公开(公告)号：US3488123A

公开(公告)日：1970-01-06

申请号：US3488123D

申请日：1966-03-28

Applicant: NASA

Inventor： NICHOLS GRADY B

IPC: G01J3/453 ,  G05D3/20 ,  G01B9/02

CPC classification number: G05D3/20 ,  G01J3/4535

公开(公告)号：US3469924A

公开(公告)日：1969-09-30

申请号：US51863466

申请日：1966-01-04

Applicant: PARSONS & CO SIR HOWARD G

Inventor： HASWELL RONALD

IPC: G01B9/02 ,  G01J3/453

CPC classification number: G01J3/453 ,  G01J3/4535

公开(公告)号：US20240361253A1

公开(公告)日：2024-10-31

申请号：US18595292

申请日：2024-03-04

Applicant: NOVA LTD.

Inventor： Gilad BARAK ,  DANNY GROSSMAN ,  Dror SHAFIR ,  YOAV BERLATZKY ,  Yanir HAINICK

IPC: G01N21/956 ,  G01B9/02001 ,  G01B9/02015 ,  G01B9/02055 ,  G01B9/0209 ,  G01B11/06 ,  G01J3/453 ,  G01N21/88

CPC classification number: G01N21/956 ,  G01B9/02007 ,  G01B9/02032 ,  G01B9/02072 ,  G01B9/0209 ,  G01B11/0675 ,  G01J3/4535 ,  G01N21/8806 ,  G01B2210/56 ,  G01B2290/70 ,  G01N2021/8848

Abstract: A measurement system for use in measuring parameters of a patterned sample, the system including a broadband light source, an optical system configured as an interferometric system, a detection unit, and a control unit, where the interferometric system defines illumination and detection channels having a sample arm and a reference arm having a reference reflector, and is configured for inducing an optical path difference between the sample and reference arms, the detection unit for detecting a combined light beam formed by a light beam reflected from the reflector and a light beam propagating from a sample's support, and generating measured data indicative of spectral interference pattern formed by spectral interference signatures, and the control unit for receiving the measured data and applying a model-based processing to the spectral interference pattern for determining one or more parameters of the pattern in the sample.

公开(公告)号：US11971303B2

公开(公告)日：2024-04-30

申请号：US18320172

申请日：2023-05-18

Applicant: WUHAN UNIVERSITY

Inventor： Ruyi Wei

IPC: G01J3/453 ,  G01J3/02 ,  G01J3/06 ,  G01J3/28

CPC classification number: G01J3/4535 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/06 ,  G01J3/2823 ,  G01J2003/062 ,  G01J2003/064 ,  G01J2003/4538

Abstract: The present invention belongs to the field of optical technology, disclosing a quadrilateral common-path time-modulated interferometric spectral imaging device and method. The present invention sets up a moving mirror scanning mechanism in a quadrilateral common path interferometer for generating optical path differences that vary with time, so that the quadrilateral common-path time-modulated interferometric spectral imaging device operates in the staring observation mode. The invention can make the quadrilateral common-path time-modulated interferometric spectral imaging device not only retain the advantages of common optical path spectroscopic technology, but also obtain high spectral resolution.

公开(公告)号：US20190204585A1

公开(公告)日：2019-07-04

申请号：US16234656

申请日：2018-12-28

Applicant: Thermo Electron Scientific Instruments LLC

Inventor： John Magie Coffin

IPC: G02B26/08 ,  G02B26/10 ,  G01J3/453 ,  G01J3/02 ,  G01J3/06

CPC classification number: G02B26/0816 ,  G01J3/021 ,  G01J3/06 ,  G01J3/4535 ,  G02B7/182 ,  G02B21/0048 ,  G02B26/10 ,  G02B26/101

Abstract: A mirror assembly has one or more axes of motion and includes a mirror that is movable and forms an acute angle with a plane orthogonal to its axis of motion. The mirror assembly may include a first reflective mirror surface in the incoming optical path that is movable and forms an acute angle with a plane orthogonal to its axis of motion, and a second reflective mirror surface in the outgoing optical path that is movable and forms an acute angle with a plane orthogonal to its axis of motion and is moveable in a linear translation to scan the mirror in the interferometer in a way to generate a normal interferogram.

公开(公告)号：US20190120692A1

公开(公告)日：2019-04-25

申请号：US16170878

申请日：2018-10-25

Applicant: YOKOGAWA ELECTRIC CORPORATION ,  Yokogawa Test & Measurement Corporation

Inventor： Manabu Kojima

IPC: G01J3/453

CPC classification number: G01J3/4535 ,  G01J3/0202

Abstract: An optical measurement apparatus includes: a moving mirror that changes an optical path length of one of two beams generated by splitting light subject to measurement; a drive mechanism that causes the moving mirror to reciprocate a predetermined distance in linear motion; a measured light receiver that detects intensity of light generated by superimposing the two beams; and a computation processor that sets a plurality of measurement ranges within the predetermined distance and calculates a measurement value based on a change in the light intensity detected by the measured light receiver for each of the measurement ranges.

公开(公告)号：US20170191521A1

公开(公告)日：2017-07-06

申请号：US15467996

申请日：2017-03-23

Applicant: Gregory R. Hopkins

Inventor： Gregory R. Hopkins

IPC: F16C11/12

CPC classification number: F16C11/12 ,  B23Q2210/002 ,  F16C2204/20 ,  F16C2204/66 ,  F16C2220/60 ,  F16C2226/40 ,  G01J1/0403 ,  G01J3/0202 ,  G01J3/4535 ,  G02B7/003 ,  G02B27/646

Abstract: A flexure mechanism may be constructed by joining a first, second, and third material together, wherein the first and second materials are non-flexure materials and the third material is a flexure material that does not have a flexure motion-defining feature. Then, after the joining step, forming a flexure-motion defining feature into the third material. Each of the components of flexure mechanism may first be machined individually and the components may then be joined or assembled in any order. Significant tolerance stack-up may occur during the individual machining operations and joining assembly of the individual components. However, these tolerance issues, miss-alignments or other flaws in the overall assembly may be eliminated in the forming of the flexure-motion defining features as part of flexure mechanism.

公开(公告)号：US09677941B2

公开(公告)日：2017-06-13

申请号：US14491336

申请日：2014-09-19

Applicant: SHIMADZU CORPORATION

Inventor： Akihiko Iwata

IPC: G01B9/02 ,  G01J3/453 ,  G01J3/10 ,  G01J3/02

CPC classification number: G01J3/4535 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0264 ,  G01J3/027 ,  G01J3/0278 ,  G01J3/108

Abstract: Feedback control of an object which moves back and forth in a straight line along a linear guide is performed through PID control. A parameter adjustment unit which determines the control parameters to be used for PID control performs feedback control and determines the optimal value of control parameters by means of an evaluation function based on the error between the measured value of the current velocity and the target velocity, for the control parameters of maximum reverse voltage and at least one from among proportional coefficient (CP), differential coefficient CD), integral coefficient CI), and frictional coefficient (CF).

公开(公告)号：US20170160072A1

公开(公告)日：2017-06-08

申请号：US15236724

申请日：2016-08-15

Applicant: Finite Element Analyst, Inc.

Inventor： Eyad Ammari

IPC: G01B9/02 ,  G01J3/453

CPC classification number: G01B9/02043 ,  G01J3/4535 ,  G01J3/4537 ,  G01N2021/3595

Abstract: This disclosure provides an optical interferometer including a multi-faceted optical element that is rotated to introduce an optical path length difference between two different optical paths in the interferometer. The multi-faceted optical element can be configured to be rotated about an axis such that the optical path length difference between the first and second optical paths varies between a first value and a second value several times during one complete rotation of the optical element. The multi-faceted optical element can be rotationally symmetric having n-fold rotational symmetry. The two different optical paths can be non-coplanar with respect to each other and the multi-faceted optical element can be disposed in one of the optical paths or both the optical paths.

公开(公告)号：US09658107B2

公开(公告)日：2017-05-23

申请号：US15130876

申请日：2016-04-15

Applicant: Si-Ware Systems

Inventor： Momen Anwar ,  Mostafa Medhat ,  Bassem Mortada ,  Ahmed Othman El Shater ,  Mina Gad Seif ,  Muhammed Nagy ,  Bassam A. Saadany ,  Amr N. Hafez

IPC: G01B9/02 ,  G01J3/453 ,  G02B26/08 ,  G01J3/45 ,  G01B7/06

CPC classification number: G01J3/4532 ,  G01B7/08 ,  G01B9/02068 ,  G01B9/02071 ,  G01B2290/35 ,  G01J3/45 ,  G01J3/4535 ,  G02B26/0841

Abstract: A Micro-Electro-Mechanical System (MEMS) apparatus provides for self-calibration of mirror positioning of a moveable mirror of an interferometer. At least one mirror in the MEMS apparatus includes a non-planar surface. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS apparatus includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at multiple reference positions of the moveable mirror corresponding to a center burst and one or more secondary bursts of an interferogram produced by the interferometer based on the non-planar surface. A calibration module uses the actuator capacitances at the reference positions to compensate for any drift in the capacitive sensing circuit.