公开(公告)号：US6091499A

公开(公告)日：2000-07-18

申请号：US291119

申请日：1999-04-14

Applicant: Michael Abraham ,  Oliver Depner ,  Matthias Eberhardt

Inventor： Michael Abraham ,  Oliver Depner ,  Matthias Eberhardt

IPC: G01B11/00 ,  G01B11/26 ,  G01J4/00 ,  G01J4/04 ,  G01N21/01 ,  G01N21/13 ,  G01N21/21 ,  G01B11/14

CPC classification number: G01B11/26 ,  G01J4/00

Abstract: Normally, repeated calibration measurements are necessary for the adjustment of the sample and ellipsometer. To achieve an automatic relative adjustment, a sample position detection system that can be adjusted in relation to the ellipsometer and locked in is assigned to the ellipsometer, and where the detection system is connected to an adjusting system that affects the sample table and/or the entire system detection system/ellipsometer. The method for automatic relative adjustment is provided for, that by initially using one sample, the system sample/ellipsometer is adjusted via the symmetry of the detector signal of the ellipsometer, and that the sample position detection system is adjusted and subsequently locked in with the ellipsometer. With all subsequent samples, a relative adjustment of sample and ellipsometer detection system is performed using the signals of the detection system. In particular, the measurements can be performed without moving the sample itself because the adjustment can also be carried out through a single movement of the ellipsometer detection system.

Abstract translation: 通常，重复的校准测量对于样品和椭偏仪的调整是必要的。 为了实现自动相对调整，可以将相对于椭偏仪调整并锁定的样本位置检测系统分配给椭偏仪，并且其中检测系统连接到影响样品台和/或 整个系统检测系统/椭偏仪。 提供了自动相对调整的方法，通过最初使用一个样本，通过椭偏仪的检测器信号的对称性来调整系统样品/椭偏仪，并且样品位置检测系统被调整并随后被锁定 椭偏仪。 对于所有后续样本，使用检测系统的信号执行样本和椭偏仪检测系统的相对调整。 特别地，可以在不移动样品本身的情况下进行测量，因为也可以通过椭偏仪检测系统的单次移动进行调整。

公开(公告)号：US6052188A

公开(公告)日：2000-04-18

申请号：US111828

申请日：1998-07-08

Applicant: David U. Fluckiger ,  Andrew W. Kueny

Inventor： David U. Fluckiger ,  Andrew W. Kueny

IPC: G01J4/04 ,  G01N21/21

CPC classification number: G01J4/04 ,  G01N21/211

Abstract: A spectral ellipsometer that enables complete simultaneous measurement of ellipsometric parameters of a surface with thin films and coatings for the full wavelength range of interest by using an imaging spectrograph together with a novel optical arrangement that disperses the polarization information of a time-invariant train of optical signals in a linear spatial array of points along or parallel to an input aperture or slit of the imaging spectrograph and disperses the polarization information in wavelength perpendicular to the aperture or slit to provide a two-dimensional spectrograph image that is collected and stored by an imaging array with one axis relating to wavelength and the other axis relating to the light polarization. Multiple simultaneous measurements of the spectral ellipsometric parameters .psi. (psi) and .DELTA. (delta) are taken at all wavelengths without the need of any time-varying or mechanically-moving optical elements. The ellipsometer can be used for real-time measurements of ellipsometric parameters of a moving or static surface with the thin films and coatings.

Abstract translation: 一种光谱椭偏仪，可通过使用成像光谱仪与新型光学布置来完全同时测量具有薄膜和涂层的薄膜和涂层的椭圆偏振参数，以及分散光学时间序列的偏振信息 沿着或平行于成像光谱仪的输入孔或狭缝的点的线性空间阵列中的信号，并且以垂直于孔或狭缝的波长分散偏振信息，以提供通过成像收集和存储的二维光谱图像 阵列，其一个轴与波长相关，另一个轴与光偏振有关。 在所有波长下采集多个同时测量光谱椭偏参数psi（psi）和DELTA（delta），而不需要任何时变或机械移动的光学元件。 椭偏仪可用于实时测量薄膜和涂层的运动或静态表面的椭偏参数。

公开(公告)号：US06046805A

公开(公告)日：2000-04-04

申请号：US159502

申请日：1998-09-23

Applicant: Tatsurou Kawamura ,  Jinsei Miyazaki

Inventor： Tatsurou Kawamura ,  Jinsei Miyazaki

IPC: G01J4/04 ,  G01N1/00 ,  G01N21/05 ,  G01N21/11 ,  G01N21/21 ,  G01N33/493 ,  G01N21/01 ,  G01J4/00

CPC classification number: G01N21/11 ,  G01N21/21 ,  G01N1/14 ,  G01N2021/054 ,  G01N2021/115 ,  G01N2021/218

Abstract: An apparatus and a method for transfusing liquid specimen for an optical characteristic measurement, which is excellent in operability and handling, and capable of introducing a liquid specimen into a sample cell without detaching the cell from an optical characteristic measurement apparatus and without bubbling, as well as a polarimeter are disclosed. According to the present invention, the specimen can be introduced into the sample cell without detaching the sample cell from the equipment, in a way of connecting the bottom of the sample cell with a reservoir for temporarily accommodating the liquid specimen through a tubular path, then varying a difference in the levels of the sample cell and the reservoir, or a way of using a syringe arranged in the tubular path. At expelling the specimen from the sample cell, the specimen is transfused into the reservoir in a similar manner.

Abstract translation: 用于输入用于光学特性测量的液体试样的装置和方法，其操作性和操作性优异，并且能够将液体试样引入样品池中，而不会将细胞从光学特性测量装置分离并且不起泡 作为偏光计被公开。 根据本发明，可以将样品池中的样品池从设备中分离出来，以将样品池的底部与用于通过管状路径暂时容纳液体试样的储存器连接的方式将样品引入样品池中，然后 改变样品池和储存器的水平差，或者使用布置在管状路径中的注射器的方式。 在样品池中排出样品时，样品以类似的方式输入储存器。

公开(公告)号：US5973787A

公开(公告)日：1999-10-26

申请号：US76673

申请日：1998-05-12

Applicant: David E. Aspnes ,  Jon Opsal

Inventor： David E. Aspnes ,  Jon Opsal

IPC: G01N21/21 ,  G01B11/06 ,  G01J3/02 ,  G01J3/447 ,  G01J4/00 ,  G01J4/04 ,  G02F1/01

CPC classification number: G01J3/02 ,  G01J3/0229 ,  G01J3/0232 ,  G01N21/211 ,  G01N2021/213

Abstract: An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135.degree. to 225.degree., and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously. A processor determines the polarization state of the beam as it impinges the analyzer from the light intensities measured by the detector.

公开(公告)号：US5965874A

公开(公告)日：1999-10-12

申请号：US807870

申请日：1997-02-26

Applicant: Osamu Aso ,  Isamu Ohshima ,  Haruki Ogoshi

Inventor： Osamu Aso ,  Isamu Ohshima ,  Haruki Ogoshi

IPC: G01J4/00 ,  G01J4/04 ,  G01M11/00 ,  G01N21/21 ,  G02F1/01

CPC classification number: G01J4/00 ,  G01J4/04 ,  G01M11/336 ,  G01M11/337 ,  G01N21/21

Abstract: A method to obtain polarization characteristics of an optical transmission medium is disclosed. Sequentially plural different states of polarized light are launched into the optical transmission medium. Intensities of light emerging from the optical transmission medium through combinations of optical elements are measured to obtain Stokes parameters from which Stokes vectors describing the emerging light corresponding to each of the plural sequentially launched states of polarization are obtained; for at least three different launched states of polarization, descriptors are used of these launched states of polarization and the Stokes vectors describing the corresponding emerging light to calculate a Jones matrix which mathematically models the changes that the launched light when described in terms of a Jones vector is subject to when passing through the optical transmission medium; and, the Jones matrix is used to describe the polarization characteristics of the optical transmission medium.

Abstract translation: 公开了一种获得光传输介质的偏振特性的方法。 顺序地将多个不同的偏振光状态发射到光传输介质中。 测量通过光学元件的组合从光传输介质出射的光的强度，以获得斯托克斯参数，从其中获得描述与多个顺序发射的极化状态中的每一个相对应的出射光的斯托克斯矢量; 对于至少三种不同的发射极化状态，使用这些发射的极化状态的描述符，并且描述相应的出射光的斯托克斯矢量来计算琼斯矩阵，该矩阵在以Jones矢量描述时对发射的光进行数学模拟 经过光传输介质时经受; 并且，Jones矩阵用于描述光传输介质的偏振特性。

公开(公告)号：US5521705A

公开(公告)日：1996-05-28

申请号：US241842

申请日：1994-05-12

Applicant: Rudolf Oldenbourg ,  Guang Mei

Inventor： Rudolf Oldenbourg ,  Guang Mei

IPC: G01J4/04 ,  G02B21/00 ,  G01N21/21

CPC classification number: G01J4/04 ,  G02B21/0096

Abstract: A method for determining polarization properties of light from an object uses a detector for detecting the intensity of light incident thereon. A pair of variable retarders are positioned in the optical path with their slow optical axes at a 45.degree. angle to each other, and a polarized light analyzer is also placed in the optical path between the light retarders and the detector. For each of the light retarders, a base retardance level is determined. The base retardance level is such that when each of the light retarders is set at the base retardance thereof and light from an object is circularly polarized, the light analyzer will cause substantial extinction of light from the object that traverses the analyzer and the intensity of light from the object incident on the detector will be substantially zero. Then, the retardance of the light retarders is set at a first retardance level in which the retardance of at least one of said retarders is different from the base retardance thereof and the intensity of light incident on said detector when said light retarders are set at the first retardance level is determined. This procedure is repeated with the retardance of the light retarders set at a second, and different retardance level. The polarization properties of the light is determined from the intensities measured at the different retardance levels.

Abstract translation: 用于确定来自物体的光的偏振特性的方法使用用于检测入射在其上的光的强度的检测器。 一对可变缓速器位于光路中，其缓慢的光轴彼此成45度角，并且偏振光分析仪也被放置在光延迟器和检测器之间的光路中。 对于每个阻光剂，确定基础延迟水平。 基本延迟水平使得当每个光阻器被设置在其基本延迟处，并且来自物体的光被圆偏振时，光分析器将引起来自穿过分析仪的物体的光的显着消光和光的强度 从入射到检测器上的物体将基本上为零。 然后，将光延迟器的延迟设定在第一延迟水平，其中至少一个所述延迟器的延迟与其基本延迟不同，并且当所述阻光器设置在所述延迟器上时，入射到所述检测器上的光的强度 确定第一延迟水平。 重复该步骤，将阻光剂设定在第二个阻滞级别和不同的延迟级别。 光的偏振特性由在不同延迟级别测量的强度确定。

公开(公告)号：US5502567A

公开(公告)日：1996-03-26

申请号：US268149

申请日：1994-06-28

Applicant: Peter Pokrowsky ,  Eckehard Kiefer ,  Michael Abraham ,  Bernd Stenkamp ,  Wolfgang Ehrfeld ,  Thomas Zetterer

Inventor： Peter Pokrowsky ,  Eckehard Kiefer ,  Michael Abraham ,  Bernd Stenkamp ,  Wolfgang Ehrfeld ,  Thomas Zetterer

IPC: G01J4/04 ,  G01N21/21 ,  G01J4/00

CPC classification number: G01J4/04 ,  G01N21/211

Abstract: A micropolarimeter comprises an analyzer (1) and a detector (3), which is typically a photodetector array. The detector has a circular configuration of a number N of sectors. Analyzer (1) and detector (3) form a unit with the analyzer assigning different polarization values to the sectors. Analyzer and the detector contain no moving parts. Three different embodiments are proposed for the analyzer: a glass cone, covered with a polarizing thin film stack, a metal grid polarizing array, and an array of polarizing waveguides. The micropolarimeter (14) is used preferably in a microellipsometer system which can serve as a tool for film diagnostics, especially optical characterization of thin films.

Abstract translation: 微波偏振器包括分析器（1）和检测器（3），其通常是光电检测器阵列。 检测器具有N个扇区的圆形配置。 分析仪（1）和检测器（3）形成一个单元，分析仪为扇区分配不同的极化值。 分析仪和检测器不含运动部件。 提出了三种不同的实施例用于分析器：玻璃锥，覆盖有偏振薄膜叠层，金属栅极偏振阵列和偏振波导阵列。 微电极计（14）优选地用在可以用作薄膜诊断工具，特别是薄膜的光学表征的微型计量器系统中。

公开(公告)号：US5440390A

公开(公告)日：1995-08-08

申请号：US77167

申请日：1993-06-14

Applicant: Bruce Tirri

Inventor： Bruce Tirri

IPC: G01J4/04 ,  G01N21/21

CPC classification number: G01J4/04

Abstract: A optical fiber polarimeter (10) includes a plurality of polarizing optical fibers (14) each having a different orientation with respect to a common reference line. A charge-coupled device having an array of pixels (32) is adapted to receive the light from the optical fibers (14) and generate a signal relating to the intensity of the light impinging on each pixel to a signal processor (18) that also orders the signals according to the orientation thereof and thereby provides a polarization phase versus intensity signal output.

Abstract translation: 光纤偏振计（10）包括多个相对于公共参考线具有不同取向的偏振光纤（14）。 具有像素阵列（32）的电荷耦合器件适于接收来自光纤（14）的光，并产生与每个像素上的光的强度有关的信号到信号处理器（18），信号处理器 根据其方向对信号进行排序，从而提供偏振相位对强度信号输出。

公开(公告)号：US5335066A

公开(公告)日：1994-08-02

申请号：US133762

申请日：1993-10-07

Applicant: Takeo Yamada ,  Akira Kazama ,  Takahiko Oshige

Inventor： Takeo Yamada ,  Akira Kazama ,  Takahiko Oshige

IPC: G01B11/06 ,  G01J4/04 ,  G01N21/21

CPC classification number: G01N21/211

Abstract: Movable optical parts included in an ellipsometer are omitted to increase the measurement speed and maintain constant, high measurement precision in film thickness measurement processing. A beam is radiated from a light source section onto a measurement target. A reflected beam having an elliptically polarized beam reflected by the measurement target is divided into four light components polarized in different directions. The optical intensities of the respective polarized light components are detected. Of the four detected optical intensities, one having the minimum value is omitted, and ellipsometric parameters .psi. and .DELTA. are calculated by using the remaining three optical intensities having the largest values. The ellipsometer comprises only stationary optical parts without using any movable optical parts. The polarization directions of the respective polarized light components, from which four optical intensities are obtained, are set at angles of 90.degree., 0.degree., +45.degree., and -45.degree. with respect to a reference direction. A composite beam splitter is used to extract the four polarized light components.

Abstract translation: 省略包括在椭偏仪中的可移动光学部件以增加测量速度并且在膜厚测量处理中保持恒定的高测量精度。 光束从光源部分辐射到测量目标上。 由测量对象反射的具有椭圆偏振光束的反射光束被分成在不同方向偏振的四个光分量。 检测各偏振光分量的光强度。 在四个检测到的光强度中，省略了具有最小值的光强度，并且通过使用具有最大值的剩余三个光学强度来计算椭圆参数psi和DELTA。 椭偏仪仅包括固定的光学部件，而不使用任何可移动的光学部件。 获得四个光强度的偏振光分量的偏振方向相对于参考方向被设定为90°，0°，+ 45°和-45°的角度。 复合分束器用于提取四个偏振光分量。

公开(公告)号：US5298972A

公开(公告)日：1994-03-29

申请号：US755931

申请日：1991-09-06

Applicant: Brian L. Heffner

Inventor： Brian L. Heffner

IPC: G01J4/04 ,  G01M11/00

CPC classification number: G01M11/00 ,  G01J4/04

Abstract: An instrument includes a polarized optical source for producing three sequential predetermined states of polarization of a light beam and an optical polarization meter for measuring the polarization of a portion of the light beam transmitted by or reflected from an optical network by splitting it into four beams, passing three of the beams through optical elements, measuring the transmitted intensity of all four beams, and calculating Stokes parameters. The light beam enters the optical polarization meter through a single-mode optical fiber that acts as a spatial filter for controlling the position and alignment of the beam with respect to the optical elements. The distortion of the light beam polarization caused by this optical fiber is corrected by introducing two different linearly polarized light beams and measuring Stokes parameters which are used to construct a calibration matrix that is inverted and multiplied times measured Stokes parameters of subsequent measurements to yield true Stokes parameters. The three sequential predetermined states of polarization yield three corresponding Jones input vectors, and the Stokes parameters for the responses of the optical network are converted to three Jones output vectors. A Jones matrix for the optical network to within a complex constant is then computed from the Jones input and output vectors. Relative polarization sensitivity can be determined from this matrix for the optical network. The relative distortion caused by the optical network can be corrected by multiplying by the inverse of the matrix during later measurements through the optical network. Additionally, power measurements on the optical network and a substituted optical through enable absolute determinations and corrections.

Abstract translation: 仪器包括用于产生光束的三个顺序的预定偏振状态的偏振光源和用于测量由光网络传输或从光网络反射的光束的一部分的偏振将其分成四个光束的光偏振计， 通过三个光束通过光学元件，测量所有四个光束的透射强度，并计算斯托克斯参数。 光束通过单模光纤进入光偏振计，该单模光纤用作空间滤光器，用于控制光束相对于光学元件的位置和对准。 通过引入两个不同的线性偏振光束和测量斯托克斯参数来校正由该光纤引起的光束偏振的失真，该斯托克斯参数用于构建校准矩阵，该校准矩阵被反演和乘以倍数测量的随后测量的斯托克斯参数以产生真实的斯托克斯 参数。 三个连续的预定偏振态产生三个对应的Jones输入向量，并且用于光网络的响应的斯托克斯参数被转换为三个琼斯输出向量。 然后从琼斯输入和输出向量计算光网络中复数常数内的琼斯矩阵。 可以从该光网络的矩阵中确定相对极化灵敏度。 光网络引起的相对失真可以通过在以后的测量中通过光网络乘以矩阵的倒数来校正。 另外，光网络上的功率测量和替代的光学通过启用绝对确定和校正。