公开(公告)号：US08279431B2

公开(公告)日：2012-10-02

申请号：US12626963

申请日：2009-11-30

Applicant: Takenori Hirose ,  Minoru Yoshida ,  Hideaki Sasazawa ,  Yasuhiro Yoshitake

Inventor： Takenori Hirose ,  Minoru Yoshida ,  Hideaki Sasazawa ,  Yasuhiro Yoshitake

IPC: G01N21/00

CPC classification number: G01J3/02 ,  G01B2210/56 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01N21/95607

Abstract: In spectral detection for detecting the shape of repeating pattern structures uniformly formed on a surface of a test object, it is advantageous to use light having a wide wavelength range in a short wavelength region. However, it is not easy to realize a relatively simple optical system capable of spectral detection of light having a wide wavelength range in a short wavelength region, namely in ultraviolet region. The present invention provides an inspection apparatus for detecting pattern defects. The inspection apparatus includes a spectral detection optical system capable of spectral detection of light in a wavelength range from deep ultraviolet to near infrared. The spectral detection optical system includes a spatially partial mirror serving as a half mirror and a reflecting objective provided with an aperture stop for limiting the angle and direction of light to be applied to and reflected by a test object.

Abstract translation: 在用于检测在测试对象的表面上均匀形成的重复图案结构的形状的光谱检测中，有利的是在短波长范围内使用宽波长范围的光。 然而，实现能够在短波长区域即紫外线区域中具有宽波长范围的光的光谱检测的相对简单的光学系统是不容易的。 本发明提供一种用于检测图案缺陷的检查装置。 检查装置包括能够对从深紫外线到近红外线的波长范围内的光进行光谱检测的光谱检测光学系统。 光谱检测光学系统包括用作半反射镜的空间部分反射镜和设置有孔径光阑的反射物镜，该孔径光阑用于限制被施加到测试对象并由被测物体反射的光的角度和方向。

公开(公告)号：US08213006B2

公开(公告)日：2012-07-03

申请号：US12530265

申请日：2008-03-27

Applicant: Michael L. Myrick ,  Robert P. Freese ,  David L. Perkins ,  Terrell Teague ,  William Soltmann ,  Leonard Zheleznyak

Inventor： Michael L. Myrick ,  Robert P. Freese ,  David L. Perkins ,  Terrell Teague ,  William Soltmann ,  Leonard Zheleznyak

IPC: G01J3/28

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0216 ,  G01J3/0232 ,  G01J3/0237 ,  G01J3/0294 ,  G01J3/10 ,  G01J3/28 ,  G01J3/32 ,  G01J3/36 ,  G01N21/31 ,  G01N21/35 ,  G01N21/3504 ,  G01N21/3563 ,  G01N21/3577 ,  G01N21/8806 ,  G01N21/9508 ,  G01N33/02 ,  G01N2201/1293

Abstract: The present subject matter relates to methods of high-speed analysis of product samples. Light is directed to a portion of a product under analysis and reflected from or transmitted through the product toward a plurality of optical detectors. Signals from the detectors are compared with a reference signal based on a portion of the illuminating light passing through a reference element to determine characteristics of the product under analysis. The products under analysis may be stationary, moved by an inspection point by conveyor or other means, or may be contained within a container, the container including a window portion through which the product illuminating light may pass.

Abstract translation: 本主题涉及产品样品的高速分析方法。 光被引导到被分析产品的一部分，从产品反射或透过产品朝向多个光学检测器。 将来自检测器的信号与基于通过参考元件的照明光的一部分的参考信号进行比较，以确定正在分析的产品的特性。 被分析的产品可以是固定的，由检查点通过输送机或其他方式移动，或者可以容纳在容器内，该容器包括产品照明光通过的窗口部分。

公开(公告)号：US08188434B2

公开(公告)日：2012-05-29

申请号：US12474571

申请日：2009-05-29

Applicant: Kevin W. Ayer

Inventor： Kevin W. Ayer

IPC: G01J5/02

CPC classification number: G01J3/12 ,  G01J3/021 ,  G01J2003/1286

Abstract: Systems and methods for generating, projecting or correlating thermal spectra use digital micro-mirror devices (DMDs) to controllably modulate input radiation such as long wave infrared light. An optical system for creating an output spectrum based upon an input light suitably includes a grating configured receive the input light and to spread the input light by wavelength into an input spectrum. A digital micro-mirror device (DMD) is configured to receive the input spectrum and to controllably activate mirrors in the DMD corresponding to selected wavelengths of the input light. Portions of the input light having selected wavelengths can be extracted from remaining portions of the input light for the output spectrum. By selecting and activating only certain mirrors on the DMD, particular wavelengths of light in infrared or other spectra can be optically switched for any number of subsequent applications, including spectral projection, simulation of solar or other spectra, detection of chemical substances, or the like.

Abstract translation: 用于产生，投影或相关热谱的系统和方法使用数字微镜器件（DMD）来可控地调制诸如长波红外光的输入辐射。 用于基于输入光产生输出光谱的光学系统适当地包括被配置为接收输入光并将波长的输入光扩展成输入光谱的光栅。 数字微镜装置（DMD）被配置为接收输入光谱并且可控地激活对应于输入光的所选波长的DMD中的反射镜。 可以从用于输出光谱的输入光的剩余部分中提取具有所选波长的输入光的部分。 通过仅选择和激活DMD上的某些反射镜，红外线或其他光谱中的特定波长的光可以被光学切换以用于任何数量的后续应用，包括光谱投影，太阳能或其它光谱的模拟，化学物质的检测等 。

公开(公告)号：US08164747B2

公开(公告)日：2012-04-24

申请号：US11956245

申请日：2007-12-13

Applicant: Alexander F. H. Goetz ,  Leonid G. Feldman ,  Thomas Ciupak ,  Robert J. Faus ,  Brian Curtiss

Inventor： Alexander F. H. Goetz ,  Leonid G. Feldman ,  Thomas Ciupak ,  Robert J. Faus ,  Brian Curtiss

IPC: G01J3/00

CPC classification number: G01N21/278 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/0256 ,  G01J3/0262 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/42 ,  G01N21/255 ,  G01N21/55 ,  G01N2021/8411 ,  G01N2201/0636 ,  G01N2201/064

Abstract: A system and method for optical spectroscopic measurements is described. One embodiment includes a measurement head for optical spectroscopic measurements, the measurement head comprising an illumination source configured to illuminate a sample, a collection optic configured to view the sample, and an internal reference, wherein the internal reference can be illuminated by the illumination source and viewed by the collection optic.

Abstract translation: 描述了用于光谱测量的系统和方法。 一个实施例包括用于光学光谱测量的测量头，测量头包括被配置为照亮样本的照明源，被配置为观察样本的收集光学器件和内部参考，其中内部参考可被照明源照亮，以及 由收集光学器件查看。

公开(公告)号：US08144321B2

公开(公告)日：2012-03-27

申请号：US12256005

申请日：2008-10-22

Applicant: Walter M. Duncan ,  James N. Malina ,  Rajeev Ramanath

Inventor： Walter M. Duncan ,  James N. Malina ,  Rajeev Ramanath

IPC: G01J3/28

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/0229

Abstract: According to one embodiment of the present invention, a system for encoding an optical spectrum includes a dispersive element, a digital micromirror device (DMD) array, a detector, and a controller. The dispersive element receives light from a source and disperses the light to yield light components of different wavelengths. The digital micromirror device (DMD) array has micromirrors that modulate the light to encode an optical spectrum of the light. The detector detects the light that has been modulated. The controller generates an intensity versus time waveform representing the optical spectrum of the detected light.

Abstract translation: 根据本发明的一个实施例，用于编码光谱的系统包括色散元件，数字微镜器件（DMD）阵列，检测器和控制器。 分散元件接收来自光源的光，并分散光以产生不同波长的光分量。 数字微镜器件（DMD）阵列具有调制光以编码光的光谱的微镜。 检测器检测已调制的光。 控制器产生表示检测到的光的光谱的强度对时间波形。

公开(公告)号：US20120062896A1

公开(公告)日：2012-03-15

申请号：US13217519

申请日：2011-08-25

Applicant: Aziz Mahfoud Familia ,  David S. Shackleford ,  Nafih Mekhilef ,  Mike A. Zimmerman

Inventor： Aziz Mahfoud Familia ,  David S. Shackleford ,  Nafih Mekhilef ,  Mike A. Zimmerman

IPC: G01N21/59

CPC classification number: G01J3/021 ,  G01J3/0245 ,  G01J3/42 ,  G01N15/082 ,  G01N21/3554 ,  G01N21/39 ,  G01N2021/399

Abstract: The present invention is directed to systems and methods which utilize a cavity ring-down spectroscopy (CRDS) technique implemented for the measurements of vapor transmission rate. In one embodiment, the vapor content to be measured is contained within an optical cavity. Light is then injected into the cavity up to a threshold level and the delay time of the injected light is measured. When the wavelength of the injected light is resonant with an absorption feature of the vapor the decay time increases linearly as a function of vapor content. In this manner, vapor content causes a longer delay time and thus the amount of vapor passing through the film (film permeation rate) can be determined in real-time.

Abstract translation: 本发明涉及利用实现用于测量蒸气透过率的空腔衰减光谱（CRDS）技术的系统和方法。 在一个实施例中，待测量的蒸汽含量被包含在光腔内。 然后将光注入腔中达阈值水平，并测量注入光的延迟时间。 当注入的光的波长与蒸气的吸收特征共振时，衰减时间作为蒸汽含量的函数线性增加。 以这种方式，蒸汽含量导致更长的延迟时间，因此可以实时确定通过膜的蒸气的量（膜渗透速率）。

公开(公告)号：US20120033213A1

公开(公告)日：2012-02-09

申请号：US12853222

申请日：2010-08-09

Applicant: Wei YANG ,  Ming Chai ,  Charlie Zhang ,  Patrick Yang

Inventor： Wei YANG ,  Ming Chai ,  Charlie Zhang ,  Patrick Yang

IPC: G01J3/28

CPC classification number: G01J3/44 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0235 ,  G01J3/0291 ,  G01J3/1804

Abstract: A spectrograph having multiple excitation wavelength ranges is disclosed. The spectrograph can include a wavelength switching mechanism to switch between different wavelength ranges in accordance with the wavelength of an incoming light signal. The wavelength switching mechanism can include multiple optical assemblies (or elements) corresponding to the different wavelength ranges for processing the incoming light signal. The mechanism can also include a switching component for switching the optical assemblies to align the appropriate assembly with the incoming light signal. Each optical assembly can include one or more transmission gratings to disperse the incoming light signal into multiple wavelengths within a particular wavelength range and a reflecting mirror proximate to the grating(s) to reflect the wavelengths of light back through the grating(s) to photodetectors for measuring to wavelengths to generate a light spectrum. The spectrograph can be used in Raman spectroscopy.

Abstract translation: 公开了具有多个激发波长范围的光谱仪。 光谱仪可以包括根据入射光信号的波长在不同波长范围之间切换的波长切换机构。 波长切换机构可以包括对应于用于处理入射光信号的不同波长范围的多个光学组件（或元件）。 该机构还可以包括用于切换光学组件以将适当的组件与入射光信号对准的切换部件。 每个光学组件可以包括一个或多个透射光栅以将入射光信号分散在特定波长范围内的多个波长和靠近光栅的反射镜，以将光的波长反射回光栅到光电检测器 用于测量波长以产生光谱。 该光谱仪可用于拉曼光谱。

公开(公告)号：US08107072B2

公开(公告)日：2012-01-31

申请号：US12574213

申请日：2009-10-06

Applicant: Kazuo Yamauchi

Inventor： Kazuo Yamauchi

IPC: G01J3/08 ,  G01J3/42 ,  G01N21/31

CPC classification number: G01N21/3103 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/027 ,  G01J3/08 ,  G01J3/42

Abstract: The present invention has been accomplished to provide an atomic absorption spectrophotometer capable of obtaining measurement data always in the state where the lowest detection limit performance is optimized, without depending on the frequency of the power supply. In a control program which runs on the microcomputer chip 42 mounted on the atomic absorption spectrophotometer 110, a plurality of lighting periods of the light sources 11 and 12 and extraction periods of the sampling data are memorized, whose lowest detection limit performance are optimized for the frequencies (50 Hz and 60 Hz) of the AC power source for driving the AC motor 22. In using the apparatus, by the control program, the frequency of the power source used in this apparatus is identified, the lighting period and sampling data extraction period corresponding to the identified frequency and the measurement mode that a user of the apparatus has previously set are selected from among a plurality of memorized values, and the appropriate lighting period is set to the hardware (PLD 43). Accordingly, without depending on the frequency, it is possible to obtain measurement data always in the state where the lowest detection limit performance is optimized.

Abstract translation: 本发明的目的是提供一种原子吸收分光光度计，其能够在不依赖于电源的频率的情况下始终以最低检测极限性能优化的状态获得测量数据。 在安装在原子吸收分光光度计110上的微计算机芯片42上运行的控制程序中，存储光源11和12的多个点亮周期和采样数据的提取周期，其最低检测限性能针对 用于驱动AC电动机22的AC电源的频率（50Hz和60Hz）。在使用该装置时，通过控制程序识别在该装置中使用的电源的频率，照明周期和采样数据提取 从多个存储值中选择对应于所识别的频率和装置的用户预先设置的测量模式的周期，并且将适当的发光周期设置到硬件（PLD 43）。 因此，在不依赖于频率的情况下，可以在最低检测极限性能优化的状态下始终获得测量数据。

公开(公告)号：US20110285995A1

公开(公告)日：2011-11-24

申请号：US13127401

申请日：2009-11-04

Applicant: Tomasz S. Tkaczyk ,  Robert T. Kester ,  Liang Gao

Inventor： Tomasz S. Tkaczyk ,  Robert T. Kester ,  Liang Gao

IPC: G01J3/28

CPC classification number: G01J3/2823 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/36 ,  G01J3/4406 ,  G02B3/0087 ,  G02B13/22 ,  G02B27/0025 ,  G02B27/1066 ,  G02B27/143

Abstract: Devices and methods for hyperspectral and multispectral imaging are discussed. In particular, Image Mapping Spectrometer systems, methods of use, and methods of manufacture are presented. Generally, an image mapping spectrometer comprises an image mapping field unit, a spectral separation unit, and a selective imager. Image mapping spectrometers may be used in spectral imaging of optical samples. In some embodiments, the image mapping field unit of an image mapping spectrometer may be manufactured with surface shaped diamond tools.

Abstract translation: 讨论了高光谱和多光谱成像的设备和方法。 特别地，提出了图像映射光谱仪系统，使用方法和制造方法。 通常，图像映射光谱仪包括图像映射场单元，光谱分离单元和选择性成像器。 图像映射光谱仪可用于光学样品的光谱成像。 在一些实施例中，图像映射光谱仪的图像映射场单元可以用表面形状的金刚石工具制造。

公开(公告)号：US20110261354A1

公开(公告)日：2011-10-27

申请号：US12668844

申请日：2008-07-14

Applicant: Joseph V. Sinfield ,  Oliver Colic

Inventor： Joseph V. Sinfield ,  Oliver Colic

IPC: G01J3/44

CPC classification number: G01J3/44 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/027 ,  G01J3/0291 ,  G01N21/64 ,  G01N21/65

Abstract: System, method, and apparatus for determining the composition of a sample of material. In one embodiment, the method pertains to the counting of photons that were inelastically scattered by the sample, and for minimizing the effects of fluorescent or phosphorescent photons. In yet another embodiment of the invention, a sample is illuminated by a repetitive pulse of monochromatic light, and the resultant scattered photons from the samples are collected and counted during a predetermined integration period. Yet other embodiments pertain to a low-cost, computer-controlled system for repetitively counting inelastically scattered photons so as to create a Raman histogram and a Raman spectrogram of the photons.

Abstract translation: 用于确定材料样品的组成的系统，方法和装置。 在一个实施方案中，该方法涉及由样品非弹性散射的光子的计数，并且用于使荧光或磷光光子的影响最小化。 在本发明的另一个实施例中，通过单色光的重复脉冲照射样品，并且在预定的积分期间收集并计数来自样品的所得散射光子。 其他实施例涉及用于重复计数非弹性散射的光子的低成本的计算机控制系统，以便产生光子的拉曼直方图和拉曼光谱图。