公开(公告)号：US6064510A

公开(公告)日：2000-05-16

申请号：US19480

申请日：1998-02-05

Applicant: Milton Gottlieb ,  Louis J. Denes

Inventor： Milton Gottlieb ,  Louis J. Denes

IPC: G01J3/28 ,  G01J3/447 ,  G02F1/33 ,  G02F1/35

CPC classification number: G01J3/2823 ,  G01J3/447

Abstract: An electronically agile spectro-polarimetric imager is described in which an acousto-optic tunable spectral filter (AOTF) is located in series with an electronically tunable optical phase modulation plate such that incident radiation will pass through the modulation plate and the AOTF in sequence. This system makes it possible to perform both spectral analysis, complex polarization analysis and object discrimination at video-rates of incident radiation from complex target scenes according to the spectral content and polarization state of the radiation reflected or emitted from the objects within the scene, regardless of the polarization state of the incident radiation. Embodiments for analyzing incident radiation of various wavelengths are provided.

Abstract translation: 描述了一种电子敏捷光谱偏振成像器，其中声光可调谐光谱滤波器（AOTF）与电子可调光学相位调制板串联设置，使得入射辐射将依次通过调制板和AOTF。 该系统使得可以根据来自场景内的物体的反射或发射的辐射的光谱含量和偏振态来执行复杂目标场景的入射辐射的视频速率下的光谱分析，复极化分析和物体鉴别，不管 的入射辐射的偏振状态。 提供了用于分析各种波长的入射辐射的实施例。

公开(公告)号：US6043884A

公开(公告)日：2000-03-28

申请号：US123823

申请日：1998-07-28

Applicant: Raul Curbelo

Inventor： Raul Curbelo

IPC: G01N29/00 ,  G01J3/447 ,  G01N21/00 ,  G01N21/17 ,  G01B9/02

CPC classification number: G01J3/447 ,  G01N21/1702

Abstract: A technique for extracting the impulse response of a sample of interest includes corresponding measurements made with the sample of interest and a reference sample. At each of a series of steps in an FT-IR spectrometer, the sample of interest is illuminated with an excitation pulse of infrared radiation, acoustic signals having a time dependence o.sub.S (t) arising from the excitation pulse are captured, and a Fourier transform O.sub.S of o.sub.S (t) is computed. At each of a series of steps in the FT-IR spectrometer, the reference sample is illuminated with an excitation pulse of analytic radiation, acoustic signals having a time dependence O.sub.R (t) arising from the excitation pulse are captured, and a Fourier transform O.sub.R of o.sub.R (t) is computed. For each step, an inverse Fourier transform of the ratio O.sub.S /O.sub.R is computed to provide a series of values s(t.sub.i) for a series of times t.sub.i. These values s(t.sub.i) represent the impulse response s(t) of the sample of interest for the mix of optical frequencies for that retardation value. Interferograms are processed to provide photoacoustic spectra.

Abstract translation: 用于提取感兴趣样本的脉冲响应的技术包括用感兴趣的样本和参考样本进行的相应测量。 在FT-IR光谱仪中的一系列步骤中，利用红外辐射的激发脉冲照射感兴趣的样品，捕获由激发脉冲产生的具有时间依赖性oS（t）的声学信号，并且进行傅立叶变换 计算oS（t）的OS。 在FT-IR光谱仪中的一系列步骤中，用分析辐射的激发脉冲照射参考样品，捕获由激发脉冲产生的具有时间依赖性OR（t）的声信号，并且傅立叶变换OR 计算oR（t）。 对于每个步骤，计算比率OS / OR的逆傅立叶变换以提供一系列时间ti的一系列值s（ti）。 这些值s（ti）表示用于该延迟值的光学频率混合的感兴趣样本的脉冲响应s（t）。 处理干涉图以提供光声谱。

公开(公告)号：US6025917A

公开(公告)日：2000-02-15

申请号：US68087

申请日：1998-05-01

Applicant: Shuji Toyonaga ,  Masahisa Shiroshita ,  Takayuki Suga ,  Yoshitaro Nakano

Inventor： Shuji Toyonaga ,  Masahisa Shiroshita ,  Takayuki Suga ,  Yoshitaro Nakano

IPC: G01J3/44 ,  G01J3/447 ,  G01J4/00 ,  G01N21/64 ,  G01N21/65 ,  G02B21/06 ,  G02F1/01

CPC classification number: G01N21/6445 ,  G01J3/4406 ,  G01J3/447 ,  G01J4/00 ,  G01N21/65

Abstract: Provided is a polarization characteristic measuring method and apparatus for accurately measuring a polarization characteristic of fluorescence or Raman-scattered light emitted when a sample is exposed to light. The sample is exposed to excitation light radiated from a pulsed excitation light source and converted to p-polarized light by polarizer and half-wave plate, and photodetectors measure an intensity I.sub.pp of a p-polarized component and an intensity I.sub.ps of an s-polarized component of fluorescence emitted from the sample under irradiation with the excitation light. In similar fashion, the sample is exposed to the excitation light of s-polarized light and the detectors measure an intensity I.sub.sp of a p-polarized component and an intensity I.sub.ss of an s-polarized component of fluorescence emitted from the sample under irradiation. From these measured values, G factor is calculated according to the following equation:G=[(I.sub.pp .multidot.I.sub.sp)/(I.sub.ps .multidot.I.sub.ss)].sup.1/2and polarization response correction is effected based on this G factor to obtain the polarization characteristic of fluorescence.

Abstract translation: PCT No.PCT / JP97 / 03391 Sec。 371日期：1998年5月1日 102（e）日期1998年5月1日PCT 1997年9月24日PCT公布。 第WO98 / 13676号公报 日期1998年4月2日提供了一种用于精确测量样品曝光时发出的荧光或拉曼散射光的偏振特性的偏振特性测量方法和装置。 将样品暴露于从脉冲激发光源辐射的激发光，并通过偏振器和半波片转换成p偏振光，光电检测器测量p偏振分量的强度Ipp和s偏振的强度Ips 在用激发光照射下从样品发射的荧光的分量。 以类似的方式，将样品暴露于s偏振光的激发光，并且检测器测量p偏振分量的强度Isp和照射下从样品发射的荧光的s偏振分量的强度Iss。 根据这些测量值，根据以下等式计算G因子：G = [（IppxIsp）/（IpsxIss）] + E，fra 1/2 + EE，并且基于该G因子来实现极化响应校正以获得极化 荧光特性。

公开(公告)号：US6025913A

公开(公告)日：2000-02-15

申请号：US130194

申请日：1998-08-05

Applicant: Raul Curbelo

Inventor： Raul Curbelo

IPC: G01B9/02 ,  G01J3/447 ,  G01J3/45 ,  G01J3/453 ,  G01N21/17 ,  G01N21/19 ,  G01N21/21 ,  G01N21/27 ,  G01N21/35

CPC classification number: G01N21/1702 ,  G01J3/447 ,  G01J3/453

Abstract: Digital signal proceessing (DSP) techiques for performing multiple modulation measurements with a polarization photoelastic modulator (PEM) in a step-scanning FT-IR spectrometer. The frequency and phase of the PEM drive signal are extracted from the digitized data collected for the actual measurement. This can then be used to perform the desired analysis of the polarization signals (e.g., CD,LD, DIRLD). This is accomplished by successively refining an initial estimate of the PEM frequency (typically starting at the nominal PEM frequency .omega..sub.0, or at the value determined from the previous step). This is done by using the current estimate of the PEM frequency to compute a phase error, and then using the computed phase error to refine the estimate of the PEM frequency. The phase errors are computed using different sets of samples in the sampling interval.

Abstract translation: 数字信号处理（DSP）技术，用于在步进扫描FT-IR光谱仪中用偏振光弹性调制器（PEM）进行多次调制测量。 从为实际测量收集的数字化数据中提取PEM驱动信号的频率和相位。 然后可以将其用于执行偏振信号（例如，CD，LD，DIRLD）的所需分析。 这是通过连续地改进PEM频率的初始估计（通常以标称PEM频率ω0开始，或以从前一步骤确定的值）来完成的。 这通过使用PEM频率的当前估计来计算相位误差来完成，然后使用计算出的相位误差来细化PEM频率的估计。 在采样间隔内使用不同的样本集来计算相位误差。

公开(公告)号：US5582646A

公开(公告)日：1996-12-10

申请号：US327107

申请日：1994-10-21

Applicant: John A. Woollam ,  Blaine D. Johs ,  Peter P. Chow

Inventor： John A. Woollam ,  Blaine D. Johs ,  Peter P. Chow

IPC: C23C14/54 ,  G01J3/447 ,  G01J4/00 ,  G01N21/21 ,  G01N23/20 ,  C23C14/24

CPC classification number: G01N21/211 ,  C23C14/54 ,  G01J3/447 ,  G01J4/00 ,  G01N23/20058

Abstract: A method of, and system for, applying light beam producing systems such as ellipsometers, polarimeters, polarized light reflectance and functionally similar systems, such that a beam of light produced thereby is caused to be incident upon a process element at an angle in excess of an associated Brewster angle while enabling the production of a signal sufficiently sensitive to changes in process element parameters, for use in "real-time" process element process monitoring and control, is disclosed. In addition a process element processing system and electron beam producing system and light beam producing system combination system is taught, wherein the electron beam producing and light beam producing systems are mounted to the process element processing system, (typically a (MBE) system), by input and output interface systems present at a location appropriate for conventional Reflection High Energy Electron Diffraction (RHEED) systems.

Abstract translation: 一种用于应用光束产生系统（例如椭圆计，偏振计，偏振光反射和功能相似的系统）的方法和系统，使得由此产生的光束以超过其的角度入射到处理元件上 公开了一种相关联的布鲁斯特角，同时能够产生对过程元件参数的变化足够敏感的信号，用于“实时”过程元件过程监控和控制。 此外，教导了工艺元件处理系统和电子束产生系统和光束产生系统组合系统，其中电子束产生和光束产生系统被安装到处理元件处理系统（通常为（MBE）系统）， 通过输入和输出接口系统存在于适合于常规反射高能电子衍射（RHEED）系统的位置。

公开(公告)号：US5450196A

公开(公告)日：1995-09-12

申请号：US289160

申请日：1994-08-11

Applicant: Andrew J. Turner

Inventor： Andrew J. Turner

IPC: G01J3/45 ,  G01J3/447 ,  G01B9/02

CPC classification number: G01J3/447

Abstract: In FT-DIRLD (Dynamic Infra Red Linear Dichroism) apparatus partly represented in FIG. 1, units 100-105, responding to interferometer output IB (indicated elsewhere), cause unit 106 to yield an interferogram combining static and dynamic dichroism interferograms. Reference signals respectively in phase and quadrature with cyclic sample strain are derived from rheometer 102. At each OPD point of predetermined uninterrupted scans, controller 108 routes simultaneously a data point of the combined interferogram and the reference signals to respective channels of multiplexer 107. A microprocessor (shown elsewhere) subsequently performs a best-fit-to-an ellipse sorting of the data and for each OPD derives: A) the value of the interferogram unaffected by sample modulation; B) the corresponding in phase term; and C) the corresponding in quadrature term; furthermore, from the A, B,C data-point series it generates the interferogram of each series and transforms it into a spectrum. DIRLD analysis is achieved asynchronously and in continuous fast scanning.

Abstract translation: 在图1中部分表示的FT-DIRLD（动态红外线性二色性）装置中。 如图1所示，单元100-105响应于干涉仪输出IB（在别处指示），使单元106产生组合静态和动态二色性干涉图的干涉图。 参考信号分别与循环样本应变相位和正交来自流变仪102.在预定的不间断扫描的每个OPD点，控制器108同时将组合的干涉图和参考信号的数据点路由到多路复用器107的相应通道。微处理器 （其他地方显示）随后对数据进行最佳拟合到一个椭圆分类，并且对于每个OPD导出：A）不受样本调制影响的干涉图的值; B）对应的相位项; 和C）相应的正交项; 此外，从A，B，C数据点系列，它产生每个系列的干涉图并将其转换成光谱。 DIRLD分析是在异步和连续快速扫描中实现的。

公开(公告)号：US5157458A

公开(公告)日：1992-10-20

申请号：US598697

申请日：1990-11-02

Applicant: Heinz Wagner ,  Martin Labhart ,  Ulrich Glaus

Inventor： Heinz Wagner ,  Martin Labhart ,  Ulrich Glaus

IPC: G01B9/02 ,  G01J3/447 ,  G01J3/45 ,  G01J3/453 ,  G01J9/02

CPC classification number: G01J3/447 ,  G01J3/4537 ,  G01B2290/70 ,  G01J2009/0261

Abstract: The polarization interferometer comprises a source of light (1), a collimator (2), a first polarizing means (3), a double-refractive means (4,5,6) and a second polarizing means (7) which polarizes the light emerging from the double-refractive means (4,5,6) and directs it to a photon detector (8). The double-refractive means (4,5,6) consists of two optical wedges (5,6) displaceable along those lateral surfaces which face each other, said wedges complementing each other to a right parallelepiped, and of a double-refractive, plane-parallel plate (4) serving as a compensator. The optical axis of the compensator (4) is twisted in a plane perpendicular to the light beam by a finite angle relative to that of the two wedges (5,6), the optical axes of the two wedges (5,6) coinciding with each other. The optical axes of the two polarizing means (3,7) are arranged perpendicularly or parallely to each other and are aligned non-parallely to the axes of the two wedges (5,6) of the double-refractive means (4,5,6).

Abstract translation: PCT No.PCT / CH90 / 00008 Sec。 371日期1990年11月2日 102（e）1990年11月2日日期PCT 1990年1月15日提交PCT公布。 WO90 / 10191 PCT出版物 日期：1990年9月7日。偏振干涉仪包括光源（1），准直器（2），第一偏振装置（3），双折射装置（4,5,6）和第二偏振装置 （7），其使从双折射装置（4,5,6）出射的光偏振并将其引导到光子检测器（8）。 双折射装置（4,5,6）由两个光楔（5,6）组成，两个光楔（5,6）可沿着彼此面对的侧表面移位，所述楔彼此互补成直角的平行六面体，双折射平面 - 平行板（4）作为补偿器。 补偿器（4）的光轴在垂直于光束的平面中相对于两个楔形物（5,6）的角度被扭转有限的角度，两个楔形物（5,6）的光轴与 彼此。 两个偏振装置（3,7）的光轴彼此垂直或平行布置，并且与双折射装置（4,5，...）的两个楔形物（5,6）的轴线非平行地排列， 6）。

公开(公告)号：US5131742A

公开(公告)日：1992-07-21

申请号：US597457

申请日：1990-10-12

Applicant: Fred L. Schaff

Inventor： Fred L. Schaff

IPC: G01J3/12 ,  G01J3/28 ,  G01J3/447

CPC classification number: G01J3/447 ,  G01J3/2823 ,  G01J2003/1247 ,  G01J3/0256 ,  G01J3/1256

Abstract: An acousto-optic spectrometer/polarimeter for analyzing an incident broad-band beam including an acousto-optic tunable filter (AOTF) for separating the incident broad-band beam into a diffracted extraordinary narrow-band beam, a diffracted ordinary narrow-band beam, and at least one undiffracted broad-band beam; first, second and third detectors respectively positioned to respectfully receive at least a portion of the diffracted extraordinary narrow-band beam, the diffracted ordinary narrow broad-band beam and the at least one undiffracted broad-band beam, and to respectively provide first, second and third signals based thereon; a subtracter for providing a polarimeter output by taking the difference between the first and the second signals; and an adder for providing a spectrometer output by adding the first and the second signals. The acousto-optic spectrometer/polarimeter according to the present invention allows broad-band imaging, spectroscopy and polarimetry to be performed simultaneously and through the same optical aperture.

Abstract translation: 一种用于分析包括声光可调滤波器（AOTF）的入射宽带束的声光谱仪/偏振计，用于将入射的宽带束分离成衍射的非常窄带束，衍射的普通窄带束， 和至少一个未衍射的宽带束; 第一，第二和第三检测器被分别定位成尊重地接收衍射的非常窄带束，衍射普通窄带宽波束和至少一个未衍射宽带波束的至少一部分，并且分别提供第一，第二，第二 和基于此的第三信号; 减法器，用于通过取第一和第二信号之间的差来提供偏振计输出; 以及用于通过添加第一和第二信号来提供光谱仪输出的加法器。 根据本发明的声光谱仪/偏光计允许同时进行宽带成像，光谱学和偏振测定，并且通过相同的光学孔径。

公开(公告)号：US4523847A

公开(公告)日：1985-06-18

申请号：US511593

申请日：1983-07-07

Applicant: Gary C. Bjorklund ,  Marc D. Levenson

Inventor： Gary C. Bjorklund ,  Marc D. Levenson

IPC: G01J3/447 ,  G01J3/10 ,  G01J3/42 ,  G01J3/433 ,  G01J9/04 ,  G01N21/19 ,  G01N21/27 ,  G01B9/02

CPC classification number: G01J3/4338 ,  G01J3/447 ,  G01J9/04 ,  G01N21/19

Abstract: A method and device for detecting dichroic and/or birefringent narrow spectral features in a sample is described. The method includes the steps of providing a beam of light having an optical frequency bandwidth which is narrow compared to the width of the narrow spectral feature and having a center frequency .omega..sub.c which lies near the narrow spectral feature, polarization phase modulating a beam of light with a single RF frequency to provide a pure FM spectrum having upper and lower sidebands in which either the carrier and sidebands have been polarized with respect to one another, exposing the sample containing the narrow spectral feature to the polarized modulated light so that the FM sidebands probe the narrow spectral feature, polarization analyzing and then photodetecting the light emerging from the sample to detect a RF beat at the specific RF frequency used for the polarization phase modulation, and electronically monitoring the amplitude of the RF beat signal to indicate the strength of the narrow spectral feature. The device includes a polarization phase modulator and a polarization analyzer positioned on opposite sides of the sample. In a preferred embodiment the polarization phase modulator produces a frequency modulated optical spectrum with the sidebands polarized precisely orthogonal to the carrier.

Abstract translation: 描述了用于检测样品中二色性和/或双折射窄光谱特征的方法和装置。 该方法包括以下步骤：提供具有与窄光谱特征的宽度相比窄的光频带宽的光束，并具有位于窄光谱特征附近的中心频率ωc，调制光束的偏振相位 具有单个RF频率以提供具有上边带和下边带的纯FM频谱，其中载波和边带彼此相对极化，将包含窄频谱特征的样本曝光到偏振调制光，使得FM边带 探测窄谱特征，偏振分析，然后对从样本出射的光进行光电检测，以检测用于极化相位调制的特定RF频率的RF拍频，并电子监测RF拍频信号的幅度，以指示 窄谱特征。 该器件包括位于样品相对两侧的偏振相位调制器和偏振分析器。 在优选实施例中，偏振相位调制器产生频率调制的光谱，其中边带被精确地正交于载波极化。

公开(公告)号：US12025495B2

公开(公告)日：2024-07-02

申请号：US17750264

申请日：2022-05-20

Applicant: Joseph Daniel Vance

Inventor： Joseph Daniel Vance

IPC: G01J3/10 ,  G01J3/447

CPC classification number: G01J3/10 ,  G01J3/447

Abstract: A light frequency standard for use as an optical clock is disclosed that is improved by optical pumping. Optical pumping is utilized to change the ground states of the atomic vapor from transition-forbidden to transition-allowed ground states involved in two-photon absorption process. Using an optical pump creates a stronger absorption line signal used for locking the laser to an absolute frequency. An optical spectrometer based upon two-photon absorption is disclosed that is improved by optical pumping, utilizing two optical pumps. The first optical pump provides photons that may combine with probe light for two-photon absorption, but it also depletes absorbing atoms that are in ground states. The second optical pump replenishes the supply of absorbing atoms into ground states allowing two-photon absorption between the first optical pump and the probe light. Two-photon absorption between the second pump light and the probe light is forbidden due to energy mismatch.