公开(公告)号：US20150268400A1

公开(公告)日：2015-09-24

申请号：US14301781

申请日：2014-06-11

Applicant: KLA-Tencor Corporation

Inventor： Anant Chimmalgi ,  Rahul Yadav ,  Joshua Wittenberg

IPC: F21V8/00 ,  G02B6/35

CPC classification number: G02B6/0006 ,  G02B6/0008 ,  G02B6/3512 ,  H01J65/04

Abstract: Systems and methods for providing laser sustained plasma light sources are disclosed. Different from conventional laser sustained plasma light sources where one fiber size and one wavelength combination is used in the lamphouse to generate light for different bands and pixel sizes, switchable fiber sizes and wavelength combinations are provided for optimal power output in different wavelength bands and pixel sizes. More specifically, switchable fiber configurations are provided where larger fibers with higher pump powers are used for bigger pixel sizes and higher wavelength bands while smaller fibers are used for smaller pixel size and shorter wavelength bands. Additionally and/or alternatively, pumping schemes are provided where pump wavelengths close to the absorption peak of the gas fill are used for bigger pixel sizes while pump wavelengths away from the gas fill absorption peak are used for smaller pixel sizes.

Abstract translation: 公开了用于提供激光持续等离子体光源的系统和方法。 与传统的激光持续等离子体光源不同，其中在灯塔中使用一个光纤尺寸和一个波长组合来产生用于不同带和像素尺寸的光，可提供可切换的光纤尺寸和波长组合用于在不同波长带和像素尺寸中的最佳功率输出 。 更具体地说，可提供可切换的光纤配置，其中具有更高的泵浦功率的较大的光纤用于较大的像素尺寸和较高的波长带，而较小的光纤用于较小的像素尺寸和较短的波长带。 附加地和/或替代地，提供泵送方案，其中靠近气体填充物的吸收峰的泵浦波长被用于更大的像素尺寸，而远离气体填充吸收峰的泵浦波长被用于更小的像素尺寸。

公开(公告)号：US20150262808A1

公开(公告)日：2015-09-17

申请号：US14215063

申请日：2014-03-17

Applicant: Weifeng Wang

Inventor： Weifeng Wang

IPC: H01J65/04 ,  H05H1/46 ,  H05H1/48

CPC classification number: H01J65/04 ,  H01J61/025 ,  H01J61/34 ,  H01J61/545 ,  H05H1/46 ,  H05H1/48

Abstract: A light source includes an enveloped chamber (32) enclosing an ionizable medium (46) and at least one laser source to provide continuous energy to the plasma (64), i.e. the excited and ionized medium, for producing high-brightness light. The envelop (34) prevents the thermal convection on the inner chamber and provides insulation to the heat transferred out of the plasma so as to generate more stable and stronger emission of light. A method for producing enhanced-brightness light includes the using of multiple chamber assemblies (178a and 178b) and at least one laser source (164) to power the plasma within each chamber assembly in sequence. A method for improving the efficiency of laser usage includes a procedure to re-focus the unabsorbed laser beam (270) back to the same plasma (272) so that more laser energy can be absorbed by the plasma to deliver increased light output.

Abstract translation: 光源包括封闭可电离介质（46）的包封室（32）和至少一个激光源，以向等离子体（64）提供持续的能量，即激发和离子化的介质，用于产生高亮度光。 信封（34）防止内室上的热对流，并为从等离子体传出的热量提供绝缘，从而产生更稳定和更强的光发射。 用于产生增强亮度光的方法包括使用多个室组件（178a和178b）和至少一个激光源（164）来依次对每个室组件内的等离子体供电。 用于提高激光使用效率的方法包括将未吸收的激光束（270）重新聚焦回相同等离子体（272）的过程，使得可以通过等离子体吸收更多的激光能量以递送增加的光输出。

公开(公告)号：US20150221494A1

公开(公告)日：2015-08-06

申请号：US14429010

申请日：2013-09-19

Applicant: CERAVISION LIMITED

Inventor： Barry Preston

IPC: H01J65/04 ,  H01J61/30 ,  H01J9/24

CPC classification number: H01J65/04 ,  H01J9/247 ,  H01J61/30 ,  H01J65/044

Abstract: A crucible for a LUWPL is formed from a wave guide body having a central bore through it. Received within the central bore is a drawn quartz tube having its ends sealed, one having been worked flat to be coplanar with one face of the body. The other end has a vestigial tip. This is secured to the body at the orifice of the bore in the other face of the body. The securement is by means of ceramic adhesive compound.

Abstract translation: 用于LUWPL的坩埚由具有通过其的中心孔的波导体形成。 在中心孔内接收的是其端部被密封的拉制石英管，一个被平坦地加工成与主体的一个面共面。 另一端有残留的提示。 这在身体的另一面的孔的孔处固定到身体。 固定是通过陶瓷粘合剂。

公开(公告)号：US08981663B2

公开(公告)日：2015-03-17

申请号：US12445684

申请日：2007-10-16

Applicant: Gregg Hollingsworth

Inventor： Gregg Hollingsworth

IPC: H05B41/24 ,  H01J65/04 ,  H05B41/28

CPC classification number: H01J65/04 ,  H05B41/2806 ,  Y02B20/22

Abstract: An electrodeless plasma lamp and a method of generating light are described. The lamp may comprise a lamp body including a dielectric material having a relative permittivity greater than 2. A lamp drive circuit is coupled to the lamp body and configured to provide radio frequency (RF) power to the lamp body. A bulb containing a fill is positioned proximate the lamp body. The fill forms a plasma when the RF power is coupled to the fill from the lamp body. A lamp drive circuit including modulation control circuit is provided to control modulation of a frequency of the RF power across a frequency band. The circuit may be configured to provide RF power across a frequency band around a resonant frequency for the lamp body to reduce peak amplitude and electro-magnetic interference while maintaining average power to the plasma.

Abstract translation: 描述了一种无电极等离子体灯和一种产生光的方法。 灯可以包括灯主体，其包括具有大于2的相对介电常数的介电材料。灯驱动电路耦合到灯体并且被配置为向灯体提供射频（RF）功率。 包含填充物的灯泡位于灯体附近。 当RF功率从灯体耦合到填充物时，填充物形成等离子体。 提供包括调制控制电路的灯驱动电路来控制跨频带的RF功率的频率的调制。 电路可以被配置为在灯体的谐振频率周围的频带上提供RF功率，以降低峰值振幅和电磁干扰，同时保持对等离子体的平均功率。

公开(公告)号：US08969841B2

公开(公告)日：2015-03-03

申请号：US14510959

申请日：2014-10-09

Applicant: Energetiq Technology, Inc.

Inventor： Donald K. Smith

IPC: G01J3/10 ,  G21K5/04

CPC classification number: H05G2/008 ,  B82Y10/00 ,  G03F7/70033 ,  G21K5/00 ,  G21K5/04 ,  H01J61/16 ,  H01J65/04 ,  H05B41/382 ,  H05G2/001 ,  H05G2/003 ,  H05G2/005 ,  Y02B20/204 ,  Y10T29/49002

Abstract: An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser can provide a substantially continuous amount of energy to the ionized gas to generate a substantially continuous high brightness light.

Abstract translation: 一种用于制造光的装置包括一个室和一个使室内的气体电离的点火源。 该装置还包括至少一个激光器，其向室内的电离气体提供能量以产生高亮度光。 激光器可以向电离气体提供基本连续的能量以产生基本连续的高亮度光。

公开(公告)号：US20150035429A1

公开(公告)日：2015-02-05

申请号：US14362262

申请日：2012-11-29

Applicant: USHIO DENKI KABUSHIKI KAISHA

Inventor： Nobuyuki Hishinuma ,  Yukiharu Tagawa ,  Junya Asayama ,  Koichi Takegoshi ,  Kosuke Yamada

IPC: H01J61/06 ,  H01J61/42

CPC classification number: H01J61/06 ,  C02F1/325 ,  C02F2201/3223 ,  C09K11/7777 ,  C09K11/778 ,  H01J5/54 ,  H01J7/183 ,  H01J61/26 ,  H01J61/34 ,  H01J61/42 ,  H01J61/44 ,  H01J61/92 ,  H01J65/04 ,  H01J65/046

Abstract: A first excimer lamp includes: a quartz glass-made light-emitting tube containing an excimer emission gas sealed therein; and a pair of electrodes for generating dielectric barrier discharge. One of the pair of electrodes is disposed in the inner space of the light-emitting tube so as to extend in the direction of a tube axis of the light-emitting tube, and the other one of the pair of electrodes is embedded in the tube wall of the light-emitting tube so as to extend in the direction of the tube axis of the light-emitting tube. The one electrode is electrically connected to a conductive foil hermetically embedded in an end portion of the light-emitting tube.

Abstract translation: 第一准分子灯包括：密封在其中的含有准分子发射气体的石英玻璃制发光管; 以及用于产生电介质阻挡放电的一对电极。 一对电极中的一个被布置在发光管的内部空间中，以沿着发光管的管轴的方向延伸，并且一对电极中的另一个被嵌入管中 发光管的壁沿着发光管的管轴方向延伸。 一个电极电连接到密封地嵌入发光管的端部的导电箔。

公开(公告)号：US20150021500A1

公开(公告)日：2015-01-22

申请号：US14510959

申请日：2014-10-09

Applicant: Energetiq Technology, Inc.

Inventor： Donald K. Smith

IPC: G21K5/04

CPC classification number: H05G2/008 ,  B82Y10/00 ,  G03F7/70033 ,  G21K5/00 ,  G21K5/04 ,  H01J61/16 ,  H01J65/04 ,  H05B41/382 ,  H05G2/001 ,  H05G2/003 ,  H05G2/005 ,  Y02B20/204 ,  Y10T29/49002

Abstract: An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser can provide a substantially continuous amount of energy to the ionized gas to generate a substantially continuous high brightness light.

Abstract translation: 一种用于制造光的装置包括一个室和一个使室内的气体电离的点火源。 该装置还包括至少一个激光器，其向室内的电离气体提供能量以产生高亮度光。 激光器可以向电离气体提供基本连续的能量以产生基本连续的高亮度光。

公开(公告)号：US20130342105A1

公开(公告)日：2013-12-26

申请号：US13924608

申请日：2013-06-23

Applicant: KLA-Tencor Corporation

Inventor： Anatoly Shchemelinin ,  Ilya Bezel

IPC: H01J37/32

CPC classification number: H01J37/32055 ,  H01J61/04 ,  H01J61/125 ,  H01J61/14 ,  H01J61/16 ,  H01J61/20 ,  H01J61/28 ,  H01J65/04

Abstract: A laser sustained plasma light source includes a plasma bulb containing a working gas flow driven by an electric current sustained within the plasma bulb. Charged particles are introduced into the working gas of the plasma bulb. An arrangement of electrodes maintained at different voltage levels drive the charged particles through the working gas. The movement of the charged particles within the working gas causes the working gas to flow in the direction of movement of the charged particles by entrainment. The resulting working gas flow increases convection around the plasma and increases laser to plasma interaction. The working gas flow within the plasma bulb can be stabilized and controlled by control of the voltages present on the each of the electrodes. A more stable flow of working gas through the plasma contributes to a more stable plasma shape and position within the plasma bulb.

Abstract translation: 激光持续等离子体光源包括等离子体灯泡，其包含由等离子体灯泡内的电流驱动的工作气体流。 带电粒子被引入等离子体灯泡的工作气体中。 维持在不同电压水平的电极布置驱动带电粒子通过工作气体。 带电粒子在工作气体内的移动导致工作气体通过夹带在带电粒子的运动方向上流动。 所产生的工作气体流量增加等离子体周围的对流并且增加激光到等离子体相互作用。 可以通过控制存在于每个电极上的电压来稳定和控制等离子体灯泡内的工作气体流。 通过等离子体的工作气体的更稳定的流动有助于在等离子体灯泡内更稳定的等离子体形状和位置。

公开(公告)号：US20130003384A1

公开(公告)日：2013-01-03

申请号：US13529582

申请日：2012-06-21

Applicant: Ilya Bezel ,  Anatoly Shchemelinin ,  Yanming Zhao ,  Matthew Derstine

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Yanming Zhao ,  Matthew Derstine

IPC: F21V13/00

CPC classification number: G01J3/021 ,  G01J3/0208 ,  G02B26/06 ,  H01J65/04

Abstract: A system for compensating abberative effects caused by a bulb of a plasma cell includes an illumination source configured to generate illumination; a plasma cell, the plasma cell including a bulb for containing a volume of gas; an ellipse configured to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas; and one or more adaptive optical elements configured to compensate for aberrations produced by one or more optical elements, the one or more adaptive optics elements positioned along an illumination pathway between the illumination source and the plasma cell.

Abstract translation: 用于补偿由等离子体电池的灯泡引起的阻尼效应的系统包括被配置为产生照明的照明源; 等离子体电池，所述等离子体电池包括用于容纳一定体积气体的灯泡; 被配置为将来自照明源的照明聚焦到气体体积中以在气体体积内产生等离子体的椭圆形; 以及配置成补偿由一个或多个光学元件产生的像差的一个或多个自适应光学元件，所述一个或多个自适应光学元件沿着照明源和等离子体单元之间的照明路径定位。

公开(公告)号：US08309943B2

公开(公告)日：2012-11-13

申请号：US13099823

申请日：2011-05-03

Applicant: Donald K. Smith ,  William M. Holber ,  Jeffrey A. Casey

Inventor： Donald K. Smith ,  William M. Holber ,  Jeffrey A. Casey

IPC: H01J63/08 ,  H05H1/24 ,  H05B31/00

CPC classification number: H01J65/04 ,  B82Y10/00 ,  G03F7/70033 ,  H05B41/382 ,  H05G2/001 ,  H05G2/003 ,  H05G2/008 ,  Y02B20/204

Abstract: An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser can provide a substantially continuous amount of energy to the ionized gas to generate a substantially continuous high brightness light.

Abstract translation: 一种用于制造光的装置包括一个室和一个使室内的气体电离的点火源。 该装置还包括至少一个激光器，其向室内的电离气体提供能量以产生高亮度光。 激光器可以向电离气体提供基本连续的能量以产生基本连续的高亮度光。