公开(公告)号：US11273464B2

公开(公告)日：2022-03-15

申请号：US16986412

申请日：2020-08-06

Applicant: Tokyo Electron Limited

Inventor： Satoshi Shimmura ,  Yuji Sakai ,  Kenta Shibasaki ,  Koji Takayanagi ,  Kenji Yada ,  Hiroichi Inada ,  Shinichi Seki ,  Kento Ogata

IPC: B05C11/10 ,  B05B14/30 ,  B05C11/08 ,  B05C13/02

Abstract: A substrate processing apparatus includes a cover member placed to surround a substrate held by a rotary holder; a collecting member placed in an exhaust path formed between the cover member and the rotary holder; and a solvent supply placed above the collecting member and configured to supply a solvent to the collecting member. The solvent supply includes an inner storage space surrounding the substrate; an outer storage space surrounding the inner storage space; and a partition wall extending along a circumferential direction to partition the inner storage space and the outer storage space. Multiple communication holes are extended to penetrate the partition wall such that the solvent introduced into the outer storage space flows to the inner storage space. Multiple dripping holes are extended to penetrate a bottom wall of the inner storage space such that the solvent within the inner storage space drops toward the collecting member.

公开(公告)号：US20220072580A1

公开(公告)日：2022-03-10

申请号：US17424530

申请日：2020-01-21

Applicant: NORDSON CORPORATION

Inventor： Jeff GROENE ,  Richard MURPHY ,  Robert CARVAHLO

IPC: B05C11/10 ,  B05B12/00 ,  B05B1/08 ,  B05C5/02

Abstract: Applicators and methods for dispensing material are disclosed. The applicator includes a syringe defining an inlet, and outlet, a chamber extending from the inlet to the outlet, a plunger disposed within the chamber, and a piston attached to the plunger, where the piston is configured to move the plunger through the chamber. The applicator also includes an actuation mechanism configured to linearly translate the piston through the chamber so as to dispense material through the outlet, a sensor attached to the plunger, where the sensor is configured to sense a linear movement of the plunger, and a controller configured to adjust operation of the actuation mechanism based on the linear movement sensed by the sensor such that the piston repeatedly dispenses a predetermined amount of the material from the outlet of the syringe over a plurality of dispense cycles.

公开(公告)号：US20220062943A1

公开(公告)日：2022-03-03

申请号：US17458691

申请日：2021-08-27

Applicant: TOKYO ELECTRON LIMITED

Inventor： Takayuki ISHII ,  Kazuya NAGASEKI ,  Michishige SAITO

IPC: B05C5/02 ,  B05C11/10 ,  B05C17/005

Abstract: A film forming apparatus is disclosed. The apparatus comprises a chamber; an exhaust unit configured to reduce the pressure in the chamber to a predetermined vacuum level; a holder disposed in the chamber and configured to hold a film forming target member on which a film is to be formed; a supply unit configured to supply a film forming material containing silicon to a surface of the film forming target member; and a heat source configured to perform heating at the predetermined vacuum level to melt the supplied film forming material.

公开(公告)号：US11259415B2

公开(公告)日：2022-02-22

申请号：US17153978

申请日：2021-01-21

Applicant: SENJU METAL INDUSTRY CO., LTD.

Inventor： Hideki Nakamura ,  Takashi Nauchi ,  Toshihiko Mutsuji ,  Ryoichi Suzuki

IPC: B23K1/018 ,  H05K3/34 ,  H01L23/00 ,  B05D3/12 ,  H05K3/28 ,  B05C11/10 ,  B05D1/26 ,  B23K3/06 ,  B05C5/02 ,  B05C21/00 ,  B05D7/00 ,  B23K1/20 ,  H05K3/10 ,  B23K1/00 ,  H05K3/14 ,  B23K101/42 ,  B23K101/40

Abstract: In conventional fluid discharge devices, a discharge head used should be increased in size according to increase in size of a workpiece such as silicon wafer. However, if the discharge head increases in length, a deformation amount of a mask used for discharging the fluid on the workpiece increases, thereby the discharging amount varies. Discharging the fluid in a reciprocating manner is performed using a fluid discharging device including a head unit having a width shorter than a length of the workpiece. A suction port having opening portions each having a slit shape are disposed on the both sides of the discharge nozzle in a vicinity of the discharge nozzle.

公开(公告)号：US11241710B2

公开(公告)日：2022-02-08

申请号：US16635615

申请日：2018-07-11

Applicant: SMS group GmbH

Inventor： Henry Görtz ,  Matthias Kretschmer ,  Lutz Kümmel

IPC: B05D1/06 ,  B05C11/10 ,  B05C19/02 ,  B05C9/04 ,  B05D3/02 ,  B05D7/14

Abstract: A device for coating a metal strip substrate includes a guiding apparatus for guiding the strip substrate along a movement path. A first coating apparatus coats a first main side of the strip substrate with an electrostatically charged coating powder which is in a fluidized state. The first coating apparatus is arranged under a first path section of the movement path. A second coating apparatus coats a second main side of the strip substrate with an electrostatically charged coating powder which is in a fluidized state. A redirecting unit redirects the strip substrate between the first and the second coating apparatus in such a way that the strip substrate in a second path section travels oppositely to the strip substrate in the first path section. The second coating apparatus is arranged at least partly geodetically under the second path section.

公开(公告)号：US20220032336A1

公开(公告)日：2022-02-03

申请号：US17387363

申请日：2021-07-28

Applicant: Festo SE & Co. KG

Inventor： Martin Maichl ,  Hannes Wirtl

IPC: B05C11/10 ,  H01L41/09

Abstract: A fluid device with a fluid chamber, the fluid device including a fluid chamber which is designed for receiving a fluid and which is commonly delimited by a device housing and a bending-elastic membrane element. The membrane element is fixed with a peripheral edge region to the device housing, wherein a membrane working section of the membrane element which is framed by the peripheral edge region can be deflected by a piezoactuator whilst carrying out a stroke movement, in order to change the volume of the fluid chamber. The membrane element is a functional constituent of the piezoactuator by way of it directly forming an electrically conductive electrode of the electrode arrangement of the piezoactuator.

公开(公告)号：US11235890B1

公开(公告)日：2022-02-01

申请号：US15793948

申请日：2017-10-25

Applicant: WORKING DRONES, INC.

Inventor： Robert Lewis Dahlstrom ,  Jeffrey C. McCutcheon ,  Tariq Rashid

IPC: B64D47/08 ,  B05C11/10 ,  B64C39/02

Abstract: A system including an unmanned aerial vehicle (UAV) or aerial robotic system (ARS) to perform at least one task to an object during flight of the UAV in a movement mode configured for maneuvering near a surface of the object. A task sensor configured to sense at least one parameter of the surface. An adjustable sensor arm attachable to the UAV and supporting the task sensor to facilitate the task performed to the surface of the object by the UAV during flight of the UAV. The sensor arm being resilient to impact forces caused by direct contact of the sensor or sensor arm with the surface to bend, spring or swivel relative to a contour of the surface.

公开(公告)号：US11235350B2

公开(公告)日：2022-02-01

申请号：US16266310

申请日：2019-02-04

Applicant: Tokyo Electron Limited

Inventor： Satoshi Shimmura ,  Yuji Sakai ,  Kousuke Yoshihara

IPC: B05C21/00 ,  B08B9/08 ,  B05C5/02 ,  G03F7/16 ,  H01L21/67 ,  B05C11/10

Abstract: A solution treatment apparatus includes: a substrate holding unit holds and rotates a substrate; a coating solution supply unit applies a coating solution to the substrate held by the substrate holding unit; a cup unit arranged outside the substrate holding unit in a manner to be able to surround the substrate held by the substrate holding unit; an exhaust path provided between the substrate holding unit and an inner peripheral surface of the cup unit; a coating solution collection unit provided above the exhaust path in a manner to cover the exhaust path and including an opening part communicating in a vertical direction; a solvent supply unit supplies a solvent for the coating solution to the coating solution collection unit; and a relay unit located above the coating solution collection unit and projecting from the inner peripheral surface of the cup unit toward the coating solution collection unit.

公开(公告)号：US20220016669A1

公开(公告)日：2022-01-20

申请号：US17488842

申请日：2021-09-29

Applicant: MACDONALD, DETTWILER AND ASSOCIATES INC.

Inventor： Limin Shang ,  Adam Neil Philip ,  Piotr Jasiobedzki ,  Mark Patrick Barnet ,  Timothy Reedman

IPC: B05D1/26 ,  B25J5/04 ,  B25J15/00 ,  B25J5/00 ,  B25J19/02 ,  B05C11/10 ,  B25J9/16 ,  H04N5/225 ,  H04N13/204 ,  B05C1/02 ,  B25J11/00

Abstract: The present disclosure provides a method and system by which a precise amount of a viscous fluid sealing compound can be dispensed at required locations through computer vision-based observation of the fluid deposited, its rate and amount of deposition and location; and that the dispensed fluid may be accurately shaped through robotic or other special purpose mechanism motion. The invention enables instant quality inspection of the dispensing process in terms of the locations, amounts and shapes of newly created seals.

公开(公告)号：US20220016666A1

公开(公告)日：2022-01-20

申请号：US17294510

申请日：2019-12-24

Applicant: MITSUBISHI HEAVY INDUSTRIES, LTD.

Inventor： Takashi SHIBUTANI ,  Masanobu TSUTSUI ,  Hiroyuki SAITO

IPC: B05C11/10 ,  B05C5/02

Abstract: A purpose of the present invention is to prevent leakage of a sealant from the rear end side of a plunger in a sealant discharge operation. The sealant discharge apparatus is equipped with a piston that moves axially inside a cartridge and a contact portion, the outer peripheral surface of which has a cylindrical shape, that is provided at the tip of the piston and can contact the inner peripheral surface of a plunger provided in the cartridge housing a sealant, and the contact portion is provided to be movable radially in the piston.