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111.发明授权公开(公告)号：US07016035B2
公开(公告)日：2006-03-21
申请号：US10605371
申请日：2003-09-25
Applicant: Pingfan Wu , Pamela Benicewicz , Elena Rozier
Inventor： Pingfan Wu , Pamela Benicewicz , Elena Rozier
CPC classification number: G01N21/718 , G01J3/02 , G01J3/0208 , G01J3/0218 , G01J3/0232
Abstract: In in-situ laser plasma spectroscopy (LPS) apparatus includes an enclosure for housing a laser energy source and associated signal coupling optics. A main fiber is attached to the enclosure at a first end of the main fiber, and attached to a probe at a second end of the main fiber. The main fiber is configured for transmitting input laser energy from the laser energy source to a target and for transmitting laser induced plasma emission signals back from the target. The probe has a single focal lens for directing the input laser energy from the main fiber to the target, and for directing the laser induced plasma emission signals from the target to the main fiber.
Abstract translation: 在原位激光等离子体光谱（LPS）设备中包括用于容纳激光能量源和相关联的信号耦合光学器件的外壳。 主纤维在主纤维的第一端处附接到外壳，并且在主纤维的第二端处附接到探针。 主光纤被配置为将来自激光能量源的输入激光能量传输到目标，并且用于从目标发送激光感应等离子体发射信号。 探头具有用于将主激光器的输入激光能量引导到目标物的单焦点透镜，以及用于将激光感应等离子体发射信号从目标引导到主光纤。
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公开(公告)号：US20060038991A1
公开(公告)日：2006-02-23
申请号：US11233454
申请日：2005-09-22
Applicant: David Tracy , Bernhard Radziuk , Klaus Fischer
Inventor： David Tracy , Bernhard Radziuk , Klaus Fischer
IPC: G01J3/443
CPC classification number: G01N21/3103 , G01N2021/3118
Abstract: A light source for an atomizing device, specifically an atom absorption spectrometer comprising one, two, or more lamps, whose ray can be selected by means of at least one two-dimensionally moveable optical selection element, and which can be directed in the direction of atomizing device. Fine-tuning is thereby achieved quickly with little constructive expenditure and with low costs. A very high degree of accuracy is possible from the selector through a rotational and highly adjustable rotation spindle.
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113.发明授权Method for time-optimized acquisition of special spectra using a scanning microscope 有权使用扫描显微镜时间优化采集特殊光谱的方法公开(公告)号：US06947861B2
公开(公告)日：2005-09-20
申请号：US10249181
申请日：2003-03-20
Applicant: Frank Olschewski
Inventor： Frank Olschewski
CPC classification number: G01J3/4406 , G01J3/443
Abstract: The method implements time-optimized acquisition of special spectra using a scanning microscope, for which purpose the spectrum is subjected to bisecting interval measurements. The method for time-optimized acquisition of special spectra (emission spectra) using a scanning microscope is implemented in several steps. Firstly a complete spectrum to be examined, within which at least one special spectrum (emission spectrum) is located, is split into at least two intervals. The interval in which the intensity lies above a specific threshold is selected. That interval is split into at least two further intervals, and the procedure is continued until the size of the interval corresponds to the lower limit of the scanning microscope's measurement accuracy. The location of the special spectrum in the complete spectrum is defined, and an interval around it is created and is measured linearly.
Abstract translation: 该方法使用扫描显微镜实现特殊光谱的时间优化采集，为此，光谱经受二等分间隔测量。 使用扫描显微镜时间优化采集特殊光谱（发射光谱）的方法是在几个步骤中实现的。 首先，要检查的至少一个特殊频谱（发射频谱）所在的完整频谱被分成至少两个间隔。 选择强度在特定阈值之上的间隔。 该间隔分为至少两个间隔，并且继续该过程直到间隔的大小对应于扫描显微镜的测量精度的下限。 定义完整光谱中特殊光谱的位置，并创建其周围的间隔，并进行线性测量。
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114.发明申请公开(公告)号：US20050190363A1
公开(公告)日：2005-09-01
申请号：US11064483
申请日：2005-02-24
Applicant: Gloria Sogan , Julien Bounouar , Jean-Pierre Desbiolles , Isabelle Gaurand
Inventor： Gloria Sogan , Julien Bounouar , Jean-Pierre Desbiolles , Isabelle Gaurand
CPC classification number: H01J37/32972 , G01N21/68
Abstract: A method of detecting gaseous species in a mixture by light-emission spectroscopy, in which use is made of the radiation emitted by a plasma (4) present in the gas mixture under analysis, a measurement system (20) is used to take a raw optical spectrum of said radiation emitted by the plasma (4), and the raw optical spectrum is compared with a library of reference optical spectra, the method comprising a step of generating a pruned optical spectrum, which step consists in making use, in the raw optical spectrum, of only those zones of the spectrum that present a significant shape corresponding to a predefined shape criterion, and subsequently said pruned spectrum is compared with the library of reference optical spectra.
Abstract translation: 通过发光光谱法检测混合物中的气态物质的方法，其中使用由分析气体混合物中存在的等离子体（4）发射的辐射，使用测量系统（20） 由等离子体（4）发射的所述辐射的光谱和原始光谱与参考光谱库进行比较，该方法包括产生修剪的光谱的步骤，该步骤包括在原始 光谱只有那些呈现与预定形状标准相对应的显着形状的光谱区域，随后将所述修剪的光谱与参考光谱库进行比较。
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公开(公告)号：US06894769B2
公开(公告)日：2005-05-17
申请号：US10331456
申请日：2002-12-31
Applicant: Audunn Ludviksson , Eric J. Strang
Inventor： Audunn Ludviksson , Eric J. Strang
CPC classification number: H01J37/32935 , G01N21/645 , G01N2021/8416 , H01J37/32963 , H01J37/32972 , H01J37/3299
Abstract: A method and system are provided for monitoring erosion of system components in a plasma processing system. The system components contain emitters that are capable of producing characteristic fluorescent light emission when exposed to a plasma. The method utilizes optical emission to monitor fluorescent light emission from the emitters for determining system component status. The method can evaluate erosion of system components in a plasma, by monitoring fluorescent light emission from the emitters. Consumable system components that can be monitored using the method include rings, shields, electrodes, baffles, and liners.
Abstract translation: 提供了一种用于监测等离子体处理系统中的系统部件的侵蚀的方法和系统。 系统组件包含当暴露于等离子体时能够产生特征荧光发射的发射体。 该方法利用光发射来监测来自发射器的荧光发射，以确定系统组件状态。 该方法可以通过监测来自发射器的荧光发射来评估等离子体中系统组件的侵蚀。 可以使用该方法监测的消耗品系统组件包括环，屏蔽，电极，挡板和衬垫。
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Patent Agency Ranking
116.发明授权Chemical analysis and detection by selective adsorbent sampling and laser induced breakdown spectroscopy 失效通过选择性吸附剂取样和激光诱导击穿光谱法进行化学分析和检测公开(公告)号：US06847446B2
公开(公告)日：2005-01-25
申请号：US10395130
申请日：2003-03-25
Applicant: Billy J. Shilling
Inventor： Billy J. Shilling
CPC classification number: G01N21/718 , G01J3/443
Abstract: The present invention describes an apparatus capable of specific detection of environmental chemicals in water and air. The apparatus combines a specific chemical sampler, encompassing selectively adsorbing material to automatically sample air or water samples and trap target chemicals, and uses Laser Induced Breakdown Spectroscopy for analysis of trapped chemicals. Operation of the apparatus is controlled by a computer interface. In order to provide the accuracy needed for chemical detection and adaptability required for field use it is required to incorporate Laser Induced Breakdown Spectroscopy with sample collection utilizing selective adsorbents. The invention provides a chemical detection device for concentrating chemical samples from water or air environments and then analyzing these samples with a low power highly portable Laser Induced Breakdown Spectroscope.
Abstract translation: 本发明描述了能够特异性地检测水和空气中的环境化学物质的装置。 该设备结合了特定的化学取样器，包括选择性吸附材料，以自动样品空气或水样品和捕获目标化学品，并使用激光诱导分解光谱分析被捕获的化学物质。 设备的操作由计算机接口控制。 为了提供现场使用所需的化学检测和适应性所需的精度，需要将激光诱导分解光谱与采用选择性吸附剂的样品收集相结合。 本发明提供了用于从水或空气环境中浓缩化学样品的化学检测装置，然后用低功率高度便携式的激光诱导分解分析仪分析这些样品。
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公开(公告)号：US6165312A
公开(公告)日：2000-12-26
申请号：US064966
申请日：1998-04-23
CPC classification number: G01J3/443 , G01J3/28 , G01J2003/2866
Abstract: The invention generally relates to various aspects of a plasma process, and more specifically the monitoring of such plasma processes. One aspect relates in at least some manner to calibrating or initializing a plasma monitoring assembly. This type of calibration may be used to address wavelength shifts, intensity shifts, or both associated with optical emissions data obtained on a plasma process. A calibration light may be directed at a window through which optical emissions data is being obtained to determine the effect, if any, that the inner surface of the window is having on the optical emissions data being obtained therethrough, the operation of the optical emissions data gathering device, or both. Another aspect relates in at least some manner to various types of evaluations which may be undertaken of a plasma process which was run, and more typically one which is currently being run, within the processing chamber. Plasma health evaluations and process identification through optical emissions analysis are included in this aspect. Yet another aspect associated with the present invention relates in at least some manner to the endpoint of a plasma process (e.g., plasma recipe, plasma clean, conditioning wafer operation) or discrete/discernible portion thereof (e.g., a plasma step of a multiple step plasma recipe). A final aspect associated with the present invention relates to how one or more of the above-noted aspects may be implemented into a semiconductor fabrication facility, such as the distribution of wafers to a wafer production system.
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118.发明授权Diagnosis apparatus for the picture providing recording of fluorescing biological tissue regions 失效用于提供荧光生物组织区域记录的图像的诊断装置
公开(公告)号：US6148227A
公开(公告)日：2000-11-14
申请号：US98286
申请日：1998-06-16
Applicant: Georges Wagnieres , Matthieu Zellweger , Nicolas Chauvin , Norbert Lange , Ulf Zanger , Andre Studzinski , Hubert van den Bergh
Inventor： Georges Wagnieres , Matthieu Zellweger , Nicolas Chauvin , Norbert Lange , Ulf Zanger , Andre Studzinski , Hubert van den Bergh
CPC classification number: A61B5/0084 , A61B1/043 , A61B5/0071 , G02B23/2484 , H04N7/18
Abstract: The diagnosis apparatus according to the invention for the picture providing recording of fluorescing biological tissue by way of an endoscope contains a stimulation light source which beams spectral components suitable for fluorescence stimulation into the tissue through the endoscope. The fluorescent light reflected by the tissue reaches through the endoscope optics into a head piece where it is split into a green, and spacially separated from this, a red spectral component and falls each on one half of a CCD solid body of a highly sensitive black and white camera. In an electronic and processor component the video signals allocated to the green and to the red spectral component are processed into two separate processing channels in a manner such that the separately processed green-red video signals are simultaneously inputted to a color video monitor and here may be superimposed to a red-green monitor picture, which may show changes of tissue indicating disease, for example dysplasia, carcinomas in situ etc., in all organs which are endoscopically accessible.
Abstract translation: 根据本发明的用于通过内窥镜提供荧光生物组织记录的图像的诊断装置包括将通过内窥镜将适合于荧光刺激的光谱成分射入组织的刺激光源。 由组织反射的荧光通过内窥镜光学器件进入头部，在其中分割成绿色，并与之空间分开，红色光谱分量，并分别落在高灵敏度黑色的CCD固体的一半上 和白色相机。 在电子和处理器部件中，分配给绿色和红色光谱分量的视频信号被处理成两个单独的处理通道，使得分开处理的绿色 - 红色视频信号被同时输入到彩色视频监视器，并且这里可以 叠加到红绿色监视器图像上，其可以显示在内窥镜可访问的所有器官中指示疾病的组织的变化，例如发育不良，原位癌等。
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公开(公告)号：US6077386A
公开(公告)日：2000-06-20
申请号：US65680
申请日：1998-04-23
CPC classification number: G01J3/443 , G01J3/28 , G01J2003/2866
Abstract: The invention generally relates to various aspects of a plasma process, and more specifically the monitoring of such plasma processes. One aspect relates in at least some manner to calibrating or initializing a plasma monitoring assembly. This type of calibration may be used to address wavelength shifts, intensity shifts, or both associated with optical emissions data obtained on a plasma process. A calibration light may be directed at a window through which optical emissions data is being obtained to determine the effect, if any, that the inner surface of the window is having on the optical emissions data being obtained therethrough, the operation of the optical emissions data gathering device, or both. Another aspect relates in at least some manner to various types of evaluations which may be undertaken of a plasma process which was run, and more typically one which is currently being run, within the processing chamber. Plasma health evaluations and process identification through optical emissions analysis are included in this aspect. Yet another aspect associated with the present invention relates in at least some manner to the endpoint of a plasma process (e.g., plasma recipe, plasma clean, conditioning wafer operation) or discrete/discernible portion thereof (e.g., a plasma step of a multiple step plasma recipe). A final aspect associated with the present invention relates to how one or more of the above-noted aspects may be implemented into a semiconductor fabrication facility, such as the distribution of wafers to a wafer production system.
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公开(公告)号：US6024202A
公开(公告)日：2000-02-15
申请号：US9411
申请日：1998-01-20
Applicant: Michael Potter
Inventor： Michael Potter
CPC classification number: G01J3/4406 , G07D7/122 , G01J2003/2866
Abstract: A method and apparatus for detecting radiation in a relatively narrow wavelength band within radiation having a wide range of wavelengths. The method comprises detecting radiation in a first wavelength band including the narrow wavelength band and other wavelengths; detecting radiation in a second wavelength band which comprises substantially only the other wavelengths; and comparing the levels of detected radiation to determine the presence of radiation in the narrow wavelength band.
Abstract translation: 一种用于在具有宽波长范围的辐射内检测相对窄波长带中的辐射的方法和装置。 该方法包括检测包括窄波段和其他波长的第一波长带中的辐射; 在基本上仅包括其他波长的第二波长带中检测辐射; 并且比较检测到的辐射水平以确定窄波段中辐射的存在。
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