公开(公告)号：US07468790B2

公开(公告)日：2008-12-23

申请号：US11064483

申请日：2005-02-24

Applicant: Gloria Sogan ,  Julien Bounouar ,  Jean-Pierre Desbiolles ,  Isabelle Gaurand

Inventor： Gloria Sogan ,  Julien Bounouar ,  Jean-Pierre Desbiolles ,  Isabelle Gaurand

IPC: C23C16/00 ,  G01J3/30

CPC classification number: H01J37/32972 ,  G01N21/68

Abstract: A method of detecting gaseous species in a mixture by light-emission spectroscopy, in which use is made of the radiation emitted by a plasma (4) present in the gas mixture under analysis, a measurement system (20) is used to take a raw optical spectrum of said radiation emitted by the plasma (4), and the raw optical spectrum is compared with a library of reference optical spectra, the method comprising a step of generating a pruned optical spectrum, which step consists in making use, in the raw optical spectrum, of only those zones of the spectrum that present a significant shape corresponding to a predefined shape criterion, and subsequently said pruned spectrum is compared with the library of reference optical spectra.

Abstract translation: 通过发光光谱法检测混合物中的气态物质的方法，其中使用由分析气体混合物中存在的等离子体（4）发射的辐射，使用测量系统（20） 由等离子体（4）发射的所述辐射的光谱和原始光谱与参考光谱库进行比较，该方法包括产生修剪的光谱的步骤，该步骤包括在原始 光谱只有那些呈现与预定形状标准相对应的显着形状的光谱区域，随后将所述修剪的光谱与参考光谱库进行比较。

公开(公告)号：US20050190364A1

公开(公告)日：2005-09-01

申请号：US11064484

申请日：2005-02-24

Applicant: Gloria Sogan ,  Julien Bounouar ,  Jean-Pierre Desbiolles ,  Isabelle Gaurand

Inventor： Gloria Sogan ,  Julien Bounouar ,  Jean-Pierre Desbiolles ,  Isabelle Gaurand

IPC: G01J3/443 ,  G01N21/27 ,  G01N21/68 ,  G01N21/73 ,  G01J3/30

CPC classification number: G01J3/443 ,  G01N21/274 ,  G01N21/68 ,  G01N2201/121 ,  G01N2201/1218 ,  G01N2201/127

Abstract: The invention provides a method and apparatus for detecting minority gaseous species in a mixture by light-emission spectroscopy by means of an optical spectrometer (8), in which the radiation emitted by a plasma (4) present in the gas mixture for analysis is used and, in the spectrum of said radiation, lines are identified of a majority gaseous species that present amplitudes that are sensitive to the presence of a minority species, and information about the concentration of a minority gaseous species is deduced from the amplitude(s) of said sensitive line(s). This makes it possible to monitor minority gaseous species in real time.

Abstract translation: 本发明提供了一种用于通过光谱仪（8）通过发光光谱检测混合物中的少数气态物质的方法和装置，其中使用由用于分析的气体混合物中存在的等离子体（4）发射的辐射 并且在所述辐射的光谱中，识别出存在对少数物种的存在敏感的振幅的多数气态物种的品系，并且关于少数种类的浓度的信息是从 说敏感线。 这使得可以实时监测少数气态物质。

公开(公告)号：US07403283B2

公开(公告)日：2008-07-22

申请号：US11064484

申请日：2005-02-24

Applicant: Gloria Sogan ,  Julien Bounouar ,  Jean-Pierre Desbiolles ,  Isabelle Gaurand

Inventor： Gloria Sogan ,  Julien Bounouar ,  Jean-Pierre Desbiolles ,  Isabelle Gaurand

IPC: G01J3/30

CPC classification number: G01J3/443 ,  G01N21/274 ,  G01N21/68 ,  G01N2201/121 ,  G01N2201/1218 ,  G01N2201/127

Abstract: A method and apparatus for detecting minority gaseous species in a mixture by light-emission spectroscopy by means of an optical spectrometer (8), in which the radiation emitted by a plasma (4) present in the gas mixture for analysis is used and, in the spectrum of the radiation, lines are identified of a majority gaseous species that present amplitudes that are sensitive to the presence of a minority species, and information about the concentration of a minority gaseous species is deduced from the amplitude(s) of the sensitive line(s). This makes it possible to monitor minority gaseous species in real time.

Abstract translation: 一种通过光谱仪（8）通过发光光谱检测混合物中的少数气态物质的方法和装置，其中使用由用于分析的气体混合物中存在的等离子体（4）发射的辐射，并且在 放射线的光谱确定出大多数气态物质，其呈现对少数物种的存在敏感的振幅，关于少数气态物质的浓度的信息从敏感线的幅度推导出 （s）。 这使得可以实时监测少数气态物质。

公开(公告)号：US20050190363A1

公开(公告)日：2005-09-01

申请号：US11064483

申请日：2005-02-24

Applicant: Gloria Sogan ,  Julien Bounouar ,  Jean-Pierre Desbiolles ,  Isabelle Gaurand

Inventor： Gloria Sogan ,  Julien Bounouar ,  Jean-Pierre Desbiolles ,  Isabelle Gaurand

IPC: G01J3/443 ,  G01N21/68 ,  G01N21/71 ,  G01J3/30

CPC classification number: H01J37/32972 ,  G01N21/68

Abstract: A method of detecting gaseous species in a mixture by light-emission spectroscopy, in which use is made of the radiation emitted by a plasma (4) present in the gas mixture under analysis, a measurement system (20) is used to take a raw optical spectrum of said radiation emitted by the plasma (4), and the raw optical spectrum is compared with a library of reference optical spectra, the method comprising a step of generating a pruned optical spectrum, which step consists in making use, in the raw optical spectrum, of only those zones of the spectrum that present a significant shape corresponding to a predefined shape criterion, and subsequently said pruned spectrum is compared with the library of reference optical spectra.

Abstract translation: 通过发光光谱法检测混合物中的气态物质的方法，其中使用由分析气体混合物中存在的等离子体（4）发射的辐射，使用测量系统（20） 由等离子体（4）发射的所述辐射的光谱和原始光谱与参考光谱库进行比较，该方法包括产生修剪的光谱的步骤，该步骤包括在原始 光谱只有那些呈现与预定形状标准相对应的显着形状的光谱区域，随后将所述修剪的光谱与参考光谱库进行比较。