公开(公告)号：US07516661B2

公开(公告)日：2009-04-14

申请号：US11360870

申请日：2006-02-23

Applicant: Jonathan L. Klein ,  Galen P. Magendanz ,  Peter H. LaFond ,  Mark L. Williams ,  Michael J. Foster

Inventor： Jonathan L. Klein ,  Galen P. Magendanz ,  Peter H. LaFond ,  Mark L. Williams ,  Michael J. Foster

IPC: G01P15/00 ,  G01P15/125

CPC classification number: B81B7/0077 ,  B81B2201/033 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  Y10T74/22

Abstract: A microelectromechanical system (MEMS) device with a mechanism layer having a first part and a second part, and at least one cover for sealing the mechanism layer. The inner surface of at least one of the covers is structured such that a protruding structure is present on the inner surface of the cover and wherein the protruding structure mechanically causes the first part to be deflected out of a plane associated with the second part.

Abstract translation: 一种具有机械层的微机电系统（MEMS）装置，其具有第一部分和第二部分，以及至少一个用于密封机构层的盖。 至少一个盖的内表面构造成使得突出结构存在于盖的内表面上，并且其中突出结构机械地使第一部分偏离与第二部分相关联的平面。

公开(公告)号：US07504757B2

公开(公告)日：2009-03-17

申请号：US11375860

申请日：2006-03-15

Applicant: Kanakasabapathi Subramanian ,  Xiaojun T. Huang ,  Noel C. MacDonald

Inventor： Kanakasabapathi Subramanian ,  Xiaojun T. Huang ,  Noel C. MacDonald

IPC: H02N1/00 ,  G02B26/08

CPC classification number: B81C1/00626 ,  B81B2201/033 ,  H01L21/3086

Abstract: Multi-level structures are formed in a semiconductor substrate by first forming a pattern of lines or structures of different widths. Width information on the pattern is decoded by processing steps into level information to form a MEMS structure. The pattern is etched to form structures having a first floor. The structures are oxidized until structures of thinner width are substantially fully oxidized. A portion of the oxide is then etched to expose the first floor. The first floor is then etched to form a second floor. The oxide is then optionally removed, leaving a multi-level structure. In one embodiment, high aspect ratio comb actuators are formed using the multi-level structure process.

Abstract translation: 通过首先形成不同宽度的线或结构的图案，在半导体衬底中形成多层结构。 图案上的宽度信息通过处理步骤被解码成级信息以形成MEMS结构。 蚀刻图案以形成具有一层的结构。 结构被氧化，直到较薄宽度的结构基本上被完全氧化。 然后蚀刻一部分氧化物以露出第一层。 然后蚀刻第一层以形成二楼。 然后任选地除去氧化物，留下多层结构。 在一个实施例中，使用多层结构工艺形成高纵横比梳状致动器。

公开(公告)号：US20090001847A1

公开(公告)日：2009-01-01

申请号：US12145063

申请日：2008-06-24

Applicant: Osamu TSUBOI ,  Norinao KOUMA ,  Hiromitsu SONEDA ,  Hisao OKUDA ,  Yoshihiro MIZUNO ,  Tsuyoshi MATSUMOTO ,  Ippei SAWAKI

Inventor： Osamu TSUBOI ,  Norinao KOUMA ,  Hiromitsu SONEDA ,  Hisao OKUDA ,  Yoshihiro MIZUNO ,  Tsuyoshi MATSUMOTO ,  Ippei SAWAKI

IPC: H02N1/00

CPC classification number: B81B3/0078 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/0181 ,  B81B2203/058 ,  G02B26/0841

Abstract: A micro-oscillation element includes a base frame, an oscillating portion, and a link portion connecting the base frame and the oscillating portion to each other. The oscillating portion has a movable functional portion, a first driving electrode connected to the movable functional portion, and a weight portion joined to the first driving electrode. The link portion defines an axis of the oscillating motion of the oscillating portion. The second driving electrode, fixed to the base frame, generates driving force for the oscillating motion in cooperation with the first driving electrode.

Abstract translation: 微振荡元件包括基架，振荡部和将基架和振荡部彼此连接的连杆部。 振荡部分具有可移动功能部分，连接到可移动功能部分的第一驱动电极和连接到第一驱动电极的配重部分。 连杆部分限定摆动部分的摆动运动的轴线。 固定在基架上的第二驱动电极与第一驱动电极协作产生用于振荡运动的驱动力。

公开(公告)号：US20080137165A1

公开(公告)日：2008-06-12

申请号：US11945307

申请日：2007-11-27

Applicant: AbdulJaleel K. Moidu

Inventor： AbdulJaleel K. Moidu

IPC: G02B26/08 ,  B29D11/00

CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/058

Abstract: A hybrid electro-static actuator for rotating a two-dimensional micro-electro-mechanical micro-mirror device about two perpendicular axes includes a vertical comb drive for rotating the micro-mirror about a tilt axis, and a parallel plate drive for rotating the micro-mirror about a roll axis. The rotor comb fingers of the comb drive extend from a sub-frame of the micro-mirror, which is only rotatable about the tilt axis, while one of the parallel plate electrodes is mounted on the underside of a main platform, which generally surrounds the sub-frame. The vertical comb drive rotates both the sub-frame and the main platform about the tilt axis, while the parallel plate drive only rotates the main platform about the roll axis.

Abstract translation: 用于围绕两个垂直轴旋转二维微机电微反射镜装置的混合静电致动器包括用于围绕倾斜轴旋转微镜的垂直梳齿驱动器和用于旋转微型 - 关于卷轴的镜像。 梳状驱动器的转子梳齿从微反射镜的子框架延伸，微镜的子框架只能绕倾斜轴线旋转，而平行板电极中的一个安装在主平台的下侧，主平台大体围绕着 子框架 垂直梳齿驱动器使副框架和主平台围绕倾斜轴线旋转，而平行板驱动器仅使主平台围绕辊轴线旋转。

公开(公告)号：US07334475B1

公开(公告)日：2008-02-26

申请号：US11367104

申请日：2006-03-03

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: G01P15/08 ,  G01P15/00

CPC classification number: G02B26/0841 ,  B81B3/0021 ,  B81B2201/033 ,  H02N1/008

Abstract: A micro-electro-mechanical system (MEMS) device includes an oscillating body and a beam connected to the oscillating body. The beam has a proximal end connected to the oscillating body, a distal end spaced from the oscillating body, and rotational comb teeth extending from the beam. Springs couple the beam to stationary pads to allow the oscillating body to rotate about a rotational axis. The springs are arranged along the rotation axis so at least one spring is located between another spring and the oscillating body. Stationary comb teeth extend from a stationary pad to be interdigitated with the rotational comb teeth extending from the beam. A voltage difference is applied between the stationary and rotational comb teeth to rotate the oscillating body about the rotation axis. A bottom layer includes mounting pads for supporting the stationary pads. An electrode is formed on a surface of the bottom layer. A voltage or ground is applied to the electrode to assert a physical influence on the rotation of the oscillating body.

Abstract translation: 微电子机械系统（MEMS）装置包括振荡体和连接到振动体的梁。 梁具有连接到振动体的近端，与振动体间隔开的远端以及从梁延伸的旋转梳齿。 弹簧将梁连接到固定垫，以允许振动体围绕旋转轴线旋转。 弹簧沿着旋转轴线布置，使得至少一个弹簧位于另一个弹簧和振动体之间。 固定梳齿从固定垫延伸，与从梁延伸的旋转梳齿相互交错。 在静止齿轮和旋转梳齿之间施加电压差以围绕旋转轴旋转振荡体。 底层包括用于支撑固定垫的安装垫。 在底层的表面上形成电极。 对电极施加电压或接地以对振荡体的旋转产生物理影响。

公开(公告)号：US20080043304A1

公开(公告)日：2008-02-21

申请号：US11757321

申请日：2007-06-01

Applicant: Harold L. Stalford

Inventor： Harold L. Stalford

IPC: G02B26/08

CPC classification number: G02B26/0833 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/037 ,  Y10T74/18056 ,  Y10T74/18304

Abstract: Methods and systems for micro transmissions for a micro machine may comprise an input shaft assembly coupled to a micro actuator, an output shaft assembly coupled to a micro shaft, and one or more power conversion elements operable to convert a first type of movement from the micro actuator into a second, disparate type of movement for the micro shaft.

Abstract translation: 用于微型机器的微型变速器的方法和系统可以包括耦合到微型致动器的输入轴组件，耦合到微型轴的输出轴组件和可操作以将来自微型机械的第一类型的运动转换的一个或多个功率转换元件 致动器成为微型轴的第二种不同类型的运动。

公开(公告)号：US07329930B2

公开(公告)日：2008-02-12

申请号：US10793877

申请日：2004-03-08

Applicant: Chang-Li Hung

Inventor： Chang-Li Hung

IPC: H01L27/14

CPC classification number: B81B3/0045 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0154 ,  B81B2203/058 ,  G02B26/0841

Abstract: A micro-electro-mechanical component comprising a movable element with comb electrodes, and two stationary elements with comb electrodes aligned and stacked on each other but electrically insulated by a layer of insulation material. The movable element is supported by multiple torsional hinges and suspended over a cavity such that the element can oscillate about an axis defined by the hinges. The comb electrodes of the movable element are interdigitated with the comb electrodes of one stationary element in the same plane to form an in-plane comb actuator. The comb electrodes of the movable element are also interdigitated in an elevated plane with the comb electrodes of another stationary element to form a vertical comb actuator. As a result, the micro-electro-mechanical component is both an in-plane actuator and a vertical comb actuator, or a multiple-plane actuator. Methods of fabricating such actuator are also described.

Abstract translation: 一种微电子机械部件，包括具有梳状电极的可移动元件和具有梳状电极的两个固定元件，梳状电极彼此对准并堆叠，但是被绝缘材料层电绝缘。 可移动元件由多个扭转铰链支撑并悬挂在空腔上，使得元件可以围绕由铰链限定的轴线摆动。 可移动元件的梳状电极与同一平面中的一个固定元件的梳状电极相互交错，以形成平面内的梳状致动器。 可移动元件的梳状电极也在另一个固定元件的梳状电极的高架平面上交错形成垂直梳状致动器。 结果，微电子机械部件既是面内致动器，也是垂直梳状致动器，或者是多平面致动器。 还描述了制造这种致动器的方法。

公开(公告)号：US20070241076A1

公开(公告)日：2007-10-18

申请号：US11733821

申请日：2007-04-11

Applicant: Steven H. Moffat ,  John M. Miller

Inventor： Steven H. Moffat ,  John M. Miller

IPC: C23F1/00

CPC classification number: B81C1/00174 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/058 ,  H02N1/008

Abstract: The invention relates to a method of fabrication of staggered vertical comb drive actuators with relaxed lateral alignment tolerances. A device layer of a wafer is first etched from a front side using a self-aligned two-layer mask to define interdigited fingers of both moving and stationary combs. A second etch step is used for vertically thinning one of the two sets of fingers by selectively removing their top portions. The front side of the wafer is then bonded to a carrier wafer. The wafer is then selectively etched from the back side of the device layer so as to remove lower portions of the second set of fingers, thereby forming interdigited moving and stationary combs having vertically offset fingers.

Abstract translation: 本发明涉及一种制造具有松弛横向对准公差的交错垂直梳驱动致动器的方法。 首先使用自对准的双层掩模从前侧蚀刻晶片的器件层，以限定移动和静止梳状物的指状指状物。 第二蚀刻步骤用于通过选择性地去除它们的顶部部分来垂直变薄两组手指之一。 然后将晶片的前侧结合到载体晶片。 然后从器件层的背面选择性地蚀刻晶片，以便去除第二组指状物的下部，由此形成具有垂直偏移的指状物的交错的移动和静止梳。

公开(公告)号：US20070128831A1

公开(公告)日：2007-06-07

申请号：US10572554

申请日：2004-09-12

Applicant: Naomasa Oka ,  Hiroshi Harada ,  Jun Ogihara ,  Hiroshi Fukshima ,  Hiroshi Noge ,  Yuji Suzuki ,  Kiyohiko Kawano ,  Takaaki Yoshihara ,  Masahiko Suzumura

Inventor： Naomasa Oka ,  Hiroshi Harada ,  Jun Ogihara ,  Hiroshi Fukshima ,  Hiroshi Noge ,  Yuji Suzuki ,  Kiyohiko Kawano ,  Takaaki Yoshihara ,  Masahiko Suzumura

IPC: H01L21/30

CPC classification number: G02B26/0816 ,  B81B3/0086 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00484 ,  B81C2201/0109 ,  B81C2201/019 ,  G02B6/3516 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/355 ,  G02B6/357 ,  G02B6/3584 ,  H02N1/008

Abstract: A process for fabricating a micro-electro-mechanical system (MEMS) composed of fixed components fixedly supported on a lower substrate and movable components movably supported on the lower substrate. The process utilizes an upper substrate separate from the lower substrate. The upper substrate is selectively etched in its top layer to form therein a plurality of posts which project commonly from a bottom layer of the upper substrate. The posts include the fixed components to be fixed to the lower substrate and the movable components which are resiliently supported only to one or more of the fixed components to be movable relative to the fixed components. The lower substrate is formed in its top surface with at least one recess. The upper substrate is then bonded to the top of the lower substrate upside down in such a manner as to place the fixed components directly on the lower substrate and to place the movable components upwardly of the recess. Finally, the bottom layer of the upper substrate is removed to release the movable components from the bottom layer for floating the movable components above the recess and allowing them to move relative to the lower substrate, while keeping the fixed components fixed to the top of the lower substrate.

Abstract translation: 一种用于制造由固定地支撑在下基板上的固定部件和可移动地支撑在下基板上的可移动部件的微机电系统（MEMS）的制造方法。 该方法利用与下基板分开的上基板。 在其顶层中选择性地蚀刻上基板，以在其中形成多个从上基板的底层共同突出的柱。 支柱包括要固定到下基板的固定部件和仅弹性地支撑到一个或多个固定部件以相对于固定部件可移动的可动部件。 下基板在其顶表面上形成有至少一个凹部。 然后将上基板以这样的方式上下连接到下基板的顶部，以将固定部件直接放置在下基板上并将可移动部件放置在凹部的上方。 最后，去除上基板的底层以从底层释放可移动部件，用于使可移动部件浮动在凹部上方并允许​​它们相对于下基板移动，同时保持固定部件固定在 下基板。

公开(公告)号：US07187100B2

公开(公告)日：2007-03-06

申请号：US10828946

申请日：2004-04-20

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: G02B26/10 ,  G02B26/08 ,  H02N1/00

CPC classification number: H02N1/008 ,  B81B3/0045 ,  B81B2201/033 ,  B81B2201/047 ,  B81B2203/0109 ,  B81B2203/058 ,  G02B26/0841 ,  Y10S359/904

Abstract: A micro-electro-mechanical system (MEMS) mirror device includes an mirror, bonding pads, springs, and beams connected to the mirror. The mirror has a width greater than 1000 and less than 1200 microns, a length greater than 4000 and less than 5500 microns, and a thickness greater than 240 microns. Each beam includes a plurality of rotational comb teeth and is connected by multiple springs to the bonding pads.

Abstract translation: 微机电系统（MEMS）镜装置包括连接到反射镜的反射镜，接合垫，弹簧和梁。 反射镜的宽度大于1000且小于1200微米，长度大于4000且小于5500微米，厚度大于240微米。 每个梁包括多个旋转梳齿，并通过多个弹簧连接到接合垫。