公开(公告)号：US08336337B2

公开(公告)日：2012-12-25

申请号：US10519016

申请日：2003-07-07

Applicant: Richard Schmidt ,  Karsten Bräuer

Inventor： Richard Schmidt ,  Karsten Bräuer

IPC: C03B37/018

CPC classification number: H05H1/30 ,  C03B37/01426 ,  C03B2201/04 ,  C03B2201/075 ,  C03B2201/12

Abstract: The invention relates to a method for producing a blank mold from synthetic quartz glass by using a plasma-assisted deposition method, according to which a hydrogen-free media flow containing a glass starting material and a carrier gas is fed to a multi-nozzle deposition burner. The glass starting material is introduced into a plasma zone by the deposition burner and is oxidized therein while forming SiO2 particles, and the SiO2 particles are deposited on a deposition surface while being directly vitrified. In order to increase the deposition efficiency, the invention provides that the deposition burner (1) focuses the media flow toward the plasma zone (4) by. A multi-nozzle plasma burner, which is suited for carrying out the method and which is provided with a media nozzle for feeding a media flow to the plasma zone, is characterized in that the media nozzle (7) is designed so that it is focussed toward the plasma zone (4). The focussing is effected by a tapering (6) of the media nozzle (7).

Abstract translation: 本发明涉及一种通过使用等离子体辅助沉积方法从合成石英玻璃制造空白模具的方法，根据该方法，将含有玻璃原料和载气的无氢介质流进料到多喷嘴沉积 刻录机。 玻璃原料通过沉积燃烧器引入等离子体区域，并在其中被氧化，同时形成SiO 2颗粒，并且SiO 2颗粒沉积在沉积表面上同时被直接玻璃化。 为了提高沉积效率，本发明提供了沉积燃烧器（1）将介质流聚焦到等离子体区（4）。 适用于执行该方法并且具有用于将介质流供给到等离子体区域的介质喷嘴的多喷嘴等离子燃烧器的特征在于，介质喷嘴（7）被设计成使其聚焦 朝向等离子体区（4）。 聚焦由介质喷嘴（7）的锥形（6）实现。

公开(公告)号：US20120093471A1

公开(公告)日：2012-04-19

申请号：US13317476

申请日：2011-10-19

Applicant: Lance Gibson ,  David Peckham ,  Robert Lingle, JR.

Inventor： Lance Gibson ,  David Peckham ,  Robert Lingle, JR.

IPC: G02B6/036

CPC classification number: G02B6/03683 ,  C03B37/01211 ,  C03B37/01228 ,  C03B37/014 ,  C03B37/018 ,  C03B2201/04 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/31 ,  C03B2203/22

Abstract: The specification describes an improved optical fiber produced by a hybrid VAD/MCVD process. The core of the fiber is produced using VAD and the inner cladding layer has a depressed index and is produced using MCVD. In preferred embodiments, the optical power envelope is essentially entirely contained in VAD produced core material and the MCVD produced depressed index cladding material. Optical loss is minimized by confining most of the optical power to the VAD core where OH presence is low, as well as by maximizing the optical power in the un-doped silica region. The MCVD substrate tube material is essentially devoid of optical power.

公开(公告)号：US20120036896A1

公开(公告)日：2012-02-16

申请号：US13216639

申请日：2011-08-24

Applicant: Dennis Robert Simons ,  Jelle Philip Terpsma ,  Frans Gooijer

Inventor： Dennis Robert Simons ,  Jelle Philip Terpsma ,  Frans Gooijer

IPC: C03B37/018 ,  C03B37/027

CPC classification number: C03B37/01807 ,  C03B37/01413 ,  C03B37/0183 ,  C03B2201/04 ,  C03B2201/075

Abstract: The present invention relates to a method for manufacturing a preform for optical fibres, wherein deposition of glass-forming compounds on the substrate takes place. The present invention furthermore relates to a method for manufacturing optical fibres, wherein one end of a solid preform is heated, after which an optical fibre is drawn from said heated end.

Abstract translation: 本发明涉及一种用于制造光纤预制棒的方法，其中玻璃化合物在基片上的沉积发生。 本发明还涉及一种制造光纤的方法，其中固体预成型件的一端被加热，之后从所述加热端拉出光纤。

公开(公告)号：US08093165B2

公开(公告)日：2012-01-10

申请号：US12869035

申请日：2010-08-26

Applicant: Akio Koike ,  Yasutomi Iwahashi ,  Shinya Kikugawa ,  Yuko Tachibana

Inventor： Akio Koike ,  Yasutomi Iwahashi ,  Shinya Kikugawa ,  Yuko Tachibana

IPC: C03C3/06 ,  C03B19/06 ,  C03B37/018 ,  C03B25/00

CPC classification number: C03B19/1453 ,  B82Y10/00 ,  B82Y40/00 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2201/23 ,  C03B2201/42 ,  C03C3/06 ,  C03C3/076 ,  C03C4/0071 ,  C03C4/0085 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2201/42 ,  C03C2203/44 ,  C03C2203/52 ,  C03C2203/54 ,  G03F1/24 ,  G03F7/70958 ,  Y02P40/57

Abstract: The present invention provides a TiO2—SiO2 glass in which when used as an optical member for an exposure tool for EUVL, a thermal expansion coefficient is substantially zero at the time of irradiation with high-EUV energy light, and physical properties of a multilayer can be kept over a long period of time by releasing hydrogen from the glass. The present invention relates to a TiO2-containing silica glass having a fictive temperature of 1,100° C. or lower, a hydrogen molecule concentration of 1×1016 molecules/cm3 or more, and a temperature, at which a linear thermal expansion coefficient is 0 ppb/° C., falling within the range of from 40 to 110° C.

Abstract translation: 本发明提供了一种TiO 2 -SiO 2玻璃，其中当用作用于EUVL的曝光工具的光学部件时，在高EUV能量光照射时热膨胀系数基本上为零，并且多层罐的物理性能 通过从玻璃中释放氢气，保持很长一段时间。 本发明涉及一种假想温度为1100℃或更低，氢分子浓度为1×1016分/厘米3或更高的含钛二氧化硅玻璃以及线性热膨胀系数为0的温度 ppb /℃，在40〜110℃的范围内。

公开(公告)号：US08073301B2

公开(公告)日：2011-12-06

申请号：US12381302

申请日：2009-03-10

Applicant: Lance Gibson ,  David Peckham ,  Robert Lingle, Jr.

Inventor： Lance Gibson ,  David Peckham ,  Robert Lingle, Jr.

IPC: G02B6/036

CPC classification number: G02B6/03683 ,  C03B37/01211 ,  C03B37/01228 ,  C03B37/014 ,  C03B37/018 ,  C03B2201/04 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/31 ,  C03B2203/22

Abstract: The specification describes an improved optical fiber produced by a hybrid VAD/MCVD process. The core of the fiber is produced using VAD and the inner cladding layer has a depressed index and is produced using MCVD. In preferred embodiments, the optical power envelope is essentially entirely contained in VAD produced core material and the MCVD produced depressed index cladding material. Optical loss is minimized by confining most of the optical power to the VAD core where OH presence is low, as well as by maximizing the optical power in the un-doped silica region. The MCVD substrate tube material is essentially devoid of optical power.

Abstract translation: 本说明书描述了通过混合VAD / MCVD工艺生产的改进的光纤。 使用VAD制造纤维的芯，并且内包层具有凹陷指数，并且使用MCVD制造。 在优选实施例中，光功率包层基本上完全包含在VAD生产的芯材料中，并且MCVD产生凹陷的折射率包层材料。 通过将大部分光功率限制在其中OH存在低的VAD核心以及通过使未掺杂二氧化硅区域中的光功率最大化来将光损耗最小化。 MCVD衬底管材料基本上没有光学功率。

公开(公告)号：US20110240663A1

公开(公告)日：2011-10-06

申请号：US13131987

申请日：2010-06-25

Applicant: Shigeru Yamagata ,  Tomomi Usui

Inventor： Shigeru Yamagata ,  Tomomi Usui

IPC: B65D6/00 ,  C03B19/09 ,  B32B1/02

CPC classification number: C03B19/095 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/32 ,  C30B15/10 ,  C30B29/06 ,  C30B35/002 ,  Y10T428/131 ,  Y10T428/1317 ,  Y10T428/2982

Abstract: A method for producing a silica container having a rotational symmetry is provided. The method includes, forming a preliminarily molded article by feeding a powdered substrate's raw material to an inner wall of an outer frame having aspiration holes with rotating the frame, and forming a silica substrate. The preliminarily molded article is aspirated from an outer peripheral side with controlling a humidity inside the outer frame by ventilating gases present in the outer frame with charging from inside the preliminarily molded article a gas mixture comprised of an O2 gas and an inert gas and made below a prescribed dew-point temperature by dehumidification, and at the same time heated from inside the preliminarily molded article by a discharge-heat melting method with carbon electrodes, thereby making an outer peripheral part of the preliminarily molded article to a sintered body while an inner peripheral part to a fused glass body.

Abstract translation: 提供了具有旋转对称性的二氧化硅容器的制造方法。 该方法包括：通过将粉末状基材的原料供给到具有旋转框架的抽吸孔的外框架的内壁，形成二氧化硅基板来形成预成型品。 从外周侧抽吸预成型品，通过从外部框架内部充填从O 2气体和惰性气体构成的气体混合物从外部框架内的气体通风来控制外框内的湿度， 通过除湿规定的露点温度，同时用碳电极通过放电加热熔融法从预成型体内部加热，由此使预成型品的外周部分成为烧结体，而内部 周边部分为熔融玻璃体。

公开(公告)号：US07994083B2

公开(公告)日：2011-08-09

申请号：US11521683

申请日：2006-09-15

Applicant: Brian Lee Harper ,  Kenneth Edward Hrdina ,  John Edward LaSala

Inventor： Brian Lee Harper ,  Kenneth Edward Hrdina ,  John Edward LaSala

IPC: C03C3/06 ,  C03B19/01 ,  C03B19/09 ,  C03B19/06 ,  C03B19/00

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B32/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2201/23 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/54 ,  G03F7/708 ,  Y10S501/905

Abstract: Disclosed are methods for hydrogen loading silica glass and silica glass comprising loaded H2. The methods can lead to H2 gradient in the glass material. Alternatively, the method may involve the use of varying H2 partial pressure of H2 in the atmosphere. Both can result in expedited hydrogen loading process.

Abstract translation: 公开了负载二氧化硅玻璃和含有负载H2的石英玻璃的氢的方法。 这些方法可能导致玻璃材料中的H2梯度。 或者，该方法可以涉及在大气中使用H 2的变化的H 2分压。 两者都可以产生加速氢气加载过程。

公开(公告)号：US20110162413A1

公开(公告)日：2011-07-07

申请号：US13042352

申请日：2011-03-07

Applicant: Tetsuya OTOSAKA

Inventor： Tetsuya OTOSAKA

IPC: C03B37/014

CPC classification number: C03B37/01446 ,  C03B37/01237 ,  C03B37/0124 ,  C03B37/01426 ,  C03B37/0146 ,  C03B37/01466 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/31 ,  C03B2203/23 ,  C03B2203/24 ,  C03B2203/26 ,  C03B2207/50

Abstract: Provided is a method of manufacturing an optical fiber base material having at least four layer including a core, a first cladding, a second cladding containing fluorine, and a third cladding. The manufacturing method comprises preparing a starting base material that includes the core and the first cladding; forming a porous intermediate glass base material by supplying glass raw material and oxygen to a high-frequency induction thermal plasma torch to synthesize glass fine particles that are then deposited on a surface of the starting base material; forming an intermediate glass base material that includes the core, the first cladding, and the second cladding containing fluorine, by heating and vitrifying the porous intermediate glass base material in an atmosphere containing fluorine; and providing the third cladding on the outer surface of the intermediate glass base material.

Abstract translation: 提供一种制造具有至少四层的光纤基材的方法，该层包括芯，第一包层，含氟的第二包层和第三包层。 制造方法包括制备包括芯和第一包层的起始基材; 通过向高频感应热等离子体焰炬提供玻璃原料和氧气来合成玻璃微粒，形成多孔中间玻璃基材，然后沉积在起始基材的表面上; 通过在含氟气氛中加热和玻璃化多孔中间玻璃基材，形成包含芯，第一包层和含氟的第二包层的中间玻璃基材; 以及在中间玻璃基材的外表面上设置第三包层。

公开(公告)号：US07964522B2

公开(公告)日：2011-06-21

申请号：US11891984

申请日：2007-08-14

Applicant: Lisa Anne Moore ,  Charlene Marie Smith

Inventor： Lisa Anne Moore ,  Charlene Marie Smith

IPC: C03C3/06 ,  C03C3/112 ,  C03B19/06 ,  C03B15/00 ,  C03B32/00 ,  C03B17/00

CPC classification number: C03B19/1461 ,  C03B19/12 ,  C03B19/14 ,  C03B19/1453 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2201/23 ,  C03C3/061 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/22 ,  C03C2201/40 ,  C03C2201/50 ,  Y02P40/57

Abstract: An F-doped silica glass, a process for making the glass, an optical member comprising the glass, and an optical system comprising such optical member. The glass material comprises 0.1-5000 ppm by weight of fluorine. The glass material according to certain embodiments of the present invention has low polarization-induced birefringence, low LIWFD and low induced absorption at 193 nm.

Abstract translation: F掺杂石英玻璃，制造玻璃的方法，包括玻璃的光学构件和包括这种光学构件的光学系统。 玻璃材料包含0.1-5000ppm重量的氟。 根据本发明的某些实施方案的玻璃材料在193nm处具有低偏振诱发双折射，低LIWFD和低诱导吸收。

公开(公告)号：US20100323872A1

公开(公告)日：2010-12-23

申请号：US12869035

申请日：2010-08-26

Applicant: Akio KOIKE ,  Yasutomi IWAHASHI ,  Shinya KIKUGAWA ,  Yuko TACHIBANA

Inventor： Akio KOIKE ,  Yasutomi IWAHASHI ,  Shinya KIKUGAWA ,  Yuko TACHIBANA

IPC: C03C3/04

CPC classification number: C03B19/1453 ,  B82Y10/00 ,  B82Y40/00 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2201/23 ,  C03B2201/42 ,  C03C3/06 ,  C03C3/076 ,  C03C4/0071 ,  C03C4/0085 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2201/42 ,  C03C2203/44 ,  C03C2203/52 ,  C03C2203/54 ,  G03F1/24 ,  G03F7/70958 ,  Y02P40/57

Abstract: The present invention provides a TiO2—SiO2 glass in which when used as an optical member for an exposure tool for EUVL, a thermal expansion coefficient is substantially zero at the time of irradiation with high-EUV energy light, and physical properties of a multilayer can be kept over a long period of time by releasing hydrogen from the glass. The present invention relates to a TiO2-containing silica glass having a fictive temperature of 1,100° C. or lower, a hydrogen molecule concentration of 1×1016 molecules/cm3 or more, and a temperature, at which a linear thermal expansion coefficient is 0 ppb/° C., falling within the range of from 40 to 110° C.

Abstract translation: 本发明提供了一种TiO 2 -SiO 2玻璃，其中当用作用于EUVL的曝光工具的光学部件时，在高EUV能量光照射时热膨胀系数基本上为零，并且多层罐的物理性能 通过从玻璃中释放氢气，保持很长一段时间。 本发明涉及一种假想温度为1100℃或更低，氢分子浓度为1×1016分/厘米3或更高的含钛二氧化硅玻璃以及线性热膨胀系数为0的温度 ppb /℃，在40〜110℃的范围内。