公开(公告)号：US20040057494A1

公开(公告)日：2004-03-25

申请号：US10251600

申请日：2002-09-19

Inventor： Simon Tsao ,  Nien-Yu Weng ,  Yung-Chang Chang ,  Chien-Chang Liao

IPC: G01J005/00

CPC classification number: G01J5/04 ,  G01J5/049 ,  G01J5/061 ,  G01J5/10 ,  G01J2005/0048 ,  G01J2005/068

Abstract: An ear thermometer is tested at the time of manufacturing calibration for determining a temperature coefficient to be stored in information storing means. Based on the temperature coefficient, signal processing means compensates an undesirable temperature deviation caused by a change of an ambient temperature upon temperature taking, thereby enhancing the accuracy of the ear thermometer. Also, a method is provided for calibrating the ear thermometer by determining the temperature coefficient without increasing additional cost and calibration procedures.

Abstract translation: 在制造校准时测试耳温度计，以确定要存储在信息存储装置中的温度系数。 基于温度系数，信号处理装置补偿由温度变化引起的不期望的温度偏差，从而提高耳温度计的精度。 而且，提供了一种用于通过确定温度系数来校准耳温度计而不增加附加成本和校准程序的方法。

公开(公告)号：US06647350B1

公开(公告)日：2003-11-11

申请号：US09872752

申请日：2001-06-01

Applicant: Ronald A. Palfenier ,  Patrick J. Nystrom

Inventor： Ronald A. Palfenier ,  Patrick J. Nystrom

IPC: G01K1130

CPC classification number: G01J5/0003 ,  A61B17/34 ,  A61B17/3423 ,  A61B34/72 ,  G01J1/4204 ,  G01J5/0007 ,  G01J5/02 ,  G01J5/026 ,  G01J5/0265 ,  G01J5/027 ,  G01J5/08 ,  G01J5/0806 ,  G01J5/0818 ,  G01J5/0821 ,  G01J5/0862 ,  G01J5/0893 ,  G01J5/522 ,  G01J2005/0048 ,  G01J2005/068 ,  G01K11/006

Abstract: A radiometric system (10) typically used in semiconductor wafer processing has reduced optical losses, improved wavelength selectivity, improved signal to noise, and improved signal processing to achieve wafer temperature measurements from about 10° C. to 4,000° C. A YAG rod collection optic (12) directly couples specimen radiation (14) to a filter (18) and photo detector (20). The filter determines which radiation wavelengths are measured, and optionally includes a hot/cold mirror surface (22) for reflecting undesired radiation wavelengths back to the specimen. The detector is formed from doped GaAlAs having a peaked response near 900 nm. A signal processor (28) converts the signal into a temperature reading.

Abstract translation: 通常在半导体晶片处理中使用的辐射系统（10）具有降低的光学损耗，改善的波长选择性，改善的信噪比，以及改进的信号处理，以实现约10℃至4,000℃的晶片温度测量.YAG棒收集 光学元件（12）将试样辐射（14）直接耦合到滤光器（18）和光电检测器（20）。 滤光器确定测量哪些辐射波长，并且可选地包括用于将不需要的辐射波长反射回样品的热/冷镜面（22）。 检测器由具有900nm附近的峰值响应的掺杂GaAlAs形成。 信号处理器（28）将该信号转换成温度读数。

公开(公告)号：US06584426B2

公开(公告)日：2003-06-24

申请号：US09426905

申请日：1999-10-26

Applicant: Hiroyuki Ota

Inventor： Hiroyuki Ota

IPC: G06F1500

CPC classification number: G01J5/04 ,  G01J5/02 ,  G01J5/021 ,  G01J5/027 ,  G01J5/049 ,  G01J5/16 ,  G01J2005/0048 ,  G01J2005/068

Abstract: An electronic thermometer including a probe to be inserted in to a portion of an outer ear to be measured by the thermometer, an infrared quantity detection means for detecting an infrared radiation quantity which is entered through the probe, a temperature computation means for applying the detected infrared radiation quantity in a predetermined computation expression to compute out a temperature such as body temperature, an infrared transmission data reading means for taking data corresponding to an infrared transmission quantity passing through the probe, and a control means for controlling the computation expression according to the taken data corresponding to the infrared transmission quantity.

Abstract translation: 一种电子温度计，包括插入到由所述温度计测量的外耳的一部分的探针，用于检测通过所述探针进入的红外线辐射量的红外线量检测装置，用于施加所检测到的红外线辐射量的温度计算装置 红外线传输数据读取装置，用于获取与通过探头的红外线传输量相对应的数据的红外线发射数据读取装置，以及控制装置， 拍摄对应于红外线传输量的数据。

公开(公告)号：US20020191670A1

公开(公告)日：2002-12-19

申请号：US09877354

申请日：2001-06-07

Inventor： Yu Chien Huang ,  Simon Taso ,  Vincent Weng ,  Charles Chang ,  Kevin Lin ,  Roger Chen ,  Jason Liao

IPC: G01J005/06 ,  A61B005/00 ,  G01J005/08

CPC classification number: G01J5/04 ,  G01J5/049 ,  G01J5/08 ,  G01J5/0818 ,  G01J5/10 ,  G01J2005/0048 ,  G01J2005/068

Abstract: An infrared radiation ear thermometer has an optical system, an infrared detector, an ambient temperature sensor, and display unit, a signal processing section. Wherein, the infrared detector further includes an infrared sensor and a temperature reference sensor; the infrared sensor is deposition on the substrate and the temperature reference sensor is mount near the substrate of the infrared detector to convert the infrared signal into an electrical signal and sense the reference temperature separately. The ambient temperature sensor is set in the space near the optical system to detect the fast change of the ambient temperature. The signal processing section receives the signals from these temperature sensors to produce an offset by a mathematical algorithm. The offset is used to correct the temperature reading and maintain a high precision even though the ear thermometer suffers from an extreme temperature change.

Abstract translation: 红外辐射耳温度计具有光学系统，红外检测器，环境温度传感器和显示单元，信号处理部分。 其中红外线检测器还包括红外传感器和温度参考传感器; 红外传感器沉积在基板上，温度参考传感器安装在红外检测器的基板附近，将红外信号转换成电信号并分别感测参考温度。 环境温度传感器设置在光学系统附近的空间中，以检测环境温度的快速变化。 信号处理部分接收来自这些温度传感器的信号，以通过数学算法产生偏移。 偏移量用于校正温度读数，并保持高精度，即使耳温度计遭受极端的温度变化。

公开(公告)号：US20020123690A1

公开(公告)日：2002-09-05

申请号：US10098069

申请日：2002-03-14

Applicant: Advanced Monitors Corp.

Inventor： Jacob Fraden

IPC: A61B006/00

CPC classification number: G01J5/04 ,  G01J5/046 ,  G01J5/049 ,  G01J5/10 ,  G01J5/16 ,  G01J5/24 ,  G01J5/522 ,  G01J2005/0048 ,  G01J2005/068

Abstract: An infrared (IR) thermometer for performing temperature measurement of an object without having contact with the object. The IR thermometer comprises at least one IR sensing element which, upon exposure to IR radiation, produces a response. The IR sensing element comprises a flat themistor flake supported by a substrate. The IR thermometer further comprises a processing circuit which analyzes the response to predict the steady-state response of the at least one IR sensing element and temperature of the object. In one embodiment, the processing circuit may obtain two or more responses separated by a predetermined period of time to predict temperature of the object. The processing circuit may also associate reference data in its prediction algorithm.

Abstract translation: 一种用于对物体进行温度测量而不与物体接触的红外（IR）温度计。 IR温度计包括至少一个IR感测元件，其在暴露于IR辐射时产生响应。 IR感测元件包括由基板支撑的扁平的电阻片。 IR温度计还包括处理电路，其分析响应以预测至少一个IR感测元件的稳态响应和对象的温度。 在一个实施例中，处理电路可以获得在预定时间段内分开的两个或更多个响应，以预测对象的温度。 处理电路还可以在其预测算法中关联参考数据。

公开(公告)号：US06375350B1

公开(公告)日：2002-04-23

申请号：US09634440

申请日：2000-08-08

Applicant: Alexander Stein

Inventor： Alexander Stein

IPC: G01J500

CPC classification number: G01J5/0003 ,  F24C7/083 ,  G01J5/026 ,  G01J5/041 ,  G01J5/08 ,  G01J5/0818 ,  G01J5/0846 ,  G01J5/0862 ,  G01J5/0875 ,  G01J5/10 ,  G01J5/524 ,  G01J2005/0051 ,  G01J2005/068

Abstract: Apparatus for measuring the temperature of an electrically heated pot which uses the Planck formula and employs an infrared reflective hemisphere; first and second infrared wave guides, and first and second infrared filters and infrared detectors as well as a calculating device.

Abstract translation: 用于测量电加热锅的温度的装置，其使用普朗克公式并使用红外反射半球; 第一和第二红外波导，以及第一和第二红外滤光器和红外检测器以及计算装置。

公开(公告)号：US06371925B1

公开(公告)日：2002-04-16

申请号：US09269530

申请日：1999-05-27

Applicant: Hirohisa Imai ,  Kazunari Nisii ,  Kiyoshi Kanazawa ,  Makoto Shibuya ,  Miki Moriguchi ,  Naohumi Nakatani ,  Hirohumi Inui ,  Kazuko Awaya ,  Kanzi Nisii ,  Kazumasa Takada ,  Motomiti Kato ,  Hirosi Kobayasi ,  Kozi Yosimoto ,  Masanori Nisikawa

Inventor： Hirohisa Imai ,  Kazunari Nisii ,  Kiyoshi Kanazawa ,  Makoto Shibuya ,  Miki Moriguchi ,  Naohumi Nakatani ,  Hirohumi Inui ,  Kazuko Awaya ,  Kanzi Nisii ,  Kazumasa Takada ,  Motomiti Kato ,  Hirosi Kobayasi ,  Kozi Yosimoto ,  Masanori Nisikawa

IPC: A61B500

CPC classification number: G01J5/02 ,  G01J5/025 ,  G01J5/026 ,  G01J5/027 ,  G01J5/04 ,  G01J5/046 ,  G01J5/049 ,  G01J5/06 ,  G01J5/08 ,  G01J5/0806 ,  G01J5/0815 ,  G01J5/0834 ,  G01J5/089 ,  G01J5/62 ,  G01J2005/0048 ,  G01J2005/068

Abstract: A radiation thermometer measures temperature of the eardrum. The thermometer comprises a signal processor for calculating a temperature from an output of a light receptor, which receives only the infrared rays radiated directly from the eardrum and/or vicinity of it, and a notification system for notifying the temperature resulted from the calculation. Since the structure does not receive an influence of any radiant heats from other than those of the eardrum and/or vicinity of it, temperature change of a probe does not become a factor of measuring errors, so as to offer an accurate measurement of temperatures. An infrared-receiving element is positioned within a triangle configured by an intersection between a light path and an optical axis, and two image points of hypothetical end points formed by an optical condenser, when viewed in a cross sectional plane including the optical axis of the optical condenser, where (a) the light path is a path that extends from the hypothetical end point to the image point of the hypothetical end point formed by the optical condenser by passing through a rim of the optical condenser on the same side as the hypothetical end point with respect to the optical axis, and (b) the hypothetical end point is a point at which a straight line drawn from the rim of the optical condenser toward the probe in a manner to be tangent to an inner surface of the probe on the same side as the rim of the optical condenser with respect to the optical axis crosses a plane at a tip of the probe.

Abstract translation: 辐射温度计测量耳膜的温度。 该温度计包括一个信号处理器，用于从光接收器的输出计算温度，该光接收器仅接收从鼓膜和/或其附近辐射的红外线;以及通知系统，用于通知由计算产生的温度。 由于该结构不会受到来自鼓膜和/或其附近的任何辐射热的影响，所以探针的温度变化不成为测量误差的因素，以提供精确的温度测量。 红外线接收元件位于由光路和光轴之间的交点构成的三角形内，并且在包括光轴的光轴的横截面中观察时，由光学聚光器形成的假想端点的两个图像点 光学冷凝器，其中（a）光路是从假想终点延伸到由光学冷凝器形成的假想终点的图像点的路径，其通过与所述光学冷凝器的边缘在同一侧上的假想终点 相对于光轴的终点，（b）假想终点是从光学冷凝器的边缘朝向探针以与探针的内表面相切的方式绘制的直线的点 与光学冷凝器相对于光轴的边缘相同的一侧与探针的尖端处的平面交叉。

公开(公告)号：US06283629B1

公开(公告)日：2001-09-04

申请号：US09542214

申请日：2000-04-04

Applicant: Bernhard Kraus ,  Frank Beerwerth ,  Klaus Heubach ,  Manfred Kaiser

Inventor： Bernhard Kraus ,  Frank Beerwerth ,  Klaus Heubach ,  Manfred Kaiser

IPC: G01K1500

CPC classification number: G01J5/522 ,  G01J2005/0048 ,  G01J2005/068

Abstract: A method of calibrating a radiation thermometer including a radiation sensor that is characterized by a sensitivity (S) and a temperature-responsive resistor that serves as an ambient temperature sensor, the temperature-responsive resistor having at a specified reference temperature a reference resistance (R0). The method includes the steps of using a first radiation standard having a known temperature TS(1); while the ambient temperature sensor is at a first ambient temperature TU(1), using the radiation thermometer to read the temperature of the first radiation standard; while using the radiation thermometer to read the temperature of the first radiation standard, measuring a first output signal U(1) of the radiation sensor; using a second radiation standard having a known temperature TS(2); while the ambient temperature sensor is at said first ambient temperature TU(1), using the radiation thermometer to read the temperature of the second radiation standard; while using the radiation thermometer to read the temperature of the second radiation standard, measuring a second output signal U(2) of the radiation sensor; and calibrating the radiation sensor and the ambient temperature sensor by using TS(1), TS(2) and the values obtained for U(1) and U(2) and without using any value for TU(1) that is derived from measuring an output of the ambient sensor, wherein the step of calibrating involves calculating at least one of the reference resistance (R0) of the ambient temperature sensor, the ambient temperature (Tu), and the sensitivity (S) of the radiation sensor.

Abstract translation: 一种校准包括辐射传感器的辐射温度计的方法，所述辐射传感器的特征在于灵敏度（S）和用作环境温度传感器的温度响应电阻器，所述温度响应电阻器在指定的参考温度下具有参考电阻（R0 ）。 该方法包括使用具有已知温度TS（1）的第一辐射标准的步骤; 而环境温度传感器处于第一环境温度TU（1）时，使用辐射温度计读取第一辐射标准的温度; 同时使用辐射温度计读取第一辐射标准的温度，测量辐射传感器的第一输出信号U（1）; 使用具有已知温度TS（2）的第二辐射标准; 当环境温度传感器处于所述第一环境温度TU（1）时，使用辐射温度计读取第二辐射标准的温度; 同时使用辐射温度计读取第二辐射标准的温度，测量辐射传感器的第二输出信号U（2）; 并且通过使用TS（1），TS（2）和为U（1）和U（2）获得的值来校准辐射传感器和环境温度传感器，并且不使用从测量导出的TU（1）的任何值 环境传感器的输出，其中校准步骤包括计算环境温度传感器的参考电阻（R0），环境温度（Tu）和辐射传感器的灵敏度（S）中的至少一个。

公开(公告)号：US20010010309A1

公开(公告)日：2001-08-02

申请号：US09739863

申请日：2000-12-18

Inventor： Frank B. M. Van Bilsen

IPC: H05B001/02

CPC classification number: H01L21/67248 ,  G01J5/00 ,  G01J5/0003 ,  G01J5/0007 ,  G01J2005/0048 ,  G01J2005/068 ,  H01L21/67115

Abstract: A CVD processing reactor employs a pyrometer to control temperature ramping. The pyrometer is calibrated between wafer processing by using a thermocouple that senses temperature during a steady state portion of a processing operation.

公开(公告)号：US06179466B2

公开(公告)日：2001-01-30

申请号：US09044217

申请日：1998-03-18

Applicant: Bruce W. Peuse ,  Gary E. Miner ,  Mark Yam ,  Aaron Hunter ,  Peter Knoot ,  Jason Mershon

Inventor： Bruce W. Peuse ,  Gary E. Miner ,  Mark Yam ,  Aaron Hunter ,  Peter Knoot ,  Jason Mershon

IPC: G01J500

CPC classification number: G01J5/08 ,  G01J5/0003 ,  G01J5/0007 ,  G01J5/0815 ,  G01J5/0818 ,  G01J5/0821 ,  G01J5/0846 ,  G01J5/0887 ,  G01J5/522 ,  G01J2005/0048 ,  G01J2005/068 ,  H01L22/10 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method of correcting a temperature probe reading in a thermal processing chamber for heating a substrate, including the steps of heating the substrate to a process temperature and using a first, a second and a third probe to measure the temperature of the substrate. The first probe has a first effective reflectivity and the second probe has a second effective reflectivity. The first probe produces a first temperature indication, the second probe produces a second temperature indication and the third probe produces a third temperature indication. The first and second effective reflectivities may be different. From the first and second temperature indications, a corrected temperature reading for the first probe may be derived, wherein the corrected temperature reading is a more accurate indicator of an actual temperature of the substrate than an uncorrected readings produced by both the first and second probes. A corrected temperature reading for the third probe may be derived by adjusting the temperature correction calculated for the first probe according to the measured emissivity sensitivity associated with the environment of the third probe to provide a corrected temperature reading that is a more accurate indicator of an actual temperature of the substrate in the environment of the third probe. An apparatus for carrying out the method is also disclosed.

Abstract translation: 一种校正用于加热衬底的热处理室中的温度探针读数的方法，包括以下步骤：将衬底加热到​​工艺温度，并使用第一，第二和第三探针测量衬底的温度。 第一探针具有第一有效反射率，第二探针具有第二有效反射率。 第一探针产生第一温度指示，第二探针产生第二温度指示，第三探头产生第三温度指示。 第一和第二有效的反射率可能不同。 从第一和第二温度指示可以导出用于第一探针的校正温度读数，其中校正温度读数是比由第一和第二探针产生的未校正读数更准确地指示衬底的实际温度。 可以通过根据与第三探针的环境相关联的测量的发射率灵敏度来调整针对第一探针计算的温度校正值来提供校正温度读数，校正温度读数是实际的更精确的指示符 在第三探针的环境中的衬底的温度。 还公开了一种用于执行该方法的装置。