MINIATURIZED FOURIER-TRANSFORM RAMAN SPECTROMETER SYSTEMS AND METHODS

    公开(公告)号:US20190049300A1

    公开(公告)日:2019-02-14

    申请号:US16058927

    申请日:2018-08-08

    Abstract: State-of-the-art portable Raman spectrometers use discrete free-space optical components that must be aligned well and that don't tolerate vibrations well. Conversely, the inventive spectrometers are made with monolithic photonic integration to fabricate some or all optical components on one or more planar substrates. Photonic integration enables dense integration of components, eliminates manual alignment and individual component assembly, and yields superior mechanical stability and resistance to shock or vibration. These features make inventive spectrometers especially suitable for use in high-performance portable or wearable sensors. They also yield significant performance advantages, including a large (e.g., 10,000-fold) increase in Raman scattering efficiency resulting from on-chip interaction of the tightly localized optical mode and the analyte and a large enhancement in spectral resolution and sensitivity resulting from the integration of an on-chip Fourier-transform spectrometer.

    SELF CALIBRATION FOR MIRROR POSITIONING IN OPTICAL MEMS INTERFEROMETERS
    130.
    发明申请
    SELF CALIBRATION FOR MIRROR POSITIONING IN OPTICAL MEMS INTERFEROMETERS 有权
    自动校准用于光学MEMS干涉仪中的镜像定位

    公开(公告)号:US20160231172A1

    公开(公告)日:2016-08-11

    申请号:US15130876

    申请日:2016-04-15

    Abstract: A Micro-Electro-Mechanical System (MEMS) apparatus provides for self-calibration of mirror positioning of a moveable mirror of an interferometer. At least one mirror in the MEMS apparatus includes a non-planar surface. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS apparatus includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at multiple reference positions of the moveable mirror corresponding to a center burst and one or more secondary bursts of an interferogram produced by the interferometer based on the non-planar surface. A calibration module uses the actuator capacitances at the reference positions to compensate for any drift in the capacitive sensing circuit.

    Abstract translation: 微机电系统(MEMS)装置提供干涉仪可移动反射镜的镜像定位的自校准。 MEMS装置中的至少一个反射镜包括非平面表面。 可移动镜连接到具有可变电容的MEMS致动器。 MEMS装置包括电容感测电路,用于确定MEMS致动器在可移动镜的对应于中心脉冲串的多个参考位置处的电容,以及由干涉仪基于非平面表面产生的干涉图的一个或多个二次脉冲串。 校准模块使用参考位置处的致动器电容来补偿电容感测电路中的任何漂移。

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