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    HIGH FREQUENCY LOCK-IN THERMOGRAPHY USING SINGLE PHOTON DETECTORS
    134.
    发明申请
    HIGH FREQUENCY LOCK-IN THERMOGRAPHY USING SINGLE PHOTON DETECTORS 审中-公开

    公开(公告)号：US20180180670A1

    公开(公告)日：2018-06-28

    申请号：US15390096

    申请日：2016-12-23

    Applicant: FEI Company

    Inventor： Euan Ramsay ,  Theodore R. Lundquist

    IPC: G01R31/308 ,  G01R1/07 ,  G01J5/00

    Abstract: Systems, methods, and computer readable media to improve the operation of thermographic imaging systems are described. Techniques are disclosed for generating thermograms using single low-noise photon detectors. More particularly, an array of single low-noise photon detectors operating in the Geiger mode may be used to accurately identify the time delay between the application of a periodic power stimulus to a device under test and the generation of photons resulting from that stimulus. In one embodiment an array of single photon detectors may be used to time-tag each detected photon. Thereafter, a high-speed counting circuit can correlate the detected photons to the applied stimulus. When operating at the frequencies possible in the Geiger mode, such measurements permit a higher degree of spatial resolution (e.g., in the x, y and z axes) of thermal hot-spots within the device under test than prior art approaches.

    System for orienting a sample using a diffraction pattern
    137.
    发明授权
    System for orienting a sample using a diffraction pattern 有权

    公开(公告)号：US09978557B2

    公开(公告)日：2018-05-22

    申请号：US15135205

    申请日：2016-04-21

    Applicant: FEI Company

    Inventor： John Francis Flanagan, IV

    IPC: H01J37/20 ,  H01J37/26

    CPC classification number: H01J37/20 ,  H01J37/261 ,  H01J37/265 ,  H01J2237/1501 ,  H01J2237/202 ,  H01J2237/2826

    Abstract: A method and apparatus are provided for aligning a sample in a charged particle beam system. The charged particle beam is directed toward the sample to obtain a sample diffraction pattern. The sample diffraction pattern is compared with reference diffraction patterns having known misalignments to determine which reference pattern most closely matches the sample pattern. The known alignment of the best-matching reference diffraction pattern is used to correct the tilt of the sample. The “patterns” compared can be lists of bright spots with corresponding intensities rather than images.

    Collision ionization ion source
    139.
    发明授权
    Collision ionization ion source 有权

    公开(公告)号：US09899181B1

    公开(公告)日：2018-02-20

    申请号：US15405139

    申请日：2017-01-12

    Applicant: FEI Company

    Inventor： Gregory A. Schwind ,  Aurelien Philippe Jean Maclou Botman ,  Sean Kellogg ,  Leon van Kouwen ,  Luigi Mele

    IPC: H01J27/20 ,  H01J37/26 ,  H01J37/08

    CPC classification number: H01J27/20 ,  H01J27/205 ,  H01J37/08 ,  H01J37/26 ,  H01J2237/006 ,  H01J2237/061 ,  H01J2237/082

    Abstract: A collision ionization ion source comprising: A pair of stacked plates, sandwiched about an intervening gap; An input zone (aperture), provided in a first of said plates, to admit an input beam of charged particles to said gap; An output zone (aperture), located opposite said input zone and provided in the second of said plates, to allow emission of a flux of ions from said gap; A gas space, between said input and output zones, in which gas can be ionized by said input beam so as to produce said ions; A supply duct in said gap, for supplying a flow of said gas to said gas space, and comprising: An emergence orifice, opening into said gas space; An entrance orifice, connectable to a gas supply, wherein said duct comprises at least one transition region between said entrance orifice and said emergence orifice in which an inner height of said duct, measured normal to the plates, decreases from a first height value to a second height value.

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