Specimen cryo holder and dewar
    144.
    发明授权
    Specimen cryo holder and dewar 有权
    标本低温保持架和杜瓦瓶

    公开(公告)号:US09543112B2

    公开(公告)日:2017-01-10

    申请号:US14410235

    申请日:2013-06-04

    Abstract: In an existing specimen cryo holder, a change in the orientation of a specimen would lead to tilting of a dewar together with the specimen and hence to bubbling of a cooling source contained in the dewar. In view of this, a specimen cryo holder, including a mechanism capable of cooling a specimen while keeping the posture of a dewar in a fixed direction even when the specimen is tilted into a direction suitable for processing or observation thereof, is provided. Also provided is a dewar in which a vacuum maintenance mechanism is mounted to an outer vessel so that an inner vessel holding a cooling source therein is vacuum-insulated from the outside air.

    Abstract translation: 在现有的样品冷冻保持器中,样品的取向的变化将导致杜瓦瓶与样品一起倾斜,并因此产生包含在杜瓦瓶中的冷却源的起泡。 鉴于此,提供了一种样本冷冻保持器,其包括即使当试样倾斜到适合于其加工或观察的方向时,也能够将保持在固定方向上的杜瓦的姿势的样品冷却的机构。 还提供了一种杜瓦瓶,其中真空维护机构安装到外部容器,使得其中容纳冷却源的内部容器与外部空气真空绝缘。

    Method and System for Imaging of a Photomask Through a Pellicle
    148.
    发明申请
    Method and System for Imaging of a Photomask Through a Pellicle 有权
    通过防护薄膜成像光掩模的方法和系统

    公开(公告)号:US20160225582A1

    公开(公告)日:2016-08-04

    申请号:US15012599

    申请日:2016-02-01

    Abstract: A system for imaging a sample through a protective pellicle is disclosed. The system includes an electron beam source configured to generate an electron beam and a sample stage configured to secure a sample and a pellicle, wherein the pellicle is disposed above the sample. The system also includes an electron-optical column including a set of electron-optical elements to direct at least a portion of the electron beam through the pellicle and onto a portion of the sample. In addition, the system includes a detector assembly positioned above the pellicle and configured to detect electrons emanating from the surface of the sample.

    Abstract translation: 公开了一种通过保护性薄膜成像样品的系统。 该系统包括被配置为产生电子束的电子束源和被配置为固定样品和防护薄膜组件的样品台,其中防护薄膜组件设置在样品上方。 该系统还包括电子 - 光学柱,其包括一组电子 - 光学元件,以将至少一部分电子束通过防护薄膜组件引导到样品的一部分上。 此外,该系统包括位于防护薄膜组件上方并被配置成检测从样品表面发出的电子的检测器组件。

    Electron microscope and electron microscope sample retaining device
    149.
    发明授权
    Electron microscope and electron microscope sample retaining device 有权
    电子显微镜和电子显微镜样品保持装置

    公开(公告)号:US09378922B2

    公开(公告)日:2016-06-28

    申请号:US14417345

    申请日:2013-06-19

    Abstract: An object of the invention is to provide an electron microscope which can easily and safely prepare a gas or liquid environment in the electron microscope and can observe a specimen in the environment and a reaction of the specimen at a high resolution and to provide a specimen holder for the electron microscope. In the electron microscope including specimen holding means (6) for holding a specimen (23), the specimen (23) is placed in a capillary (17) through which electron beams are transmittable, the electron microscope includes a supply device for supplying gas or liquid into the capillary (17) and a collection device for collecting the gas or the liquid, and the electron microscope obtains a specimen image of the specimen while flowing the gas or the liquid.

    Abstract translation: 本发明的目的是提供一种电子显微镜,其可以容易且安全地在电子显微镜中制备气体或液体环境,并且可以观察环境中的样品和高分辨率的样品的反应并提供样品架 用于电子显微镜。 在包括用于保持试样(23)的检体保持机构(6)的电子显微镜中,试样(23)被放置在可透射电子束的毛细管(17)中,电子显微镜包括用于供给气体的供给装置 液体进入毛细管(17)和用于收集气体或液体的收集装置,并且电子显微镜在流动气体或液体的同时获得样品的样本图像。

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