公开(公告)号：US20170168231A1

公开(公告)日：2017-06-15

申请号：US15444687

申请日：2017-02-28

Applicant: Corning Incorporated

Inventor： George Edward Berkey ,  Dana Craig Bookbinder ,  Ming-Jun Li ,  Pushkar Tandon

IPC: G02B6/02 ,  C03C13/04 ,  C03B37/014 ,  G02B6/036 ,  C03B37/018

CPC classification number: G02B6/02014 ,  C03B37/01205 ,  C03B37/01211 ,  C03B37/01262 ,  C03B37/01282 ,  C03B37/01413 ,  C03B37/01433 ,  C03B37/01446 ,  C03B37/01453 ,  C03B37/018 ,  C03B37/01815 ,  C03B37/0183 ,  C03B37/01838 ,  C03B37/01853 ,  C03B37/01869 ,  C03B2201/08 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/24 ,  C03B2203/22 ,  C03B2203/23 ,  C03B2203/24 ,  C03B2205/42 ,  C03B2207/30 ,  C03C13/045 ,  C03C13/046 ,  C03C25/1061 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2203/54 ,  C03C2213/00 ,  G02B6/02019 ,  G02B6/03627

Abstract: An optical fiber having a core comprising silica and greater than 1.5 wt % chlorine and less than 0.5 wt % F, said core having a refractive index Δ1MAX, and a inner cladding region having refractive index Δ2MIN surrounding the core, where Δ1MAX>Δ2MIN.

公开(公告)号：US09611169B2

公开(公告)日：2017-04-04

申请号：US14958024

申请日：2015-12-03

Applicant: Corning Incorporated

Inventor： Sezhian Annamalai ,  Carlos Alberto Duran ,  Kenneth Edward Hrdina

IPC: C03C3/06 ,  C03B19/14 ,  C03B25/02 ,  C03C3/112 ,  C03C4/00

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B19/1461 ,  C03B25/02 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/14 ,  C03B2201/23 ,  C03B2201/32 ,  C03B2201/40 ,  C03B2201/42 ,  C03B2201/50 ,  C03B2201/54 ,  C03C3/112 ,  C03C4/00 ,  C03C2201/12 ,  C03C2201/14 ,  C03C2201/32 ,  C03C2201/40 ,  C03C2201/42 ,  C03C2201/50 ,  C03C2201/54 ,  C03C2203/52

Abstract: A doped silica-titania glass article is provided that includes a glass article having a glass composition comprising (i) a silica-titania base glass, (ii) a fluorine dopant, and (iii) a second dopant. The fluorine dopant has a concentration of fluorine of up to 5 wt. % and the second dopant comprises one or more oxides selected from the group consisting of Al, Nb, Ta, B, Na, K, Mg, Ca and Li oxides at a total oxide concentration from 50 ppm to 6 wt. %. Further, the glass article has an expansivity slope of less than 0.5 ppb/K2 at 20° C. The second dopant can be optional. The composition of the glass article may also contain an OH concentration of less than 100 ppm.

公开(公告)号：US09599769B2

公开(公告)日：2017-03-21

申请号：US14932521

申请日：2015-11-04

Applicant: Verrillon, Inc.

Inventor： William Jacobsen ,  Abdelouahed Soufiane

IPC: G02B6/02 ,  G02B6/028 ,  G02B6/036 ,  C03C3/06 ,  C03C13/04 ,  C03C25/10 ,  C03B37/018

CPC classification number: G02B6/0281 ,  C03B37/018 ,  C03B2201/12 ,  C03B2201/31 ,  C03B2201/42 ,  C03B2201/70 ,  C03B2203/23 ,  C03B2203/26 ,  C03C3/06 ,  C03C13/045 ,  C03C25/104 ,  C03C2201/02 ,  C03C2201/12 ,  C03C2201/31 ,  C03C2217/91 ,  G02B6/02 ,  G02B6/0283 ,  G02B6/03627 ,  Y02P40/57

Abstract: Embodiments of the invention relate to a hydrogen-resistant optical fiber with a core having a central axis. The core may include only silica, or only silica and fluorine, while a cladding region surrounding the core may be made of silica and fluorine, along with at least one of germanium, phosphorus, and titanium.

公开(公告)号：US09568818B2

公开(公告)日：2017-02-14

申请号：US14862707

申请日：2015-09-23

Applicant: Heraeus Quarzglas GmbH & Co. KG

Inventor： Stefan Ochs ,  Klaus Becker

IPC: C03C3/06 ,  G03F1/22 ,  C03B19/06 ,  C03C3/04 ,  C03B19/14 ,  C03C23/00 ,  C03B32/00 ,  G03F7/00

CPC classification number: G03F1/22 ,  C03B19/06 ,  C03B19/14 ,  C03B19/1453 ,  C03B19/1461 ,  C03B32/00 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/23 ,  C03B2201/42 ,  C03C3/04 ,  C03C3/06 ,  C03C21/007 ,  C03C23/00 ,  C03C23/007 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/42 ,  C03C2203/40 ,  C03C2203/54 ,  G03F1/24 ,  G03F1/60 ,  G03F7/00

Abstract: A method for producing a silica glass blank co-doped with titanium and fluorine for use in EUV lithography includes (a) producing a TiO2—SiO2 soot body by flame hydrolysis of silicon- and titanium-containing precursor substances, (b) fluorinating the TiO2—SiO2 soot body to form a fluorine-doped TiO2—SiO2 soot body, (c) treating the fluorine-doped TiO2—SiO2 soot body in a water vapor-containing atmosphere to form a conditioned soot body, and (d) vitrifying the conditioned soot body to form the blank. The blank has an internal transmission of at least 60% in the wavelength range of 400 to 700 nm at a sample thickness of 10 mm, a mean OH content in the range of 10 to 100 wt. ppm and a mean fluorine content in the range of 2,500 to 10,000 wt. ppm. Titanium is present in the blank in the oxidation forms Ti3+ and Ti4+.

Abstract translation: 用于EUV光刻的共同掺杂钛和氟的二氧化硅玻璃毛坯的制造方法包括（a）通过含硅和钛的前体物质的火焰水解制备TiO 2 -SiO 2烟炱体，（b）氟化TiO 2 -SiO2烟灰体，形成氟掺杂的TiO 2 -SiO 2烟炱体，（c）在含水蒸气的气氛中处理氟掺杂的TiO 2 -SiO 2烟炱体以形成调节的烟灰体，（d） 烟灰体形成空白。 空白样品厚度为10mm时，在400〜700nm的波长范围内具有至少60％的内透射率，10〜100wt。范围内的平均OH含量。 ppm，平均氟含量在2500至10,000重量％的范围内。 ppm。 钛在氧化形式Ti3 +和Ti4 +中存在于坯料中。

公开(公告)号：US20170022094A1

公开(公告)日：2017-01-26

申请号：US15086169

申请日：2016-03-31

Applicant: OFS Fitel, LLC

Inventor： Man F. Yan ,  Peter I. Borel ,  Tommy Geisler ,  Rasmus V. Jensen ,  Ole A. Levring ,  Jorgen Ostgaard Olsen ,  David W. Peckham ,  Dennis J. Trevor ,  Patrick W. Wisk ,  Benyuan Zhu

IPC: C03C13/04 ,  C03B37/027 ,  G02B6/036

CPC classification number: C03C13/046 ,  C03B37/01208 ,  C03B37/01853 ,  C03B37/027 ,  C03B2201/07 ,  C03B2201/08 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/28 ,  C03B2201/50 ,  C03B2203/223 ,  C03B2203/23 ,  C03C3/06 ,  C03C4/10 ,  C03C13/045 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/28 ,  C03C2201/50 ,  G02B6/03627 ,  G02B6/0365

Abstract: An optical fiber has a core region that is doped with one or more viscosity-reducing dopants in respective amounts that are configured, such that, in a Raman spectrum with a frequency shift of approximately 600 cm−, the fiber has a nanoscale structure having an integrated D2 line defect intensity of less than 0.025. Alternatively, the core region is doped with one or more viscosity-reducing dopants in respective amounts that are configured such that the fiber has a residual axial compressive stress with a stress magnitude of more than 20 MPa and a stress radial extent between 2 and 7 times the core radius.According to another aspect of the invention a majority of the optical propagation through the fiber is supported by an identified group of fiber regions comprising the core region and one or more adjacent cladding regions. The fiber regions are doped with one or more viscosity-reducing dopants in respective amounts and radial positions that are configured to achieve viscosity matching among the fiber regions in the identified group.

Abstract translation: 根据本发明的另一方面，通过光纤的大部分光学传播由包括芯区域和一个或多个相邻包层区域的所识别的纤维区域组支撑。 纤维区域掺杂有相应量和径向位置中的一种或多种降低粘度的掺杂剂，其被配置为实现所识别的组中的纤维区域之间的粘度匹配。

公开(公告)号：US20160318793A1

公开(公告)日：2016-11-03

申请号：US15137255

申请日：2016-04-25

Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.

Inventor： Yoshiaki TAMURA ,  Tetsuya HARUNA ,  Yuki KAWAGUCHI

IPC: C03C13/04 ,  C03B37/014

CPC classification number: C03C13/046 ,  C03B37/01211 ,  C03B37/01237 ,  C03B37/0124 ,  C03B37/014 ,  C03B37/01807 ,  C03B37/01861 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/50 ,  C03B2201/54 ,  C03B2203/22 ,  C03B2203/222 ,  C03C2201/12 ,  C03C2201/50 ,  C03C2201/54

Abstract: An optical fiber preform of the present embodiment comprises a core portion and a cladding each comprised of silica glass. The core portion has a first dopant region including a central axis of the core portion and a second dopant region away from the central axis. The first dopant region contains a first dopant selected from among Na, K, and their compounds, and a concentration of the first dopant is 10 atomic ppm or more but 2,000 atomic ppm or less. The second dopant region contains a second dopant reducing viscosity of the silica glass. The second dopant has, as a characteristic at a temperature of 2,000° C. to 2,300° C., a diffusion coefficient of 1×10−12 cm2/s or higher but lower than that of the first dopant, and a concentration of the second dopant region is 10 atomic ppm or more.

Abstract translation: 本实施方式的光纤预制件包括由石英玻璃构成的芯部和包层。 芯部分具有包括芯部分的中心轴线和远离中心轴线的第二掺杂剂区域的第一掺杂区域。 第一掺杂剂区域含有选自Na，K及其化合物的第一掺杂剂，第一掺杂剂的浓度为10原子ppm以上且2000原子ppm以下。 第二掺杂剂区域包含第二掺杂剂，降低石英玻璃的粘度。 作为在2000℃〜2300℃的温度下的特性，第二掺杂剂的扩散系数为1×10-12 cm 2 / s以上但比第一掺杂剂低的扩散系数， 第二掺杂剂区域为10原子ppm以上。

公开(公告)号：US20160236965A1

公开(公告)日：2016-08-18

申请号：US15003115

申请日：2016-01-21

Applicant: Corning Incorporated

Inventor： Sezhian Annamalai ,  Carlos Alberto Duran ,  Kenneth Edward Hrdina ,  William Rogers Rosch

IPC: C03C3/076 ,  C03B25/00 ,  C03C3/089 ,  C03C3/06 ,  C03C3/112

CPC classification number: C03C3/076 ,  C03B19/12 ,  C03B19/1453 ,  C03B25/00 ,  C03B25/02 ,  C03B2201/10 ,  C03B2201/12 ,  C03B2201/42 ,  C03C3/06 ,  C03C3/089 ,  C03C3/112 ,  C03C23/007 ,  C03C2201/10 ,  C03C2201/12 ,  C03C2201/14 ,  C03C2203/52

Abstract: Annealing treatments for modified titania-silica glasses and the glasses produced by the annealing treatments. The annealing treatments include an isothermal hold that facilitates equalization of non-uniformities in fictive temperature caused by non-uniformities in modifier concentration in the glasses. The annealing treatments may also include heating the glass to a higher temperature following the isothermal hold and holding the glass at that temperature for several hours. Glasses produced by the annealing treatments exhibit high spatial uniformity of CTE, CTE slope, and fictive temperature, including in the presence of a spatially non-uniform concentration of modifier.

Abstract translation: 改性二氧化钛 - 二氧化硅玻璃和通过退火处理制备的玻璃的退火处理。 退火处理包括促进由玻璃中改性剂浓度不均匀引起的虚构温度不均匀性均衡的等温保持。 退火处理还可以包括在等温保持之后将玻璃加热到更高的温度，并将玻璃保持在该温度下几个小时。 通过退火处理产生的玻璃表现出CTE，CTE斜率和假想温度的高空间均匀性，包括在存在空间不均匀的改性剂浓度的情况下。

公开(公告)号：US20150259238A1

公开(公告)日：2015-09-17

申请号：US14431525

申请日：2013-09-06

Applicant: Heraeus Quarzglas GmbH & Co. KG

Inventor： Martin Trommer ,  Malte Schwerin ,  Stephan Grimm ,  Frank Froehlich ,  Johannes Kirchhof

IPC: C03B37/018 ,  C03C3/04 ,  C03B37/027

CPC classification number: C03B37/018 ,  C03B19/1461 ,  C03B23/047 ,  C03B37/01446 ,  C03B37/027 ,  C03B2201/12 ,  C03C3/04 ,  C03C3/06 ,  C03C2201/12 ,  C03C2203/46 ,  C03C2203/54

Abstract: The invention relates to a method for fluorinating a soot body. The method involves: a) providing a soot body, and b) treating the soot body with a gas mixture containing hydrogen and CnF2n+2 (n=1 or 2) at a temperature in the range of (1,280-n*250)° C. to (1,220-n* 100)° C.

Abstract translation: 本发明涉及一种氟化烟灰体的方法。 该方法包括：a）提供烟灰体，和b）在（1,280-n * 250）°范围内的温度下用含有氢和C n F 2n + 2（n = 1或2）的气体混合物处理烟灰体 到（1,220-n * 100）℃

公开(公告)号：US09085481B2

公开(公告)日：2015-07-21

申请号：US13583605

申请日：2011-03-10

Applicant: Ralph Sattmann ,  Jan Vydra ,  Michael Huenermann

Inventor： Ralph Sattmann ,  Jan Vydra ,  Michael Huenermann

IPC: C03B23/047 ,  C03B37/012 ,  C03B37/027 ,  C03C13/04 ,  G02B6/036

CPC classification number: C03B37/02754 ,  C03B37/01211 ,  C03B37/01228 ,  C03B37/01242 ,  C03B37/018 ,  C03B37/027 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/30 ,  C03B2201/31 ,  C03B2203/22 ,  C03B2203/23 ,  C03B2205/30 ,  C03C13/045 ,  C03C2201/12 ,  G02B6/03633 ,  G02B6/0365 ,  Y10T428/2935

Abstract: Methods for producing an optical fiber by elongating a silica glass blank or a coaxial group of silica glass components, on the basis of which a fiber is obtained that comprises a core zone, an inner jacket zone enclosing the core zone and a ring zone surrounding the inner jacket zone, are known. In order to provide, proceeding from this, a method, a tubular semi-finished product and a group of coaxial components for the cost-effective production of an optical fiber, which is characterized by a high quality of the boundary between the core and jacket and by low bending sensitivity, according to the invention, the silica glass of the ring zone is provided in the form of a ring zone tube made of silica glass having a mean fluorine content of at least 6000 weight ppm and the tube has an inner tube surface and an outer tube surface, wherein via the wall of the ring zone tube, a radial fluorine concentration profile is adjusted which has an inner fluorine depletion layer with a layer thickness of at least 1 μm and no more than 10 μm, in which the fluorine content decreases toward the inner tube surface and is no more than 3000 weight ppm in a region close to the surface which has a thickness of 1 μm.

Abstract translation: 通过使二氧化硅玻璃坯料或同轴的二氧化硅玻璃成分体组织进行拉伸来制造光纤的方法，基于该光纤获得包含芯部区域的纤维，包围芯部区域的内部护套区域和围绕该区域的环形区域 内护套区域，已知。 为了提供一种用于成本有效地生产光纤的方法，管状半成品和一组同轴部件，其特征在于芯和夹套之间的边界质量高 并且通过低弯曲灵敏度，根据本发明，环区的石英玻璃以平均氟含量为至少6000重量ppm的石英玻璃制成的环形管的形式提供，并且管具有内管 表面和外管表面，其中通过环带管的壁，调节径向氟浓度分布，其具有层厚度为至少1μm且不大于10μm的内氟耗尽层，其中 氟含量向内管表面减少，并且在接近表面厚度为1μm的区域中不超过3000重量ppm。

公开(公告)号：US20150114040A1

公开(公告)日：2015-04-30

申请号：US14582237

申请日：2014-12-24

Applicant: NIKON CORPORATION

Inventor： Toshio YOSHINARI ,  Tadahiko Saito

IPC: C03B19/14 ,  C03B11/00 ,  C03C3/04

CPC classification number: C03B19/1415 ,  C03B11/00 ,  C03B19/1453 ,  C03B19/1469 ,  C03B19/1476 ,  C03B19/1492 ,  C03B23/0013 ,  C03B23/0496 ,  C03B32/005 ,  C03B2201/12 ,  C03B2201/42 ,  C03C3/04 ,  C03C3/06 ,  C03C2201/12 ,  C03C2201/42 ,  C03C2203/44 ,  C03C2203/52

Abstract: A method for manufacturing an SiO2—TiO2 based glass upon a target by a direct method, includes a first process of preheating the target and a second process of growing an SiO2—TiO2 based glass ingot to a predetermined length upon the target which has been preheated, wherein the target is heated in the first process such that, in the second process, the temperature of growing surface of the glass ingot is maintained at or above a predetermined lower limit temperature.

Abstract translation: 通过直接法制备靶材上的SiO 2 -TiO 2基玻璃的方法包括预热靶材的第一种方法和在预热的靶材上生长SiO 2 -TiO 2基玻璃锭至预定长度的第二种方法 其中，所述靶在所述第一工序中被加热，使得在所述第二工序中，所述玻璃锭的生长面的温度保持在规定的下限温度以上。