公开(公告)号：US09852875B2

公开(公告)日：2017-12-26

申请号：US15657153

申请日：2017-07-23

Applicant: Bruker JV Israel Ltd.

Inventor： John Leonard Wall

IPC: H01J35/10 ,  H01J35/18 ,  H01J35/08

CPC classification number: H01J35/106 ,  H01J35/08 ,  H01J35/14 ,  H01J35/18 ,  H01J2235/086 ,  H01J2235/088 ,  H01J2235/1204 ,  H01J2235/1262 ,  H01J2235/186

Abstract: An X-ray tube includes a cathode, which is configured to generate an electron beam, and a round anode, which is configured to rotate such that the electron beam impinges on a rotating surface of the anode so as to emit at least one X-ray beam. An array of gas pipes is configured to direct gas onto the surface so as to cool the anode.

公开(公告)号：US09831058B2

公开(公告)日：2017-11-28

申请号：US14601427

申请日：2015-01-21

Applicant: VAREX IMAGING CORPORATION

Inventor： David Craig Smith ,  Christopher Price ,  Derek Bullock ,  James E. Burke

IPC: H01J5/22 ,  H01J35/18 ,  H01J9/385 ,  H01J9/40 ,  H01J35/08 ,  H01J35/16 ,  H01J7/18 ,  H01J35/20

CPC classification number: H01J5/22 ,  H01J7/18 ,  H01J9/385 ,  H01J9/40 ,  H01J35/08 ,  H01J35/16 ,  H01J35/18 ,  H01J35/20 ,  H01J2209/26

Abstract: The disclosed subject matter includes devices and methods relating to vacuums and vacuum assemblies. In some aspects, methods and devices relate to a vacuum assembly including a body defining an evacuated vacuum chamber, a conduit in the body extending between the vacuum chamber and an exterior of the body, a plug at least partially occluding the conduit, and a seal between the plug and the body that seals the vacuum chamber from the exterior of the body.

公开(公告)号：US09823203B2

公开(公告)日：2017-11-21

申请号：US15060477

申请日：2016-03-03

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Sylvia Jia Yun Lewis ,  Janos Kirz

IPC: G01N23/205 ,  H01J35/08 ,  G21K1/06

CPC classification number: G01N23/205 ,  G21K1/062 ,  H01J35/08 ,  H01J2235/086

Abstract: Systems for x-ray diffraction/scattering measurements having greater x-ray flux and x-ray flux density are disclosed. These are useful for applications such as material structural analysis and crystallography. The higher flux is achieved by using designs for x-ray targets comprising a number of microstructures of one or more selected x-ray generating materials fabricated in close thermal contact with a substrate having high thermal conductivity. This allows for bombardment of the targets with higher electron density or higher energy electrons, which leads to greater x-ray flux. The high brightness/high flux source may then be coupled to an x-ray reflecting optical system, which can focus the high flux x-rays to a spots that can be as small as one micron, leading to high flux density, and used to illuminate materials for the analysis based on their scattering/diffractive effects.

公开(公告)号：US09818571B2

公开(公告)日：2017-11-14

申请号：US14950570

申请日：2015-11-24

Applicant: CANON KABUSHIKI KAISHA

Inventor： Takashi Shiozawa ,  Kazuya Tsujino ,  Koichi Tsunoda ,  Nobuhiro Ito ,  Kazuhiro Sando ,  Yoichi Ikarashi

IPC: H01J35/08 ,  H01J35/16 ,  H01J35/06 ,  H01J35/14 ,  H05G1/10

CPC classification number: H01J35/08 ,  H01J35/06 ,  H01J35/14 ,  H01J35/16 ,  H01J2235/087 ,  H01J2235/088 ,  H01J2235/168 ,  H05G1/10

Abstract: An X-ray generation tube includes: an anode including a target configured to generate X-rays under irradiation of electrons, and an anode member electrically connected to the target; a cathode including an electron emitting source configured to emit an electron beam in a direction towards the target, and a cathode member electrically connected to the electron emitting source; and an insulating tube extending between the anode member and the cathode member. The anode further includes an inner circumferential anode layer electrically connected to the anode member, the inner circumferential anode layer extending along an inner circumferential face of the insulating tube, and is remote from the cathode member.

公开(公告)号：US20170287668A1

公开(公告)日：2017-10-05

申请号：US15432272

申请日：2017-02-14

Applicant: CANON KABUSHIKI KAISHA

Inventor： Yoshihiro Yanagisawa

IPC: H01J35/04 ,  H01J35/06 ,  H05G1/30 ,  H01J35/08

CPC classification number: H01J35/045 ,  H01J35/06 ,  H01J35/08 ,  H01J35/116 ,  H01J2235/1258 ,  H05G1/30

Abstract: Provided is an X-ray generating tube including an electron gun, which includes a grid electrode secured to a support member. In the X-ray generating tube, thermal stress generated at a joining portion between the support member and the grid electrode is reduced, to thereby maintain a position of an electron beam on a target irradiated with the electron beam accurately for a long time. A grid electrode and a support member are secured to each other via a buffer member, which has an elastic coefficient that is lower than elastic coefficients of the grid electrode and the support member, and which is joined to the grid electrode and the support member through a first joining portion on the grid electrode side and a second joining portion on the support member side, respectively.

公开(公告)号：US20170278588A1

公开(公告)日：2017-09-28

申请号：US15618458

申请日：2017-06-09

Applicant: Moxtek, Inc.

Inventor： Eric Miller ,  Bill Hansen

IPC: G21K5/08 ,  H01J35/18 ,  H05F3/04 ,  G21K5/10 ,  H01J35/08 ,  H01J35/06

CPC classification number: G21K5/08 ,  G21K5/10 ,  H01J35/06 ,  H01J35/08 ,  H01J35/18 ,  H01J2235/086 ,  H01J2235/087 ,  H05F3/04

Abstract: In one embodiment, the invention includes an x-ray source having a cathode with an elongated blade oriented substantially transverse with respect to a longitudinal axis of the cathode. The blade can be pointed towards an anode. In another embodiment, the invention includes an x-ray source having a window with an annular-shape, forming a hollow-ring. A convex portion of a half-ball-shape of an anode can extend into a hollow of the annular-shape of the window. In another embodiment, the invention includes an x-ray source having an anode with a dome shape having a concave side facing the electron emitter.

公开(公告)号：US20170251545A1

公开(公告)日：2017-08-31

申请号：US15441849

申请日：2017-02-24

Applicant: Newton Scientific, Inc.

Inventor： Robert E. Klinkowstein ,  Ruth E. Shefer

IPC: H05G1/10 ,  H01J35/16 ,  H05G1/06 ,  H01J35/08 ,  H01J35/06

CPC classification number: H05G1/10 ,  H01J35/06 ,  H01J35/08 ,  H01J35/116 ,  H01J35/16 ,  H05G1/06

Abstract: The present application provides a bipolar x-ray tube module. The bipolar x-ray tube module may include a bipolar x-ray tube and at least two voltage multipliers. The voltage multipliers may be positioned such that the voltage gradient of the first voltage multiplier is substantially parallel to the second voltage multiplier in order to provide a compact configuration.

公开(公告)号：US09734980B2

公开(公告)日：2017-08-15

申请号：US14785348

申请日：2014-02-13

Applicant: CHONGQING QIYUEYONGYANG MICROELECTRONIC SCIENCE&TECHNOLOGY DEVELOPMENT CO., LTD

Inventor： Kui-Yang Li

IPC: H01J35/06 ,  H01J35/08

CPC classification number: H01J35/065 ,  H01J35/06 ,  H01J35/08

Abstract: Graphene serving as the cathode of an X-ray tube, and a high-efficiency graphene cathode field emission X-ray tube. The graphene cathode field emission X-ray tube is high in conversion efficiency and less in stray radiation, reduces radiation dosage acting upon human body when used in the fields of medical treatment, security inspection and the like; the graphene cathode field emission X-ray tube is easy to realize a micro-focus X-ray tube, strong in emissive power and high in voltage resistance, and can be applied to the fields of semiconductor detection, industrial flaw detection and the like; in addition, the graphene cathode field emission X-ray tube is good in controllability, free from cathode heating. The graphene cathode field emission X-ray tube also has the characteristics of good stability and long service life.

公开(公告)号：US09693439B1

公开(公告)日：2017-06-27

申请号：US14304329

申请日：2014-06-13

Applicant: KLA-Tencor Corporation

Inventor： Guorong V. Zhuang ,  Michael S. Bakeman ,  Andrei V. Shchegrov ,  Jonathan M. Madsen

IPC: H05G2/00 ,  G01N23/201

CPC classification number: H05G2/005 ,  G01N23/201 ,  G21K1/06 ,  H01J35/08 ,  H01J35/14 ,  H01J2235/082 ,  H05G2/008

Abstract: Methods and systems for realizing a high brightness liquid metal droplet based x-ray source suitable for high throughput x-ray metrology are presented herein. A high power laser bombards a solid target material to generate liquid metal droplets. The laser generated liquid metal droplets are excited with a focused, high power excitation beam such as an electron or laser beam. The excitation beam is synchronized with the stream of liquid metal droplets stimulated by the high power laser to achieve a stable x-ray emission generated by the excited liquid metal droplets. In some embodiments, x-ray optics are designed to efficiently collect and focus radiation within a desired emission band onto a measurement target. Reliability is improved by shielding the excitation source and the x-ray optics from the region of interaction between the excitation beam and the liquid metal droplet anode by a localized curtain of shielding gas.

公开(公告)号：US09653249B2

公开(公告)日：2017-05-16

申请号：US14440856

申请日：2013-10-24

Applicant: CANON KABUSHIKI KAISHA

Inventor： Takeo Tsukamoto ,  Takao Ogura ,  Shuji Yamada ,  Yoichi Ikarashi ,  Nobuhiro Ito

IPC: H01J35/02 ,  H01J35/32 ,  H01J35/08 ,  C23C16/06 ,  G01N23/04

CPC classification number: H01J35/08 ,  C23C16/06 ,  G01N23/04 ,  H01J35/32 ,  H01J2235/081 ,  H01J2235/087

Abstract: The present invention relates to a transmission type target having a diamond base material as the transmissive base material. The transmission type target includes a target layer containing a metal carbide constituted of at least one metal selected from the group consisting of molybdenum, tantalum, and tungsten and carbon; and a diamond base material supporting the target layer. The transmission type target inhibits the composition of the target layer from varying with the drive history of the transmission type target and inhibits the output of radiation from varying over a long time.