INTEGRATED FOURIER TRANSFORM OPTICAL SPECTROMETER

    公开(公告)号:US20180128592A1

    公开(公告)日:2018-05-10

    申请号:US15343827

    申请日:2016-11-04

    Abstract: A spectrometer and method for determining an emitted light spectrum. An input light signal is received and directed to an array of interferometers using waveguides. A plurality of self-interfering signals are detected from a first plurality of interferometers in the array of interferometers. The first plurality of interferometers has fewer interferometers than required to satisfy the Nyquist criterion for reconstructing the emitted light spectrum. The emitted light spectrum is reconstructed from the plurality of self-interfering signals using compressive sensing. The plurality of self-interfering signals can provide an interference pattern used to reconstruct the emitted light spectrum. A second plurality of interferometers may output a second plurality of self-interfering signals to reconstruct a low resolution spectrum of the input light signal satisfying the Nyquist criterion. Low resolution signal components can be detected from the low resolution spectrum and used to pre-process the interference pattern.

    Integrated fourier transform optical spectrometer

    公开(公告)号:US09964396B1

    公开(公告)日:2018-05-08

    申请号:US15343827

    申请日:2016-11-04

    Applicant: COM DEV LTD.

    Abstract: A spectrometer and method for determining an emitted light spectrum. An input light signal is received and directed to an array of interferometers using waveguides. A plurality of self-interfering signals are detected from a first plurality of interferometers in the array of interferometers. The first plurality of interferometers has fewer interferometers than required to satisfy the Nyquist criterion for reconstructing the emitted light spectrum. The emitted light spectrum is reconstructed from the plurality of self-interfering signals using compressive sensing. The plurality of self-interfering signals can provide an interference pattern used to reconstruct the emitted light spectrum. A second plurality of interferometers may output a second plurality of self-interfering signals to reconstruct a low resolution spectrum of the input light signal satisfying the Nyquist criterion. Low resolution signal components can be detected from the low resolution spectrum and used to pre-process the interference pattern.

    Line scan spectroscopic white light interferometry for semiconductor inspection and metrology

    公开(公告)号:US09863756B1

    公开(公告)日:2018-01-09

    申请号:US14877882

    申请日:2015-10-07

    Inventor: Shifang Li

    Abstract: A device and method for surface height profiling are presented. The device has a source with a source slit through which light is provided. The device includes an objective lens having a reference surface. The objective lens is configured to illuminate a sample with test light from the source and to combine test light reflected from the sample with reference light reflected from the reference surface to form combined light. A spectrometer is positioned to receive the combined light at an entrance slit. The spectrometer is configured to image the combined light as a 2D image with a wavelength dimension and a spatial position dimension. A processor in electrical communication with the spectrometer is programmed to receive a signal representing the 2D image and to determine a surface height profile of the sample based on the signal.

    Fabry-perot fourier transform spectrometer

    公开(公告)号:US09664563B2

    公开(公告)日:2017-05-30

    申请号:US12958312

    申请日:2010-12-01

    Applicant: Paul Lucey

    Inventor: Paul Lucey

    CPC classification number: G01J3/26 G01J3/14 G01J3/4531

    Abstract: A spatial Fourier transform spectrometer is disclosed. The Fourier transform spectrometer includes a Fabry-Perot interferometer with first and second optical surfaces. The gap between the first and second optical surfaces spatially varies in a direction that is orthogonal to the optical axis of the Fourier transform spectrometer. The Fabry-Perot interferometer creates an interference pattern from input light. An image of the interference pattern is captured by a detector, which is communicatively coupled to a processor. The processor is configured to process the interference pattern image to determine information about the spectral content of the input light.

    APPARATUS, SYSTEMS, AND METHODS FOR TALBOT SPECTROMETERS
    168.
    发明申请
    APPARATUS, SYSTEMS, AND METHODS FOR TALBOT SPECTROMETERS 审中-公开
    仪器,系统和TALBOT光谱仪的方法

    公开(公告)号:US20170059412A1

    公开(公告)日:2017-03-02

    申请号:US15254855

    申请日:2016-09-01

    CPC classification number: G01J3/453 G01J3/0259 G01J3/4531 G01J3/4532

    Abstract: A non-paraxial Talbot spectrometer includes a transmission grating to receive incident light. The grating period of the transmission grating is comparable to the wavelength of interest so as to allow the Talbot spectrometer to operate outside the paraxial limit. Light transmitted through the transmission grating forms periodic Talbot images. A tilted detector is employed to simultaneously sample the Talbot images at various distances along a direction perpendicular to the grating. Spectral information of the incident light can be calculated by taking Fourier transform of the measured Talbot images or by comparing the measured Talbot images with a library of intensity patterns acquired with light sources having known wavelengths.

    Abstract translation: 非近轴Talbot光谱仪包括用于接收入射光的透射光栅。 传输光栅的光栅周期与感兴趣的波长相当,以便允许Talbot光谱仪在傍轴极限外运行。 通过透射光栅透射的光形成周期性的Talbot图像。 采用倾斜检测器同时沿垂直于光栅的方向以不同距离对Talbot图像进行采样。 入射光的光谱信息可以通过对所测量的Talbot图像进行傅立叶变换或通过将测量的Talbot图像与用已知波长的光源采集的强度图案的文库进行比较来计算。

    OPTICAL FIBER SENSOR USED FOR OIL CONDITIONING MONITORING
    169.
    发明申请
    OPTICAL FIBER SENSOR USED FOR OIL CONDITIONING MONITORING 有权
    用于油调节监测的光纤传感器

    公开(公告)号:US20170045445A1

    公开(公告)日:2017-02-16

    申请号:US15105397

    申请日:2013-12-17

    Abstract: A detector for oil condition monitoring includes an optical fibre having a first end and a second end having an end face. A sensor body has a gap in which a sample of the oil may be received and a reflecting surface, the second end of the optical fibre being embedded in the sensor body and having an end face spaced from the reflecting surface across the gap. Light emitted from the optical fibre can pass through the sample of oil and be reflected by the reflecting surface back into the optical fibre. By interferometry of the respective signals, the condition of the oil can be determined.

    Abstract translation: 用于油状态监测的检测器包括具有第一端和具有端面的第二端的光纤。 传感器体具有可容纳油的样品的间隙和反射表面,光纤的第二端嵌入传感器主体中,并且具有与穿过间隙的反射表面间隔开的端面。 从光纤发射的光可以通过油样并被反射面反射回光纤。 通过干涉测量各个信号,可以确定油的状态。

    Two-dimensional fourier transform spectrometer

    公开(公告)号:US09476768B2

    公开(公告)日:2016-10-25

    申请号:US13955158

    申请日:2013-07-31

    Abstract: The present invention relates to a system and methods for acquiring two-dimensional Fourier transform (2D FT) spectra. Overlap of a collinear pulse pair and probe induce a molecular response which is collected by spectral dispersion of the signal modulated probe beam. Simultaneous collection of the molecular response, pulse timing and characteristics permit real time phasing and rapid acquisition of spectra. Full spectra are acquired as a function of pulse pair timings and numerically transformed to achieve the full frequency-frequency spectrum. This method demonstrates the ability to acquire information on molecular dynamics, couplings and structure in a simple apparatus. Multi-dimensional methods can be used for diagnostic and analytical measurements in the biological, biomedical, and chemical fields.

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