Image processing device, information generation device, and information generation method

    公开(公告)号:US10904503B2

    公开(公告)日:2021-01-26

    申请号:US16670239

    申请日:2019-10-31

    Abstract: A correction information generation section 50 emits measurement light having uniform intensity onto a polarized image acquisition section 20 acquiring a polarized image. Further, on the basis of a measured polarized image acquired from the polarized image acquisition section 20, the correction information generation section 50 generates variation correction information for correcting sensitivity variations caused in the measured polarized image due to difference in polarization direction, and causes a correction information storage section 30 to store the generated variation correction information. A correction processing section 40 then corrects the sensitivity variations caused in the polarized image acquired by the polarized image acquisition section 20 due to the difference in polarization direction by using the pre-generated variation correction information stored in the correction information storage section 30. Therefore, the polarized image outputted from the correction processing section 40 becomes a high-quality polarized image with, for example, its sensitivity variations corrected.

    Device for measuring rotational angles in counters and multi-stage rotary encoders as well as associated sensors

    公开(公告)号:US10571309B2

    公开(公告)日:2020-02-25

    申请号:US15553224

    申请日:2016-02-22

    Applicant: Guenter Grau

    Inventor: Guenter Grau

    Abstract: Various embodiments relate to devices for measuring the state of devices and multi-stage rotary encoders as well as to associated sensors. In order to simplify the design of devices which can be read out electronically and multi-turn rotary encoders, according to some embodiments a device having at least one rotatable wheel, at least one light source and at least one polarization sensor is proposed, the wheel being at least partially transparent and polarization-maintaining, parts of the wheel being configured as pole filters, it being possible for light which exits the light source to be polarized by the pole filter and to be received by the polarization sensor.

    LIGHT SOURCE SYSTEM AND POLARIZATION ANGLE ADJUSTING METHOD

    公开(公告)号:US20200033194A1

    公开(公告)日:2020-01-30

    申请号:US16438710

    申请日:2019-06-12

    Abstract: A light source system is provided. The light source system is capable of measuring a polarization angle and includes a light source configured to emit an original light beam, and the original light beam has an original polarization angle. The light source system further includes an amplifying module configured to amplify the original light beam and generate a forward beam for hitting a target, and the forward beam has a forward polarization angle that is equal to the original polarization angle. The light source system further includes a polarization measurement unit, and the polarization measurement unit includes a first polarization measurement module configured to receive a first return beam and measure a first polarization angle of the first return beam. The first return beam is reflected from the target.

    SYSTEM AND METHOD FOR USE IN HIGH SPATIAL RESOLUTION ELLIPSOMETRY

    公开(公告)号:US20200025678A1

    公开(公告)日:2020-01-23

    申请号:US16483877

    申请日:2018-02-08

    Abstract: System and method for use in optical monitoring of a sample. The system comprising: a light source unit (140) for providing collimated illumination; polarization modulation unit (160) located in optical path of light propagating from the light source unit; a lens unit (120) for focusing light onto an illumination spot on a surface of a sample, and for collection of light components returning from the sample; a light collection unit configured for collecting light returning from the sample and generate output image data associated with Fourier plane imaging with respect to surface of the sample; and a control unit (500) configured processing said data in accordance with said system calibration. The method provides calibration data, and comprising: providing reference data indicative of complex refractive index of the reference samples on at least two reference samples; collecting ellipsometry data for said at least two reference samples using the ellipsometry system, generating output data having a plurality of data pieces, each associated with unknown angular direction; and for each data piece corresponding to an unknown angular direction, determining simultaneously system parameters and angle of incidence in accordance with corresponding parameters of the reference data to thereby determine calibration data.

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