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    Apparatus with selected fill gas
    171.
    发明授权
    Apparatus with selected fill gas 有权
    具有选定填充气体的装置

    公开(公告)号：US07017411B2

    公开(公告)日：2006-03-28

    申请号：US10793382

    申请日：2004-03-04

    Applicant: John A. Geen ,  John Martin

    Inventor： John A. Geen ,  John Martin

    IPC: G01P15/02

    CPC classification number: H01L23/20 ,  B81B7/0058 ,  B81B2201/025 ,  H01L2924/0002 ,  H01L2924/00

    Abstract: An inertial sensor has an interior filled with a relatively low viscosity fill gas. To that end, the inertial sensor has a housing forming the noted interior, and a movable component within the interior. The inertial sensor also has the noted fill gas within the interior. The fill gas has a viscosity that is less than the viscosity of nitrogen under like conditions. For example, when subjected to the same temperatures and pressures, the fill gas has a viscosity that is less than the viscosity of nitrogen.

    Abstract translation: 惯性传感器具有填充有相对低粘度的填充气体的内部。 为此，惯性传感器具有形成所述内部的壳体和内部的可移动部件。 惯性传感器在内部还具有注明的填充气体。 填充气体的粘度比同样条件下的氮的粘度小。 例如，当经受相同的温度和压力时，填充气体的粘度小于氮的粘度。

    Composite sensor device and method of producing the same
    172.
    发明授权
    Composite sensor device and method of producing the same 失效

    公开(公告)号：US07004025B2

    公开(公告)日：2006-02-28

    申请号：US09886667

    申请日：2001-06-21

    Applicant: Masaya Tamura

    Inventor： Masaya Tamura

    IPC: G01P15/125 ,  G01P9/04 ,  G01C19/56

    CPC classification number: G01P15/125 ,  B81B7/0041 ,  B81B7/02 ,  B81B2201/0235 ,  B81B2201/025 ,  B81C2203/0145 ,  G01C19/5719 ,  G01P1/02 ,  G01P15/0802 ,  G01P2015/0814

    Abstract: A plane vibrator of an angular velocity sensor and a movable member of an acceleration sensor are provided in a spaced floating state on the same substrate. A lid is formed so as to cover and be spaced from the upper side of the plane vibrator and the movable member. A space defined by the substrate and the lid is sectioned into a angular velocity sensor space and an acceleration sensor space by use of a sectioning wall. The angular velocity sensor space is hermetically sealed to be in the vacuum state. The acceleration sensor space is hermetically sealed to be under atmospheric pressure. The plane vibrator is vibrated at a high frequency and a large amplitude so that the angular velocity detection sensitivity is enhanced. The movable member, even if vibration of the plane vibrator is transmitted thereto, is prevented from vibrating at a high frequency and a large amplitude, due to the damping effect of air. Thus, the acceleration detection sensitivity is enhanced.

    Acceleration sensor and manufacturing method thereof
    173.
    发明申请
    Acceleration sensor and manufacturing method thereof 失效
    加速度传感器及其制造方法

    公开(公告)号：US20050268717A1

    公开(公告)日：2005-12-08

    申请号：US11063551

    申请日：2005-02-24

    Applicant: Nobuo Ozawa

    Inventor： Nobuo Ozawa

    IPC: G01P15/08 ,  G01P15/12 ,  G01P15/18 ,  H01L29/84

    CPC classification number: G01P15/123 ,  B81B3/0051 ,  B81B2201/025 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0842

    Abstract: An acceleration sensor includes a base portion shaped into the form of a frame, a weight portion located inside the base portion and disposed away from the base portion, a flexible beam portion disposed over an upper portion of the base portion and an upper portion of the weight portion and a stopper portion disposed above the base portion and disposed over the weight portion away from the weight portion, wherein the stopper portion restricts an amount of displacement of the weight portion in the direction of the stopper portion.

    Abstract translation: 加速度传感器包括成形为框架形状的基部，位于基部内部并且远离基部设置的配重部分，设置在基部的上部上方的柔性梁部分和 所述止动部设置在所述基部的上方并且配置在所述配重部分上方远离所述配重部分，其中，所述止动部限制所述配重部在所述止动部的方向上的位移量。

    Micro inertia sensor and method of manufacturing the same
    174.
    发明授权
    Micro inertia sensor and method of manufacturing the same 失效
    微惯性传感器及其制造方法

    公开(公告)号：US06835588B2

    公开(公告)日：2004-12-28

    申请号：US10735171

    申请日：2003-12-12

    Applicant: Seung Do An ,  Kyoung Soo Kim ,  Ji Man Cho

    Inventor： Seung Do An ,  Kyoung Soo Kim ,  Ji Man Cho

    IPC: H01L2100

    CPC classification number: B81C1/00301 ,  B81B2201/025 ,  B81B2207/095 ,  B81C2201/019 ,  B81C2203/0118 ,  B81C2203/038 ,  G01C19/5783 ,  G01P1/023 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0828 ,  Y10T428/24322

    Abstract: The present invention provides a micro inertia sensor and a method of manufacturing the same, the micro inertia sensor includes a lower glass substrate; a lower silicon including a first border, a first fixed point and a side movement sensing structure; an upper silicon including a second border, a second fixed point being connected to a via hole, in which a metal wiring is formed, on an upper side, and an sensing electrode, which correspond to the first border, the first fixed point and the side movement sensing structure; a bonded layer by a eutectic bonding between the upper silicon and the lower silicon; and a upper glass substrate, being positioned on an upper portion of the upper silicon, for providing the via hole on which an electric conduction wiring is formed, thereby aiming at the miniaturization of the product and the simplification of the process.

    Abstract translation: 本发明提供一种微惯性传感器及其制造方法，所述微惯性传感器包括下玻璃基板; 包括第一边界的下硅，第一固定点和侧移检测结构; 包括第二边界的上硅，在上侧连接有形成有金属布线的通孔的第二固定点和与第一边界相对应的第一固定点和第二边界的感测电极 侧运动感测结构; 通过上硅和下硅之间的共晶键合的键合层; 以及上玻璃基板，其位于上硅的上部，用于提供其上形成导电布线的通孔，从而瞄准产品的小型化和简化工艺。

    Method for producing surface micromechanical structures, and sensor
    176.
    发明申请
    Method for producing surface micromechanical structures, and sensor 失效
    生产表面微机械结构和传感器的方法

    公开(公告)号：US20040089903A1

    公开(公告)日：2004-05-13

    申请号：US10467216

    申请日：2003-12-16

    Inventor： Frank Fischer ,  Wilhelm Frey ,  Lars Metzger

    IPC: H01L021/00 ,  H01L027/14 ,  H01L029/82

    CPC classification number: G01P15/125 ,  B81B2201/025 ,  B81C1/00619 ,  B81C2201/0112 ,  G01P15/0802 ,  G01P2015/0814

    Abstract: A method is described for producing surface micromechanical structures having a high aspect ratio, a sacrificial layer (20) being provided between a substrate (30) and a function layer (10), trenches (60, 61) being provided by a plasma etching process in the function layer (10), at least some of these trenches exposing surface regions (21, 22) of the sacrificial layer (20). To increase the aspect ratio of the trenches, an additional layer (70) is deposited on the side walls of the trenches in at least some sections, but not on the exposed surface regions (21, 22) of the sacrificial layer (20). In addition, a sensor is described, in particular an acceleration sensor or a rotational rate sensor.

    Abstract translation: 描述了一种用于生产具有高纵横比的表面微机械结构的方法，在衬底（30）和功能层（10）之间提供牺牲层（20），通过等离子体蚀刻工艺提供的沟槽（60,61） 在功能层（10）中，这些沟槽中的至少一些暴露了牺牲层（20）的表面区域（21,22）。 为了增加沟槽的纵横比，在牺牲层（20）的暴露的表面区域（21,22）的至少一些部分中，在沟槽的侧壁上沉积附加层（70）。 此外，描述了传感器，特别是加速度传感器或转速传感器。

    Method and system for making a micromachine device with a gas permeable enclosure
    179.
    发明申请
    Method and system for making a micromachine device with a gas permeable enclosure 审中-公开
    用于制造具有透气外壳的微机械装置的方法和系统

    公开(公告)号：US20020132113A1

    公开(公告)日：2002-09-19

    申请号：US10052407

    申请日：2002-01-18

    Applicant: Ball Semiconductor, Inc.

    Inventor： Tomoki Tanaka ,  Risaku Toda

    IPC: B05D005/12 ,  B05D003/12

    CPC classification number: B81C1/00333 ,  B81B2201/0235 ,  B81B2201/025 ,  B81C1/00198 ,  B81C1/00285 ,  G01P15/125 ,  G01P15/18 ,  Y10T428/28

    Abstract: A method for coating a micro-electromechanical system (MEMS) device is provided. A coating material, such as a ceramic slurry, may be utilized to form a gas permeable enclosure or shell around the device after the coating material hardens. A vacuum may be applied near the device to exert an attractive force on the coating material to aid in homogenously distributing the coating material over the device. In addition, a vibration may be applied to the device to aid in distributing the coating material. If the device is attached to a substrate, a hole may be formed through the substrate with one opening near the device and a second opening located elsewhere. The vacuum may then be applied to the second opening to draw the coating material over the device and towards the first opening.

    Abstract translation: 提供了一种用于涂覆微机电系统（MEMS）装置的方法。 在涂层材料硬化之后，可以使用诸如陶瓷浆料的涂层材料在装置周围形成气体可渗透的外壳或外壳。 可以在装置附近施加真空以对涂层材料施加吸引力，以帮助将涂层材料均匀地分布在装置上。 此外，可以对该装置施加振动以辅助涂布材料的分配。 如果装置连接到基板上，则可以通过基板形成一个孔，在该装置附近有一个开口，另一个开口位于其他位置。 然后可以将真空施加到第二开口以将涂层材料拉过装置并朝向第一开口。

    Method to make gas permeable shell for MEMS devices with controlled porosity
    180.
    发明授权
    Method to make gas permeable shell for MEMS devices with controlled porosity 失效
    制造具有受控孔隙率的MEMS器件的透气外壳的方法

    公开(公告)号：US06444135B1

    公开(公告)日：2002-09-03

    申请号：US09688722

    申请日：2000-10-16

    Applicant: Murali Hanabe ,  Risaku Toda

    Inventor： Murali Hanabe ,  Risaku Toda

    IPC: B31D300

    CPC classification number: B81C1/00198 ,  B81B2201/0235 ,  B81B2201/025

    Abstract: A method and system for making a gas permeable shell in a micro electromechanical systems (MEMS) device is disclosed. The MEMS device is created with an internal sacrificial layer. The device is then coated with a slurry composition which, after drying, is later exposed to a solvent. As a result, the sacrificial layer is removed to produce interconnected voids.

    Abstract translation: 公开了一种用于在微机电系统（MEMS）装置中制造气体可渗透外壳的方法和系统。 MEMS器件由内部牺牲层制成。 然后用浆料组合物涂覆该装置，其在干燥之后稍后暴露于溶剂中。 结果，牺牲层被去除以产生互连的空隙。

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