Silica glass containing TiO2 and process for its production
    171.
    发明申请
    Silica glass containing TiO2 and process for its production 有权
    含二氧化硅的硅玻璃及其生产工艺

    公开(公告)号:US20070042893A1

    公开(公告)日:2007-02-22

    申请号:US11589875

    申请日:2006-10-31

    Abstract: It is to provide a silica glass containing TiO2, having a wide temperature range wherein the coefficient of thermal expansion is substantially zero. A silica glass containing TiO2, which has a TiO2 concentration of from 3 to 10 mass %, a OH group concentration of at most 600 mass ppm and a Ti3+ concentration of at most 70 mass ppm, characterized by having a fictive temperature of at most 1,200° C., a coefficient of thermal expansion from 0 to 100° C. of 0±150 ppb/° C., and an internal transmittance T400-700 per 1 mm thickness in a wavelength range of from 400 to 700 nm of at least 80%. A process for producing a silica glass containing TiO2, which comprises porous glass body formation step, F-doping step, oxygen treatment step, densification step and vitrification step.

    Abstract translation: 提供含有TiO 2的二氧化硅玻璃,其具有宽的温度范围,其中热膨胀系数基本上为零。 含有TiO 2浓度为3〜10质量%,OH基浓度为600质量ppm以下且Ti 3 +浓度为70质量ppm以下,其特征在于,假想温度为1200℃以下,0〜100℃的热膨胀系数为0±150ppb /℃。 并且在400至700nm的波长范围内每1mm厚度的内部透射率T 400-700 至少为80%。 一种制备含有TiO 2的二氧化硅玻璃的方法,其包括多孔玻璃体形成步骤,F掺杂步骤,氧处理步骤,致密化步骤和玻璃化步骤。

    Method for making extreme ultraviolet lithography structures
    176.
    发明申请
    Method for making extreme ultraviolet lithography structures 有权
    制造极紫外光刻结构的方法

    公开(公告)号:US20030226375A1

    公开(公告)日:2003-12-11

    申请号:US10302347

    申请日:2002-11-22

    Abstract: A method for forming EUV LITHOGRAPHY GLASS STRUCTURES WITH VOIDS is disclosed which includes forming a slurry mixture including silica soot particles, and inserting the slurry mixture into a casting mold. The method provides low weight mass reduced rigid glass structures with beneficial thermal stability. The casting mold includes therein a casting form. The casting form is adapted to provide selected geometry void spaces within the glass lithography structure. The slurry mixture is dried to form a green ware object. The casting form is removed from the green ware and the green ware object is consolidated into a lithography glass structure with voids.

    Abstract translation: 公开了一种用于形成具有不透明度的EUV光刻玻璃结构的方法,其包括形成包括二氧化硅烟灰颗粒的浆料混合物,并将浆料混合物插入铸模中。 该方法提供了具有有利的热稳定性的低重质量减少的刚性玻璃结构。 铸模中包括铸造形式。 铸造形式适于在玻璃光刻结构内提供选定的几何空间空间。 将浆料混合物干燥以形成绿色物品。 将铸件从绿色工具中取出,将绿色物品固结成具有空隙的光刻玻璃结构。

    Erbium-doped multicomponent glasses manufactured by the sol-gel method
    178.
    发明申请
    Erbium-doped multicomponent glasses manufactured by the sol-gel method 审中-公开
    通过溶胶 - 凝胶法制造的掺铒多组分玻璃

    公开(公告)号:US20020013209A1

    公开(公告)日:2002-01-31

    申请号:US09803277

    申请日:2001-03-09

    Abstract: A multicomponent particulate gel includes 80-100 mole % SiO2, 1-10 mole % X2O, 1-10 mole % YO, 1-15 mole % Al2O3, and 0.1-5.0 weight % Er2O3,where X represents lithium, sodium, potassium, or mixtures thereof and Y represents calcium, barium, magnesium, lead or mixtures thereof, and the ratio of Al2O3 to (X2OnullYO) is between about 0.9 and about 2.5. A process of manufacturing the gel includes hydrolyzing alkoxide derivatives of silicon, aluminum, erbium, lithium, sodium, potassium, calcium, barium, magnesium, lead or mixtures thereof in water to generate their respective hydroxide derivatives; polymerizing the hydroxide derivatives to produce a gel slurry comprising an essentially silica network; and drying the gel slurry to produce the gel.

    Abstract translation: 多组分颗粒凝胶包含80-100摩尔%的SiO 2,1-10摩尔%的X 2 O,1-10摩尔%的YO,1-15摩尔%的Al 2 O 3和0.1-5.0重量的Er 2 O 3,其中X代表锂,钠,钾, 或其混合物,Y表示钙,钡,镁,铅或其混合物,Al 2 O 3与(X 2 O + YO)的比例在约0.9至约2.5之间。 制造凝胶的方​​法包括在水中水解硅,铝,铒,锂,钠,钾,钙,钡,镁,铅或其混合物的醇盐衍生物以产生它们各自的氢氧化物衍生物; 聚合氢氧化物衍生物以产生包含基本上二氧化硅网络的凝胶淤浆; 并干燥凝胶浆以产生凝胶。

    Glass-making method
    179.
    发明授权
    Glass-making method 失效
    制玻璃法

    公开(公告)号:US06250108B1

    公开(公告)日:2001-06-26

    申请号:US09108382

    申请日:1998-07-01

    Abstract: In a method of making a high-quality silica glass, a rare earth element that is a substance making a great contribution to the index of refraction is introduced therein together with aluminum for stabilizing the glass. An alkoxide of aluminum or its derivative is used as the starting material for preparing a boehmite sol. A salt of at least one element selected from rare earth elements or a solution in which the salt is dissolved and the boehmite sol are mixed with a silica sol, whereupon the sols are vitrified.

    Abstract translation: 在制造高质量二氧化硅玻璃的方法中,引入作为对折射率有很大贡献的物质的稀土元素与铝一起引入以稳定玻璃。 使用铝或其衍生物的醇盐作为勃姆石溶胶的制备原料。 选自稀土元素中的至少一种元素或其中溶解盐的溶液和勃姆石溶胶与硅溶胶混合的盐,随后将溶胶玻璃化。

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