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    Inductively coupled plasma spectrometer for process diagnostics and control
    14.
    发明授权
    Inductively coupled plasma spectrometer for process diagnostics and control 失效
    用于过程诊断和控制的电感耦合等离子体光谱仪

    公开(公告)号：US06867859B1

    公开(公告)日：2005-03-15

    申请号：US09631271

    申请日：2000-08-02

    Applicant: Gary Powell

    Inventor： Gary Powell

    IPC: G01J3/443 ,  G01N21/73 ,  H01J37/32 ,  H01L21/00 ,  G01J3/30

    CPC classification number: H01L21/67253 ,  G01J3/443 ,  G01N21/73 ,  H01J37/32935 ,  H01J37/32972 ,  H01L21/67069

    Abstract: The present invention relates to an apparatus and method for forming a plasma in the exhaust line of a primary process reactor. The plasma is generated in an inductive source (5) to examine the chemical concentrations of the waste or exhaust gas in vacuum lines that are below atmospheric pressure. The optical radiation emitted by the plasma is analyzed by an optical spectrometer (9) and the resulting information is used to diagnose, monitor, or control operating states in the main vacuum vessel.

    Abstract translation: 本发明涉及在一级工艺反应器的排气管线中形成等离子体的装置和方法。 在感应源（5）中产生等离子体，以检查低于大气压的真空管线中的废物或废气的化学浓度。 通过光谱仪（9）分析由等离子体发射的光辐射，并且所得到的信息用于诊断，监测或控制主真空容器中的操作状态。

    Method and device utilizing plasma source for real-time gas sampling
    15.
    发明申请
    Method and device utilizing plasma source for real-time gas sampling 失效
    利用等离子体源进行实时气体取样的方法和装置

    公开(公告)号：US20050030531A1

    公开(公告)日：2005-02-10

    申请号：US10939637

    申请日：2004-09-13

    Applicant: Gary Powell ,  Richard Hazard

    Inventor： Gary Powell ,  Richard Hazard

    IPC: H01L21/3065 ,  G01N1/22 ,  G01N21/68 ,  H01L21/205 ,  G01J3/30

    CPC classification number: G01J3/02 ,  G01J3/0264 ,  G01J3/28 ,  G01J3/443 ,  G01N1/2226 ,  G01N21/15 ,  G01N21/68

    Abstract: Aspects of the present invention provide novel methods and devices for sampling gas, exciting the sampled gas to emit radiation and detecting in real time from the emitted radiation a plurality of wave bands of an emission spectrum. Energy used to excite the sampled gas may be adjusted based on the detected wave bands. A process may be controlled in real time based on the detected wave bands. Novel interfaces may be used to display portions of the detected wave bands. A known flow of a reference gas may be included in the flow of sampled gases and an unknown flow of an unknown flow gas determined.

    Abstract translation: 本发明的方面提供了用于对气体进行采样的新方法和装置，激发采样的气体发射辐射并且从发射的辐射实时地检测发射光谱的多个波段。 用于激发采样气体的能量可以基于检测到的波段进行调整。 可以基于检测到的波段来实时地控制过程。 可以使用新的接口来显示检测到的波段的部分。 参考气体的已知流可以包括在采样气体流中，并且确定未知流量气体的未知流量。

    Method and device utilizing real-time gas sampling
    16.
    发明授权
    Method and device utilizing real-time gas sampling 失效

    公开(公告)号：US06538734B2

    公开(公告)日：2003-03-25

    申请号：US09726195

    申请日：2000-11-29

    Applicant: Gary Powell

    Inventor： Gary Powell

    IPC: G01J330

    CPC classification number: G01N1/2226 ,  G01N21/68

    Abstract: Aspects of the present invention provide novel methods and devices for sampling gas, exciting the sampled gas to emit radiation and detecting in real time from the emitted radiation a plurality of wave bands of an emission spectrum. Energy used to excite the sampled gas may be adjusted based on the detected wave bands. A process may be controlled in real time based on the detected wave bands. Novel interfaces may be used to display portions of the detected wave bands. A known flow of a reference gas may be included in the flow of sampled gases and an unknown flow of an unknown flow gas determined.

    Programmable lock detector and corrector
    19.
    发明授权
    Programmable lock detector and corrector 有权
    可编程锁定检测器和校正器

    公开(公告)号：US06970047B1

    公开(公告)日：2005-11-29

    申请号：US10628656

    申请日：2003-07-28

    Applicant: Phillip Johnson ,  Gary Powell ,  William Andrews

    Inventor： Phillip Johnson ,  Gary Powell ,  William Andrews

    IPC: H03K5/13 ,  H03K5/15 ,  H03L7/081 ,  H03L7/095 ,  H03L7/10

    CPC classification number: H03L7/0814 ,  H03K5/15013 ,  H03L7/095 ,  H03L7/10 ,  Y10S331/02

    Abstract: An apparatus and method for programmable lock detection and correction (PLDC) to a programmable accuracy in a digital delay-locked loop (DLL) based multiphase clock generator (MCG) is based on a DLL that utilizes a digital count to control the delay of a digitally controlled, multiple-tap delay line in its feedback path where stability of the digital count is used to qualify the determination of lock to a programmable accuracy and lock determination is based on combinatorial evaluation of the multiple phase outputs for the proper waveform relationships. The incidence of false lock corresponding to excessive delay through the delay line is addressed by a LOOPRESET signal that results in a reset of the digital count that controls the delay through the delay line. Additionally, programmability of the stability interval, the digital counter step size, and the accuracy of the lock provide control over lock acquisition time.

    Abstract translation: 基于数字延迟锁定环（DLL）的多相时钟发生器（MCG）中的可编程锁定检测和校正（PLDC）的装置和方法，其基于利用数字计数来控制延迟锁定环 在其反馈路径中的数字控制的多抽头延迟线，其中使用数字计数的稳定性来将锁定的确定限定到可编程精度和锁定确定，基于用于适当波形关系的多相输出的组合评估。 通过延迟线对应于过度延迟的假锁的发生率由LOOPRESET信号来解决，该LOOPRESET信号导致数字计数的复位，该数字计数通过延迟线控制延迟。 此外，稳定性间隔的可编程性，数字计数器步长和锁的精度提供了对锁获取时间的控制。

    Method and apparatus for chemical monitoring
    20.
    发明申请
    Method and apparatus for chemical monitoring 失效
    化学监测方法和装置

    公开(公告)号：US20050046825A1

    公开(公告)日：2005-03-03

    申请号：US10897314

    申请日：2004-07-22

    Applicant: Gary Powell ,  Herbert Litvak

    Inventor： Gary Powell ,  Herbert Litvak

    IPC: G01J20060101 ,  G01J3/443 ,  G01N21/00 ,  G01N21/73

    CPC classification number: G01N21/73 ,  Y10T436/106664

    Abstract: The present invention relates to monitoring chemicals in a process chamber using a spectrometer having a plasma generator, based on patterns over time of chemical consumption. The relevant patterns may include a change in consumption, reaching a consumption plateau, absence of consumption, or presence of consumption. In some embodiments, advancing to a next step in forming structures on the workpiece depends on the pattern of consumption meeting a process criteria. In other embodiments, a processing time standard is established, based on analysis of the relevant patterns. Yet other embodiments relate to controlling work on a workpiece, based on analysis of the relevant patterns. The invention may be either a process or a device including logic and resources to carry out a process.

    Abstract translation: 本发明涉及使用具有等离子体发生器的光谱仪的处理室中的化学品监测，其基于化学消耗时间的图形。 相关模式可能包括消费变化，达到消费高原，消费消费或消费存在。 在一些实施例中，前进到在工件上形成结构的下一步骤取决于符合工艺标准的消耗模式。 在其他实施例中，基于相关模式的分析来建立处理时间标准。 其他实施例涉及基于相关模式的分析来控制工件上的工作。 本发明可以是包括用于执行过程的逻辑和资源的过程或设备。

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