公开(公告)号：US20050030657A1

公开(公告)日：2005-02-10

申请号：US10893332

申请日：2004-07-19

Applicant: John Maier ,  Patrick Treado ,  Chenhui Wang

Inventor： John Maier ,  Patrick Treado ,  Chenhui Wang

IPC: G01B9/02 ,  G01J20060101 ,  G01J3/02 ,  G01J3/10 ,  G01J3/28 ,  G01J3/30 ,  G01J3/44 ,  G01N21/64 ,  G01N21/65 ,  G02F1/1333 ,  G02F1/1335 ,  G02F1/1347

CPC classification number: G01N21/65 ,  G01J3/02 ,  G01J3/0224 ,  G01J3/0229 ,  G01J3/0256 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/0283 ,  G01J3/10 ,  G01J3/44 ,  G01J3/4406 ,  G01N21/6456 ,  G01N2021/6417 ,  G01N2021/6423 ,  G01N2021/6471 ,  G01N2201/0221 ,  G01N2201/0627 ,  G02F1/133371 ,  G02F1/1347

Abstract: The disclosure generally relates to a method and apparatus for multi-wavelength imaging spectrometer. More specifically, in one embodiment, the disclosure relates to an optical filter for passing photons therethrough. The filter includes a first filter stage and a second filter stage. The first filter stage may include a first retarder element and a first liquid crystal cell. The first element may include an input face and an output face. One of the first element faces is not oriented substantially normal to the trajectory of photons passing through the filter.

Abstract translation: 本公开一般涉及用于多波长成像光谱仪的方法和装置。 更具体地，在一个实施例中，本发明涉及一种用于使光子通过其的滤光器。 该滤波器包括第一滤波器级和第二滤波级。 第一滤波器级可以包括第一延迟元件和第一液晶单元。 第一元件可以包括输入面和输出面。 第一元件面之一不是基本上垂直于通过过滤器的光子的轨迹。

公开(公告)号：US20050030533A1

公开(公告)日：2005-02-10

申请号：US10893339

申请日：2004-07-19

Applicant: Patrick Treado

Inventor： Patrick Treado

IPC: G01B9/02 ,  G01J20060101 ,  G01J3/02 ,  G01J3/10 ,  G01J3/28 ,  G01J3/30 ,  G01J3/44 ,  G01N21/64 ,  G01N21/65 ,  G02F1/1333 ,  G02F1/1335 ,  G02F1/1347

CPC classification number: G01N21/65 ,  G01J3/02 ,  G01J3/0224 ,  G01J3/0229 ,  G01J3/0256 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/0283 ,  G01J3/10 ,  G01J3/44 ,  G01J3/4406 ,  G01N21/6456 ,  G01N2021/6417 ,  G01N2021/6423 ,  G01N2021/6471 ,  G01N2201/0221 ,  G01N2201/0627 ,  G02F1/133371 ,  G02F1/1347

Abstract: The disclosure generally relates to a method and apparatus for compact dispersive imaging spectrometer. More specifically, one embodiment of the disclosure relates to a portable system for obtaining a spatially accurate wavelength-resolved image of a sample having a first and a second spatial dimension. The portable system can include a photon emission source for sequentially illuminating a plurality of portions of said sample with a plurality of photons to produce photons scattered by the sample. The photon emission source can illuminate the sample along the first spatial dimension for each of plural predetermined positions of the second spatial dimension. The system may also include an optical lens for collecting the scattered photons to produce therefrom filtered photons, a dispersive spectrometer for determining a wavelength of ones of the filtered photons, a photon detector for receiving the filtered photons and obtaining therefrom plural spectra of said sample, and a processor for producing a two dimensional image of said sample from the plural spectra.

Abstract translation: 本发明一般涉及紧凑型分散成像光谱仪的方法和装置。 更具体地，本公开的一个实施例涉及用于获得具有第一和第二空间维度的样本的空间上准确的波长分辨图像的便携式系统。 便携式系统可以包括光子发射源，用于用多个光子顺序照射所述样品的多个部分，以产生由样品散射的光子。 光子发射源可以沿着第一空间维度对第二空间维度的多个预定位置中的每一个照射样本。 该系统还可以包括用于收集散射光子以产生滤光光子的光学透镜，用于确定滤光光子中波长的波长的色散光谱仪，用于接收经滤光的光子并由此获得所述样品的多个光谱的光子检测器， 以及用于从所述多个光谱产生所述样本的二维图像的处理器。

公开(公告)号：US5450207A

公开(公告)日：1995-09-12

申请号：US93355

申请日：1993-07-16

Applicant: Igor Fomenkov

Inventor： Igor Fomenkov

IPC: G01J3/51 ,  G01J20060101 ,  G01J1/42 ,  G01J3/12 ,  G01J3/28 ,  G01J9/00 ,  H01S20060101 ,  H01S3/10 ,  H01S3/13 ,  H01S3/139 ,  H01S3/225

CPC classification number: H01S3/1303 ,  G01J3/12 ,  H01S3/1392 ,  G01J2003/2866 ,  G01J9/00

Abstract: Calibration of a wavelength adjustment mechanism of a laser is achieved using a hollow cathode absorption lamp. The lamp is provided with a vaporous material having a precisely known wavelength of maximum absorption. A photo-detector detects the amount of light from the laser beam absorbed by the vaporous material as a function of wavelength. The wavelength of the laser is adjusted to achieve maximum absorption such that the actual laser beam wavelength may be compared with an expected, wavelength to determine a calibration offset. The hollow cathode lamp is operated to produce a vaporous material of known absorption characteristic but is illuminated at a level substantially below a level required for conventional opto-galvanic resonance.

Abstract translation: 使用中空阴极吸收灯实现激光的波长调节机构的校准。 该灯具有具有精确已知的最大吸收波长的气态材料。 光检测器检测作为波长的函数的由气态材料吸收的激光束的光量。 调整激光器的波长以实现最大吸收，使得实际的激光束波长可以与预期的波长进行比较以确定校准偏移。 空心阴极灯被操作以产生已知吸收特性的气态材料，但被照射在基本上低于常规光电共振所需水平的水平。

公开(公告)号：US20050062974A1

公开(公告)日：2005-03-24

申请号：US10869824

申请日：2004-06-16

Applicant: Bengt Ivarsson

Inventor： Bengt Ivarsson

IPC: G01J20060101 ,  G01N21/55

CPC classification number: G01N21/552 ,  G01N21/553 ,  G01N21/648

Abstract: An optical apparatus for total internal reflection spectroscopy comprises: a transparent body having an internally reflective surface; at least one source of electromagnetic radiation for providing at least one beam of collimated electromagnetic radiation; optical scanning means for directing the beam or beams to the transparent body so that the radiation is internally reflected at the reflective surface, and sequentially or continuously scanning the incident angle of the radiation over an angular range; at least one detector for detecting electromagnetic radiation exiting the transparent body, and means for counteracting variation of the irradiance in the illuminated area of the surface during the angular scan, or the effect of such variation on the reflected beam or beams. An optical apparatus for examining thin layer structures on a surface for differences in respect of optical thickness and/or refractive index, and a method for total internal reflection spectroscopy are also disclosed.

Abstract translation: 用于全内反射光谱的光学装置包括：具有内部反射表面的透明体; 用于提供至少一个准直电磁辐射束的至少一个电磁辐射源; 用于将光束或光束引导到透明体的光学扫描装置，使得辐射在反射表面处被内部反射，并且在角度范围内依次或连续地扫描辐射的入射角; 用于检测离开透明体的电磁辐射的至少一个检测器，以及用于在角扫描期间抵消表面的照射区域中的辐照度变化的装置，或这种变化对反射光束或束的影响的装置。 还公开了一种用于检查表面上关于光学厚度和/或折射率的差异的薄层结构的光学装置，以及全内反射光谱法的方法。

公开(公告)号：US5995008A

公开(公告)日：1999-11-30

申请号：US852086

申请日：1997-05-07

Applicant: John D. King ,  Frederick J. Schuler

Inventor： John D. King ,  Frederick J. Schuler

IPC: G01J20060101 ,  G01J3/36 ,  G08B17/12

CPC classification number: G08B17/12

Abstract: An optical fire detector employs two or more sensors operating a different spectral bands. The spectral bands are selected to have approximately coincident cut-off wavelengths in order to make the detector's ability to positively identify a fire more uniform over its field of view. The use of three overlapping spectral bands provides the detector with enhanced detection capabilities for large, hot fires that behave like black body radiators.

Abstract translation: 光学火灾探测器使用两个或更多个传感器来操作不同的光谱带。 选择光谱带具有近似重合的截止波长，以便使得检测器能够在其视野上更均匀地识别火焰的能力。 使用三个重叠的光谱带为检测器提供增强的检测能力，适用于像黑体散热器一样的大型热火。

公开(公告)号：US5420877A

公开(公告)日：1995-05-30

申请号：US093352

申请日：1993-07-16

Applicant: Richard L. Sandstrom

Inventor： Richard L. Sandstrom

IPC: G01J9/00 ,  G01J20060101 ,  G01J9/02 ,  H01S20060101 ,  H01S3/13 ,  H01S5/0687

CPC classification number: G01J9/0246 ,  H01S3/13 ,  H01S5/0687

Abstract: Temperature compensation method and apparatus for wave meters and tunable lasers controlled thereby which avoids the necessity of maintaining a good vacuum in the wave meter housing and which provides the quick establishment of wave length accuracy after laser turn on before temperature stability in the wave meter is reached. In accordance with the method, the wave meter housing is filled preferably with one atmosphere of dry nitrogen, and the wave meter output is corrected for temperature effects by combining the uncorrected or raw wave meter output with an appropriate wave meter temperature dependent component and an additional appropriate rate of change of wave meter temperature dependent component. The net result is the achievement of accuracy and stability in the wave meter output without use of an oven and before a steady state operating temperature is attained.

Abstract translation: 波长计和可调谐激光器的温度补偿方法和装置，从而避免了在波表内保持良好真空的必要性，并且在达到波长计的温度稳定性之前，激光打开后能够快速建立波长精度 。 根据该方法，优选地，用一个大气压的干氮填充波表，并且通过将未校正或原始波长计输出与适当的波长计温度相关分量组合，并对其进行温度效应校正， 波形仪温度相关分量的适当变化率。 最终的结果是在不使用烘箱的情况下以及达到稳态工作温度之前实现了波表输出的精度和稳定性。

公开(公告)号：US20050046825A1

公开(公告)日：2005-03-03

申请号：US10897314

申请日：2004-07-22

Applicant: Gary Powell ,  Herbert Litvak

Inventor： Gary Powell ,  Herbert Litvak

IPC: G01J20060101 ,  G01J3/443 ,  G01N21/00 ,  G01N21/73

CPC classification number: G01N21/73 ,  Y10T436/106664

Abstract: The present invention relates to monitoring chemicals in a process chamber using a spectrometer having a plasma generator, based on patterns over time of chemical consumption. The relevant patterns may include a change in consumption, reaching a consumption plateau, absence of consumption, or presence of consumption. In some embodiments, advancing to a next step in forming structures on the workpiece depends on the pattern of consumption meeting a process criteria. In other embodiments, a processing time standard is established, based on analysis of the relevant patterns. Yet other embodiments relate to controlling work on a workpiece, based on analysis of the relevant patterns. The invention may be either a process or a device including logic and resources to carry out a process.

Abstract translation: 本发明涉及使用具有等离子体发生器的光谱仪的处理室中的化学品监测，其基于化学消耗时间的图形。 相关模式可能包括消费变化，达到消费高原，消费消费或消费存在。 在一些实施例中，前进到在工件上形成结构的下一步骤取决于符合工艺标准的消耗模式。 在其他实施例中，基于相关模式的分析来建立处理时间标准。 其他实施例涉及基于相关模式的分析来控制工件上的工作。 本发明可以是包括用于执行过程的逻辑和资源的过程或设备。

公开(公告)号：US20050041244A1

公开(公告)日：2005-02-24

申请号：US10893331

申请日：2004-07-19

Applicant: Patrick Treado ,  G. Vanni

Inventor： Patrick Treado ,  G. Vanni

IPC: G01B9/02 ,  G01J20060101 ,  G01J3/02 ,  G01J3/10 ,  G01J3/28 ,  G01J3/30 ,  G01J3/44 ,  G01N21/64 ,  G01N21/65 ,  G02F1/1333 ,  G02F1/1335 ,  G02F1/1347

CPC classification number: G01N21/65 ,  G01J3/02 ,  G01J3/0224 ,  G01J3/0229 ,  G01J3/0256 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/0283 ,  G01J3/10 ,  G01J3/44 ,  G01J3/4406 ,  G01N21/6456 ,  G01N2021/6417 ,  G01N2021/6423 ,  G01N2021/6471 ,  G01N2201/0221 ,  G01N2201/0627 ,  G02F1/133371 ,  G02F1/1347

Abstract: The disclosure relates to a method and apparatus for a compact birefringent interference imaging spectrometer. More specifically, the disclosure relates to a portable system for obtaining a spectrum of a sample. The portable system may include a first photon emission source for illuminating the sample with a first plurality of photons to thereby produce photons scattered by the sample; an optical lens for collecting the scattered photons; a filter for receiving the collected scattered photons and providing therefrom filtered photons; a first photon detector for receiving the filtered photons and obtaining therefrom a spectrum of the sample; and a rejection filter for blocking the photons from said first photon emission source from entering said first photon detector. The disclosure additionally relates to methods of using such portable systems.

Abstract translation: 本发明涉及紧凑型双折射干涉成像光谱仪的方法和装置。 更具体地，本公开涉及一种用于获得样品的光谱的便携式系统。 便携式系统可以包括用于用第一多个光子照射样品从而产生由样品散射的光子的第一光子发射源; 用于收集散射光子的光学透镜; 用于接收所收集的散射光子并从其提供过滤的光子的滤光器; 第一光子检测器，用于接收经滤光的光子并从中获得样品的光谱; 以及用于阻挡来自所述第一光子发射源的光子进入所述第一光子检测器的滤波器。 本公开另外涉及使用这种便携式系统的方法。

公开(公告)号：US5957581A

公开(公告)日：1999-09-28

申请号：US866266

申请日：1997-05-30

Applicant: Abraham Katzir ,  Ophir Eyal ,  Vered Scharf

Inventor： Abraham Katzir ,  Ophir Eyal ,  Vered Scharf

IPC: G01J20060101 ,  G01J5/00 ,  G01J5/06 ,  G01K11/00

CPC classification number: G01K11/006

Abstract: A method of active radiometric thermometry. The target, whose temperature is to be measured, is heated briefly and locally, preferably by a pulse of laser radiation. The intensity of infrared or visible radiation emitted by the heated portion of the target is measured as a function of time. The temperature of the target is inferred from the shape of the intensity curve of the emitted radiation as a function of time.

Abstract translation: 一种主动辐射测温法。 要测量其温度的目标被短暂地和局部加热，优选地通过激光辐射的脉冲。 由目标的加热部分发射的红外或可见辐射的强度作为时间的函数被测量。 目标的温度是根据作为时间的函数的发射辐射的强度曲线的形状推断的。

公开(公告)号：US4648711A

公开(公告)日：1987-03-10

申请号：US730007

申请日：1985-05-02

Applicant: Richard E. Zachary

Inventor： Richard E. Zachary

IPC: G01J5/08 ,  F01D17/00 ,  F02C20060101 ,  F02C3/00 ,  F02C7/00 ,  F02C9/26 ,  G01J20060101 ,  G01J5/04 ,  G01J5/48 ,  G01M15/00 ,  G01J5/60

CPC classification number: G01J5/02 ,  G01J5/0088 ,  G01J5/029 ,  G01J5/041 ,  G01J5/08 ,  G01J5/0818 ,  G01J5/60

Abstract: A slight tube assembly, in combination with a sensing instrument, such as an optical pyrometer, for use in continuously monitoring the temperature of the first row of rotating blades in large gas turbines, particularly the type used in industry. Temperature data received by the pyrometer unit is fed to a control circuit, which regulates fuel input to the tubine to control the firing temperature. The key to obtaining reliable blade temperature data in the practice of this invention is the position of the sight tube in the turbine, which enables the pyrometer to "view" the rotating blades along a direct line of sight that penetrates a hot gas duct, but not the turbine section of the engine.

Abstract translation: 与诸如光学高温计的感测仪器组合的轻微管组件，用于连续监测大型燃气轮机中的第一排旋转叶片的温度，特别是在工业中使用的类型。 由高温计单元接收的温度数据被馈送到控制电路，该控制电路调节输入到该管的燃料以控制烧制温度。 在本发明的实践中获得可靠的叶片温度数据的关键是观察管在涡轮机中的位置，其使得高温计能够沿着穿过热气体管道的直接视线“观察”旋转叶片，但是 不是发动机的涡轮段。