-
公开(公告)号：US20200056940A1
公开(公告)日：2020-02-20
申请号：US16662448
申请日：2019-10-24
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Toshimitsu KAWAI
Abstract: A spectral sensor includes a wiring substrate which has a principal surface; a light detector which is disposed on the principal surface of the wiring substrate and is electrically connected to the wiring substrate; spacer which is disposed around the light detector, on the principal surface of the wiring substrate; and a Fabry-Perot interference filter which has a light transmission region and is disposed on the principal surface of the wiring substrate with the spacer therebetween. The spacer support the Fabry-Perot interference filter in a surrounding region of the light transmission region and the spacer is arranged to form opening communicating with an inner side of the surrounding region and an outer side of the surrounding region, when viewed from a light transmission direction in the light transmission region.
-
12.发明申请公开(公告)号：US20190204150A1
公开(公告)日：2019-07-04
申请号：US16303209
申请日：2017-05-01
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
CPC classification number: G02B26/001 , B23K26/0006 , B23K26/064 , B23K26/0643 , B23K26/53 , B23K2101/40 , B23K2103/56 , B81B3/0072 , B81C1/00539 , B81C1/00634 , G01J3/0243 , G01J3/26 , G02B5/284
Abstract: The Fabry-Perot interference filter includes: a substrate having a first surface, a first laminate having a first mirror portion disposed on the first surface, a second laminate having a second mirror portion facing the first mirror portion with an air gap interposed therebetween, and an intermediate layer defining the air gap between the first and second laminate. The substrate has an outer edge portion positioned outside an outer edge of the intermediate layer when viewed from a direction perpendicular to the first surface. The second laminate further includes a covering portion covering the intermediate layer and a peripheral edge portion positioned on the first surface in the outer edge portion. The second mirror portion, the covering portion, and the peripheral edge portion are integrally formed so as to be continuous with each other. The peripheral edge portion is thinned along an outer edge of the outer edge portion.
-
公开(公告)号：US20180348054A1
公开(公告)日：2018-12-06
申请号：US16059744
申请日：2018-08-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Toshimitsu KAWAI
Abstract: A spectral sensor includes a wiring substrate which has a principal surface; a light detector which is disposed on the principal surface of the wiring substrate and is electrically connected to the wiring substrate; spacer which is disposed around the light detector, on the principal surface of the wiring substrate; and a Fabry-Perot interference filter which has a light transmission region and is disposed on the principal surface of the wiring substrate with the spacer therebetween. The spacer support the Fabry-Perot interference filter in a surrounding region of the light transmission region and the spacer is arranged to form opening communicating with an inner side of the surrounding region and an outer side of the surrounding region, when viewed from a light transmission direction in the transmission region.
-
公开(公告)号：US20180113024A1
公开(公告)日：2018-04-26
申请号：US15569101
申请日：2016-04-19
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Masaki HIROSE , Katsumi SHIBAYAMA , Takashi KASAHARA , Toshimitsu KAWAI , Takehiko YASHIRO , Mitsushi MINENO , Shigeru SUZUKI
CPC classification number: G01J3/26 , G01J3/0286 , G01J3/0291 , G01J5/0225 , G01J5/024 , G01J5/045 , G01J5/046 , G01J5/06 , G01J5/0862 , G01J5/10 , G01J2005/068 , G02B5/284 , G02B7/008 , G02B26/001
Abstract: A light detection device includes a Fabry-Perot interference filter, a light detector, a spacer that has a placement surface on which a portion outside a light transmission region in a bottom surface of the interference filter is placed, and an adhesive member that adheres the interference filter and the spacer to each other. Elastic modulus of the adhesive member is smaller than elastic modulus of the spacer. At least a part of a lateral surface of the interference filter is located on the placement surface such that a part of the placement surface of the spacer is disposed outside the lateral surface. The adhesive member is disposed in a corner portion formed by the lateral surface of the interference filter and the part of the placement surface of the spacer and contacts each of the lateral surface and the part of the placement surface.
-
公开(公告)号：US20160357009A1
公开(公告)日：2016-12-08
申请号：US15117757
申请日：2015-02-03
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Toshimitsu KAWAI
IPC: G02B26/00
Abstract: A Fabry-Perot interference filter includes a fixed mirror and a movable mirror disposed opposite to the fixed mirror via a gap, distance between the fixed mirror and the movable in a light transmission region being adjusted by electrostatic force. A plurality of first annular grooves surrounding the light transmission region and a plurality of first through-holes opening to the gap side and the opposite side are formed at a surrounding portion surrounding the light transmission region in the movable mirror.
Abstract translation: 法布里 - 珀罗干涉滤光器包括固定镜和可移动镜，通过间隙与固定镜相对设置，固定镜与可透过静电力调节的光透射区域之间的距离。 围绕透光区域的多个第一环形槽和在间隙侧和相对侧开放的多个第一通孔形成在可移动反射镜中的围绕光透射区域的周围部分。
-
Patent Agency Ranking
公开(公告)号：US20160282181A1
公开(公告)日：2016-09-29
申请号：US15031925
申请日：2014-10-31
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Toshimitsu KAWAI
IPC: G01J3/26
CPC classification number: G01J3/26 , G01J3/0286
Abstract: A spectral sensor includes a wiring substrate which has a principal surface; a light detector which is disposed on the principal surface of the wiring substrate and is electrically connected to the wiring substrate; spacer which is disposed around the light detector, on the principal surface of the wiring substrate; and a Fabry-Perot interference filter which has a light transmission region and is disposed on the principal surface of the wiring substrate with the spacer therebetween. The spacer support the Fabry-Perot interference filter in a surrounding region of the light transmission region and the spacer is arranged to form opening communicating with an inner side of the surrounding region and an outer side of the surrounding region, when viewed from a light transmission direction in the light transmission region.
Abstract translation: 光谱传感器包括具有主表面的布线基板; 光检测器，其布置在所述布线基板的主表面上并电连接到所述布线基板; 布置在布线基板的主表面上的光检测器周围的间隔物; 和法布里 - 珀罗干涉滤光器，其具有透光区域，并且在其间具有间隔物的布线基板的主表面上。 间隔件在透光区域的周围区域中支撑法布里 - 珀罗干涉滤光器，并且隔离件被布置成当从透光性观察时形成与周围区域的内侧和周边区域的外侧连通的开口 光透射区域的方向。
-
公开(公告)号：US20160245697A1
公开(公告)日：2016-08-25
申请号：US15031786
申请日：2014-10-31
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Toshimitsu KAWAI
IPC: G01J3/26
CPC classification number: G01J3/26 , G01J3/0286 , G01J3/45 , G01J5/04 , G01J5/20 , G02B26/001
Abstract: A spectral sensor includes a Fabry-Perot interference filter which is provided with an opening to pass light transmitted according to a distance between a first mirror and a second mirror along a facing direction; a light detector which has a light reception unit to receive the light having passed through the opening; a wiring substrate on which the light detector is mounted; and a plurality of spacers which support the filter on the wiring substrate, such that a second space continuous with a first space in the opening and including the first space when viewed from the facing direction is formed between the filter and the wiring substrate. The light detector is disposed in the second space. The light reception unit is disposed in a region corresponding to the first space in the second space, when viewed from the facing direction.
Abstract translation: 光谱传感器包括法布里 - 珀罗干涉滤光器，其设置有开口，以沿着沿着相对方向的第一反射镜和第二反射镜之间的距离传播的光; 光检测器，其具有用于接收已经穿过所述开口的光的光接收单元; 其上安装有光检测器的布线基板; 以及多个间隔件，其在所述布线基板上支撑所述滤波器，使得在所述滤波器和所述布线基板之间形成有与所述开口中的第一空间连续并且在从所述相对方向观察时包括所述第一空间的第二空间。 光检测器设置在第二空间中。 当从相对的方向观察时，光接收单元设置在与第二空间中的第一空间对应的区域中。
-
公开(公告)号：US20240369410A1
公开(公告)日：2024-11-07
申请号：US18685342
申请日：2022-06-21
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Hiroki OYAMA , Yumi KURAMOTO
Abstract: A light detection system includes a Fabry-Perot interference filter including a first mirror and a second mirror, a distance therebetween being variable, a light detection unit configured to detect light in a wavelength range of λ1 or more and λ2 or less, and a control unit configured to apply a voltage to the Fabry-Perot interference filter such that the distance changes in a distance range of d1 or more and d2 or less. For a transmission spectrum T1 (λ) of light in a case where the distance is d1, a peak transmittance T1 (λa) appears within the wavelength range, and a transmittance T1 (λ2) is less than or equal to 1%. For a transmission spectrum T2 (λ) of light in a case where the distance is d2, a peak transmittance T2 (λb) appears within the wavelength range, and a transmittance T2 (λ1) is less than or equal to 1%.
-
公开(公告)号：US20220026703A1
公开(公告)日：2022-01-27
申请号：US17298316
申请日：2019-09-30
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
Abstract: An optical filter device includes: a Fabry-Perot interference filter that includes: a first structural body having first and second surfaces; a second structural body having a third surface; a first mirror portion provided to the first structural body; a second mirror portion provided to the second structural body so as to face the first mirror portion via an air gap; a first driving electrode provided to the first structural body; a second driving electrode provided to the second structural body; first and third terminals electrically connected to the first driving electrode; and a second terminal electrically connected to the second driving electrode. A distance between the first driving electrode and the air gap is shorter than a distance between the second surface and the air gap. A resistance measurement unit is electrically connected to the first and third terminals and measures a resistance value of the first driving electrode.
-
公开(公告)号：US20220003603A1
公开(公告)日：2022-01-06
申请号：US17294051
申请日：2019-09-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Peter SEITZ , Helmut TEICHMANN , Katsumi SHIBAYAMA , Takashi KASAHARA
Abstract: Provided is a control device for controlling a Fabry-Perot interference filter having a pair of mirror parts and a pair of driving electrodes. The control device includes: a first driving source that is controlled by using a current as a control parameter, and changes the distance between the pair of mirror parts; a second driving source that is controlled by using a voltage as a control parameter, and changes the distance; and a control unit that controls the first driving source and the second driving source in such a way that the distance is changed by a first driving source in a first region and the distance is changed by the second driving source in at least one part of an region other than the first region when an region including a maximum of the voltage is defined as the first region.
-
-
-
-
-
-
-
-
-
Search Results
40
records
(took 0.019 seconds)
