公开(公告)号：US20160363433A1

公开(公告)日：2016-12-15

申请号：US15179189

申请日：2016-06-10

Applicant: TOKYO ELECTRON LIMITED

Inventor： Kippei Sugita ,  Tomohide Minami

IPC: G01B7/14

CPC classification number: G01D5/2417 ,  G01D5/24 ,  G01R27/2605 ,  G06F3/044 ,  G06K9/0002

Abstract: Electrostatic capacitance can be measured with high directivity in a specific direction. A sensor chip that measures the electrostatic capacitance includes a first electrode, a second electrode and a third electrode. The first electrode has a first portion. The second electrode has a second portion extended on the first portion of the first electrode, and is insulated from the first electrode within the sensor chip. The third electrode has a front face extended in a direction which intersects with the first portion of the first electrode and the second portion of the second electrode, and is provided on the first portion and the second portion. The third electrode is insulated from the first electrode and the second electrode within the sensor chip.

Abstract translation: 可以在特定方向上以高方向性测量静电电容。 测量静电电容的传感器芯片包括第一电极，第二电极和第三电极。 第一电极具有第一部分。 第二电极具有在第一电极的第一部分上延伸的第二部分，并且与传感器芯片内的第一电极绝缘。 第三电极具有在与第一电极的第一部分和第二电极的第二部分相交的方向上延伸的前表面，并且设置在第一部分和第二部分上。 第三电极与传感器芯片内的第一电极和第二电极绝缘。

公开(公告)号：US11460355B2

公开(公告)日：2022-10-04

申请号：US16903123

申请日：2020-06-16

Applicant: Tokyo Electron Limited

Inventor： Tong Wu ,  Tomohide Minami

IPC: H01Q1/38 ,  G01K11/26

Abstract: An antenna device according to an exemplary embodiment includes a first metal layer, a first dielectric layer, a second metal layer, and a second dielectric layer. The first dielectric layer has a thermal conductivity and heat resistance that are higher than those of an FR-4 resin. The antenna device includes a first metal terminal and a second metal terminal, and a thermosensor. A pair of an input terminal and an output terminal of the thermosensor are electrically connected to the first metal terminal and the second metal terminal, respectively, and the second metal layer includes a first segment and a second segment. The first metal terminal is disposed above the first segment, and the second metal terminal is disposed above the second segment.

公开(公告)号：US11114321B2

公开(公告)日：2021-09-07

申请号：US16104335

申请日：2018-08-17

Applicant: Tokyo Electron Limited

Inventor： Sylvain Ballandras ,  Thierry Laroche ,  Kimihiro Matsuse ,  Jacques Berg ,  Tomohide Minami

IPC: G01K11/22 ,  H01L21/67 ,  G01K13/00 ,  G01K3/14 ,  H03H9/02 ,  H03H9/25 ,  H03H1/00 ,  H01J37/32 ,  H03H3/08 ,  H03H9/42 ,  G01D5/48 ,  G01K1/02 ,  G01K11/26

Abstract: An apparatus and method for real-time sensing of properties in industrial manufacturing equipment are described. The sensing system includes first plural sensors mounted within a processing environment of a semiconductor device manufacturing system, wherein each sensor is assigned to a different region to monitor a physical or chemical property of the assigned region of the manufacturing system, and a reader system having componentry configured to simultaneously and wirelessly interrogate the plural sensors. The reader system uses a single high frequency interrogation sequence that includes (1) transmitting a first request pulse signal to the first plural sensors, the first request pulse signal being associated with a first frequency band, and (2) receiving uniquely identifiable response signals from the first plural sensors that provide real-time monitoring of variations in the physical or chemical property at each assigned region of the system.

公开(公告)号：US10074549B2

公开(公告)日：2018-09-11

申请号：US15465056

申请日：2017-03-21

Applicant: TOKYO ELECTRON LIMITED

Inventor： Kippei Sugita ,  Tomohide Minami

IPC: G01R27/26 ,  H01L21/67 ,  H01L21/677 ,  H01L21/683 ,  G01D5/24

CPC classification number: H01L21/67253 ,  G01D5/24 ,  H01L21/67748 ,  H01L21/6833

Abstract: In a method for acquiring data indicating an electrostatic capacitance between a focus ring and a measuring device includes a disc-shaped base substrate, sensor units arranged along an edge of the base substrate and a circuit substrate mounted on the base substrate, a processor acquires one or more first data sets respectively including a plurality of digital values indicating an electrostatic capacitance of a corresponding sensor unit. The measuring device is transferred to a region on the mounting table surrounded by the focus ring. The processor acquires second data sets when one or more digital values or an average of the digital values included in each of said one or more first data sets exceeds a first threshold. The processor stores measurement data including the respective second data sets or averages of the digital values of each of the second data sets. The measuring device is unloaded from the chamber.

公开(公告)号：US10018484B2

公开(公告)日：2018-07-10

申请号：US15869298

申请日：2018-01-12

Applicant: Tokyo Electron Limited

Inventor： Kippei Sugita ,  Tomohide Minami

IPC: G01R27/26 ,  G01D5/241 ,  G01D5/24 ,  G06F3/044 ,  G06K9/00

CPC classification number: G01D5/2417 ,  G01D5/24 ,  G01R27/2605 ,  G06F3/044 ,  G06K9/0002

Abstract: Electrostatic capacitance can be measured with high directivity in a specific direction. A sensor chip that measures the electrostatic capacitance includes a first electrode, a second electrode and a third electrode. The first electrode has a first portion. The second electrode has a second portion extended on the first portion of the first electrode, and is insulated from the first electrode within the sensor chip. The third electrode has a front face extended in a direction which intersects with the first portion of the first electrode and the second portion of the second electrode, and is provided on the first portion and the second portion. The third electrode is insulated from the first electrode and the second electrode within the sensor chip. No portion is extended from the first electrode to be positioned above the first portion.

公开(公告)号：US20160363556A1

公开(公告)日：2016-12-15

申请号：US15179306

申请日：2016-06-10

Applicant: TOKYO ELECTRON LIMITED

Inventor： Kippei Sugita ,  Tomohide Minami

IPC: G01N27/24

CPC classification number: G01N27/24 ,  G01R27/2605 ,  G01R31/265 ,  G01R31/2831 ,  G01R31/318511 ,  H01J37/32009 ,  H01J37/321 ,  H01J37/32211

Abstract: A system of inspecting a focus ring is provided. The system includes a measuring device, a transfer device and an operation unit. The measuring device includes a base substrate, a sensor chip and a circuit board. The sensor chip has a sensor electrode and is provided along an edge of the base substrate. The circuit board is configured to output a high frequency signal to the sensor electrode and acquire a digital value indicating electrostatic capacitance based on a voltage amplitude in the sensor electrode. The transfer device is configured to scan the measuring device. The operation unit is configured to obtain difference values by performing a difference operation with respect to the digital values acquired by the measuring device at multiple positions along a direction which intersects with an inner periphery of the focus ring.

Abstract translation: 提供了一种检查对焦环的系统。 该系统包括测量装置，传送装置和操作单元。 测量装置包括基底，传感器芯片和电路板。 传感器芯片具有传感器电极并且沿着基底基板的边缘设置。 电路板被配置为向传感器电极输出高频信号，并且基于传感器电极中的电压振幅获取表示静电电容的数字值。 传送装置被配置为扫描测量装置。 操作单元被配置为通过对与测量装置在与聚焦环的内周相交的方向的多个位置处获取的数字值执行差分运算来获得差值。