公开(公告)号：US20060114462A1

公开(公告)日：2006-06-01

申请号：US11210729

申请日：2005-08-25

Applicant: Mei-feng Zhou ,  Chang-fu Yi

Inventor： Mei-feng Zhou ,  Chang-fu Yi

IPC: G01J3/46

CPC classification number: G01J9/00 ,  G01J3/0213 ,  G01J3/0272 ,  G01J9/0246

Abstract: A measuring-wavelength apparatus includes a beam splitter (2), a first optical sensor (6), a second optical sensor (7), a signal-attenuation component (5) and a processing unit (8). A measuring-wavelength method comprising: splitting an incoming light into a first beam and a second beam; transforming the first beam into a first output signal; attenuating the second beam by using a signal-attenuation component; transforming the attenuated second beam into a second output signal; calculating a difference between the first and the second output signals to achieve an optical loss of the light; and in view of the optical loss, looking up a reference table to obtain a wavelength of the light.

Abstract translation: 测量波长装置包括分束器（2），第一光学传感器（6），第二光学传感器（7），信号衰减部件（5）和处理单元（8）。 一种测量波长方法，包括：将入射光分成第一光束和第二光束; 将所述第一光束变换为第一输出信号; 通过使用信号衰减分量衰减第二光束; 将衰减的第二波束变换为第二输出信号; 计算第一和第二输出信号之间的差以实现光的光损失; 并且考虑到光损耗，查找参考表以获得光的波长。

公开(公告)号：US20060072633A1

公开(公告)日：2006-04-06

申请号：US10953048

申请日：2004-09-29

Applicant: Dale Flanders ,  Xinfa Ma ,  Walid Atia

Inventor： Dale Flanders ,  Xinfa Ma ,  Walid Atia

IPC: H01S3/10

CPC classification number: G01N21/39 ,  G01J1/4257 ,  G01J3/02 ,  G01J3/0213 ,  G01J3/0256 ,  G01J3/10 ,  G01J3/26 ,  G01J3/433 ,  G01J2003/2866 ,  G01N2021/391 ,  G01N2021/399 ,  G01N2201/08 ,  H01S3/08013 ,  H01S3/083 ,  H01S5/005 ,  H01S5/0064 ,  H01S5/02252 ,  H01S5/141

Abstract: An optical power control system for a semiconductor source spectroscopy system controls power fluctuations in the tunable signal from the spectroscopy system and thus improves the noise performance of the system. This general solution has advantages relative to other systems that simply detect reference power levels during the scan and then correct the detected signal after interaction with the sample by reducing the requirements for coordinating the operation of the sample detectors and power or reference detectors. The spectroscopy system comprises a semiconductor source and a tunable filter. The combination of the semiconductor source and tunable signal illuminate a sample with a tunable signal, being tunable over a scan band. The power control system comprises an amplitude detector system for detecting the power of the tunable optical signal and power control system for regulating the amplitude of the tunable optical signal in response to its detected power.

Abstract translation: 用于半导体源光谱系统的光功率控制系统控制来自光谱系统的可调谐信号中的功率波动，从而改善系统的噪声性能。 该通用解决方案相对于在扫描期间简单地检测参考功率电平然后在与样品相互作用之后校正检测到的信号的其它系统具有优点，通过减少协调样品检测器和功率或参考检测器的操作的要求。 光谱系统包括半导体源和可调谐滤波器。 半导体源和可调信号的组合用可调信号照射样品，可在扫描带上调谐。 功率控制系统包括用于检测可调谐光信号的功率的振幅检测器系统和用于响应于其检测到的功率来调节可调谐光信号的幅度的功率控制系统。

公开(公告)号：US06388794B2

公开(公告)日：2002-05-14

申请号：US09846583

申请日：2001-05-01

Applicant: Thomas W. Hagler

Inventor： Thomas W. Hagler

IPC: G02B2602

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0213 ,  G01J3/0229 ,  G01J3/0289 ,  G01J3/12 ,  G01J3/18 ,  G01J3/32 ,  G01J3/433 ,  G01J2001/4242 ,  G01J2003/2866

Abstract: A disc serving as a spatial radiation modulator has dispersed radiation filters thereon. Each filter has a transmittance or reflectance modulation function of the form sin2(m&thgr;+p&pgr;/4), where m is a positive integer and p has one of the four values 0, 1, 2, 3. A radiation beam including selected wavelength components is diffracted into an elongated image dispersed according to wavelength. Different wavelength components are focused onto different filters on the modulator and are encoded by correspond filters. Since the modulation functions of the filters are orthogonal to one another, it is possible to extract the amplitude of each wavelength component after it has been encoded or modulated by corresponding filter from the total detected signal during one measurement.

Abstract translation: 用作空间辐射调制器的盘在其上具有分散的辐射滤波器。 每个滤波器具有形式为sin2（mtata + ppi / 4）的透射率或反射率调制函数，其中m是正整数，p具有四个值0,1,2,3中的一个。包括选择的波长分量 被衍射成根据波长分散的细长图像。 不同的波长分量聚焦在调制器上的不同滤波器上，并由相应的滤波器编码。 由于滤波器的调制功能彼此正交，因此可以在一次测量期间从总检测信号对相应的滤波器进行编码或调制之后提取每个波长分量的振幅。

公开(公告)号：US5999271A

公开(公告)日：1999-12-07

申请号：US88438

申请日：1998-06-01

Applicant: Ishiang Shih ,  Linh Ngo Phong ,  Shaolin Shi ,  Cindy Xing Qiu

Inventor： Ishiang Shih ,  Linh Ngo Phong ,  Shaolin Shi ,  Cindy Xing Qiu

IPC: G01J3/51 ,  G01J9/00 ,  G01S7/483 ,  G01N21/25

CPC classification number: G01J9/00 ,  G01J3/51 ,  G01S7/483 ,  G01J3/0213

Abstract: Methods for wavelength determination of a monochromatic light beam are described. The methods involve a detector unit containing at least one pair of photo detectors. One of the detectors in each detector pair is covered with a variable attenuator and the other is not covered by the variable attenuator. The optical transmission coefficient of the variable attenuator is a monotonic function of wavelength. Under illumination of a monochromatic light, the photocurrents produced in the detectors with and without the variable attenuator are compared. The relative values of the photocurrents are used to determine the wavelength of the monochromatic light.

Abstract translation: 描述了单色光束的波长确定方法。 该方法涉及包含至少一对光电检测器的检测器单元。 每个检测器对中的一个检测器被可变衰减器覆盖，另一个不被可变衰减器覆盖。 可变衰减器的光透射系数是波长的单调函数。 在单色光的照明下，比较具有和不具有可变衰减器的检测器中产生的光电流。 光电流的相对值用于确定单色光的波长。

公开(公告)号：US4932780A

公开(公告)日：1990-06-12

申请号：US116233

申请日：1987-11-03

Applicant: Akio Izumi

Inventor： Akio Izumi

IPC: G01B9/02

CPC classification number: G01B9/02019 ,  G01B9/02028 ,  G01J3/021 ,  G01J3/0213 ,  G01J3/4535

Abstract: In an interferometer comprising a beam splitter made up of a parallel planar plate and translucent (that is, semi-reflecting) films formed on both sides thereof, and a pair of reverse reflectors disposed at predetermined distances from the two surfaces of the beam splitter, an incident beam is split into two beams by one of the translucent films, and the two beams are reflected by the reverse reflectors, thus interfering with each other at the other translucent film.

Abstract translation: 在包括由平行平面板和形成在其两侧上的半透明（即半反射））膜构成的分束器的干涉仪中，以及以与分束器的两个表面预定距离设置的一对反向反射器， 入射光束被半透明膜之一分成两束光束，两束光被反射镜反射，从而在另一半透明膜处彼此干涉。

公开(公告)号：US3308712A

公开(公告)日：1967-03-14

申请号：US32191663

申请日：1963-11-06

Applicant: IBM

Inventor： KAY RONALD H

IPC: G01J3/00 ,  G01J3/12 ,  G01J3/26

CPC classification number: G01J3/26 ,  G01J3/0213 ,  G01J3/0229 ,  G01J3/1256 ,  G01J2003/1234

公开(公告)号：US2867916A

公开(公告)日：1959-01-13

申请号：US46315554

申请日：1954-10-19

Applicant: BERTRAM MICHAEL LANDEMANN

Inventor： BIRDSEYE SIDNEY H

IPC: G01J3/52

CPC classification number: G01J3/10 ,  G01J3/02 ,  G01J3/0213 ,  G01J2003/1213

公开(公告)号：US12104954B2

公开(公告)日：2024-10-01

申请号：US17844919

申请日：2022-06-21

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Suyeon Lee ,  Unjeong Kim ,  Hojung Kim

IPC: G01J3/32 ,  G01J3/02 ,  G01J3/10 ,  G01J3/28 ,  G01N21/01 ,  G01N21/17 ,  G01N21/25 ,  G01N21/31 ,  G01N21/33

CPC classification number: G01J3/32 ,  G01J3/0213 ,  G01J3/10 ,  G01J3/2803 ,  G01J3/2823 ,  G01N21/255 ,  G01N21/314 ,  G01N21/33 ,  G01J2003/2813 ,  G01J2003/2826 ,  G01N2021/0168 ,  G01N2021/1765 ,  G01N2021/317 ,  G01N2201/0221

Abstract: An apparatus for detecting an ultraviolet blocking material includes a light receiver configured to acquire detection light from a target object; a spectrum signal generator configured to generate spectrum signals based on the detection light; and a processor configured to: select a reference wavelength from a range from about 290 nm to about 400 nm, and detect an ultraviolet blocking material based on a first spectrum signal of a first wavelength less than the reference wavelength and a second spectrum signal of a second wavelength greater than the reference wavelength, the first spectrum signal and the second spectrum signal being generated by the spectrum signal generator.

公开(公告)号：US20190017871A1

公开(公告)日：2019-01-17

申请号：US16031409

申请日：2018-07-10

Applicant: NANOLAMBDA KOREA

Inventor： Byung IL Choi

IPC: G01J3/02 ,  G01J3/28 ,  G01J3/18

CPC classification number: G01J3/0254 ,  G01J3/0213 ,  G01J3/0218 ,  G01J3/0297 ,  G01J3/14 ,  G01J3/18 ,  G01J3/28 ,  G01J3/2803 ,  G01J3/2823 ,  G01J2003/1208 ,  G01J2003/2806

Abstract: Spectrum sensors can be continuously calibrated in a manufacturing environment employing a continuously moving platform that carries the spectrum sensors in combination with spatially separated light spectra illuminating a region of the platform. A plurality of spectrum sensors, each including multiple sensor pixels, can be placed on the platform. The spatially separated light spectra can be illuminated over an area of the platform. The plurality of spectrum sensors can be moved with the platform through a region of the spatially separated light spectrum. Each sensor pixel for each of the plurality of spectrum sensors can be calibrated based on response of each spectral channel during passage through the spatially separated light spectra. The entire spectra from a light source can be employed simultaneously to calibrate multiple spectrum sensors in the manufacturing environment.

公开(公告)号：US20180284273A1

公开(公告)日：2018-10-04

申请号：US15764358

申请日：2016-09-26

Applicant: Heptagon Micro Optics Pte. Ltd.

Inventor： Bernhard Buettgen ,  Gözen Köklü ,  Daniel Furrer ,  Stephan Beer ,  Miguel Bruno Vaello Paños

IPC: G01S17/08 ,  G01J3/28 ,  G01J3/02 ,  G01S17/89 ,  H04N5/33 ,  G06T7/514

CPC classification number: G01S17/08 ,  G01B11/00 ,  G01C3/08 ,  G01J3/0208 ,  G01J3/0213 ,  G01J3/0216 ,  G01J3/0229 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/36 ,  G01J2003/2806 ,  G01S17/89 ,  G06T7/514 ,  G06T2207/10024 ,  H01L27/14621 ,  H01L27/14627 ,  H01L27/14825 ,  H04N5/332

Abstract: An optoelectronic module operable to acquire distance data and spectral data includes an array of demodulation pixels and an array of spectral filters. The demodulation pixels can possess an intrinsic wavelength-dependent sensitivity, wherein the intrinsic wavelength-dependent sensitivity can be offset by an intensity balancing micro-lens array in some cases. In some cases, the intrinsic wavelength-dependent sensitivity can be offset by a combined filter array, while in other cases the intrinsic wavelength-dependent sensitivity can be offset by an intensity balancing filter array. Still in other cases, the demodulation pixels can be operable in such as to offset the intrinsic wavelength-dependent sensitivity.