公开(公告)号：US09513233B2

公开(公告)日：2016-12-06

申请号：US14354855

申请日：2012-10-29

Applicant: THE UNIVERSITY OF CHICAGO

Inventor： Patrick La Riviere ,  Yuxin Steve Wang ,  Darin Clark ,  Keith Cheng

IPC: A61B6/00 ,  G01N23/04 ,  G01N23/223 ,  G06T19/00 ,  G01N23/225 ,  B82Y10/00 ,  A61B6/03

CPC classification number: G01N23/04 ,  A61B6/032 ,  A61B6/482 ,  A61B6/508 ,  B82Y10/00 ,  G01N23/046 ,  G01N23/223 ,  G01N23/2251 ,  G01N2223/0766 ,  G01N2223/6126 ,  G06T19/00 ,  G06T2210/41 ,  G21K2201/061 ,  G21K2201/064

Abstract: Systems and methods are provided for staining tissue with multiple biologically specific heavy metal stains and then performing X-ray imaging, either in projection or tomography modes, using either a plurality of illumination energies or an energy sensitive detection scheme. The resulting energy-weighted measurements can then be used to decompose the resulting images into quantitative images of the distribution of stains. The decomposed images may be false-colored and recombined to make virtual X-ray histology images. The techniques thereby allow for effective differentiation between two or more X-ray dyes, which had previously been unattainable in 3D imaging, particularly 3D imaging of features at the micron resolution scale. While techniques are described in certain example implementations, such as with microtomography, the techniques are scalable to larger fields of view, allowing for use in 3D color, X-ray virtual histology of pathology specimens.

Abstract translation: 提供了用多个生物特异性重金属染色染色组织的系统和方法，然后使用多个照明能量或能量敏感检测方案，以投影或断层摄影模式进行X射线成像。 然后，所得到的能量加权测量可用于将所得图像分解成污渍分布的定量图像。 分解图像可能是假色的并重新组合以制作虚拟X射线组织学图像。 因此，这些技术允许两种或多种X射线染料之间的有效区分，其先前在3D成像中是不可实现的，特别是在微米分辨率刻度上的特征的3D成像。 虽然技术在某些示例实现中被描述，例如利用微影像技术，但是这些技术可以扩展到更大的视野，允许在3D颜色，病理标本的X射线虚拟组织学中使用。

公开(公告)号：US09411238B2

公开(公告)日：2016-08-09

申请号：US14372950

申请日：2013-01-10

Applicant: ASML Netherlands B.V.

Inventor： Andrei Mikhailovich Yakunin ,  Vadim Yevgenyevich Banine ,  Johannes Hubertus Josephina Moors ,  Jan Bernard Plechelmus Van Schoot ,  Martinus Cornelis Maria Verhagen ,  Olav Waldemar Vladimir Frijns ,  Vladimir Mihailovitch Krivtsun ,  Gerardus Hubertus Petrus Maria Swinkels ,  Michel Riepen ,  Hendrikus Gijsbertus Schimmel ,  Viacheslav Medvedev

IPC: H05G2/00 ,  G03F7/20 ,  G21K1/06

CPC classification number: G03F7/70033 ,  G03F7/70166 ,  G03F7/70191 ,  G03F7/70575 ,  G03F7/70916 ,  G21K1/067 ,  G21K2201/064 ,  H05G2/008

Abstract: A source-collector device includes a target unit having a target surface of plasma-forming material and a laser unit to generate a beam of radiation directed onto the target surface to form a plasma from said plasma-forming material. A contaminant trap is provided to reduce propagation of particulate contaminants generated by the plasma. A radiation collector includes a one or more grazing-incidence reflectors arranged to collect radiation emitted by the plasma and form a beam therefrom, and a filter is configured to attenuate at least one wavelength range of the beam.

Abstract translation: 源极 - 集电极器件包括具有等离子体形成材料的靶表面的靶单元和用于产生被引导到靶表面上的辐射束以形成来自所述等离子体形成材料的等离子体的激光单元。 提供污染物阱以减少由等离子体产生的颗粒污染物的传播。 辐射收集器包括一个或多个放射入射反射器，其布置成收集由等离子体发射的辐射并从其形成光束，并且滤光器被配置为衰减光束的至少一个波长范围。

公开(公告)号：US09335280B2

公开(公告)日：2016-05-10

申请号：US14349732

申请日：2012-10-03

Applicant: X-RAY OPTICAL SYSTEMS, INC.

Inventor： Steven M. Pomerantz ,  John H. Burdett ,  Rory D. Delaney

IPC: H05G1/02 ,  G01N23/10 ,  G01N23/223

CPC classification number: G21F5/015 ,  G01N23/10 ,  G01N23/223 ,  G01N2223/074 ,  G01N2223/076 ,  G01N2223/301 ,  G01N2223/308 ,  G01N2223/309 ,  G21K2201/062 ,  G21K2201/064

Abstract: A mobile transport and shielding apparatus, which holds an x-ray analyzer for transport between operating sites, and also serves as a shielded, operational station for holding the x-ray analyzer during operation thereof. The x-ray analyzer is removably insertable into the apparatus and is operable either within the mobile transport and shielding apparatus, or outside of the apparatus. The apparatus may provide means to control, power, cool, and/or charge the x-ray analyzer during operation of the analyzer; and also means to transport the analyzer (e.g., a handle).

Abstract translation: 一种移动式运输和屏蔽装置，其保持用于在操作现场之间运输的x射线分析仪，并且还用作在其操作期间保持x射线分析仪的屏蔽操作台。 X射线分析仪可移除地插入设备中，并且可在移动传输和屏蔽设备内或设备外部操作。 该装置可以提供在分析仪操作期间对x射线分析仪进行控制，供电，冷却和/或充电的装置; 并且还用于运送分析器（例如，手柄）。

公开(公告)号：US20160111177A1

公开(公告)日：2016-04-21

申请号：US14893911

申请日：2014-05-21

Applicant: David Alan Bates

Inventor： David Alan Bates

IPC: G21K1/06 ,  G01N23/227 ,  H05G1/02

CPC classification number: G21K1/067 ,  G01N23/2273 ,  G21K1/06 ,  G21K2201/062 ,  G21K2201/064 ,  H01J35/02 ,  H01J2235/163 ,  H05G1/02

Abstract: An X-ray source comprising: an elongate tubular housing adapted to be fitted into a port of and extend into a chamber containing a sample to be analysed, said housing containing: an electron gun and a target mounted in the housing, the electron gun being arranged to direct electrons to a point on the target such that the target radiates X-rays; and a monochromator arranged to focus X-rays radiated from the target to a focal point on a sample in the chamber; wherein the monochromator is positioned, and comprises a material selected such that the target, the monochromator and the focal point on the sample are substantially in-line within the envelope of the tubular housing.

Abstract translation: 一种X射线源，包括：细长管状壳体，其适于装配到容纳要分析的样品的腔室中并且延伸到容纳待分析样品的腔室中，所述壳体包含：电子枪和安装在壳体中的靶，电子枪为 被布置成将电子引导到目标上的点，使得目标辐射X射线; 以及单色仪，其被布置成将从所述目标辐射的X射线聚焦到所述腔室中的样品上的焦点; 其中所述单色仪被定位，并且包括选择的材料，使得所述样品上的所述靶，所述单色仪和所述焦点基本上在所述管状壳体的封套内成直线。

公开(公告)号：US20160069825A1

公开(公告)日：2016-03-10

申请号：US14651813

申请日：2013-12-10

Applicant: inter-University Research Institute Corporation High Energy Accelerator Research Organization

Inventor： Tadashi Matsushita ,  Wolfgang Voegeli ,  Tetsuro Shirasawa ,  Toshio Takahashi ,  Etsuo Arakawa

IPC: G01N23/20

CPC classification number: G01N23/20008 ,  G01N23/20 ,  G21K2201/062 ,  G21K2201/064

Abstract: It is an object of the present invention to provide a method and an apparatus for measuring a scattering intensity distribution capable of measuring a scattering intensity distribution in a reciprocal space in a short time. The method or apparatus for measuring a scattering intensity distribution causes X-rays emitted from an X-ray source (101) to be reflected by an X-ray optical element (102) so as to converge in the vicinity of a surface of a sample (SA), causes monochromatic X-rays condensed after passing through a plurality of optical paths to be incident on the sample at glancing angles (ω) that differ depending on the respective optical paths at a time in a state in which there is a correlation between an angle formed by each optical path of the monochromatic X-rays and a reference plane, and an angle formed by each optical path and a plane including the normal of the reference plane and an optical path located in the center of the respective optical paths, detects scattering intensities of the monochromatic X-rays scattered by the sample using a two-dimensional detector (103) and calculates a scattering intensity distribution in the reciprocal space based on the scattering intensity distribution detected by the two-dimensional detector and the correlation.

Abstract translation: 本发明的目的是提供一种用于测量在短时间内能够测量往复空间中的散射强度分布的散射强度分布的方法和装置。 用于测量散射强度分布的方法或装置使得从X射线源（101）发射的X射线被X射线光学元件（102）反射，以便在样品表面附近会聚 （SA），使得在通过多个光路之后会聚的单色X射线以与扫描角（ω）不同的入射到样品的样品，所述扫描角（ω）在存在相关性的状态下的每个光路上不同 在由单色X射线的每个光路形成的角度和参考平面之间以及由每个光路形成的角度和包括基准平面的法线的平面和位于各个光路的中心的光路之间 使用二维检测器（103）检测由样本散射的单色X射线的散射强度，并且基于散射强度分布d计算往复空间中的散射强度分布 由二维检测器和相关性检测。

公开(公告)号：US09240254B2

公开(公告)日：2016-01-19

申请号：US13246488

申请日：2011-09-27

Applicant: Bruno W. Schueler ,  David A. Reed ,  Jeffrey Thomas Fanton ,  Rodney Smedt

Inventor： Bruno W. Schueler ,  David A. Reed ,  Jeffrey Thomas Fanton ,  Rodney Smedt

IPC: G01N23/223 ,  G21K1/00 ,  G21K1/06 ,  G01N23/227

CPC classification number: G21K1/06 ,  G01N23/223 ,  G01N23/2273 ,  G01N2223/61 ,  G21K2201/062 ,  G21K2201/064

Abstract: Systems and methods for characterizing films by X-ray photoelectron spectroscopy (XPS) are disclosed. For example, a system for characterizing a film may include an X-ray source for generating an X-ray beam having an energy below the k-edge of silicon. A sample holder may be included for positioning a sample in a pathway of the X-ray beam. A first detector may be included for collecting an XPS signal generated by bombarding the sample with the X-ray beam. A second detector may be included for collecting an X-ray fluorescence (XRF) signal generated by bombarding the sample with the X-ray beam. Monitoring/estimation of the primary X-ray flux at the analysis site may be provided by X-ray flux detectors near and at the analysis site. Both XRF and XPS signals may be normalized to the (estimated) primary X-ray flux to enable film thickness or dose measurement without the need to employ signal intensity ratios.

Abstract translation: 公开了通过X射线光电子能谱（XPS）表征膜的系统和方法。 例如，用于表征胶片的系统可以包括用于产生具有低于硅的k边缘的能量的X射线束的X射线源。 可以包括样品保持器以将样品定位在X射线束的通路中。 可以包括第一检测器以收集通过用X射线束轰击样品而产生的XPS信号。 可以包括第二检测器，用于收集通过用X射线束轰击样品而产生的X射线荧光（XRF）信号。 在分析现场的X射线通量探测器附近和分析现场可以提供监测/估计分析现场的主要X射线通量。 XRF和XPS信号都可以归一化为（估计的）初级X射线通量，以实现膜厚度或剂量测量，而不需要使用信号强度比。

公开(公告)号：US09235137B2

公开(公告)日：2016-01-12

申请号：US13370829

申请日：2012-02-10

Applicant: Damian Fiolka ,  Ralf Stuetzle

Inventor： Damian Fiolka ,  Ralf Stuetzle

IPC: G03B27/72 ,  G03F7/20 ,  G02B27/09 ,  G21K1/06 ,  G21K1/16

CPC classification number: G03F7/70233 ,  G02B27/0905 ,  G02B27/0977 ,  G03F7/70075 ,  G03F7/70116 ,  G03F7/70175 ,  G03F7/702 ,  G03F7/70566 ,  G21K1/06 ,  G21K1/16 ,  G21K2201/06 ,  G21K2201/064 ,  G21K2201/067

Abstract: An illumination optical unit includes a collector mirror which produces a polarization distribution that is applied to the first faceted optical element during the operation of the illumination optical unit. There are at least two first facet elements to which radiation having a differing polarization is applied. The first faceted optical element has at least one first state in which the normal vectors of the reflective surfaces of the first facet elements are selected so that a first predetermined polarization distribution results at the location of the object field during the operation of the illumination optical unit.

Abstract translation: 照明光学单元包括集光镜，其在照明光学单元的操作期间产生施加到第一刻面光学元件的偏振分布。 存在施加具有不同极化的辐射的至少两个第一小面元件。 第一刻面光学元件具有至少一个第一状态，其中第一面元件的反射表面的法向矢量被选择为使得在照明光学单元的操作期间在物场的位置处产生第一预定偏振分布 。

公开(公告)号：US09063277B2

公开(公告)日：2015-06-23

申请号：US13332582

申请日：2011-12-21

Applicant: Fumitaro Masaki ,  Akira Miyake

Inventor： Fumitaro Masaki ,  Akira Miyake

IPC: B05D5/06 ,  F21V9/04 ,  G03B27/32 ,  G03B27/54 ,  G02B5/08 ,  G03F7/20 ,  G21K1/06 ,  B82Y10/00

CPC classification number: G02B5/0816 ,  B82Y10/00 ,  G03F7/702 ,  G03F7/70233 ,  G03F7/70316 ,  G03F7/70958 ,  G21K1/062 ,  G21K2201/064 ,  G21K2201/067

Abstract: A method of manufacturing a mirror includes a first step of arranging, on a substrate, a shape adjusting layer having a layer thickness which changes by heat, a second step of arranging, on the shape adjusting layer, a reflection layer including a first layer, a second layer, and a barrier layer which is arranged between the first layer and the second layer, and prevents a diffusion of a material of the first layer and a material of the second layer, and a third step of bringing a shape of the reflection layer close to a target shape by changing a layer thickness profile of the shape adjusting layer after the second step, the third step including a process of partially annealing the shape adjusting layer.

Abstract translation: 一种制造反射镜的方法包括：在基板上布置具有由热变化的层厚度的形状调整层的第一步骤，在形状调整层上布置包括第一层的反射层的第二步骤， 第二层和布置在第一层和第二层之间的阻挡层，并且防止第一层的材料和第二层的材料的扩散，以及使反射形状的第三步骤 通过在第二步骤之后改变形状调整层的层厚度轮廓，接近目标形状的层，第三步骤包括部分退火形状调节层的过程。

公开(公告)号：US09057962B2

公开(公告)日：2015-06-16

申请号：US13691804

申请日：2012-12-02

Applicant: Natale M. Ceglio ,  Giovanni Nocerino ,  Fabio Zocchi

Inventor： Natale M. Ceglio ,  Giovanni Nocerino ,  Fabio Zocchi

IPC: G03F7/20 ,  G21K1/06

CPC classification number: G03F7/70033 ,  G03F7/2004 ,  G21K1/067 ,  G21K2201/064

Abstract: A source-collector module for an extreme ultraviolet (EUV) lithography system, the module including a laser-produced plasma (LPP) that generates EUV radiation and a grazing-incidence collector (GIC) mirror arranged relative thereto and having an input end and an output end. The LPP is formed using an LPP target system wherein a pulsed laser beam travels on-axis through the GIC and is incident upon solid, moveable LPP target. The GIC mirror is arranged relative to the LPP to receive the EUV radiation therefrom at its input end and focus the received EUV radiation at an intermediate focus adjacent the output end. An example GIC mirror design is presented that includes a polynomial surface-figure correction to compensate for GIC shell thickness effects, thereby improve far-field imaging performance.

Abstract translation: 一种用于极紫外（EUV）光刻系统的源极收集器模块，该模块包括产生EUV辐射的激光产生等离子体（LPP）和相对于其放置的放射入射收集器（GIC）反射镜，并且具有输入端和 输出端。 LPP使用LPP目标系统形成，其中脉冲激光束在轴上行进通过GIC并入射到固体，可移动的LPP靶上。 GIC反射镜相对于LPP布置，以在其输入端接收EUV辐射，并将接收的EUV辐射聚焦在邻近输出端的中间焦点。 提出了一个示例GIC镜面设计，其中包括一个多项式曲面图校正，以补偿GIC外壳厚度效应，从而提高远场成像性能。

公开(公告)号：US09029815B2

公开(公告)日：2015-05-12

申请号：US13583471

申请日：2011-03-02

Applicant: Hiroto Sato

Inventor： Hiroto Sato

IPC: G02B5/08 ,  G03F7/20 ,  H05G2/00

CPC classification number: G03F7/70166 ,  G03F7/70891 ,  G03F7/70958 ,  G21K2201/064 ,  H05G2/001

Abstract: A deterioration of the collector performance in an extreme ultraviolet light source device due to a heat deformation of the collector mirror assembly is to be prevented. The collector mirror assembly used in the extreme ultraviolet light source device comprises a plurality of reflective shells 21 with different diameters which are shaped as ellipsoids of revolution or hyperboloids of revolution, wherein the reflective shells 21 are arranged in a nested shape and the ends thereof are held by a holding structure 22. A cooling channel, through which a cooling medium flows is mounted at the reflective shell 21 in the axial direction of the reflective shell on the face being the back side of the reflective surface. This cooling channel acts as a reinforcement material and is able to suppress a heat deformation of the reflective shell 21. By using molybdenum as the material for the reflective shells 21, the heat deformation can be suppressed even further, and by providing cooling channels in the holding structure 22, the collector mirror assembly can be cooled even more efficiently and a heat deformation thereof can be suppressed.

Abstract translation: 防止由于集光镜组件的热变形引起的极紫外光源装置的集电体性能的劣化。 在极紫外光源装置中使用的收集器反射镜组件包括多个具有不同直径的反射壳21，其形状为旋转的椭圆形或旋转双曲面，其中反射壳21以嵌套形状布置，其端部为 由保持结构22保持。冷却介质流过的冷却通道在反射壳体的轴向方向上安装在反射壳体21的作为反射表面的背面的面上。 该冷却通道用作增强材料，并且能够抑制反射壳体21的热变形。通过使用钼作为反射壳体21的材料，可以进一步抑制热变形，并且通过在 可以更有效地冷却收集镜组件，并且可以抑制其热变形。