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公开(公告)号：US2052103A
公开(公告)日：1936-08-25
申请号：US53627031
申请日：1931-05-09
Applicant: PHILIPS NV
Inventor： WILHELM MULDER JOHANNES GIJSBE , GILLES HOLST
IPC: H01J17/06
CPC classification number: H01J17/06
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公开(公告)号：US2007932A
公开(公告)日：1935-07-09
申请号：US47730530
申请日：1930-08-23
Applicant: SIRIAN LAMP CO
Inventor： SAMUEL RUBEN
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公开(公告)号：US1668387A
公开(公告)日：1928-05-01
申请号：US72341724
申请日：1924-06-30
Applicant: MARTIN THIELERS
Inventor： MARTIN THIELERS
IPC: H01J17/06
CPC classification number: H01J17/06
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公开(公告)号：US09941087B2
公开(公告)日：2018-04-10
申请号：US15410711
申请日：2017-01-19
Applicant: Axcelis Technologies, Inc.
Inventor： Neil K. Colvin , Tseh-Jen Hsieh , Paul b. Silverstein
CPC classification number: H01J17/06 , H01J17/186 , H01J27/022 , H01J27/08 , H01J37/08 , H01J37/3171 , H01J2237/006 , H01J2237/061
Abstract: An ion source has an arc chamber having an arc chamber body. An electrode extends into an interior region of the arc chamber body, and a cathode shield has a body that is cylindrical having an axial hole. The axial hole is configured to pass the electrode therethrough. First and second ends of the body have respective first and second gas conductance limiters. The first gas conductance limiter extends from an outer diameter of the body and has a U-shaped lip. The second gas conductance limiter has a recess for a seal to protect the seal from corrosive gases and maintain an integrity of the seal. A gas source introduces a gas to the arc chamber body. A liner has an opening configured to pass the cathode shield therethrough, where the liner has a recess. A gap is defined between the U-shaped lip and the liner, wherein the U-shaped lip reduces a conductance of gas into the gap and the recess further reduces conductance of gas into the region.
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公开(公告)号：US09934927B1
公开(公告)日：2018-04-03
申请号：US15666974
申请日：2017-08-02
Applicant: College of William and Mary
Inventor： M. Mumtaz Qazilbash , David J. Lahneman
CPC classification number: H01J17/28 , H01J17/06 , H01J17/10 , H01J17/16 , H01J17/20 , H01J61/16 , H01J61/302 , H01J61/52 , H01J61/54 , H01J61/88
Abstract: A system for generating infrared light includes a sealed housing and a noble gas filling the housing. A window disposed in a wall of the housing is transparent to infrared radiation. Two electrodes, disposed in the housing, are aligned along a common longitudinal axis adapted to be approximately perpendicular to a local force of gravity. A gap is defined between the electrodes along the longitudinal axis. Obstruction(s), disposed in the housing adjacent to the gap between the electrodes, extend along the length of the gap. The obstruction(s) define a convection space between the electrodes. The convection space has a dimension, measured perpendicular to the longitudinal axis, in the range of 2 to 10 times the length of the gap. An electric current source is coupled to the electrodes.
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Patent Agency Ranking
公开(公告)号：US09659732B2
公开(公告)日：2017-05-23
申请号：US14456835
申请日：2014-08-11
Applicant: Honeywell International Inc.
Inventor： Matthew Clark , Dean E. Johnson , Bruce A. Seiber
CPC classification number: H01J1/025 , G01C19/665 , H01J9/02 , H01J17/06 , H01J17/16
Abstract: A partially-insulated cathode for exciting plasma in a plasma chamber is provided. The partially-insulated cathode includes a conductive structure enclosing a cavity having a cavity surface and an insulating material contiguously covering a portion of the cavity surface from the cavity opening up to an insulation height that is less than a cavity height. Cross-sections of the cavity in X-Y planes have at least one respective cavity-width. A cavity opening has a diameter less than a minimum cavity-width of the at least one cavity-width.
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公开(公告)号：US06346770B1
公开(公告)日：2002-02-12
申请号：US09533008
申请日：2000-03-22
Applicant: Karl H. Schoenbach , Wojciech W. Byszewski , Frank E. Peterkin , Amin N. Dharamsi
Inventor： Karl H. Schoenbach , Wojciech W. Byszewski , Frank E. Peterkin , Amin N. Dharamsi
IPC: H01J6106
CPC classification number: H01J3/025 , H01J1/025 , H01J3/04 , H01J17/04 , H01J17/06 , H01J27/08 , H01J61/067 , H01J61/09 , H01J61/12 , H01J61/305 , H01J61/66 , H01J61/72 , H01J61/78 , H01S3/03 , H01S3/0382 , H01S3/0385 , H01S3/2383
Abstract: A discharge device for operation in a gas at a prescribed pressure includes a cathode having a plurality of micro hollows therein, and an anode spaced from the cathode. Each of the micro hollows has dimensions selected to produce a micro hollow discharge at the prescribed pressure. Preferably, each of the micro hollows has a cross-sectional dimension that is on the order of the mean free path of electrons in the gas. Electrical energy is coupled to the cathode and the anode at a voltage and current for producing micro hollow discharges in each of the micro hollows in the cathode. The discharge device may include a discharge chamber for maintaining the prescribed pressure. A dielectric layer may be disposed on the cathode when the spacing between the cathode and the anode is greater than about the mean free path of electrons in the gas. Applications of the discharge device include fluorescent lamps, excimer lamps, flat fluorescent light sources, miniature gas lasers, electron sources and ion sources.
Abstract translation: 用于在规定压力下操作气体的放电装置包括其中具有多个微型空腔的阴极和与阴极间隔开的阳极。 每个微型空腔具有选定的尺寸以在规定的压力下产生微细的中空排出。 优选地，每个微型空腔的横截面尺寸都是气体中电子的平均自由程的数量级。 电能以负极和电流耦合到阴极和阳极，用于在阴极中的每个微型空腔中产生微空心放电。 排出装置可以包括用于维持规定压力的排出室。 当阴极和阳极之间的间隔大于气体中电子的平均自由程时，电介质层可以设置在阴极上。 放电装置的应用包括荧光灯，准分子灯，平面荧光光源，微型气体激光器，电子源和离子源。
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公开(公告)号：US20010052755A1
公开(公告)日：2001-12-20
申请号：US09912384
申请日：2001-07-26
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Nobuharu Harada , Syoji Ishihara
IPC: H01J061/04
CPC classification number: H01J17/06 , H01J61/0732
Abstract: A discharge tube is comprised of a glass bulb, a cathode, and an anode. Impregnating porous tungsten with barium makes the cathode tip portion. A clearance between the end face of a lead rod and the end face of the cathode tip portion is filled with a molybdenum-ruthenium brazing filler metal.
Abstract translation: 放电管由玻璃灯泡，阴极和阳极组成。 用钡浸渍多孔钨使阴极尖端部分。 引线棒的端面与阴极端部的端面之间的间隙填充有钼 - 钌钎焊料。
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公开(公告)号：US6072273A
公开(公告)日：2000-06-06
申请号：US310817
申请日：1999-05-12
Applicant: Karl H. Schoenbach , Wojciech W. Byszewski , Frank E. Peterkin , Amin N. Dharamsi
Inventor： Karl H. Schoenbach , Wojciech W. Byszewski , Frank E. Peterkin , Amin N. Dharamsi
IPC: H01J1/02 , H01J1/62 , H01J27/26 , H01J61/06 , H01J61/067 , H01J61/09 , H01J61/12 , H01J61/20 , H01J61/66 , H01J61/72 , H01S3/038
CPC classification number: H01J3/025 , H01J1/025 , H01J17/04 , H01J17/06 , H01J27/08 , H01J3/04 , H01J61/067 , H01J61/09 , H01J61/12 , H01J61/305 , H01J61/66 , H01J61/72 , H01S3/0385 , H01J61/78 , H01S3/03 , H01S3/0382 , H01S3/2383
Abstract: A discharge device for operation in a gas at a prescribed pressure includes a cathode having a plurality of micro hollows therein, and an anode spaced from the cathode. Each of the micro hollows has dimensions selected to produce a micro hollow discharge at the prescribed pressure. Preferably, each of the micro hollows has a cross-sectional dimension that is on the order of the mean free path of electrons in the gas. Electrical energy is coupled to the cathode and the anode at a voltage and current for producing micro hollow discharges in each of the micro hollows in the cathode. The discharge device may include a discharge chamber for maintaining the prescribed pressure. A dielectric layer may be disposed on the cathode when the spacing between the cathode and the anode is greater than about the mean free path of electrons in the gas. Applications of the discharge device include fluorescent lamps, excimer lamps, flat fluorescent light sources, miniature gas lasers, electron sources and ion sources.
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公开(公告)号：US5939829A
公开(公告)日：1999-08-17
申请号：US901195
申请日：1997-07-28
Applicant: Karl H. Schoenbach , Wojciech W. Byszewski , Frank E. Peterkin , Amin N. Dharamsi
Inventor： Karl H. Schoenbach , Wojciech W. Byszewski , Frank E. Peterkin , Amin N. Dharamsi
IPC: H01J1/02 , H01J1/62 , H01J27/26 , H01J61/06 , H01J61/067 , H01J61/09 , H01J61/12 , H01J61/20 , H01J61/66 , H01J61/72 , H01S3/038
CPC classification number: H01J3/025 , H01J1/025 , H01J17/04 , H01J17/06 , H01J27/08 , H01J3/04 , H01J61/067 , H01J61/09 , H01J61/12 , H01J61/305 , H01J61/66 , H01J61/72 , H01S3/0385 , H01J61/78 , H01S3/03 , H01S3/0382 , H01S3/2383
Abstract: A discharge device for operation in a gas at a prescribed pressure includes a cathode having a plurality of micro hollows therein, and an anode spaced from the cathode. Each of the micro hollows has dimensions selected to produce a micro hollow discharge at the prescribed pressure. Preferably, each of the micro hollows has a cross-sectional dimension that is on the order of the mean free path of electrons in the gas. Electrical energy is coupled to the cathode and the anode at a voltage and current for producing micro hollow discharges in each of the micro hollows in the cathode. The discharge device may include a discharge chamber for maintaining the prescribed pressure. A dielectric layer may be disposed on the cathode when the spacing between the cathode and the anode is greater than about the mean free path of electrons in the gas. Applications of the discharge device include fluorescent lamps, excimer lamps, flat fluorescent light sources, miniature gas lasers, electron sources and ion sources.
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