公开(公告)号：US20130230146A1

公开(公告)日：2013-09-05

申请号：US13771736

申请日：2013-02-20

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Il-hwan KIM ,  Do-yoon KIM ,  Yong-chul KIM ,  Shang-hyeun PARK ,  Tae-won JEONG

IPC: H01J29/02 ,  H01J35/04

CPC classification number: H01J29/025 ,  H01J3/021 ,  H01J35/045 ,  H01J35/065 ,  H01J2203/0216 ,  H01J2203/0236 ,  H01J2203/0244 ,  H01J2203/0272 ,  H01J2235/068

Abstract: An electron emission device includes a cathode electrode; a mesh-shaped gate electrode spaced apart from the cathode electrode; a plurality of gate spacers between the cathode electrode and the gate electrode; and a plurality of electron emission sources between the cathode electrode and the gate electrode, and alternating with the plurality of gate spacers.

Abstract translation: 电子发射装置包括阴极电极; 与阴极间隔开的网状栅电极; 在所述阴极电极和所述栅电极之间的多个栅极间隔物; 以及在所述阴极电极和所述栅电极之间的多个电子发射源，并且与所述多个栅极间隔物交替。

公开(公告)号：US08410678B2

公开(公告)日：2013-04-02

申请号：US13406662

申请日：2012-02-28

Applicant: Christopher E. Holland ,  Paul R. Schwoebel ,  Charles A. Spindt ,  Eric M. Pearson ,  Victor M. Aguero

Inventor： Christopher E. Holland ,  Paul R. Schwoebel ,  Charles A. Spindt ,  Eric M. Pearson ,  Victor M. Aguero

IPC: H01J1/62

CPC classification number: H01J3/04 ,  H01J3/021 ,  H01J27/26 ,  H01J37/08 ,  H01J2237/0805 ,  H01J2237/31749

Abstract: Described is a micro-fabricated charged particle emission device including a substrate and a plurality of charged particle emission sites formed in the substrate. A path extends between each emission site and a source of liquid metal. Each path is coated with a wetting layer of non-oxidizing metal for wetting the liquid metal. Exemplary non-oxidizing metals that may be used to make the wetting layer include gold and platinum. The wetting layer is sufficiently thin such that some liquid metal is able to flow to each emission site despite any chemical interaction between the liquid metal and the non-oxidizing metal of the wetting layer.

Abstract translation: 描述了一种微制造的带电粒子发射器件，其包括衬底和形成在衬底中的多个带电粒子发射部位。 一条路径在每个发射部位和液态金属源之间延伸。 每个路径涂有非氧化金属的润湿层，用于润湿液态金属。 可用于制备润湿层的示例性非氧化性金属包括金和铂。 润湿层足够薄，使得尽管液态金属和润湿层的非氧化性金属之间存在任何化学相互作用，但是一些液态金属能够流到每个发射部位。

公开(公告)号：US08378561B2

公开(公告)日：2013-02-19

申请号：US13055560

申请日：2009-07-30

Applicant: Yoshihisa Ishiguro ,  Masanori Haba ,  Ryouichi Suzuki

Inventor： Yoshihisa Ishiguro ,  Masanori Haba ,  Ryouichi Suzuki

IPC: H01J63/04

CPC classification number: H01J35/065 ,  H01J1/304 ,  H01J3/021 ,  H01J2201/30453 ,  H01J2235/062

Abstract: An electron emitter includes a guard electrode 13 on the outer circumferential side of a carbon film structure 10 which is formed on a substrate 7 by plasma CVD method. This guard electrode 13 includes a curved surface portion (a curved surface portion that curves from top toward a side opposite to the film-forming direction) 13a convex in a film-forming direction of the carbon film structure 10. A curvature radius R1 of an outer-circumferential-side portion of the curved surface portion 13a is larger than or equal to a curvature radius R2 of a carbon-film-structure-side portion of the curved surface portion 13a.

Abstract translation: 电子发射体在碳膜结构体10的外周侧具有通过等离子体CVD法在基板7上形成的保护电极13。 该保护电极13包括在碳膜结构体10的成膜方向上凸出的曲面部（从顶部朝向与成膜方向相反的一侧弯曲的曲面部）13a。曲率半径R1为 曲面部13a的外周侧部分大于或等于曲面部分13a的碳膜结构侧部分的曲率半径R2。

公开(公告)号：US20130032716A1

公开(公告)日：2013-02-07

申请号：US12007511

申请日：2008-01-11

Applicant: Mamoru Nakasuji ,  Takao Kato ,  Nobuharu Noji ,  Tohru Satake ,  Takeshi Murakami ,  Kenji Watanabe

Inventor： Mamoru Nakasuji ,  Takao Kato ,  Nobuharu Noji ,  Tohru Satake ,  Takeshi Murakami ,  Kenji Watanabe

IPC: H01J37/07

CPC classification number: H01J3/10 ,  B82Y10/00 ,  B82Y40/00 ,  G01N23/225 ,  H01J3/021 ,  H01J37/063 ,  H01J37/073 ,  H01J37/1471 ,  H01J37/1472 ,  H01J37/3174 ,  H01J2237/06316 ,  H01J2237/2817

Abstract: An electron beam apparatus, in which an electron beam emitted from an electron gun having a cathode and an anode is focused and irradiated onto a sample, and secondary electrons emanated from the sample are directed into a detector, the apparatus further comprising means for optimizing irradiation of the electron beam emitted from the electron gun onto the sample, the optimizing means may be two-stage deflectors disposed in proximity to the electron gun which deflects and directs the electron beam emitted in a specific direction so as to be in alignment with the optical axis direction of the electron beam apparatus, the electron beam emitted in the specific direction being at a certain angle with respect to the optical axis due to the fact that, among the crystal orientations of said cathode, a specific crystal orientation allowing a higher level of electron beam emission out of alignment with the optical axis direction.

Abstract translation: 电子束装置，其中从具有阴极和阳极的电子枪发射的电子束被聚焦并照射到样品上，并且从样品发出的二次电子被引导到检测器中，该装置还包括用于优化照射的装置 从电子枪发射到样品上的电子束的优化装置可以是设置在电子枪附近的两级偏转器，其偏转并引导沿特定方向发射的电子束以与光学器件对准 电子束装置的轴方向，由于在所述阴极的晶体取向中具有更高水平的特定晶体取向的事实，在特定方向上发射的电子束相对于光轴成一定角度 电子束发射与光轴方向不对准。

公开(公告)号：US08344354B2

公开(公告)日：2013-01-01

申请号：US12736270

申请日：2009-03-24

Applicant: Toru Ujihara ,  Xiuguang Jin ,  Yoshikazu Takeda ,  Tsutomu Nakanishi ,  Naoto Yamamoto ,  Takashi Saka ,  Toshihiro Kato

Inventor： Toru Ujihara ,  Xiuguang Jin ,  Yoshikazu Takeda ,  Tsutomu Nakanishi ,  Naoto Yamamoto ,  Takashi Saka ,  Toshihiro Kato

IPC: H01L31/0304

CPC classification number: G21K1/16 ,  H01J1/34 ,  H01J3/021 ,  H01J37/06 ,  H01J2201/3423 ,  H01J2203/0296 ,  H01J2237/06333 ,  H01J2237/06383 ,  H01J2237/24557 ,  H01J2237/26

Abstract: A spin-polarized electron generating device includes a substrate, a buffer layer, a strained superlattice layer formed on the buffer layer, and an intermediate layer formed of a crystal having a lattice constant greater than a lattice constant of a crystal of the buffer layer, the intermediate layer intervening between the substrate and the buffer layer. The buffer layer includes cracks formed in a direction perpendicular to the substrate by tensile strain.

Abstract translation: 自旋极化电子产生装置包括衬底，缓冲层，形成在缓冲层上的应变超晶格层，以及由晶格常数大于缓冲层晶体的晶格常数的晶体形成的中间层， 介于衬底和缓冲层之间的中间层。 缓冲层包括通过拉伸应变在垂直于基板的方向上形成的裂纹。

公开(公告)号：US20120257723A1

公开(公告)日：2012-10-11

申请号：US13439456

申请日：2012-04-04

Applicant: Il-hwan KIM ,  Yong-chul KIM ,  Jeong-na HEO ,  Joon-won BAE ,  Sung-hoon PARK

Inventor： Il-hwan KIM ,  Yong-chul KIM ,  Jeong-na HEO ,  Joon-won BAE ,  Sung-hoon PARK

IPC: H01J35/14 ,  H01J9/18 ,  H01J3/14

CPC classification number: H01J35/045 ,  H01J3/021 ,  H01J3/027 ,  H01J35/065 ,  H01J2235/062

Abstract: An electron beam generator includes a cathode electrode; and a first insulating layer, a gate, a second insulating layer and a focusing gate sequentially on the cathode electrode. The cathode electrode, the first insulating layer, the gate, the second insulating layer and the focusing gate are individually separable from each other and combinable with each other.

Abstract translation: 电子束发生器包括阴极电极; 以及顺序地在阴极上的第一绝缘层，栅极，第二绝缘层和聚焦栅。 阴极电极，第一绝缘层，栅极，第二绝缘层和聚焦栅极可以彼此分离并且彼此组合。

公开(公告)号：US20120212120A1

公开(公告)日：2012-08-23

申请号：US13406662

申请日：2012-02-28

Applicant: Christopher E. Holland ,  Paul R. Schwoebel ,  Charles A. Spindt ,  Eric M. Pearson ,  Victor M. Aguero

Inventor： Christopher E. Holland ,  Paul R. Schwoebel ,  Charles A. Spindt ,  Eric M. Pearson ,  Victor M. Aguero

IPC: H01J1/00

CPC classification number: H01J3/04 ,  H01J3/021 ,  H01J27/26 ,  H01J37/08 ,  H01J2237/0805 ,  H01J2237/31749

Abstract: Described is a micro-fabricated charged particle emission device including a substrate and a plurality of charged particle emission sites formed in the substrate. A path extends between each emission site and a source of liquid metal. Each path is coated with a wetting layer of non-oxidizing metal for wetting the liquid metal. Exemplary non-oxidizing metals that may be used to make the wetting layer include gold and platinum. The wetting layer is sufficiently thin such that some liquid metal is able to flow to each emission site despite any chemical interaction between the liquid metal and the non-oxidizing metal of the wetting layer.

Abstract translation: 描述了一种微制造的带电粒子发射器件，其包括衬底和形成在衬底中的多个带电粒子发射部位。 一条路径在每个发射部位和液态金属源之间延伸。 每个路径涂有非氧化金属的润湿层，用于润湿液态金属。 可用于制备润湿层的示例性非氧化性金属包括金和铂。 润湿层足够薄，使得尽管液态金属和润湿层的非氧化金属之间存在任何化学相互作用，但是一些液态金属能够流到每个发射部位。

公开(公告)号：US08246413B2

公开(公告)日：2012-08-21

申请号：US12959605

申请日：2010-12-03

Applicant: Peng Liu ,  Duan-Liang Zhou ,  Pi-Jin Chen ,  Zhao-Fu Hu ,  Cai-Lin Guo ,  Bing-Chu Du ,  Shou-Shan Fan

Inventor： Peng Liu ,  Duan-Liang Zhou ,  Pi-Jin Chen ,  Zhao-Fu Hu ,  Cai-Lin Guo ,  Bing-Chu Du ,  Shou-Shan Fan

IPC: H01J1/00

CPC classification number: H01J9/025 ,  H01J1/304 ,  H01J1/32 ,  H01J3/021 ,  H01J9/125

Abstract: A method for making a field emission device includes the following steps. An insulative substrate is provided. An electron pulling electrode is formed on the insulative substrate. A secondary electron emission layer is formed on the electron pulling electrode. A first dielectric layer is fabricated. The first dielectric layer has a second opening to expose the secondary electron emission layer. A cathode plate having an electron output portion is provided. An electron emission layer is formed on part surface of the cathode plate. The cathode plate is placed on the first dielectric layer. The electron output portion and the second opening have at least one part overlapped, and at least one part of the electron emission layer is oriented to the secondary electron emission layer via the second opening.

Abstract translation: 制造场发射装置的方法包括以下步骤。 提供绝缘基板。 在绝缘基板上形成电子牵引电极。 在电子牵引电极上形成二次电子发射层。 制造第一介电层。 第一介电层具有第二开口以暴露二次电子发射层。 提供具有电子输出部分的阴极板。 在阴极板的部分表面上形成电子发射层。 阴极板放置在第一电介质层上。 电子输出部分和第二开口具有至少一个部分重叠，并且电子发射层的至少一部分经由第二开口被定向到二次电子发射层。

公开(公告)号：US08138665B2

公开(公告)日：2012-03-20

申请号：US12306264

申请日：2007-07-09

Applicant: Christopher E. Holland ,  Paul R. Schwoebel ,  Charles A. Spindt ,  Eric M. Pearson ,  Victor M. Aguero

Inventor： Christopher E. Holland ,  Paul R. Schwoebel ,  Charles A. Spindt ,  Eric M. Pearson ,  Victor M. Aguero

IPC: H01J1/62 ,  H01J63/04

CPC classification number: H01J3/04 ,  H01J3/021 ,  H01J27/26 ,  H01J37/08 ,  H01J2237/0805 ,  H01J2237/31749

Abstract: Described is a micro-fabricated charged particle emission device including a substrate and a plurality of charged particle emission sites formed in the substrate. A path extends between each emission site and a source of liquid metal. Each path is coated with a wetting layer of non-oxidizing metal for wetting the liquid metal. Exemplary non-oxidizing metals that may be used to provide the wetting layer include gold and platinum. The wetting layer is sufficiently thin such that some liquid metal is able to flow to each emission site despite any chemical interaction between the liquid metal and the non-oxidizing metal of the wetting layer.

Abstract translation: 描述了一种微制造的带电粒子发射器件，其包括衬底和形成在衬底中的多个带电粒子发射部位。 一条路径在每个发射部位和液态金属源之间延伸。 每个路径涂有非氧化金属的润湿层，用于润湿液态金属。 可用于提供润湿层的示例性非氧化性金属包括金和铂。 润湿层足够薄，使得尽管液态金属和润湿层的非氧化金属之间存在任何化学相互作用，但是一些液态金属能够流到每个发射部位。

公开(公告)号：US08115187B2

公开(公告)日：2012-02-14

申请号：US12124475

申请日：2008-05-21

Applicant: Brent M. Segal ,  Jonathan W. Ward ,  Thomas Rueckes

Inventor： Brent M. Segal ,  Jonathan W. Ward ,  Thomas Rueckes

IPC: H01L29/02

CPC classification number: H01J21/10 ,  H01J3/021 ,  H01J19/38 ,  H01J2203/0232 ,  Y10S977/742

Abstract: Vacuum microelectronic devices with carbon nanotube films, layers, ribbons and fabrics are provided. The present invention discloses microelectronic vacuum devices including triode structures that include three-terminals (an emitter, a grid and an anode), and also higher-order devices such as tetrodes and pentodes, all of which use carbon nanotubes to form various components of the devices. In certain embodiments, patterned portions of nanotube fabric may be used as grid/gate components, conductive traces, etc. Nanotube fabrics may be suspended or conformally disposed. In certain embodiments, methods for stiffening a nanotube fabric layer are used. Various methods for applying, selectively removing (e.g. etching), suspending, and stiffening vertically- and horizontally-disposed nanotube fabrics are disclosed, as are CMOS-compatible fabrication methods. In certain embodiments, nanotube fabric triodes provide high-speed, small-scale, low-power devices that can be employed in radiation-intensive applications.

Abstract translation: 提供具有碳纳米管膜，层，带和织物的真空微电子器件。 本发明公开了包括三端（发射极，栅极和阳极）的三极管结构的微电子真空装置，以及诸如四极和五极管的高阶器件，所有这些都使用碳纳米管来形成 设备。 在某些实施例中，纳米管织物的图案化部分可以用作栅极/栅极部件，导电迹线等。纳米管织物可以悬挂或保形地设置。 在某些实施例中，使用用于加强纳米管织物层的方法。 公开了用于施加，选择性地去除（例如蚀刻）悬浮和加强垂直和水平布置的纳米管织物的各种方法，以及CMOS兼容的制造方法。 在某些实施例中，纳米管织物三极管提供可用于辐射密集型应用中的高速，小规模，低功率的器件。