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    IONIZATION GAUGE FOR HIGH PRESSURE OPERATION
    14.
    发明申请
    IONIZATION GAUGE FOR HIGH PRESSURE OPERATION 有权

    公开(公告)号：US20170146420A1

    公开(公告)日：2017-05-25

    申请号：US15421805

    申请日：2017-02-01

    Applicant: MKS Instruments, Inc.

    Inventor： Gerardo A. Brucker

    IPC: G01L21/32 ,  H01J41/04 ,  H01J1/52 ,  G01L19/06

    CPC classification number: G01L21/32 ,  G01L19/0627 ,  G01L21/30 ,  H01J1/52 ,  H01J41/02 ,  H01J41/04

    Abstract: An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.

    Charged particle beam instrument
    16.
    发明授权
    Charged particle beam instrument 有权
    带电粒子束仪

    公开(公告)号：US09318300B2

    公开(公告)日：2016-04-19

    申请号：US14526582

    申请日：2014-10-29

    Applicant: JEOL Ltd.

    Inventor： Yasushi Hiroki ,  Mitsuaki Ohsaki

    IPC: H01J37/26 ,  H01J37/18 ,  H01J37/20 ,  H01J41/02

    CPC classification number: H01J37/18 ,  H01J37/20 ,  H01J41/02 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2605

    Abstract: A charged particle beam instrument is offered which can easily perform an in situ observation in a gaseous atmosphere. The charged particle beam instrument (100) is used to perform an observation of a specimen (S) placed in a gaseous atmosphere and has a specimen chamber (2), a gas supply portion (6) for supplying a gas into the specimen chamber (2), a venting portion (7) for venting the specimen chamber (2), a gaseous environment adjuster (4), and a gas controller (812) for controlling the gaseous environment adjuster (4). This adjuster (4) has a gas inflow rate adjusting valve (40) for adjusting the flow rate of the gas supplied into the specimen chamber (2) and a first vacuum gauge (CG1) for measuring the pressure of the gas supplied into the specimen chamber (2). The gas controller (812) sets a target value of pressure for the gas supplied into the specimen chamber (2) based on a predetermined relational expression indicating a relationship between the reading of the first vacuum gauge (CG1) and the pressure inside the specimen chamber (2) and on a corrective coefficient for correcting the reading of the first vacuum gauge (CG1) according to the species of the gas supplied into the specimen chamber (2) and controls the gas inflow rate adjusting valve (40) such that the reading of the first vacuum gauge (CG1) reaches the target value of pressure.

    Abstract translation: 提供了一种带电粒子束仪器，可以在气体气氛中轻松进行原位观察。 带电粒子束仪器（100）用于对放置在气体气氛中的样本（S）进行观察，并具有样本室（2），用于向样本室供给气体的气体供给部（6） 2），用于排出样品室（2）的排气部分（7），气体环境调节器（4）和用于控制气体环境调节器（4）的气体控制器（812）。 该调节器（4）具有用于调节供给到试样室（2）的气体的流量的气体流入量调节阀（40）和用于测定供给到试样室内的气体的压力的第一真空计（CG1） 室（2）。 气体控制器（812）基于表示第一真空计（CG1）的读数与试样室内的压力之间的关系的预定关系式，设定供给到试样室（2）的气体的目标值 （2），以及根据供给到试样室（2）的气体的种类来校正第一真空计（CG1）的读数的校正系数，并控制气体流入速率调节阀（40），使得读数 的第一个真空计（CG1）达到目标压力值。

    Ionization gauge with operational parameters and geometry designed for high pressure operation
    17.
    发明授权
    Ionization gauge with operational parameters and geometry designed for high pressure operation 有权
    具有操作参数和几何设计用于高压操作的电离计

    公开(公告)号：US08648604B2

    公开(公告)日：2014-02-11

    申请号：US12860050

    申请日：2010-08-20

    Applicant: Gerardo A. Brucker

    Inventor： Gerardo A. Brucker

    IPC: G01L21/30

    CPC classification number: G01L21/30 ,  G01L21/32 ,  G01L21/34 ,  H01J41/02

    Abstract: An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.

    Abstract translation: 用于测量压力和减少溅射产生的电离计包括产生电子的至少一个电子源。 电离计还包括收集由电子和气体分子之间的碰撞形成的离子的集电极。 电离计还包括阳极。 相对于集电极的偏置电压的阳极偏置电压被配置为在预定压力下切换以降低溅射碰撞的产量。

    Gas analyzer
    18.
    发明授权
    Gas analyzer 有权
    气体分析仪

    公开(公告)号：US08296090B2

    公开(公告)日：2012-10-23

    申请号：US12595821

    申请日：2008-04-02

    Applicant: Junji Aoki ,  Hirokazu Kitaura ,  Said Boumsellek

    Inventor： Junji Aoki ,  Hirokazu Kitaura ,  Said Boumsellek

    IPC: G01L27/00 ,  G01L15/00

    CPC classification number: H01J49/0009 ,  G01L21/30 ,  H01J41/02 ,  H01J41/10 ,  H01J49/0027

    Abstract: A gas analyzer using a quadrupole mass spectrometric method etc. is provided with an ionizer to ionize a sample gas, a first ion detector and a second ion detector each configured to detect a respective ion from ionizer, and each being disposed a respective distance from the ionizer on an opposite side of the ionizer, the respective distances being different from each other, a filter interposed between the ionizer and the first ion detector to selectively allow ions from the ionizer to pass therethrough, and an arithmetic device to correct a partial pressure of a specific component obtained from the first ion detector and selected by the filter by using a first total pressure of the sample gas obtained from the first ion detector and a second total pressure of the sample gas obtained from the second ion detector.

    Abstract translation: 使用四极质谱法的气体分析仪等设置有电离器，用于离子化样品气体，第一离子检测器和第二离子检测器，每个离子检测器和第二离子检测器被配置为检测来自电离器的相应离子， 电离器在离子交换器的相对侧上，各自的距离彼此不同，插入在离子发生器和第一离子检测器之间以选择性地允许来自离子发生器的离子通过的过滤器，以及用于校正离子发生器的分压的运算装置 由第一离子检测器获得的特定成分，并通过使用从第一离子检测器获得的样品气体的第一总压力和由第二离子检测器获得的样品气体的第二总压力由过滤器选择。

    Photo-ionization detector and method for continuous operation and real-time self-cleaning
    20.
    发明授权
    Photo-ionization detector and method for continuous operation and real-time self-cleaning 有权
    光电离检测器及连续操作方法及实时自清洁

    公开(公告)号：US06734435B2

    公开(公告)日：2004-05-11

    申请号：US09870179

    申请日：2001-05-29

    Applicant: Hong T. Sun ,  Peter C. Hsi

    Inventor： Hong T. Sun ,  Peter C. Hsi

    IPC: H01J4702

    CPC classification number: G01N33/0026 ,  G01N27/66 ,  G01N33/0029 ,  G01N33/0047 ,  H01J41/02

    Abstract: A photo-ionization detector (PID) including two detection units controls gas flows through the ionization chambers of the detection units for real-time self-cleaning and measurement. Operation of the PID can include flowing gas through the ionization chamber of one detection unit to measure the volatile gas concentration while stopping gas flow through the ionization chamber of the other detection unit. A UV lamp converts oxygen contained in the closed ionization chamber to ozone, which removes contamination in the closed ionization chamber, Continuous gas flows can alternate between one ionization chamber to the other. Alternatively, a PID with only one gas detection unit intermittently interrupts the flow of the ambient gas in the ionization chamber.

    Abstract translation: 包括两个检测单元的光电离检测器（PID）控制气体流过检测单元的电离室，用​​于实时自清洁和测量。 PID的操作可以包括使气体通过一个检测单元的电离室，以在停止通过另一检测单元的电离室的气体流动时测量挥发性气体浓度。 UV灯将封闭电离室中所含的氧气转化为臭氧，从而消除了封闭电离室中的污染。连续气流可以在一个电离室之间交替传输。 或者，仅具有一个气体检测单元的PID间歇地中断电离室中的环境气体的流动。

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