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公开(公告)号：US09341514B2
公开(公告)日：2016-05-17
申请号：US13799630
申请日：2013-03-13
Applicant: CORNING INCORPORATED
CPC classification number: G01J3/2823 , G01J3/0208 , G01J3/0229 , G01J3/0256 , G01J3/04 , G01J3/2803 , G01J3/36 , G01J2003/042 , G01J2003/045 , G01J2003/2813 , G01J2003/2826 , H04N5/347 , H04N9/04
Abstract: A hyperspectral imaging system and a method are described herein for providing a hyperspectral image of an area of a remote object (e.g., scene of interest). In one aspect, the hyperspectral imaging system includes at least one optic, a rotatable disk (which has at least one spiral slit formed therein), a spectrometer, a two-dimensional image sensor, and a controller. In another aspect, the hyperspectral imaging system includes at least one optic, a rotatable disk (which has multiple straight slits formed therein), a spectrometer, a two-dimensional image sensor, and a controller. In yet another aspect, the hyperspectral imaging system includes at least one optic, a rotatable drum (which has a plurality of slits formed on the outer surface thereof and a fold mirror located therein), a spectrometer, a two-dimensional image sensor, and a controller.
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12.发明授权Apparatus and method for real time measurement of substrate temperatures for use in semiconductor growth and wafer processing 有权用于半导体生长和晶片处理的衬底温度的实时测量的装置和方法公开(公告)号：US09239265B2
公开(公告)日：2016-01-19
申请号：US12830810
申请日：2010-07-06
Applicant: Charles A. Taylor, II , Darryl Barlett , Douglas Perry , Roy Clarke , Jason Williams
Inventor： Charles A. Taylor, II , Darryl Barlett , Douglas Perry , Roy Clarke , Jason Williams
IPC: G01J3/00 , G01J3/40 , G01J3/42 , G01J5/00 , G01J5/58 , C23C16/46 , C23C16/52 , G01J3/10 , G01J5/60 , G01J3/02 , G01J5/08
CPC classification number: G01J5/0003 , C23C16/46 , C23C16/52 , G01J3/024 , G01J3/0286 , G01J3/0291 , G01J3/10 , G01J5/0007 , G01J5/0821 , G01J5/60
Abstract: The invention is an optical method and apparatus for measuring the temperature of semiconductor substrates in real-time, during thin film growth and wafer processing. Utilizing the nearly linear dependence of the interband optical absorption edge on temperature, the present method and apparatus result in highly accurate measurement of the absorption edge in diffuse reflectance and transmission geometry, in real time, with sufficient accuracy and sensitivity to enable closed loop temperature control of wafers during film growth and processing. The apparatus operates across a wide range of temperatures covering all of the required range for common semiconductor substrates.
Abstract translation: 本发明是用于在薄膜生长和晶片处理期间实时测量半导体衬底的温度的光学方法和装置。 利用带间光吸收边缘对温度的近似线性依赖性，本方法和装置实时地实现了对扩散反射和透射几何形状的吸收边的高度精确测量，具有足够的精度和灵敏度以实现闭环温度控制 的薄膜生长和加工中的晶片。 该装置在涵盖普通半导体衬底的所有范围的宽范围的温度范围内工作。
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公开(公告)号：US09074933B2
公开(公告)日：2015-07-07
申请号：US13637408
申请日：2011-03-16
Applicant: Takafumi Yokino , Katsumi Shibayama
Inventor： Takafumi Yokino , Katsumi Shibayama
CPC classification number: G01J3/28 , G01J3/0208 , G01J3/021 , G01J3/0259 , G01J3/0262 , G01J3/18
Abstract: A spectroscopic module 1 is provided with a spectroscopic unit 8 and a photodetector 9 in addition to a spectroscopic unit 4 and a photodetector 5 and thus can enhance its detection sensitivity for light in a wide wavelength range or different wavelength regions of light. A light-transmitting hole 5b and a light-absorbing layer 12 are disposed between light detecting portions 5a, 9a, while a reflection unit 7 is provided so as to oppose the layer 12 (i.e., region R), whereby the size can be kept from becoming larger. Ambient light La is absorbed by the layer 12. Any part of the light La transmitted through the region R in the layer 12 is reflected to the region R by the unit 7 formed so as to oppose the region R, whereby stray light can be inhibited from being caused by the incidence of the light La.
Abstract translation: 分光模块1除了分光单元4和光电检测器5之外还设置有分光单元8和光电检测器9，因此可以提高其在宽波长范围或不同波长区域中的光的检测灵敏度。 在光检测部分5a，9a之间设置透光孔5b和光吸收层12，同时设置反射单元7以与层12（即，区域R）相对，从而可以保持尺寸 从变大。 环境光La被层12吸收。穿过层12中的区域R透射的光La的任何部分被形成为与区域R相对的单元7反射到区域R，从而可以抑制杂散光 由于La的发生而引起。
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公开(公告)号：US08786853B2
公开(公告)日：2014-07-22
申请号：US13145239
申请日：2010-01-22
Applicant: Maurizio Tormen , Stanley Ross , Robert Lockhart
Inventor： Maurizio Tormen , Stanley Ross , Robert Lockhart
CPC classification number: G01J3/1804 , G01J3/02 , G01J3/0237 , G01J3/32 , G02B5/1828
Abstract: A spectrometer includes: an entrance aperture, a collimator, intended to produce, from a light source, a collimated input light (5), a plurality of gratings arranged in a 2-D matrix, a plurality of detectors, and an exit aperture.
Abstract translation: 光谱仪包括：入射孔，准直器，用于从光源产生准直的输入光（5），以2-D矩阵排列的多个光栅，多个检测器和出射孔。
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15.发明授权公开(公告)号：US08564770B1
公开(公告)日：2013-10-22
申请号：US13150832
申请日：2011-06-01
Applicant: Mark David Lewis , Daniel J. Anderson , Lee A. Newman , Amy G. Keith
Inventor： Mark David Lewis , Daniel J. Anderson , Lee A. Newman , Amy G. Keith
CPC classification number: G01N21/31 , G01J3/42 , G01N2021/8466 , G01N2201/0221
Abstract: A system detects a plant's exposure to trichloroethylene (TCE) through plant leaf imaging. White light impinging upon a plant's leaf interacts therewith to produce interacted light. A detector is positioned to detect at least one spectral band of the interacted light. A processor coupled to the detector performs comparisons between photonic energy of the interacted light at the one or more spectral bands thereof and reference data defining spectral responses indicative of leaf exposure to TCE. An output device coupled to the processor provides indications of the comparisons.
Abstract translation: 系统通过植物叶成像检测植物对三氯乙烯（TCE）的暴露。 撞在植物叶上的白光与其相互作用产生相互作用的光。 定位检测器以检测相互作用的光的至少一个光谱带。 耦合到检测器的处理器执行在其一个或多个光谱带处的相互作用的光的光子能量和指定叶片暴露于TCE的光谱响应的参考数据之间的比较。 耦合到处理器的输出设备提供比较的指示。
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Patent Agency Ranking
16.发明申请公开(公告)号：US20130222801A1
公开(公告)日：2013-08-29
申请号：US13814427
申请日：2011-08-16
Applicant: Elad Harel , Gregory S. Engel
Inventor： Elad Harel , Gregory S. Engel
IPC: G01J3/40
Abstract: A technique for forming a two-dimensional electronic spectrum of a sample includes illuminating a line within a portion of the sample with four laser pulses; where along the entire line the difference in the arrival times between two of the laser pulses varies as a function of the position and the difference in the arrival times between the other two pulses is constant along the entire line. A spectroscopic analysis may then be performed on the resulting pulsed output signal from the illuminated line to produce a single-shot two dimensional electronic spectroscopy.
Abstract translation: 用于形成样品的二维电子光谱的技术包括用四个激光脉冲照射一部分样品内的线; 沿着整条线，两个激光脉冲之间的到达时间的差异作为位置的函数而变化，并且其它两个脉冲之间的到达时间差在整个线上是恒定的。 然后可以对来自照明线的所得脉冲输出信号进行光谱分析，以产生单次二维电子光谱。
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17.发明授权公开(公告)号：US08406469B2
公开(公告)日：2013-03-26
申请号：US12838600
申请日：2010-07-19
Applicant: Kevin Fisher
Inventor： Kevin Fisher
CPC classification number: G06K9/623 , G06K9/0063 , G06K9/6242
Abstract: Disclosed herein are systems, methods, and non-transitory computer-readable storage media for progressive band selection for hyperspectral images. A system having module configured to control a processor to practice the method calculates a virtual dimensionality of a hyperspectral image having multiple bands to determine a quantity Q of how many bands are needed for a threshold level of information, ranks each band based on a statistical measure, selects Q bands from the multiple bands to generate a subset of bands based on the virtual dimensionality, and generates a reduced image based on the subset of bands. This approach can create reduced datasets of full hyperspectral images tailored for individual applications. The system uses a metric specific to a target application to rank the image bands, and then selects the most useful bands. The number of bands selected can be specified manually or calculated from the hyperspectral image's virtual dimensionality.
Abstract translation: 本文公开了用于高光谱图像的逐行频带选择的系统，方法和非暂时的计算机可读存储介质。 具有被配置为控制处理器以实施该方法的模块的系统计算具有多个频带的高光谱图像的虚拟维度，以确定阈值信息水平需要多少频带的数量Q，基于统计度量对每个频带进行排序 从多个频带选择Q个频带，基于虚拟维度生成频带子集，并根据频带子集生成缩小图像。 这种方法可以创建针对个别应用定制的完整高光谱图像的数据集。 系统使用特定于目标应用的度量来对图像带进行排序，然后选择最有用的频带。 所选频段的数量可以手动指定，也可以从高光谱图像的虚拟维度计算出来。
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18.发明申请公开(公告)号：US20120287430A1
公开(公告)日：2012-11-15
申请号：US13107927
申请日：2011-05-15
Applicant: Ronald Anthony Masters
Inventor： Ronald Anthony Masters
IPC: G01J3/40
CPC classification number: G01J3/021 , G01J3/0208 , G01J3/0224 , G01J3/0248 , G01J2003/0281
Abstract: A compact field spectrograph is described that provides a resolution of 500 or more with no entrance aperture, providing for substantial gain in light throughput, ideal for viewing multiple distant objects with or without telescopic aid, and providing the ability to observe and distinguish a multiplex of objects simultaneously, even if in motion, with minimal or no mechanical tracking required. Spectra may be viewed directly with the unaided eye, or photographed with common consumer cameras.
Abstract translation: 描述了一种紧凑型场光谱仪，其提供500或更大的分辨率，没有入射孔径，提供光通量的实质增益，理想地用于观看具有或不具有伸缩辅助装置的多个远距离物体，并且提供观察和区分多重 即使在运动中，也可以同时进行对象，同时进行最少或不需要机械跟踪。 光谱可以直接用肉眼观察，或者用普通消费者相机拍摄。
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公开(公告)号：US20120081704A1
公开(公告)日：2012-04-05
申请号：US13324168
申请日：2011-12-13
Applicant: C. Alexander Morrow , Theodore J. Ronningen
Inventor： C. Alexander Morrow , Theodore J. Ronningen
CPC classification number: G02B6/32 , G01J3/02 , G01J3/0218 , G02B6/2931 , G02B6/3636 , G02B6/4249
Abstract: Optical fibers are utilized to provide high efficiency, spatially resolved coupling of light from collection optics to an imaging spectrometer. In particular, a micro lens array may be utilized to couple light from multiple spatial locations into individual optical fibers. At the opposite end of the fiber bundle, the fibers are packed tightly together to send the light into an imaging spectrograph. The light that enters this spectrograph maintains its spatial separation, for instance, along the array dimension and is spectrally dispersed, for instance, along a dimension orthogonal to the array dimension. This spatially separated, wavelength resolved light can then be recorded on a two dimensional detector such as a CCD camera.
Abstract translation: 光纤被用于提供从收集光学器件到成像光谱仪的高效空间分辨耦合。 特别地，可以使用微透镜阵列将来自多个空间位置的光耦合到单个光纤中。 在纤维束的另一端，将纤维紧紧地包装在一起，将光发射到成像光谱仪中。 进入该光谱仪的光保持其沿着阵列尺寸的空间分离，并且例如沿着与阵列尺寸正交的尺寸进行光谱分散。 然后将这种空间分离的波长分辨的光记录在诸如CCD照相机的二维检测器上。
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公开(公告)号：US08090558B1
公开(公告)日：2012-01-03
申请号：US12477459
申请日：2009-06-03
Applicant: Thaddeus G. Dziura
Inventor： Thaddeus G. Dziura
CPC classification number: G01N21/55 , G01B11/0616 , G01B2210/56 , G01N2021/8438 , G03F7/70625
Abstract: A method is presented for selecting the order in which parameters are evaluated for inclusion in a model of a film stack, which is by ranking them according to measurement precision. Further, a method is presented for determining which parameters are to be floated, set, or discarded from the model, which is by determining whether average chi-square and chi-square uniformity decreases or increases when the parameter is added to the model. In this manner, a model for the film stack can be quickly assembles with a high degree of accuracy.
Abstract translation: 提出了一种用于选择参数被评估以包括在胶片堆叠的模型中的顺序的方法，其通过根据测量精度对它们进行排名。 此外，提出了一种用于确定要从模型中浮动，设置或丢弃哪些参数的方法，其通过当将参数添加到模型时确定平均卡方和卡方均匀性是否减小或增加。 以这种方式，可以以高精确度快速地组装用于胶片堆叠的模型。
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