公开(公告)号：US08421039B2

公开(公告)日：2013-04-16

申请号：US13077329

申请日：2011-03-31

Applicant: Edward C. Eisner

Inventor： Edward C. Eisner

IPC: G21K5/10 ,  H01J3/12

CPC classification number: H01J3/14 ,  G21K5/10 ,  H01J37/302 ,  H01J37/3171 ,  H01J2237/049 ,  H01J2237/30477 ,  H01J2237/30483

Abstract: The present invention relates to a method and apparatus for varying the cross-sectional shape of an ion beam, as the ion beam is scanned over the surface of a workpiece, to generate a time-averaged ion beam having an improved ion beam current profile uniformity. In one embodiment, the cross-sectional shape of an ion beam is varied as the ion beam moves across the surface of the workpiece. The different cross-sectional shapes of the ion beam respectively have different beam profiles (e.g., having peaks at different locations along the beam profile), so that rapidly changing the cross-sectional shape of the ion beam results in a smoothing of the beam current profile (e.g., reduction of peaks associated with individual beam profiles) that the workpiece is exposed to. The resulting smoothed beam current profile provides for improved uniformity of the beam current and improved workpiece dose uniformity.

Abstract translation: 本发明涉及一种用于在离子束在工件的表面上扫描时改变离子束截面形状的方法和装置，以产生具有改进的离子束电流分布均匀性的时间平均离子束 。 在一个实施例中，离子束的横截面形状随着离子束移动穿过工件表面而变化。 离子束的不同横截面形状分别具有不同的光束轮廓（例如，沿着光束轮廓在不同位置处具有峰值），使得快速改变离子束的横截面形状导致光束电流的平滑 工件暴露于的轮廓（例如，减小与各个梁轮廓相关联的峰）。 所得到的平滑光束电流分布提供了改进的束电流均匀性和改进的工件剂量均匀性。

公开(公告)号：US06956218B1

公开(公告)日：2005-10-18

申请号：US10814919

申请日：2004-03-31

Applicant: David Douglas

Inventor： David Douglas

IPC: H01J3/12 ,  H05H7/00

CPC classification number: H05H7/00

Abstract: A method for controlling the momentum compaction in a beam of charged particles. The method includes a compaction-managed mirror bend achromat (CMMBA) that provides a beamline design that retains the large momentum acceptance of a conventional mirror bend achromat. The CMMBA also provides the ability to tailor the system momentum compaction spectrum as desired for specific applications. The CMMBA enables magnetostatic management of the longitudinal phase space in Energy Recovery Linacs (ERLs) thereby alleviating the need for harmonic linearization of the RF waveform.

Abstract translation: 一种用于控制带电粒子束中的动量压实的方法。 该方法包括压实管理的镜子弯曲消色差（CMMBA），其提供保留常规镜像弯曲消色差的大动量接受的光束线设计。 CMMBA还提供了根据特定应用需要定制系统动量压缩谱的能力。 CMMBA能够对能量回收线性编组（ERL）中的纵向相位空间进行静磁控制，从而减轻对RF波形的谐波线性化的需要。

公开(公告)号：US5637953A

公开(公告)日：1997-06-10

申请号：US589265

申请日：1996-01-22

Applicant: George Wakalopulos

Inventor： George Wakalopulos

IPC: H01J3/12 ,  H01J33/02 ,  H01J29/70 ,  H01J29/58

CPC classification number: H01J3/12 ,  H01J33/02

Abstract: An electron beam device has a cathode that generates a fan-shaped electron beam. A first focusing lens includes first and second plates on opposed sides of a filament. The edges of the plates closest to a positively charged anode are arcuate, so that as individual electrons are accelerated normal to the edge of the charged plates, the beam increases in length with departure from the filament. A second focusing lens includes third and fourth plates on opposed sides of the first focusing lens. Each of the third and fourth plates has an arcuate edge proximate to the positively charged anode. The plates of the first and second focusing lenses provide focusing in a widthwise direction, while defining the increase in the lengthwise direction. Preferably, the filament is also curved. In the preferred embodiment, the curvature of the plates of the first focusing lens defines a common radius with the plates of the second focusing lens. The electron beam may be projected from the interior of an evacuated tube and may have a length that is not limited by the length of the filament.

Abstract translation: 电子束装置具有产生扇形电子束的阴极。 第一聚焦透镜包括在灯丝的相对侧上的第一和第二板。 最靠近正电荷的阳极的板的边缘是弧形的，使得随着各个电子垂直于带电板的边缘加速，光束随着灯丝的长度而增加。 第二聚焦透镜在第一聚焦透镜的相对侧上包括第三和第四平板。 第三和第四板中的每一个具有靠近带正电的阳极的弧形边缘。 第一和第二聚焦透镜的板在宽度方向上提供聚焦，同时限定长度方向上的增加。 优选地，细丝也是弯曲的。 在优选实施例中，第一聚焦透镜的板的曲率与第二聚焦透镜的平板形成共同的半径。 电子束可以从真空管的内部突出并且可以具有不受长丝长度限制的长度。

公开(公告)号：US5475231A

公开(公告)日：1995-12-12

申请号：US124906

申请日：1993-09-21

Applicant: Thomas M. Crook ,  Delmer L. Smith ,  Robert G. Ahonen

Inventor： Thomas M. Crook ,  Delmer L. Smith ,  Robert G. Ahonen

IPC: H01J37/244 ,  H05H1/00 ,  H01J3/12

CPC classification number: H05H1/0006 ,  H01J37/244 ,  H01J2237/24507

Abstract: An apparatus for monitoring ion beams with an electrically isolated aperture includes an ion beam source for generating an ion beam and an electrically conductive aperture plate arranged to collimate the ion beam. The aperture plate is electrically isolated from the rest of the deposition apparatus and is divided into a plurality of electrically isolated segments. A current monitoring device has an input connected to the aperture plate so as to monitor current from the aperture plate which is indicative of the ion beam performance.

Abstract translation: 用于用电隔离孔监测离子束的装置包括用于产生离子束的离子束源和布置成准直离子束的导电孔板。 孔板与沉积设备的其余部分电隔离，并且被分成多个电隔离段。 电流监测装置具有连接到孔板的输入端，以监测来自孔板的电流，其指示离子束性能。

公开(公告)号：US5276687A

公开(公告)日：1994-01-04

申请号：US895461

申请日：1992-06-08

Applicant: Naoyuki Miyamoto

Inventor： Naoyuki Miyamoto

IPC: H04Q11/04 ,  H01J3/12 ,  H04M11/06

CPC classification number: H04Q11/0428

Abstract: A network system includes a plurality of terminals classified into a plurality of groups, a network for selectively connecting the plurality of terminals to each other, and a control part for receiving a call indicating one of the groups from a source terminal which is one of the plurality of terminals and for coupling, through the network, the source terminal to a destination terminal which is one terminal included in one of the groups which has an attribute identical to that of the source terminal.

Abstract translation: 网络系统包括分为多个组的多个终端，用于选择性地将多个终端彼此连接的网络，以及控制部分，用于从源终端接收指示其中一组的呼叫，该源终端是 多个终端，并且用于通过网络将源终端耦合到作为具有与源终端的属性相同的属性中的一个组中的一个终端的目的地终端。

公开(公告)号：US4823013A

公开(公告)日：1989-04-18

申请号：US89092

申请日：1987-08-25

Applicant: Karel D. van der Mast

Inventor： Karel D. van der Mast

IPC: H01J37/153 ,  H01J37/30 ,  H01J37/317 ,  H01L21/027 ,  H01J3/12

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/3007 ,  H01J37/3174 ,  H01J2237/0492 ,  H01J2237/31776

Abstract: In a beam shaper superpositions of a deformed first diaphragm and a deformed or non-deformed second diaphragm can be realized by means of a quadrupole system. As a result of this a great freedom for adapting the spot cross-section to the patterns to be formed is obtained, as a result of which the number of writing pulses per pattern and hence the writing time for, for example, a chip can be considerably reduced and in particular non-orthogonal and non-linear transistions in the patterns can be written with greater definition.

公开(公告)号：US4409486A

公开(公告)日：1983-10-11

申请号：US268457

申请日：1981-05-29

Applicant: Terence Bates

Inventor： Terence Bates

IPC: G21K1/08 ,  H01J3/12

CPC classification number: G21K1/08

Abstract: A system for achromatically deflecting a beam of charged particles without producing net divergence of the beam comprises three successive magnetic deflection means (A,B,C) which deflect the beam alternately in opposite directions, the first (A) and second (B) by angles of less than 50.degree. and the third (C) by an angle of at least 90.degree.; particles with different respective energies are transversely spaced as they enter the third deflection means (C), but emerge completely superimposed in both position and direction, and may be brought to a focus (F) in each of two mutually perpendicular planes a short distance thereafter. Such a system may be particularly compact, especially in the direction in which the beam leaves the system, and is suitable for deflecting a beam of electrons from a linear accelerator (5,6,7) so as to produce a vertical beam of electrons (or with an X-ray target, of X-rays) which can be rotated about a horizontal patient for radiation therapy.

Abstract translation: 用于使带电粒子束变色偏转而不产生光束净偏差的系统包括三个连续的磁偏转装置（A，B，C），它们以相反的方向交替地偏转光束，第一（A）和第二（B）由 角度小于50°，第三（C）角度至少为90°; 具有不同相应能量的颗粒在它们进入第三偏转装置（C）时横向间隔开，但在位置和方向上完全叠加，并且可以在两个相互垂直的平面中的每一个中稍后距离聚焦（F） 。 这种系统可能特别紧凑，特别是在光束离开系统的方向上，并且适合于偏转来自线性加速器（5,6,7）的电子束，以产生垂直的电子束（ 或X射线靶，X射线），其可围绕水平患者旋转以进行放射治疗。

公开(公告)号：US09767985B2

公开(公告)日：2017-09-19

申请号：US14895708

申请日：2014-10-17

Applicant: HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Jiang Huang ,  Mingwu Fan ,  Tiaoqin Yu ,  Lige Zhang ,  Chen Zuo ,  Jun Yang ,  Yongqian Xiong ,  Kaifeng Liu ,  Gerald F. Wu ,  Lei Cao

IPC: H01J37/143 ,  H01J3/12 ,  G21K1/093 ,  G21K5/04

CPC classification number: H01J37/143 ,  G21K1/093 ,  G21K5/04 ,  H01J3/12 ,  H01J33/00 ,  H01J37/3178 ,  H01J2237/0835 ,  H01J2237/1405 ,  H01J2237/152

Abstract: Provided is a device for optimizing a diffusion section of an electron beam, comprising two groups of permanent magnets, a magnetic field formed by the four magnetic poles extending the electron beam in a longitudinal direction, and compressing the electron beam in a transverse direction, so that the electron beam becomes an approximate ellipse; another magnetic field formed by the eight magnetic poles optimizing an edge of a dispersed electron-beam bunch into an approximate rectangle; by controlling the four longitudinal connection mechanisms so that the upper magnetic yoke and the lower magnetic yoke of the first group of permanent magnets move synchronously towards the center thereof thereby longitudinally compressing the electron beam in the shape of an approximate ellipse, and the upper magnetic yoke and the lower magnetic yoke of the second group of permanent magnets move synchronously towards the center thereof thereby longitudinally compressing the electron beam in the shape of an approximate rectangle, and the process of longitudinal compression is repeated until a longitudinal size of the electron-beam bunch is reduced to 80 mm. The invention is capable of reasonably compressing a longitudinal size of an electron-beam bunch after diffusion to approximately 80 mm, which ensures optimum irradiation uniformity and efficiency, and enables the longitudinal size to be within the range of a conventional titanium window.

公开(公告)号：US09711323B2

公开(公告)日：2017-07-18

申请号：US15124099

申请日：2015-06-17

Applicant: Intelligent Virus Imaging Inc.

Inventor： Ida-Maria Sintorn ,  Rickard Nordstrom Nordstrom ,  Gustaf Kylberg

IPC: H01J37/26 ,  H01J3/12 ,  H01J29/56 ,  H01J37/153

CPC classification number: H01J37/153 ,  H01J2237/1532 ,  H01J2237/223

Abstract: The method is for automatic astigmatism correction of a lens system. A first image is provided that is not in focus at a first stigmator setting of a set of lenses. A calculating device calculates a corresponding first Fourier spectrum image. A distribution and direction of pixels of the Fourier spectrum image are determined by calculating a first vector and a second vector. The first vector is compared with the second vector. The lens system is changed from a first stigmator setting to a second stigmator setting to provide a second image. A corresponding Fourier spectrum image is calculated. The distribution and direction of pixels of the second Fourier spectrum image is determined by calculating a third vector and a fourth vector. The third vector is compared to the fourth vector. The image that has the lowest vector ratio is selected.

公开(公告)号：US08791423B2

公开(公告)日：2014-07-29

申请号：US13806057

申请日：2011-07-26

Applicant: Yoichi Hirayama

Inventor： Yoichi Hirayama

IPC: H01J37/153 ,  H01J3/12 ,  H01J37/28

CPC classification number: H01J37/28 ,  H01J3/12 ,  H01J37/153 ,  H01J37/26 ,  H01J2237/0492 ,  H01J2237/1534 ,  H01J2237/28 ,  H01J2237/2802

Abstract: An aberration correction device includes, between a TEM objective lens and an STEM objective lens, a transfer lens group for transferring a coma-free surface of the TEM objective lens to a multipolar lens, a transfer lens group for transferring the coma-free surface of the TEM objective lens to a multipolar lens, and a transfer lens for correcting fifth-order spherical aberration of the STEM objective lens.

Abstract translation: 一种像差校正装置，在TEM物镜和STEM物镜之间包括用于将TEM物镜的无彗形面传递到多极透镜的转印透镜组，用于将无偏转表面转印的转印透镜组 TEM物镜到多极透镜以及用于校正STEM物镜的五阶球面像差的转印透镜。