公开(公告)号：US07180590B2

公开(公告)日：2007-02-20

申请号：US10616398

申请日：2003-07-09

Applicant: Jens Bastue ,  Nicolai Herholdt-Rasmussen ,  Michael Rasmussen ,  Ole Jespersen

Inventor： Jens Bastue ,  Nicolai Herholdt-Rasmussen ,  Michael Rasmussen ,  Ole Jespersen

IPC: G01J3/28

CPC classification number: G01J3/02 ,  G01J3/0286 ,  G01J3/18

Abstract: Transmission spectrometers require low levels of background light so that the signal to noise ratio is increased, and also require stable performance over wide temperature ranges. Light reflected by the transmission grating can result in increased background levels. One approach to reducing the background level is to orient the transmissive diffraction grating so that light reflected by the grating is reflected out of the diffraction plane. The temperature-induced wavelength drift of a transmission spectrometer can be due to the frame upon which the transmission grating is mounted. The wavelength drift is reduced by allowing the thermal expansion of the grating to be independent of the frame.

Abstract translation: 透射光谱仪需要低水平的背景光，从而增加信噪比，并且在宽温度范围内也需要稳定的性能。 由透射光栅反射的光可导致背景增加。 降低背景水平的一种方法是使透射衍射光栅定向，使得由光栅反射的光被反射出衍射平面。 透射光谱仪的温度感应波长漂移可能是由于安装透射光栅的框架。 通过允许光栅的热膨胀独立于框架来减小波长漂移。

公开(公告)号：US20070030483A1

公开(公告)日：2007-02-08

申请号：US11196043

申请日：2005-08-03

Applicant: Matthew Everett ,  Yan Zhou ,  Jochen Horn ,  Keith O'Hara ,  James Foley

Inventor： Matthew Everett ,  Yan Zhou ,  Jochen Horn ,  Keith O'Hara ,  James Foley

IPC: G01J3/28

CPC classification number: G01N21/4795 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/0216 ,  G01J3/0224 ,  G01J3/0256 ,  G01J3/0286 ,  G01J3/18 ,  G01J3/22 ,  G02B5/1814 ,  G02B27/4244

Abstract: A compact conical diffraction Littrow spectrometer is disclosed. The distortion of the conically diffracted spectral component beams is compensated and as a result, the diffracted spectral beams can still be focused into a substantially straight line to shine onto a detector array. A spectral domain optical coherence tomography (SD-OCT) system incorporating a Littrow spectrometer or a spectrometer having one or more shared focusing element(s) and an SD-OCT system incorporating a spectrometer that is substantially polarization independent are also disclosed.

Abstract translation: 公开了一种紧凑的圆锥衍射Littrow光谱仪。 对锥形衍射光谱分量光束的失真进行补偿，结果衍射的光束束仍可被聚焦成基本上直线以照射到检测器阵列上。 还公开了包含Littrow光谱仪或具有一个或多个共享聚焦元件的光谱仪的光谱相干光学相干断层扫描（SD-OCT）系统和包含基本上偏振无关的光谱仪的SD-OCT系统。

公开(公告)号：US07173695B2

公开(公告)日：2007-02-06

申请号：US10502345

申请日：2002-12-25

Applicant: Atsushi Katsunuma

Inventor： Atsushi Katsunuma

IPC: G01J3/28

CPC classification number: G01J3/18 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/0286 ,  G01J3/0291

Abstract: A spectroscope is equipped with a temperature compensation mechanism that can reliably reduce a drift of a spectral image in the wavelength dispersion direction caused by a change in the environmental temperature irrespective of the form of the spectroscope. The spectroscope is provided with a first support member 17 that integrally supports an incidence member 11, a collective optical system 13 and a detection element 15, a second support member 21, made of a material different from the first support member, that supports a wavelength dispersion element 14, and a transmission member 24, 25 that transmits a contraction/expansion amount of the first support member to the second support member when environmental temperature changes. The second support member includes a deformation member 28 that elastically deforms, when environmental temperature changes, in accordance with a difference between its own contraction/expansion amount and the contraction/expansion amount of the first support member and a rotation member 26 that rotates minutely in accordance with elastic deformation of the deformation member. The said wavelength dispersion element is mounted on the rotation member in such a way that its wavelength dispersion direction is oriented perpendicular to the axial direction of the rotation member.

Abstract translation: 分光镜配备有温度补偿机构，其可以可靠地降低由环境温度的变化引起的波长色散方向上的光谱图像的漂移，而与分光镜的形式无关。 该分光镜设置有第​​一支撑构件17，其一体地支撑入射构件11，集体光学系统13和检测元件15，第二支撑构件21由与第一支撑构件不同的材料制成，其支撑波长 分散元件14和传递构件24,25，其在环境温度变化时将第一支撑构件的收缩/膨胀量传递到第二支撑构件。 第二支撑构件包括当环境温度变化时根据其自身的收缩/膨胀量与第一支撑构件的收缩/膨胀量之间的差异以及旋转构件26的弹性变形的变形构件28，旋转构件26在 根据变形构件的弹性变形。 所述波长色散元件以使得其波长色散方向垂直于旋转部件的轴向方向的方式安装在旋转部件上。

公开(公告)号：US20070013913A1

公开(公告)日：2007-01-18

申请号：US11169202

申请日：2005-06-27

Applicant: Robert Rafac

Inventor： Robert Rafac

IPC: G01J3/45 ,  G01B9/02

CPC classification number: G01J3/26 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0237 ,  G01J3/027 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/28

Abstract: A bandwidth meter apparatus and method for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter is disclosed which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicative of the bandwidth of the light emitted from the laser and a second output representative of a second parameter which is indicative of the bandwidth of the light emitted from the laser; and, an actual bandwidth calculation apparatus utilizing the first output and the second output as part of a multivariable equation employing predetermined calibration variables specific to the optical bandwidth monitor, to calculate an actual bandwidth parameter; the multivariable equation comprising a symmetry sensitive term.

Abstract translation: 公开了一种用于测量从激光输入到带宽计的发射光谱的带宽的带宽计量仪装置和方法，其可以包括光带宽监视器，其提供表示第一参数的第一输出，第一参数指示 从激光器发射的光和表示从激光器发射的光的带宽的第二参数的第二输出; 以及使用所述第一输出和所述第二输出的实际带宽计算装置作为使用所述光学带宽监视器特有的预定校准变量的多变量方程的一部分来计算实际带宽参数; 包含对称敏感项的多变量方程式。

公开(公告)号：US07158231B1

公开(公告)日：2007-01-02

申请号：US10699540

申请日：2003-11-01

Applicant: John A. Woollam ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt ,  Galen L. Pfeiffer

Inventor： John A. Woollam ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt ,  Galen L. Pfeiffer

IPC: G01J4/00

CPC classification number: G01J3/447 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/0224 ,  G01J3/0229 ,  G01J3/024 ,  G01J3/0286 ,  G01J3/10 ,  G01J4/00 ,  G01N21/211 ,  G01N21/274 ,  G01N2021/213

Abstract: A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, there being apertures before the stage for supporting a material system, and thereafter, the system being present in an environmental control chamber.

Abstract translation: 具有电磁辐射的多色光束的光谱椭圆计或偏振计系统，偏振器，用于支撑材料系统的台，分析器，分散光学器件和检测器系统，其包括多个检测器元件，其中存在孔 用于支撑材料系统的阶段，此后，系统存在于环境控制室中。

公开(公告)号：US20060262305A1

公开(公告)日：2006-11-23

申请号：US11483728

申请日：2006-07-11

Applicant: Manabu Shiozaki ,  Masakazu Shigehara

Inventor： Manabu Shiozaki ,  Masakazu Shigehara

IPC: G01J3/28

CPC classification number: G01J3/02 ,  G01J3/0286 ,  G01J3/1804 ,  G02B5/18 ,  G02B5/1866 ,  G02B7/008

Abstract: The present invention provides a diffraction grating element that allows the temperature control mechanism to be dispensed with or simplified. The diffraction grating element of the present invention comprises a transparent plate having a first surface and a second surface that are substantially parallel with one another; and a diffraction grating which is formed on a first surface side with respect to the second surface and is substantially parallel with the first surface. At any temperature within a temperature range −20° C. to +80° C., the sum of the rate of change in the period per unit length of the diffraction grating with respect to a temperature change, and the temperature coefficient of the refractive index of a medium that surrounds the diffraction grating element is 0.

Abstract translation: 本发明提供一种能够省略或简化温度控制机构的衍射光栅元件。 本发明的衍射光栅元件包括具有彼此基本平行的第一表面和第二表面的透明板; 以及衍射光栅，其相对于所述第二表面形成在第一表面侧上并且基本上与所述第一表面平行。 在-20°C至+ 80°C的温度范围内的任何温度下，衍射光栅相对于温度变化的每单位长度的周期变化率和折射率的温度系数之和 围绕衍射光栅元件的介质的折射率为0。

公开(公告)号：US07092097B2

公开(公告)日：2006-08-15

申请号：US11370602

申请日：2006-03-08

Applicant: Mark A. Cargill ,  Peter G. VanderJagt

Inventor： Mark A. Cargill ,  Peter G. VanderJagt

IPC: G01J3/50 ,  G01N21/27

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0286 ,  G01J3/0289 ,  G01J3/0291 ,  G01J3/50 ,  G01J3/501 ,  G01J3/524

Abstract: An LED-based color measurement instrument including an illumination system and a sensing system. The illumination system includes modulated LEDs and a temperature control system for regulating the temperature of the LEDs, thereby improving the consistency of their performance. The sensing system includes a photodiode, a transimpedance amplifier, and an integrator in the first stage to cancel the effect of ambient light on the output of the first stage. The sensing system also includes a lens system for imaging a target area of the target sample onto the photo sensor in a manner so that the product of the target area times the solid angle captured by the lens system is generally uniform over a selected range of distances, thereby reducing the positional sensitivity of the instrument with respect to the target sample.

公开(公告)号：US07067819B2

公开(公告)日：2006-06-27

申请号：US10846170

申请日：2004-05-14

Applicant: Gary Janik

Inventor： Gary Janik

IPC: G01J3/28 ,  G01J1/42 ,  G01N23/20 ,  G01D18/00 ,  G12B13/00

CPC classification number: G01J3/10 ,  G01J3/0286 ,  G01J3/36 ,  G01N21/211 ,  G01N2021/213

Abstract: A system configured for measurement of a specimen is provided. The system includes an optical subsystem configured to perform measurements of the specimen. The optical subsystem includes a light source that is configured to generate light having a relatively large number of separated spectral peaks with substantially no continuous background. In some embodiments, the light may include vacuum ultraviolet light, extreme ultraviolet light, and/or soft x-rays. A carrier medium is also provided that includes program instructions executable on a computer system to analyze data generated by a detector of an optical subsystem by partitioning the data into individual peaks spaced apart across a wavelength spectrum. Partitioning the data preferably corrects for spectrum shift, drift, stretching, shrinking, or a combination thereof at the detector. The individual peaks correspond to separated spectral peaks in light generated by a light source of the optical subsystem.

Abstract translation: 提供了一种被配置用于测量样本的系统。 该系统包括被配置为执行样本的测量的光学子系统。 光学子系统包括被配置为产生具有相对大数量的基本上没有连续背景的分离的光谱峰的光的光源。 在一些实施例中，光可以包括真空紫外光，极紫外光和/或软x射线。 还提供了载体介质，其包括可在计算机系统上执行的程序指令，以通过将数据划分成跨越波长频谱间隔开的各个峰值来分析由光学子系统的检测器产生的数据。 分析数据优选地在检测器处校正频谱偏移，漂移，拉伸，收缩或其组合。 各个峰对应于由光学子系统的光源产生的光中的分离的光谱峰。

公开(公告)号：US07026626B2

公开(公告)日：2006-04-11

申请号：US10669030

申请日：2003-09-23

Applicant: Dale A. Harrison

Inventor： Dale A. Harrison

IPC: G01N21/33

CPC classification number: G01J3/2803 ,  G01J3/021 ,  G01J3/0286 ,  G01J3/2823 ,  G01J3/36 ,  G01N21/211 ,  G01N21/33 ,  G01N21/47 ,  G01N21/55

Abstract: A spectroscopy system is provided which operates in the vacuum ultraviolet spectrum. More particularly, a system utilizing reflectometry techniques in the vacuum ultraviolet spectrum is provided for use in metrology applications. To ensure accurate and repeatable measurement, the environment of the optical path is controlled to limit absorption effects of gases that may be present in the optical path. The VUV reflectometer may be utilized to monitor a wide range of data in a semiconductor processing environment. For example, the techniques may be used for measuring thicknesses, optical properties, composition, porosity and roughness of a film or stack of films. Further, the VUV techniques and apparatus may be used to characterize critical dimensions and other features of a device. The VUV reflectometer system may be utilized as a stand alone tool, or the relatively compact nature of the system may be taken advantage of such that the system is incorporated into other process tools. Thus, for example, the VUV techniques described herein may be incorporated directly into tools used for deposition, etch, photolithography, etc. so that in-line measurements, monitoring and control may be advantageously obtained.

Abstract translation: 提供在真空紫外光谱中操作的光谱系统。 更具体地，提供了在真空紫外光谱中利用反射测量技术的系统用于计量学应用。 为了确保准确和可重复的测量，控制光路的环境以限制可能存在于光路中的气体的吸收效应。 VUV反射计可用于在半导体处理环境中监视宽范围的数据。 例如，这些技术可以用于测量薄膜或薄膜层的厚度，光学性质，组成，孔隙率和粗糙度。 此外，VUV技术和装置可用于表征装置的关键尺寸和其它特征。 VUV反射计系统可以用作独立的工具，或者可以利用系统的相对紧凑的特性，使得该系统被并入到其他工艺工具中。 因此，例如，本文所述的VUV技术可以直接结合到用于沉积，蚀刻，光刻等的工具中，使得可以有利地获得在线测量，监测和控制。

公开(公告)号：US20060022154A1

公开(公告)日：2006-02-02

申请号：US10901705

申请日：2004-07-29

Applicant: James Schmitkons ,  Jan Shanaberger

Inventor： James Schmitkons ,  Jan Shanaberger

IPC: G01J1/00

CPC classification number: G01J3/10 ,  F26B3/28 ,  G01J3/0286

Abstract: An ultraviolet lamp assembly includes an elongate lamp bulb, a central reflector mounted above the bulb and side reflector panels mounted on opposite sides of the central reflector panel. A first air gap is located between the first side reflector panel and the central reflector panel when the first and second side reflector panels are in the open position. A second air gap is located between the second side reflector panel and the central reflector panel when the first and second side reflector panels are in the open position. An air moving device is configured to direct cooling air downwardly through the perforations at the upper portion of the bulb and downwardly through the first and second air gaps at the lower portion of the bulb.

Abstract translation: 紫外线灯组件包括细长的灯泡，安装在灯泡上方的中央反射器和安装在中央反射器面板的相对侧上的侧反射板。 当第一和第二侧反射板处于打开位置时，第一气隙位于第一侧反射板和中央反射板之间。 当第一和第二侧反射板处于打开位置时，第二气隙位于第二侧反射板和中央反射板之间。 空气移动装置构造成将冷却空气向下引导通过灯泡上部的穿孔并向下穿过灯泡下部的第一和第二气隙。