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    Automated defect detection and mapping for optical filters
    221.
    发明授权
    Automated defect detection and mapping for optical filters 有权

    公开(公告)号：US09927369B2

    公开(公告)日：2018-03-27

    申请号：US15172592

    申请日：2016-06-03

    Applicant: Materion Corporation

    Inventor： Robert Sprague

    IPC: G01N21/88 ,  G01M11/02 ,  G01N21/958 ,  G01N21/25 ,  G01N21/95

    CPC classification number: G01N21/8806 ,  G01M11/0278 ,  G01M11/0285 ,  G01N21/255 ,  G01N21/958 ,  G01N2021/9511 ,  G01N2201/061 ,  G01N2201/068

    Abstract: Devices and methods are disclosed for characterizing point flaws (including pinholes and point defects) of an optical filter. A passband test is performed, including: illuminating the optical filter with passband illumination whose spectral range at least overlaps a passband of the optical filter; acquiring a passband map of the optical filter using a two-dimensional array of photodetectors while illuminating the optical filter with the passband illumination; and identifying point defects of the optical filter as low intensity locations of the passband map. A stopband test is performed, including: illuminating the optical filter with stopband illumination whose spectral range lies entirely outside of the passband of the optical filter; acquiring a stopband map of the optical filter using the two-dimensional array of photodetectors while illuminating the optical filter with the stopband illumination; and identifying pinholes of the optical filter as high intensity locations of the stopband map.

    Electronic devices with environmental sensors
    223.
    发明授权
    Electronic devices with environmental sensors 有权

    公开(公告)号：US09927360B2

    公开(公告)日：2018-03-27

    申请号：US15250714

    申请日：2016-08-29

    Applicant: Apple Inc.

    Inventor： Richard Yeh

    IPC: G01N21/61 ,  G01N33/00 ,  G01N27/16 ,  H05K5/00 ,  G06F1/16

    CPC classification number: G01N21/61 ,  G01N21/3504 ,  G01N27/16 ,  G01N33/004 ,  G01N2201/0221 ,  G01N2201/061 ,  G01N2201/068 ,  G06F1/1616 ,  G06F1/1626 ,  H05K5/0017 ,  H05K5/0086

    Abstract: An environmental sensor may include a heat source that heats a metal oxide sensing material. Electrodes may be formed in the metal oxide sensing material that measure the resistance of the metal oxide sensing material to determine the concentration of various gases. The environmental sensor may include an infrared light source that emits infrared light at a given wavelength. An infrared detector and band-pass filter may be used to detect the concentration of a particular gas such as carbon dioxide. In order to reduce power consumption, a heater may act as both the heat source for the metal oxide sensing material and the infrared light source for the infrared detector. The metal oxide sensing material, heater, and infrared detector may be formed in the same enclosure. The enclosure may have an opening that is aligned with an opening in an electronic device housing.

    IMAGING APPARATUS AND IMAGING METHOD
    224.
    发明申请
    IMAGING APPARATUS AND IMAGING METHOD 有权

    公开(公告)号：US20180067046A1

    公开(公告)日：2018-03-08

    申请号：US15810804

    申请日：2017-11-13

    Applicant: Panasonic Intellectual Property Management Co., Ltd.

    Inventor： TARO IMAGAWA

    IPC: G01N21/64

    CPC classification number: G01N21/64 ,  G01B11/026 ,  G01N21/6408 ,  G01N21/6456 ,  G01N2201/061 ,  G01S17/00

    Abstract: A lighting unit illuminates an object with at least one type of excitation light and illumination light. An imaging unit captures images with at least one type of fluorescent light generated by the object illuminated with the excitation light, and with reflected light caused when the object reflects the illumination light. A fluorescent light detector generates a delay time distribution image of fluorescent light from a fluorescent light image captured by the imaging unit. A distance measuring unit generates a range image from a reflected light image captured by the imaging unit.

    Electronic Devices with Environmental Sensors
    225.
    发明申请
    Electronic Devices with Environmental Sensors 有权

    公开(公告)号：US20180059021A1

    公开(公告)日：2018-03-01

    申请号：US15250714

    申请日：2016-08-29

    Applicant: Apple Inc.

    Inventor： Richard Yeh

    IPC: G01N21/61 ,  G01N33/00 ,  G01N27/16 ,  H05K5/00 ,  G06F1/16

    CPC classification number: G01N21/61 ,  G01N21/3504 ,  G01N27/16 ,  G01N33/004 ,  G01N2201/0221 ,  G01N2201/061 ,  G01N2201/068 ,  G06F1/1616 ,  G06F1/1626 ,  H05K5/0017 ,  H05K5/0086

    Abstract: An environmental sensor may include a heat source that heats a metal oxide sensing material. Electrodes may be formed in the metal oxide sensing material that measure the resistance of the metal oxide sensing material to determine the concentration of various gases. The environmental sensor may include an infrared light source that emits infrared light at a given wavelength. An infrared detector and band-pass filter may be used to detect the concentration of a particular gas such as carbon dioxide. In order to reduce power consumption, a heater may act as both the heat source for the metal oxide sensing material and the infrared light source for the infrared detector. The metal oxide sensing material, heater, and infrared detector may be formed in the same enclosure. The enclosure may have an opening that is aligned with an opening in an electronic device housing.

    Inspection apparatus and method, lithographic apparatus, lithographic processing cell and device manufacturing method
    226.
    发明授权
    Inspection apparatus and method, lithographic apparatus, lithographic processing cell and device manufacturing method 有权

    公开(公告)号：US09904181B2

    公开(公告)日：2018-02-27

    申请号：US14901993

    申请日：2014-06-13

    Applicant: ASML Netherlands B.V.

    Inventor： Richard Quintanilha

    IPC: G03B27/54 ,  G03F7/20 ,  G01N21/956

    CPC classification number: G03F7/70625 ,  G01N21/95623 ,  G01N2201/061 ,  G01N2201/08 ,  G01N2201/12 ,  G03F7/70633

    Abstract: The present invention determines property of a target (30) on a substrate (W), such as a grating on a wafer. An inspection apparatus has an illumination source (702, 710) with two or more illumination beams (716, 716′, 716″, 716′″) in the pupil plane of a high numerical aperture objective lens (L3). The substrate and target are illuminated via the objective lens from different angles of incidence with respect to the plane of the substrate. In the case of four illumination beams, a quad wedge optical device (QW) is used to separately redirect diffraction orders of radiation scattered from the substrate and separates diffraction orders from the two or more illumination beams. For example four 0th diffraction orders are separated for four incident directions. After capture in multimode fibers (MF), spectrometers (S1-S4) are used to measure the intensity of the separately redirected 0th diffraction orders as a function of wavelength. This may then be used in determining a property of a target.

    Fluid analyzer using absorption spectroscopy
    230.
    发明授权
    Fluid analyzer using absorption spectroscopy 有权

    公开(公告)号：US09874655B2

    公开(公告)日：2018-01-23

    申请号：US14886092

    申请日：2015-10-19

    Applicant: Schlumberger Technology Corporation

    Inventor： Shigeo Daito ,  Tsutomu Yamate

    IPC: G01V8/12 ,  G01N21/31 ,  E21B49/10

    CPC classification number: G01V8/12 ,  E21B49/10 ,  G01N21/3103 ,  G01N2201/061

    Abstract: A technique facilitates formation evaluation with downhole devices which may include fluid analyzers having atomic absorption spectroscopy (AAS) systems. According to an embodiment, a fluid analyzer of a downhole tool may be positioned in a wellbore penetrating a subterranean formation. The downhole tool comprises a downhole flowline for receiving a sample fluid. Additionally, the fluid analyzer comprises a flowline positioned to receive the sample fluid for analysis by the atomic absorption spectroscopy system. The atomic absorption spectroscopy system has a light source to generate light and to excite atoms of a substance in the sample fluid. The atomic absorption spectroscopy system also comprises a detector to measure how much light has been absorbed by the substance, thus enabling the atomic absorption spectroscopy analysis.

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