公开(公告)号：US07079253B2

公开(公告)日：2006-07-18

申请号：US10630430

申请日：2003-07-29

Applicant: Michael B. North-Morris ,  Anthony S. Lee

Inventor： Michael B. North-Morris ,  Anthony S. Lee

IPC: G01B9/02 ,  G01J3/45

CPC classification number: G01M11/331 ,  G01M11/31 ,  G01M11/3127

Abstract: A tracking stage has an optical filter with a free spectral range greater than the maximum mode hop of a tunable laser. The free spectral range is sufficient to determine the wavelength of the laser output after the mode hop. The output is dithered or a quadrature signal is used to determine whether the mode hop is forwards or backwards. In a further embodiment, a second tracking stage with a shorter free spectral range is coupled to the tunable laser to provide enhanced wavelength resolution. Alternatively, the second tracking stage is omitted and the signal of the tracking stage is amplified to enhance wavelength resolution.

Abstract translation: 跟踪阶段具有光学范围大于可调谐激光器的最大模式跳跃的光学滤波器。 自由光谱范围足以确定模式跳后激光输出的波长。 输出被抖动，或者使用正交信号来确定模式跳跃是向前还是向后。 在另一实施例中，具有较短自由光谱范围的第二跟踪级耦合到可调谐激光器以提供增强的波长分辨率。 或者，省略第二跟踪级，并且放大跟踪级的信号以增强波长分辨率。

公开(公告)号：US07034945B2

公开(公告)日：2006-04-25

申请号：US10627404

申请日：2003-07-25

Applicant: Richard Lee Kendrick ,  Eric H. Smith

Inventor： Richard Lee Kendrick ,  Eric H. Smith

IPC: G01B9/02 ,  G01J3/45

CPC classification number: G01J3/453

Abstract: A spectrometer configured to extract spectral information from a wavefront. The spectrometer includes a first collection device that includes an adjustable-optical path and configured to collect a first portion of a wavefront; a second collection device configured to collect a second portion of the wavefront; combiner optics configured to interfere the first and second portions of the wavefront at an image plane of the first and second collector devices to form interference patterns at the image plane; and a Fourier transformation module configured to derive spectral information from the interference patterns.

Abstract translation: 配置为从波前提取光谱信息的光谱仪。 光谱仪包括第一采集装置，其包括可调光路径并且被配置为收集波前的第一部分; 第二收集装置，被配置为收集所述波前的第二部分; 组合器光学器件，被配置为在所述第一和第二集电器件的像平面处干涉所述波前的所述第一和第二部分，以在所述图像平面处形成干涉图案; 以及傅立叶变换模块，被配置为从所述干扰图案中导出频谱信息。

公开(公告)号：US06952267B2

公开(公告)日：2005-10-04

申请号：US10615321

申请日：2003-07-07

Applicant: Robert J. Rarac

Inventor： Robert J. Rarac

IPC: G01J1/42 ,  G01J3/02 ,  G01J3/28 ,  G01J3/45 ,  G01B9/02

CPC classification number: G01J1/4257 ,  G01J1/0228 ,  G01J3/02 ,  G01J3/027 ,  G01J3/28 ,  G01J3/45

Abstract: A method and apparatus for measuring bandwidth of light emitted from a laser which may comprise: first and second wavelength sensitive optical bandwidth detectors providing, respectively, an output representative of a first parameter indicative of the bandwidth of the emitted light as measured respectively by the first and second bandwidth detectors, and an actual bandwidth calculation apparatus adapted to utilize these two outputs as part of a multivariable linear equation employing predetermined calibration variables specific to either the first or the second bandwidth detector, to calculate a first actual bandwidth parameter or a second actual bandwidth parameter. The first actual bandwidth parameter may be a spectrum full width at some percent of the maximum (“FWXM”), and the second actual bandwidth parameter may be a portion containing some percentage of the energy (“EX”). The first and second bandwidth detectors may an etalon and the outputs may be representative of a fringe width of a fringe of an optical output of the respective etalon at FWXM. The precomputed calibration variables may be derived from respective three dimensional plots representing, respectively, detector outputs in relation to a calibrating input light with known values of the first and second actual bandwidth parameters.

Abstract translation: 一种用于测量从激光器发射的光的带宽的方法和装置，其可以包括：第一和第二波长敏感光学带宽检测器，分别提供表示第一参数的输出，所述第一参数指示所发射的光的带宽，分别由第一 和第二带宽检测器，以及实际带宽计算装置，其适用于利用这两个输出作为使用特定于第一或第二带宽检测器的预定校准变量的多变量线性方程的一部分来计算第一实际带宽参数或第二实际带宽参数 带宽参数。 第一实际带宽参数可以是在最大值的一些百分比（“FWXM”）的频谱全宽，并且第二实际带宽参数可以是包含能量的一部分（“EX”）的部分。 第一和第二带宽检测器可以是标准具，并且输出可以代表FWXM处的各个标准具的光输出的边缘的边缘宽度。 预先计算的校准变量可以从相应的三维图得出，分别表示相对于具有第一和第二实际带宽参数的已知值的校准输入光的检测器输出。

公开(公告)号：US20050211901A1

公开(公告)日：2005-09-29

申请号：US11079626

申请日：2005-03-14

Applicant: Ivo Crossmann ,  Hans Alt

Inventor： Ivo Crossmann ,  Hans Alt

IPC: G01J3/45 ,  G01N21/35 ,  G01N21/63 ,  H01L21/66

CPC classification number: G01N21/3563

Abstract: A method for determining the substitutional carbon content (Cs) of a monocrystalline or polycrystalline silicon sample comprises measuring an absorption spectrum of the silicon sample to be studied and of a reference sample and calculatng a differential spectrum from them, wherein the calculated differential spectrum provides a detection threshold of

Abstract translation: 用于测定单晶或多晶硅样品的取代碳含量（℃）的方法包括测量待研究的硅样品和参考样品的吸收光谱，并从其计算差示光谱 ，其中所计算的差分光谱提供<5PPBA C 的检测阈值。

公开(公告)号：US20050073690A1

公开(公告)日：2005-04-07

申请号：US10678843

申请日：2003-10-03

Applicant: Russell Abbink ,  John Maynard ,  Trent Ridder

Inventor： Russell Abbink ,  John Maynard ,  Trent Ridder

IPC: G01J3/26 ,  G01J3/45 ,  G01J9/02 ,  G01B9/02

CPC classification number: G01J3/26 ,  G01J3/0286 ,  G01J3/45 ,  G01J9/02

Abstract: A vertical cavity surface-emitting laser (VCSEL) package useful in interferometry. The present invention comprises methods and apparatuses that allow use of multimode VCSELS, and that provide for wavelength control and stability. The present invention contemplates the use of a defined response element, such as an etalon, in combination with control of the operating environment of the VCSEL to monitor and control the output wavelength of the VCSEL.

Abstract translation: 用于干涉测量的垂直腔表面发射激光器（VCSEL）封装。 本发明包括允许使用多模VCSELS并提供波长控制和稳定性的方法和装置。 本发明考虑使用诸如标准具的定义的响应元件与VCSEL的操作环境的控制相结合来监视和控制VCSEL的输出波长。

公开(公告)号：US20050068538A1

公开(公告)日：2005-03-31

申请号：US10676907

申请日：2003-09-30

Applicant: Rajasekhar Rao ,  John Melchior ,  Holger Glatzel

Inventor： Rajasekhar Rao ,  John Melchior ,  Holger Glatzel

IPC: H01S3/23 ,  G01J3/45

CPC classification number: H01S3/2366 ,  H01S3/03 ,  H01S3/2333

Abstract: A spectral analysis module, including a wavemeter, for a high repetition rate gas discharge laser having a laser output beam comprising a pulsed output of greater than or equal to 15 mJ per pulse, sub-nanometer bandwidth tuning range pulses having a femptometer bandwidth precision and tens of femptometers bandwidth accuracy range, for measuring bandwidth on a pulse to pulse basis at pulse repetition rates of 4000 Hz and above, is disclosed which may comprise a primary beam-splitter in the path of the laser output laser of the gas discharge laser operative to pass the vast majority of the output beam and to reflect a first small portion of the output beam, the primary beam splitter oriented at an angle to sufficiently reduce the fluence on the primary beam-splitter, and creating overlapping fresnel reflections in the first small portion of the laser output beam; a secondary beam splitter made from a material having a damage threshold sufficiently high to tolerate the fluence created by the overlapping portion of the fresnel reflections in the first small portion of the output laser beam, the secondary beam splitter reflecting the vast majority of the first small portion of the output laser beam and passing a second small portion of the output laser beam; a telescoping optic in the path of the second small portion of the output beam operative to demagnify the second small portion of the output beam onto a first stage diffuser receiving the demagnified second small portion of the output laser beam, the demagnification selected to keep the fluence in the overlapping fresnel reflections in the second small portion of the output laser beam below the damage threshold of the first stage diffuser. The telescoping optic may demagnify a long axis of the second small portion of the output laser beam more than a short axis of the second small portion of the output laser beam, redistributing the fluence of the second small portion of the laser output beam across the first stage diffuser to keep any portion of the first stage diffuser from exceeding the damage threshold for the material from which the first stage diffuser is made. The vast majority of the first small portion of the laser output beam may be reflected into a power detection module. A second stage diffuser may creating a narrow cone of a focused second small portion of the laser output beam before the beam enters an interferometer.

公开(公告)号：US06867863B1

公开(公告)日：2005-03-15

申请号：US09936967

申请日：2000-03-31

Applicant: Paul Kadlec

Inventor： Paul Kadlec

IPC: G01B9/02 ,  G01J3/45 ,  G01J4/00 ,  G02F1/01 ,  G02F1/03

CPC classification number: G02F1/0123 ,  G02F1/0131

Abstract: A diagnostic system (24) for a PEM (20) provides optically determined information about the retardance characteristics induced by the PEM (20). The diagnostic system (24) is integrated with the PEM (20) so that the PEM (20) performance may be diagnosed or monitored during operation of the PEM (20). Specifically, the diagnostic system (24) is used alongside an optical setup (22) that employs a primary light beam (28) for conventional purposes such as polarimetry, optical metrology, etc. The diagnostic system (24) includes its own diagnostic light source (50) that is directed through the optical element (32) of the PEM (20) at a location remote from the primary aperture (38) of the PEM (20). Thus, the diagnostic system (24) and the primary PEM (20) operation can be undertaken simultaneously, with one not interfering with the other. The output of the diagnostic system reflects the actual retardance characteristic provided by the PEM (20) and can be used as feedback to adjust the PEM control as needed.

Abstract translation: 用于PEM（20）的诊断系统（24）提供关于由PEM（20）引起的延迟特性的光学确定的信息。 诊断系统（24）与PEM（20）集成，使得在PEM（20）的操作期间可以诊断或监视PEM（20）性能。 具体地，诊断系统（24）与光学设置（22）一起使用，该光学设备（22）采用用于常规目的的主光束（28），例如偏振测量，光学测量等。诊断系统（24）包括其自身的诊断光源 （50），其在远离PEM（20）的主孔（38）的位置处被引导通过PEM（20）的光学元件（32）。 因此，诊断系统（24）和初级PEM（20）操作可以同时进行，其中一个不干扰另一个。 诊断系统的输出反映了PEM（20）提供的实际延迟特性，可以根据需要用作反馈调节PEM控制。

公开(公告)号：US6141100A

公开(公告)日：2000-10-31

申请号：US116191

申请日：1998-07-15

Applicant: E. Michael Burka ,  Raul Curbelo

Inventor： E. Michael Burka ,  Raul Curbelo

IPC: G01N21/27 ,  G01J3/28 ,  G01J3/42 ,  G01N21/55 ,  G01J3/45

CPC classification number: G01J3/42 ,  G01J3/2823 ,  G01N21/552 ,  G01J3/0208 ,  G01J3/021

Abstract: Method and apparatus for providing an imaging attenuated total reflection (ATR) spectrometer which provides faster measurement speed and better spatial resolution than systems collecting an equivalent amount of data using conventional, non-imaging ATR methods and systems. Apparatus includes a radiation source, an interferometer coupled to the radiation source which produces a spectrally-multiplexed input beam of radiation, an internal reflection element (IRE) engaging a sample-under-test, a focal plane array detector, a first optical system adapted and positioned to direct and concentrate the input beam through the rear surface of the IRE towards a contact area of the sample such that an angle of incidence of said input beam at the front surface is equal to or greater than the critical angle for the IRE, and a second optical system adapted and positioned to collect reflected radiation from the contact area and image the same onto the focal plane array detector.

Abstract translation: 用于提供成像衰减全反射（ATR）光谱仪的方法和装置，其提供比使用常规的非成像ATR方法和系统收集等量数据的系统的更快的测量速度和更好的空间分辨率。 设备包括辐射源，耦合到辐射源的干涉仪，其产生光谱复用的输入射线束，接合待测样本的内部反射元件（IRE），焦平面阵列检测器，适于 并且定位成将输入光束通过IRE的后表面引导并集中到样品的接触区域，使得前表面处的所述输入光束的入射角等于或大于IRE的临界角， 以及第二光学系统，其适于并定位成收集来自接触区域的反射辐射并将其图像到焦平面阵列检测器上。

公开(公告)号：US6128085A

公开(公告)日：2000-10-03

申请号：US421449

申请日：1999-10-19

Applicant: Dale Buermann ,  Abdul Rahim Forouhi ,  Michael J. Mandella

Inventor： Dale Buermann ,  Abdul Rahim Forouhi ,  Michael J. Mandella

IPC: G01B11/06 ,  G01J3/02 ,  G01J3/12 ,  G01J3/42 ,  G01J3/45 ,  G01J4/00 ,  G01N21/27 ,  G01N21/45 ,  G01N21/21

CPC classification number: G01J3/12 ,  G01B11/0625 ,  G01B11/0641 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/42 ,  G01J4/00

Abstract: An apparatus uses reflectance spectrophotometry to characterize a sample having any number of thin films. The apparatus uses two toroidal mirrors in an optical relay to direct light reflected by the sample to a spectroscopic device. A computer then analyzes the reflected spectrum to characterize the optical properties of the sample. The optical relay allows a range of angles of reflection from the sample, and has no chromatic aberration. The optical relay is also arranged so that the non-chromatic aberration is minimized. For polarization-based measurements polarizing elements can be used in the apparatus and the spectroscopic device can be a spectroscopic ellipsometer. The sample is mounted on a movable stage so that different areas of the sample may be characterized. Furthermore, a deflector and a viewer are used to allow the operator of the apparatus to view the region of the sample under study.

Abstract translation: 一种装置使用反射分光光度法来表征具有任何数量薄膜的样品。 该装置在光学继电器中使用两个环形反射镜来将由样品反射的光引导到光谱装置。 然后计算机分析反射光谱以表征样品的光学性质。 光学继电器允许来自样品的一定范围的反射角度，并且没有色差。 光学继电器也被布置成使得非色差最小化。 对于基于偏振的测量，偏振元件可以用在装置中，并且光谱装置可以是光谱椭偏仪。 将样品安装在可移动的载物台上，以便可以对样品的不同区域进行表征。 此外，偏转器和观察器用于允许装置的操作者观察正在研究的样品的区域。

公开(公告)号：US6128075A

公开(公告)日：2000-10-03

申请号：US277533

申请日：1999-03-26

Applicant: Philip R. Brierley

Inventor： Philip R. Brierley

IPC: G01J3/45 ,  G01J3/453 ,  G01N21/03 ,  G01N21/35 ,  G01N21/55 ,  G01N21/01 ,  G01J5/02

CPC classification number: G01J3/45 ,  G01J3/453 ,  G01N21/03 ,  G01N21/35 ,  G01N21/552 ,  G01N2021/3595 ,  G01N21/3563 ,  G01N21/3577

Abstract: A stage for an infrared spectroscope has a focusing body and a sampling element spaced apart by a mounting fixture. The focusing body and sampling element optically cooperate by transmission and internal refraction and reflection to focus an infrared beam on a sample surface and to collect the beam for analysis after it was reflected from the sample surface. The sampling element is made of a durable material and can be removably mounted in the fixture.

Abstract translation: 用于红外分光镜的平台具有聚焦体和通过安装夹具间隔开的采样元件。 聚焦体和采样元件通过透射和内部折射和反射进行光学协调，将红外光束聚焦在样品表面上，并在从样品表面反射之后收集光束进行分析。 采样元件由耐用材料制成，并且可拆卸地安装在固定装置中。