公开(公告)号：US07025501B2

公开(公告)日：2006-04-11

申请号：US10870828

申请日：2004-06-17

Applicant: Blaine D. Johs ,  Miroslav Micovic

Inventor： Blaine D. Johs ,  Miroslav Micovic

IPC: G01K11/32 ,  G01J5/08 ,  G01J4/04

CPC classification number: G01K11/125

Abstract: A method for tracking change in Temperature of Uniaxial or Biaxial Anisotropic Samples utilizing polarized electromagnetic radiation.

Abstract translation: 利用极化电磁辐射跟踪单轴或双轴各向异性样品的温度变化的方法。

公开(公告)号：US20050225761A1

公开(公告)日：2005-10-13

申请号：US10822355

申请日：2004-04-13

Applicant: Grant Gerhart ,  Roy Matchko

Inventor： Grant Gerhart ,  Roy Matchko

IPC: G01J4/00 ,  G01J4/04

CPC classification number: G01J4/04 ,  G01J2004/005

Abstract: A method and apparatus for determining and displaying polarization profiles of points in a scene from a single imaging detector array, which utilizes a filter system comprised of a retarder, four linear polarizers, four lenses, a color filter, camera lens and CCD video camera. Light from points in a scene are transmitted through the system and exits with attenuated intensities unique for each wavelength of the light. A narrowband color filter selects the wavelength of interest. The four lenses in the system produce four images of the scene, which are recorded as a single CCD-image. The attenuated intensities in each of the four scene-images are used to calculate the Stokes parameters for selected points in the scene for the selected wavelength. The inherent problem of the retarder introducing a different phase differential for each individual wavelength transmitted through the optical element is solved by expressing the Stokes parameters explicitly as a function of wavelength. A computer program separates the four scene-images in the CCD-image, crops, registers them and calculates the Stokes parameters for each point in the cropped scene. A unique pseudo-color scheme that utilizes the Poincarè sphere is used for encoding and displaying polarization parameters. This scheme associates the RGB values of an image with the normalized values of the Stokes parameters. The primary purpose of the method, apparatus and pseudo-color scheme is to obtain the four Stokes parameters simultaneously for each point in a scene and to be able to create video images of changing polarization parameters in real time.

Abstract translation: 一种用于从单个成像检测器阵列确定和显示场景中的点的偏振分布的方法和装置，其利用由延迟器，四个线性偏振器，四个透镜，滤色器，照相机镜头和CCD摄像机组成的滤波器系统。 来自场景中的光线通过系统传输，并以每个波长的光线独特的衰减强度退出。 窄带滤色器选择感兴趣的波长。 系统中的四个镜头产生四个场景图像，它们被记录为单个CCD图像。 四个场景图像中的每一个中的衰减强度用于计算所选波长的场景中所选点的斯托克斯参数。 通过将通过光学元件传输的每个单独波长引入不同相位差的延迟器的固有问题通过将波斯函数明确表示为斯托克斯参数来解决。 计算机程序分离CCD图像中的四个场景图像，作物，注册它们，并计算裁剪场景中每个点的斯托克斯参数。 使用Poincarè球体的独特的伪彩色方案用于编码和显示偏振参数。 该方案将图像的RGB值与Stokes参数的归一化值相关联。 该方法，装置和伪彩色方案的主要目的是为场景中的每个点同时获得四个斯托克斯参数，并能够实时创建改变极化参数的视频图像。

公开(公告)号：US20050083525A1

公开(公告)日：2005-04-21

申请号：US10969968

申请日：2004-10-22

Applicant: Jens Peupelmann ,  Egbert Krause ,  Adalbert Bandemer

Inventor： Jens Peupelmann ,  Egbert Krause ,  Adalbert Bandemer

IPC: G01J4/04 ,  G01J4/00 ,  G02B5/18 ,  G02B6/34 ,  G01J1/04

CPC classification number: G02B6/274 ,  G01J4/00 ,  G02B6/02109 ,  G02B6/276 ,  G02B6/2766 ,  G02B6/29317

Abstract: A fiber polarimeter has one or more oblique fiber Bragg gratings disposed one behind the other in a fiber. The fiber Bragg gratings couple out portions of a light wave input to the fiber depending on its polarization. For more than one fiber Bragg grating a wave plate is disposed in the fiber between consecutive fiber Bragg gratings. The portions of the light wave from the fiber Bragg grating(s) are detected to produce measurement data that is used to calculate four Stokes parameters for determining polarization, degree of polarization and/or power of the light wave.

Abstract translation: 光纤偏振计具有在光纤中一个在另一个之后设置的一个或多个倾斜光纤布拉格光栅。 纤维布拉格光栅根据其极化将耦合到输入到光纤的光波的部分。 对于多于一个的光纤布拉格光栅，在连续的光纤布拉格光栅之间的光纤中设置波片。 检测来自光纤布拉格光栅的光波的部分，以产生用于计算用于确定光波的偏振度，偏振度和/或光功率的四个斯托克斯参数的测量数据。

公开(公告)号：US20050051712A1

公开(公告)日：2005-03-10

申请号：US10766867

申请日：2004-01-30

Applicant: Manabu Komiyama

Inventor： Manabu Komiyama

IPC: G01J4/04 ,  G01J9/00 ,  H01S5/00 ,  H01S5/02 ,  H01S5/022 ,  H01S5/024 ,  H01S5/0687 ,  G02F1/01 ,  G01J3/50 ,  H01J5/16

CPC classification number: G01J9/00 ,  G01J4/04 ,  H01S5/005 ,  H01S5/0064 ,  H01S5/02248 ,  H01S5/02284 ,  H01S5/02415 ,  H01S5/02438 ,  H01S5/0687

Abstract: An optical module comprises a splitting element that splits light outputted from a light source; a first monitoring means that detects the intensity of light split by the splitting element; a polarization control means that switches the polarization state of light outputted from the splitting element based on a control signal; a filter means that accepts light outputted by the polarization control means as input, and whereof the characteristic changes depending on the polarization state of the input light; and a second monitoring means that detects the intensity of the light transmitted through the filter means.

Abstract translation: 光学模块包括分离元件，其分离从光源输出的光; 第一监视装置，其检测由所述分离元件分裂的光的强度; 偏振控制装置，其基于控制信号切换从分离元件输出的光的偏振状态; 滤波器装置，其接受由偏振控制装置输出的光作为输入，并且其特性根据输入光的偏振状态而改变; 以及第二监视装置，其检测透过过滤装置的光的强度。

公开(公告)号：US20050018189A1

公开(公告)日：2005-01-27

申请号：US10504796

申请日：2003-02-13

Applicant: D. Hampton ,  Shankar Krishnan ,  James Rix

Inventor： D. Hampton ,  Shankar Krishnan ,  James Rix

IPC: G01J3/447 ,  G01J4/04 ,  G01J4/00

CPC classification number: G01J4/04 ,  G01J3/447

Abstract: In a device for measuring the complete polarization state of light over a spectral bandwidth, an optical input signal (41) with wavelengths of light within a spectral band is incident on two or more diffraction gratings (42, 44, 46, 48), or incident from at least two directions on one or more diffraction gratings (72, 74), and the intensity is measured as a function of wavelength for at least four of the diffraction spectra produced by the grating(s). The polarization state of light is then calculated as a function of wavelength over the spectral bandwidth from the intensity measurements.

Abstract translation: 在用于在光谱带宽上测量光的完全偏振状态的装置中，光谱波段内的波长的光输入信号（41）入射到两个或更多个衍射光栅（42,44,46,48）上，或 在一个或多个衍射光栅（72,74）上从至少两个方向入射，并且对于由光栅产生的至少四个衍射光谱，测量强度作为波长的函数。 然后，根据强度测量，光的偏振状态被计算为光谱带宽上的波长的函数。

公开(公告)号：US20050002033A1

公开(公告)日：2005-01-06

申请号：US10893449

申请日：2004-07-16

Applicant: Martin Ebert ,  Li Chen

Inventor： Martin Ebert ,  Li Chen

IPC: G01B11/06 ,  G01J4/04 ,  G01N21/21 ,  G01N21/95 ,  G01J4/00

CPC classification number: G01N21/211 ,  G01J4/04

Abstract: An ellipsometric apparatus provides two impinging focused probe beams directed to reflect off the sample along two mutually distinct and preferably substantially perpendicular directions. A rotating stage rotates sections of the wafer into the travel area defined by two linear axes of two perpendicularly oriented linear stages. As a result, an entire wafer is accessed for measurement with the linear stages having a travel range of only half the wafer diameter. The reduced linear travel results in a small travel envelope occupied by the wafer and consequently in a small footprint of the apparatus. The use of two perpendicularly directed probe beams permits measurement of periodic structures along a preferred direction while permitting the use of a reduced motion stage.

Abstract translation: 椭圆仪器提供了两个撞击的聚焦探针光束，其被引导以沿两个相互不同的，优选地基本垂直的方向反射出样品。 旋转台将晶片的部分旋转到由两个垂直取向的线性级的两个线性轴限定的行进区域中。 结果，整个晶片被访问以进行测量，线性级的行程范围仅为晶片直径的一半。 减小的线性行程导致由晶片占据的小行程信封，因此在该设备的小占地面积内。 使用两个垂直定向的探针光束允许沿优选方向测量周期性结构，同时允许使用减小的运动级。

公开(公告)号：US06134012A

公开(公告)日：2000-10-17

申请号：US345560

申请日：1999-06-30

Applicant: David E. Aspnes ,  Jon Opsal

Inventor： David E. Aspnes ,  Jon Opsal

IPC: G01N21/21 ,  G01B11/06 ,  G01J3/02 ,  G01J3/447 ,  G01J4/00 ,  G01J4/04 ,  G02F1/01

CPC classification number: G01J3/02 ,  G01J3/0229 ,  G01J3/0232 ,  G01N21/211 ,  G01N2021/213

Abstract: An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135.degree. to 225.degree., and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously. A processor determines the polarization state of the beam as it impinges the analyzer from the light intensities measured by the detector.

Abstract translation: 用于使用宽波长范围分析样品的椭偏仪的椭偏仪和椭偏仪的方法包括用于产生具有用于与样品相互作用的光波长范围的多色光束的光源。 在光束与样品相互作用之前，偏振器使光束偏振。 旋转补偿器引起光束的偏振状态的相位延迟，其中波长范围和补偿器被选择为使得至少第一相位延迟值被诱导为在大约135°至225°的有效延迟的主要范围内 DEG，并且诱导超出初级范围的至少第二相延迟值。 在光束与样品相互作用后，分析仪与光束相互作用。 检测器测量与分析仪相互作用后的光强度，作为补偿器角度和波长的函数，优选同时在所有波长处。 处理器确定当光束从由检测器测量的光强度撞击分析仪时的偏振状态。

公开(公告)号：US6075235A

公开(公告)日：2000-06-13

申请号：US4166

申请日：1998-01-02

Applicant: Cornell Seu Lun Chun

Inventor： Cornell Seu Lun Chun

IPC: G01J4/04 ,  G01N21/21 ,  H04N5/33 ,  H04N5/372 ,  G02F1/01

CPC classification number: G01J4/04 ,  G01N21/211 ,  H04N3/1587 ,  H04N5/33

Abstract: An apparatus and method to determine the surface orientation of objects in a field of view is provided by utilizing an array of polarizers and a means for microscanning an image of the objects over the polarizer array. In the preferred embodiment, a sequence of three image frames is captured using a focal plane array of photodetectors. Between frames the image is displaced by a distance equal to a polarizer array element. By combining the signals recorded in the three image frames, the intensity, percent of linear polarization, and angle of the polarization plane can be determined for radiation from each point on the object. The intensity can be used to determine the temperature at a corresponding point on the object. The percent of linear polarization and angle of the polarization plane can be used to determine the surface orientation at a corresponding point on the object. Surface orientation data from different points on the object can be combined to determine the object's shape and pose. Images of the Stokes parameters can be captured and viewed at video frequency. In an alternative embodiment, multi-spectral images can be captured for objects with point source resolution. Potential applications are in robotic vision, machine vision, computer vision, remote sensing, and infrared missile seekers. Other applications are detection and recognition of objects, automatic object recognition, and surveillance. This method of sensing is potentially useful in autonomous navigation and obstacle avoidance systems in automobiles and automated manufacturing and quality control systems.

Abstract translation: 通过利用偏振器阵列和用于在偏振器阵列上显微镜观察物体的装置来提供在视场中确定物体的表面取向的装置和方法。 在优选实施例中，使用光电检测器的焦平面阵列捕获三个图像帧的序列。 在帧之间，图像移位距离等于偏振器阵列元件。 通过组合记录在三个图像帧中的信号，可以确定来自物体上每个点的辐射的强度，线偏振的百分比和偏振面的角度。 强度可用于确定物体上相应点处的温度。 线偏振百分比和偏振面的角度可用于确定物体上相应点处的表面取向。 可以组合对象上来自不同点的表面取向数据，以确定对象的形状和姿态。 可以在视频中捕获和观看斯托克斯参数的图像。 在替代实施例中，可以针对具有点源分辨率的对象捕获多光谱图像。 潜在的应用是机器人视觉，机器视觉，计算机视觉，遥感和红外导弹寻求者。 其他应用是对象的检测和识别，自动对象识别和监视。 这种感测方法在汽车和自动化制造和质量控制系统中的自主导航和障碍物回避系统中潜在有用。

公开(公告)号：US6043887A

公开(公告)日：2000-03-28

申请号：US200439

申请日：1998-11-27

Applicant: Louis B. Allard ,  Robert I. MacDonald ,  Carey M. Garrett

Inventor： Louis B. Allard ,  Robert I. MacDonald ,  Carey M. Garrett

IPC: G01J4/04 ,  G01J4/00

CPC classification number: G01J4/04

Abstract: The state of polarization of an input light beam is tested by determining four components of a Stokes vector of the light. These correspond to components of the light in three polarization states, S.sub.1 : linear horizontal, S.sub.2 : linear at 45 degrees, S.sub.3 : right circularly polarized, and S.sub.0 the total power. It is not necessary to filter out these components directly and measure their powers. In accordance with this invention it is more convenient to measure the powers in three arbitrary polarization states that have known relationships to each other, and, also measure the total power. The actual Stokes vector components is calculated from this information. Conveniently, a device having three polarization beam splitting surfaces and a prism provides a novel way in which to obtain the necessary information from an input beam so that a set of equations can be solved to determine the state of polarization the input beam.

Abstract translation: 通过确定光的斯托克斯矢量的四个分量来测试输入光束的偏振状态。 这些对应于三种偏振状态的光分量，S1：线性水平，S2：45度线性，S3：右圆极化，S0为总功率。 没有必要直接过滤掉这些组件并测量其功能。 根据本发明，测量三个具有彼此已知关系的任意偏振态的功率更为方便，并且还测量总功率。 实际的斯托克斯矢量分量是根据这个信息计算的。 方便地，具有三个偏振光束分离表面和棱镜的装置提供了一种从输入光束获得必要信息的新方法，从而可以求解一组方程以确定输入光束的偏振状态。

公开(公告)号：US5917594A

公开(公告)日：1999-06-29

申请号：US57245

申请日：1998-04-08

Applicant: Adam E. Norton

Inventor： Adam E. Norton

IPC: G01J4/04 ,  G01J3/02 ,  G01J3/42 ,  G01N21/21 ,  G01N21/27 ,  G01N21/47 ,  G02B17/08 ,  G01J3/447

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/42 ,  G01N21/211 ,  G02B19/0028 ,  G02B19/0047 ,  G02B19/0095 ,  G01N21/47

Abstract: Achromatic optics may be employed in spectroscopic measurement systems. The achromatic optics comprises a spherical mirror receiving a beam of radiation in a direction away from its axis and a pair of lenses: a positive lens and a negative meniscus lens. The negative meniscus lens corrects for the spherical aberration caused by off-axis reflection from the spherical mirror. The positive lens compensates for the achromatic aberration introduced by the negative lens so that the optics, as a whole, is achromatic over visible and ultraviolet wavelengths. Preferably, the two lenses combined have zero power or close to zero power. By employing a spherical mirror, it is unnecessary to employ ellipsoidal or paraboloidal mirrors with artifacts of diamond turning which limit the size of the spot of the sample that can be measured in ellipsometry, reflectometry or scatterometry.