公开(公告)号：US3217591A

公开(公告)日：1965-11-16

申请号：US18091162

申请日：1962-03-19

Applicant: BARR WILLIAM L ,  GARDNER ANDREW L

Inventor： BARR WILLIAM L ,  GARDNER ANDREW L

IPC: G01J3/26

CPC classification number: G01J3/26 ,  G01J3/021

公开(公告)号：US3100264A

公开(公告)日：1963-08-06

申请号：US527160

申请日：1960-01-28

Applicant: POLARAD ELECTRONICS CORP

Inventor： LAWRENCE JAFFE DAVID ,  ALAN ROSS ,  ABRAHAM SONNENSCHEIN

IPC: B64G3/00 ,  G01J3/00 ,  G01J3/14 ,  G01J3/28 ,  G01S3/781 ,  G01S3/782

CPC classification number: G01J3/14 ,  B64G3/00 ,  G01C21/025 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/2803 ,  G01S3/781 ,  G01S3/782

公开(公告)号：US12124172B2

公开(公告)日：2024-10-22

申请号：US17634702

申请日：2020-08-05

Applicant: ASML Holding N.V.

Inventor： Alexander Kremer

IPC: G03F7/20 ,  G01J3/02 ,  G01J3/44 ,  G03F7/00

CPC classification number: G03F7/70558 ,  G01J3/021 ,  G01J3/0291 ,  G01J3/4406 ,  G03F7/7085

Abstract: The present disclosure provides an ultraviolet radiation control system and a related method for control an ultraviolet radiation in a lithographic apparatus. The ultraviolet radiation control system comprises a housing; a conversion crystal (540), disposed on or in the housing, configured to convert an ultraviolet radiation to a fluorescent radiation; a plurality of photodetectors (550) configured to detect an intensity of a scattered portion of the fluorescent radiation; and at least one diffusive surface (545), disposed on or in the conversion crystal, configured to increase the intensity of the scattered portion of the fluorescent radiation.

公开(公告)号：US12066326B2

公开(公告)日：2024-08-20

申请号：US17426133

申请日：2020-01-28

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Takafumi Yokino ,  Toshiteru Suzuki ,  Katsuhiko Kato ,  Issei Oshima ,  Takashi Oba

IPC: G01J3/02

CPC classification number: G01J3/0256 ,  G01J3/021 ,  G01J3/0262

Abstract: A spectrometer includes a support having a bottom wall part and a side wall part surrounding a spectroscopic space, a cover arranged on an opening part formed by the side wall part and provided with a light transmitting part, a joining member arranged between the cover and the opening part, a light detection element supported by the side wall part between the spectroscopic space and the cover, and an optical function part provided on a surface of the bottom wall part. A vent is provided in at least one of the support, the cover, and the joining member. The vent is open to an outside and a space defined by the support, the cover, and the light detection element. The space communicates with the spectroscopic space.

公开(公告)号：US20240247980A1

公开(公告)日：2024-07-25

申请号：US18159216

申请日：2023-01-25

Applicant: Endress+Hauser Optical Analysis, Inc.

Inventor： Nicholas J. Croglio, JR. ,  Peter Scott ,  Douglas H. Beyer

IPC: G01J3/02 ,  G01J3/45 ,  G02B1/11

CPC classification number: G01J3/021 ,  G01J3/45 ,  G02B1/11

Abstract: The present disclosure includes an optical head for a spectroscopic device configured to produce a beam of light, a reference signal detector, and a signal detector. A mirror reflects the beam of light from the light source toward a multi-sectioned window having a top side and a bottom side. The bottom side includes an AR coating and the top side has a first section including an AR coating and a second section including a beam splitter with transmittance and reflectance. A first beam path for the beam of light is defined by the mirror, the second section of the multi-sectioned window, and the reference signal detector. A second beam path for the beam of light is defined by the mirror, the second section of the multi-sectioned window, a medium contained in the spectroscopic device, an additional mirror, the first section of the multi-sectioned window, and the signal detector.

公开(公告)号：US20240210618A1

公开(公告)日：2024-06-27

申请号：US18392389

申请日：2023-12-21

Applicant: IMEC VZW

Inventor： Bruno Figeys

IPC: G02B6/12 ,  G01J3/02

CPC classification number: G02B6/12014 ,  G01J3/0208 ,  G01J3/021 ,  G02B6/12021 ,  G02B2006/12104 ,  G02B2006/12164

Abstract: An integrated photonics arrayed waveguide multiplexing/demultiplexing device is disclosed. The device includes an array of waveguides having an incident light waveguide section including a phase correcting region, a transmitted light waveguide section, a tunable reflector, wherein each pair of consecutive waveguides in the array includes a coupler. The coupler configured to combine light from the transmitted light waveguide sections, determine therefrom an optical phase difference between the two consecutive waveguides, and wherein the couplers are further configured to determine therefrom a change in optical path length required for each of two consecutive waveguides to reach a predetermined optical phase difference, and wherein each phase correcting region is configured to apply the change to correct the optical path length of the respective waveguide.

公开(公告)号：US12019029B2

公开(公告)日：2024-06-25

申请号：US17108561

申请日：2020-12-01

Applicant: CANON KABUSHIKI KAISHA

Inventor： Genichiro Kudo ,  Kazumi Kimura ,  Hiroki Yoshida ,  Hiroto Kano

IPC: G01N21/88 ,  G01J3/02 ,  G01J3/28 ,  G01N21/31 ,  G01N21/47 ,  G01N21/84 ,  G02B5/00 ,  G02B13/02 ,  G02B13/04 ,  G02B13/08 ,  G02B17/08 ,  G02B27/10 ,  G02B27/42 ,  H04N23/00

CPC classification number: G01N21/8851 ,  G01J3/021 ,  G01N21/314 ,  G01N21/47 ,  G01N21/8806 ,  G02B5/005 ,  G02B13/02 ,  G02B13/04 ,  G02B13/08 ,  G02B17/0836 ,  G02B17/0848 ,  G02B27/1086 ,  G02B27/4205 ,  H04N23/00 ,  G01J3/2823 ,  G01N2021/8466 ,  G01N2201/0635

Abstract: Optical system includes front group, light-shielding member, and rear group that are arranged in this order in direction from object side toward image side. The light-shielding member is provided with opening elongated in first direction. The front group has aspherical surfaces, does not image the object at the opening in first section parallel to the first direction, and forms intermediate image of the object at the opening in second section perpendicular to the first direction. The rear group has diffractive surface that splits light beam that passes through the opening into light beams at different wavelengths in the second section and focuses the light beams on different locations in the second section. Tilt angles of the aspherical surfaces in the second section change in the first direction.

公开(公告)号：US20240175751A1

公开(公告)日：2024-05-30

申请号：US18520342

申请日：2023-11-27

Applicant: SHIMADZU CORPORATION

Inventor： Tomoyo TAO ,  Tomoki SASAYAMA ,  Ryuta SHIBUTANI ,  Atsuhiko OTAGURO ,  Fumiya KATSUTANI

IPC: G01J3/44 ,  G01J3/02 ,  G01J3/10

CPC classification number: G01J3/44 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/108

Abstract: An infrared Raman device is capable of switching and performing Raman measurement and first infrared measurement on a sample. The infrared Raman device includes an objective lens for Raman measurement; a first observation lens for infrared measurement; a laser light source that generates laser light; a first infrared light source that generates first infrared light; and a mirror. The mirror is disposed at time of the Raman measurement to reflect the laser light to cause the laser light to pass through the objective lens for Raman measurement and reflect Raman light generated from the sample by the laser light that passes through the objective lens for Raman measurement and radiated to the sample. The Raman light passes back through the objective lens for Raman measurement.

公开(公告)号：US20240068866A1

公开(公告)日：2024-02-29

申请号：US18237594

申请日：2023-08-24

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tatsuo DOUGAKIUCHI

IPC: G01J3/02 ,  G01J3/427

CPC classification number: G01J3/021 ,  G01J3/0208 ,  G01J3/0289 ,  G01J3/427 ,  G01J2003/423

Abstract: The spectrometer includes: a light source unit emitting a laser beam; a mirror unit including a first plane mirror having a first mirror surface and a second plane mirror having a second mirror surface, wherein a measurement target is introduced between the first mirror surface and the second mirror surface; and a light detector detecting the laser beam returned by multiple reflection between the first mirror surface and the second mirror surface. The first mirror surface and the second mirror surface are arranged non-parallel to each other when viewed from the Z-axis direction so as to form an optical path of the laser beam reciprocating in the Y-axis direction while performing multiple reflection between the first mirror surface and the second mirror surface. The optical path of the laser beam between the first mirror surface and the second mirror surface is inclined with respect to the Z-axis direction.

公开(公告)号：US11874172B2

公开(公告)日：2024-01-16

申请号：US17675125

申请日：2022-02-18

Applicant: SHIMADZU CORPORATION

Inventor： Hideaki Katsu ,  Hiromasa Maruno

IPC: G01J3/453 ,  G01N21/35 ,  G01J3/02

CPC classification number: G01J3/4535 ,  G01J3/021 ,  G01J3/0202 ,  G01N21/35

Abstract: A Fourier transform infrared spectrophotometer includes a main interferometer, a control interferometer, an infrared detector, a control light detector, a waveplate, and a support member. The waveplate is disposed on an optical path of a control light beam and between a fixed mirror or a moving mirror and a beam splitter. The support member supports the waveplate. An outer perimeter of the waveplate includes a supported region supported by the support member and a released region spaced apart from the support member.