公开(公告)号：US20130063722A1

公开(公告)日：2013-03-14

申请号：US13608539

申请日：2012-09-10

Applicant: William B. SPARKS

Inventor： William B. SPARKS

IPC: G01J3/447

CPC classification number: G01J3/447 ,  G01J3/44

Abstract: A single-shot real-time spectropolarimeter for use in astronomy and other sciences that captures and encodes some or all of the Stokes polarization parameters simultaneously using only static, robust optical components with no moving parts is described. The polarization information is encoded onto the spectrograph at each wavelength along the spatial dimension of the 2D output data array. The varying embodiments of the concept include both a two-Stokes implementation (in which any two of the three Stokes polarization parameters are measured) and a full Stokes implementation (in which all three of the Stokes polarization parameters are measured), each of which is provided in either single beam or dual beam forms.

Abstract translation: 描述了用于天文学和其他科学的单次实时分光偏振计，其仅使用没有移动部件的静态，坚固的光学部件同时捕获和编码部分或全部斯托克斯极化参数。 偏振信息沿着2D输出数据阵列的空间维度被编码在每个波长的光谱仪上。 该概念的变化实施例包括双斯托克斯实现（其中测量三个斯托克斯极化参数中的任何两个）和全斯托克斯实现（其中测量所有三个斯托克斯极化参数），每个都是 以单梁或双梁形式提供。

公开(公告)号：US08168939B2

公开(公告)日：2012-05-01

申请号：US12500465

申请日：2009-07-09

Applicant: Michael Mack ,  Mark Peterson ,  Steffen Gloeckner ,  Adithyaram Narasimha ,  Roger Koumans ,  Peter De Dobbelaere

Inventor： Michael Mack ,  Mark Peterson ,  Steffen Gloeckner ,  Adithyaram Narasimha ,  Roger Koumans ,  Peter De Dobbelaere

IPC: G02F1/01 ,  G01N21/86 ,  G02B5/30 ,  G01J3/447

CPC classification number: G02B6/43 ,  G02B6/305 ,  G02B6/32 ,  G02B6/34 ,  G02B6/4208 ,  G02B6/4214 ,  G02B26/105 ,  H01S5/005 ,  H01S5/0064 ,  H01S5/187 ,  H04B10/503

Abstract: Methods and systems for a light source assembly supporting direct coupling to a photonically enabled complementary metal-oxide semiconductor (CMOS) chip are disclosed. The assembly may include a laser, a microlens, a turning mirror, reciprocal and/or non-reciprocal polarization rotators, and an optical bench. The laser may generate an optical signal that may be focused utilizing the microlens. The optical signal may be reflected at an angle defined by the turning mirror, and may be transmitted out of the light source assembly to one or more grating couplers in the chip. The laser may include a feedback insensitive laser. The light source assembly may include two electro-thermal interfaces between the optical bench, the laser, and a lid affixed to the optical bench. The turning mirror may be integrated in a lid affixed to the optical bench or may be integrated in the optical bench.

Abstract translation: 公开了用于支持与光子学互补金属氧化物半导体（CMOS）芯片的直接耦合的光源组件的方法和系统。 组件可以包括激光器，微透镜，转向镜，倒数和/或非倒数偏振旋转器以及光学平台。 激光器可以产生可以利用微透镜聚焦的光信号。 光信号可以以由转向镜定义的角度反射，并且可以从光源组件传输到芯片中的一个或多个光栅耦合器。 激光器可以包括反馈不敏感的激光器。 光源组件可以包括在光学台，激光器和固定到光学台之间的盖子之间的两个电热接口。 转向镜可以集成在固定到光学工作台上的盖中，或者可以集成在光学台中。

公开(公告)号：US08031338B2

公开(公告)日：2011-10-04

申请号：US11291111

申请日：2005-11-30

Applicant: David Piston ,  Mark Rizzo

Inventor： David Piston ,  Mark Rizzo

IPC: G01J3/447

CPC classification number: C12Q1/6818 ,  G01N21/6428 ,  G01N21/6445 ,  G01N21/6458 ,  G01N33/542 ,  G01N2021/6432 ,  G01N2021/6441

Abstract: The present invention provides improved methods for assessing Förster resonance energy transfer using polarized light. Specifically, the methods rely on measuring depolarized light emitted by fluorescent acceptor molecules.

Abstract translation: 本发明提供了使用偏振光评估Förster共振能量转移的改进方法。 具体地说，该方法依赖于测量由荧光受体分子发射的去极化光。

公开(公告)号：US07884944B2

公开(公告)日：2011-02-08

申请号：US12350195

申请日：2009-01-07

Applicant: Joseph D. Vance

Inventor： Joseph D. Vance

IPC: G01J3/447 ,  G01J3/45 ,  G01B9/02

CPC classification number: G02F1/0136 ,  G02F1/0126 ,  G02F1/3526

Abstract: A tunable optical spectrometer includes a medium configured to perform polarization rotation within a frequency band on a linearly polarized test beam, wherein the medium is circularly birefringent, and wherein the polarization rotation is achieved based on two-photon-absorption. The medium includes a gaseous substance, a first reference laser beam having a first reference frequency, and a second reference laser beam having a second reference frequency, wherein the first reference laser beam and the second reference laser beam have a same circular polarization state.

Abstract translation: 可调谐光谱仪包括被配置为在线偏振测试光束上在频带内执行偏振旋转的介质，其中介质是圆形双折射的，并且其中基于双光子吸收来实现偏振旋转。 介质包括气态物质，具有第一参考频率的第一参考激光束和具有第二参考频率的第二参考激光束，其中第一参考激光束和第二参考激光束具有相同的圆偏振状态。

公开(公告)号：US20100321691A1

公开(公告)日：2010-12-23

申请号：US12918100

申请日：2008-02-18

Applicant: David Gregson

Inventor： David Gregson

IPC: G01J3/447 ,  G01J3/28 ,  G01N21/19

CPC classification number: G01N21/19 ,  G01N2021/1731 ,  G01N2201/129

Abstract: A spectrometer for analysing material comprises a light source, a monochromator for selecting a range of wave-lengths from the light source and emitting them as monochromatic light, a chamber for locating a sample, a focusing means for focusing the monochromatic light onto a sample in the chamber, a detector for measuring the monochromatic light after it has interacted with the sample. An independently variable parameter is varied between two values vi and v2, while the detector measures the monochromatic light across a range of is wavelengths, the independent variable having a value or values between v1 and v1+Δv, and Δv being much smaller than the interval between v1 and v2.

Abstract translation: 用于分析材料的光谱仪包括光源，用于从光源中选择波长范围并将其作为单色光发射的单色仪，用于定位样品的室，用于将单色光聚焦到样品上的聚焦装置 该室是用于在与样品相互作用后测量单色光的检测器。 独立变量参数在两个值vi和v2之间变化，而检测器测量波长范围内的单色光，该独立变量具有v1或v1 +＆Dgr; v和/ 小于v1和v2之间的间隔。

公开(公告)号：US20100113941A1

公开(公告)日：2010-05-06

申请号：US12527727

申请日：2008-02-18

Applicant: Bernardus H.W. Hendriks ,  Antonius T.M. Van Gogh ,  Hans Zou

Inventor： Bernardus H.W. Hendriks ,  Antonius T.M. Van Gogh ,  Hans Zou

IPC: A61B6/00 ,  G01J3/447 ,  G01J4/00 ,  G01N21/47

CPC classification number: A61B5/0084 ,  A61B5/0075 ,  A61B5/444 ,  A61B2562/0242 ,  G01N21/4795 ,  G01N2021/4792

Abstract: The present invention relates to an optical device for assessing optical depth (D) in a sample (100) illuminated by polarized radiation (20) from a source (10). A first and a second radiation guide have their end portions (3Oa′, 30b′) arranged for capturing reflected radiation (25a, 25b) from the sample. A detector (40) measures a first polarization (P1) and a second polarization (P—2) of the reflected radiation (25), and a first and a second intensity (II, 12) of the reflected radiation (25a, 25b) in the first (30a) and the second (30b) radiation guide, respectively. Processing means (60) then calculates a first (f) and a second (g) spectral function, both spectral functions (f, g) being indicative of single scattering events in the sample. The processing means (60) is further arranged to calculate a measure of the correlation (C) between the first (f) and a second (g) spectral function so as to assess whether the single scattering events originate from substantially the same optical depth (D) within the sample. Thus, the causal relation between the first and second spectral functions can be used for assessing whether the single scattering events giving rise to the two spectral functions come from substantially the same optical depth (D) within the sample. The invention is particular advantageous for optically probing an epithelial layer of a patient.

Abstract translation: 本发明涉及一种用于评估从源极（10）被偏振辐射（20）照射的样品（100）中的光学深度（D）的光学装置。 第一和第二辐射引导件具有其端部（30a'，30b'），用于从样品捕获反射辐射（25a，25b）。 检测器（40）测量反射辐射（25）的第一偏振（P1）和第二偏振（P-2），以及反射辐射（25a，25b）的第一和第二强度（II，12） 分别在第一（30a）和第二（30b）辐射导向件中。 处理装置（60）然后计算第一（f）和第二（g）光谱函数，两个光谱函数（f，g）指示样本中的单个散射事件。 处理装置（60）还被布置成计算第一（f）和第二（g）光谱函数之间的相关性（C）的度量，以便评估单个散射事件是否源于基本上相同的光学深度（ D）样品内。 因此，第一和第二光谱函数之间的因果关系可用于评估引起两个光谱函数的单个散射事件是否来自样本内的基本相同的光学深度（D）。 本发明特别有利于光学检测患者的上皮层。

公开(公告)号：US20100004773A1

公开(公告)日：2010-01-07

申请号：US12488544

申请日：2009-06-20

Applicant: Vladimir Kochergin

Inventor： Vladimir Kochergin

IPC: G06F19/00 ,  G01J3/447

CPC classification number: G01N21/211 ,  G01J3/2823 ,  G01J3/447 ,  G01N2021/213

Abstract: This invention provides an apparatus and method for characterization of thin film structures. More particularly, the present invention provides methods and devices for fast and accurate identification of optical constants, thickness, interface roughness and stresses of a sensing film structures by spectropolarimetric imaging technique. This invention also provides the method for active in-line manufacturing diagnostics and process control. The invention is broadly applicable with most important applications being manufacturing diagnostics, process control, quality control and characterization of solar cells, flat panel displays and semiconductor structures.

Abstract translation: 本发明提供了薄膜结构表征的装置和方法。 更具体地说，本发明提供了通过分光偏振成像技术快速准确地识别感测膜结构的光学常数，厚度，界面粗糙度和应力的方法和装置。 本发明还提供了用于在线制造诊断和过程控制的方法。 本发明广泛适用于最重要的应用，包括太阳能电池，平板显示器和半导体结构的制造诊断，过程控制，质量控制和表征。

公开(公告)号：US20080212091A1

公开(公告)日：2008-09-04

申请号：US12010212

申请日：2008-01-22

Applicant: Masato Tanaka ,  Tetsuya Nakanishi ,  Tetsuya Haruna ,  Masaaki Hirano ,  Toshiaki Okuno ,  Takashi Sasaki ,  Masashi Onishi

Inventor： Masato Tanaka ,  Tetsuya Nakanishi ,  Tetsuya Haruna ,  Masaaki Hirano ,  Toshiaki Okuno ,  Takashi Sasaki ,  Masashi Onishi

IPC: G01J3/447 ,  H01S3/10

CPC classification number: G01J3/10 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0224 ,  G01J3/0229 ,  G01J3/0297 ,  G01J3/06 ,  G01J3/14 ,  G01J3/1895 ,  G01J3/26 ,  G01J3/433 ,  G01J2003/065

Abstract: A light source unit and a spectrum analyzer are provided in which the influence of interference can be reduced under conditions where light is separated into spectral components. A spectrum analyzer 1 is equipped with a light source unit 2 for irradiating light onto sample A, a detector unit 3 for detecting the light reflected, scattered, or transmitted from the sample A, and a sample stage 4 on which a sample A is placed. A wide band light source 20 generates wide band light P1 such as supercontinuum light (SC light). Also, the light source unit 2 has an interference suppressing means for suppressing the interference of each wavelength component of the wide band light P1.

Abstract translation: 提供了一种光源单元和频谱分析仪，其中在将光分离成光谱分量的条件下可以降低干扰的影响。 频谱分析仪1具备用于向样品A照射光的光源单元2，检测从样品A反射，散射或透射的光的检测器单元3和放置样品A的样品台4 。 宽带光源20产生诸如超连续光（SC light）的宽带光P 1。 此外，光源单元2具有用于抑制宽带光P 1的每个波长分量的干扰的干扰抑制装置。

公开(公告)号：US20080037015A1

公开(公告)日：2008-02-14

申请号：US11903238

申请日：2007-09-21

Applicant: Adam Norton ,  Abdurrahman Sezginer ,  Fred Stanke

Inventor： Adam Norton ,  Abdurrahman Sezginer ,  Fred Stanke

IPC: G01J3/447

CPC classification number: G01B11/02 ,  G01J3/02 ,  G01J3/0294 ,  G01N21/211 ,  G01N21/25 ,  G01N21/474 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/213

Abstract: An optical measurement system for evaluating a sample has a motor-driven rotating mechanism coupled to an azimuthally rotatable measurement head, allowing the optics to rotate with respect to the sample. A polarimetric scatterometer, having optics directing a polarized illumination beam at non-normal incidence onto a periodic structure on a sample, can measure optical properties of the periodic structure. An E-O modulator in the illumination path can modulate the polarization. The head optics collect light reflected from the periodic structure and feed that light to a spectrometer for measurement. A beamsplitter in the collection path can ensure both S and P polarization from the sample are separately measured. The measurement head can be mounted for rotation of the plane of incidence to different azimuthal directions relative to the periodic structures. The instrument can be integrated within a wafer process tool in which wafers may be provided at arbitrary orientation.

Abstract translation: 用于评估样品的光学测量系统具有耦合到方位角可旋转测量头的电动机旋转机构，允许光学器件相对于样品旋转。 具有将非正常入射的偏振照明光束引导到样品上的周期性结构上的光学偏振散射仪可以测量周期性结构的光学性质。 照明路径中的E-O调制器可以调制偏振。 头部光学器件收集从周期性结构反射的光并将光馈送到光谱仪进行测量。 收集路径中的分束器可以确保来自样品的S和P极化分别测量。 测量头可以安装成相对于周期性结构使入射平面旋转到不同的方位角方向。 仪器可以集成在晶片工艺工具中，其中可以以任意取向提供晶片。

公开(公告)号：US20050264813A1

公开(公告)日：2005-12-01

申请号：US11129769

申请日：2005-05-13

Applicant: George Giakos

Inventor： George Giakos

IPC: G01J3/447 ,  G01J4/00 ,  G01J4/04 ,  G01N21/21

CPC classification number: G01J3/447 ,  B82Y10/00 ,  B82Y20/00 ,  G01J4/04 ,  G01N21/21

Abstract: The present invention relates to a multi-energy system that generates and/or forms images of targets/structures by applying Mueller matrix imaging principles and/or Stokes polarimetric parameter imaging principles to data obtained by the multi-energy system. In one embodiment, the present invention utilizes at least one energy or light source to generate two or more Mueller matrix and/or Stokes polarization parameters images of a target/structure, and evaluates the Mueller matrix/Stokes polarization parameters multi-spectral difference(s) between the two or more images of the target/structure. As a result, high contrast, high specificity images can be obtained. Additional information can be obtained by and/or from the present invention through the application of image, Mueller matrix decomposition, and/or image reconstruction techniques that operate directly on the Mueller matrix and/or Stokes polarization parameters.

Abstract translation: 本发明涉及通过将Mueller矩阵成像原理和/或斯托克斯偏振参数成像原理应用于由多能系统获得的数据来生成和/或形成目标/结构图像的多能量系统。 在一个实施例中，本发明利用至少一个能量或光源来产生目标/结构的两个或多个Mueller矩阵和/或斯托克斯极化参数图像，并且评估Mueller矩阵/斯托克斯极化参数多光谱差（s ）在目标/结构的两个或多个图像之间。 结果，可以获得高对比度，高特异性图像。 通过应用直接在Mueller矩阵和/或斯托克斯极化参数上操作的图像，Mueller矩阵分解和/或图像重建技术，可以获得附加信息和/或从本发明获得附加信息。