Non-contact photothermal method for measuring thermal diffusivity and
electronic defect properties of solids
    21.
    发明授权
    Non-contact photothermal method for measuring thermal diffusivity and electronic defect properties of solids 失效
    用于测量固体的热扩散率和电子缺陷特性的非接触光热法

    公开(公告)号:US5667300A

    公开(公告)日:1997-09-16

    申请号:US264164

    申请日:1994-06-22

    CPC classification number: G01R31/2656 G01N25/18 H01L22/12

    Abstract: There is provided a method of measuring thermal diffusivity of solids and electronic lifetimes and defect properties of semiconductors useful for in-situ, non-destructive monitoring of engineered materials and electronic substrates. The method, termed photothermal rate window method, involves irradiating a sample with a repetitive square laser pulse of duration .tau..sub.p and period T.sub.0 and monitoring the temperature profile by measuring the photothermal signal emitted from the sample. The period T.sub.0 of the repetitive heating pulse is maintained constant and the pulse duration .tau..sub.p is varied in the range between 0 and T.sub.0 with the temperature measured at each value of .tau..sub.p. The method of measuring semiconductor recombination lifetimes involves irradiating a sample and scanning one of either the period T.sub.0 and the pulse duration .tau..sub.p of the repetitive laser pulse with the other held constant. The photothermal signal emitted from the surface is measured. Defect energy states in semiconductors are measured by irradiating the sample with a repetitive laser pulse of duration .tau..sub.p and period T.sub.0 (both fixed) and monitoring the photothermal signal as the sample temperature is scanned. Defect levels are correlated with extremum in the profile. The photothermal signal in all the foregoing methods is input into a lock-in amplifier which measures the fundamental Fourier component of the signal. The output of the lock-in amplifier is fitted to a theoretical model of the photothermal response of a repetitively irradiated sample to obtain the thermal diffusivity, or the recombination lifetime.

    Abstract translation: 提供了一种测量固体的热扩散率和半导体的电子寿命和缺陷特性的方法,可用于工程材料和电子基板的原位,非破坏性监测。 称为光热速率窗口法的方法包括用持续时间τp和周期T0的重复平方激光脉冲照射样品,并通过测量从样品发射的光热信号来监测温度分布。 重复加热脉冲的周期T0保持恒定,并且脉冲持续时间τp在0和T0之间的范围内变化,并且在τp的每个值处测量温度。 测量半导体复合寿命的方法包括照射样品并扫描重复激光脉冲的周期T0和脉冲持续时间τp中的一个保持常数。 测量从表面发射的光热信号。 通过用持续时间τp和周期T0(均为固定)的重复激光脉冲照射样品并在扫描样品温度时监测光热信号来测量半导体中的缺陷能量状态。 缺陷水平与轮廓中的极值相关。 所有上述方法中的光热信号被输入到测量信号的基本傅立叶分量的锁定放大器中。 锁定放大器的输出适用于重复照射的样品的光热响应的理论模型,以获得热扩散系数或复合寿命。

    Thermal wave sub-surface defect imaging and tomography apparatus
    22.
    发明授权
    Thermal wave sub-surface defect imaging and tomography apparatus 失效
    热波子表面缺陷成像和断层摄影仪

    公开(公告)号:US4950897A

    公开(公告)日:1990-08-21

    申请号:US293276

    申请日:1989-01-04

    CPC classification number: G01N21/1702 G01N2021/1782 G01N2021/1787

    Abstract: A thermal wave three-dimensional imaging and tomography apparatus and a thermal wave detector therefor are provided. The apparatus includes a light source for generating a laser beam which is modulated and then focussed onto one side of a solid test material. A thin pyroelectric polymer electret (.beta.-PVDF) film having an electroded upper surface and an electrodeless lower surface supports the other side of the test material on its electroded surface. A single thin metal elongate pin or an array of thin metal elongate pins are disposed beneath the electrodeless lower surface. The pin or pins generate(s) signals upon detection of thermal waves passing through the solid test material resulting from the laser excitation due to the photopyroelectric (P.sup.2 E) effect. Since the pins are small, the signals generated by the pins represent local thermal wave progagation through the test material. The laser beam and the test material are moved relative to one another so that the laser beam scans substantially the entire one side of the test material. When using a single pin, the pin is moved with respect to the other side of the test material so that the pin scans the other side of the film to detect local thermal wave propagation through the test material during the entire scan of the laser beam on the test material. When using an array of pins, the array of pins remains stationary with respect to the other side of the material during the scan of the laser beam on the test material. The resulting signals generated by the pins during the laser beam scan are conveyed to a micro-computer via signal conditioning circuitry wherein a three-dimensional image of the test material subsurface structure is formed.

    Abstract translation: 提供了热波三维成像和断层摄影装置及其热波探测器。 该装置包括用于产生激光束的光源,该激光束被调制然后聚焦在固体测试材料的一侧上。 具有电沉积的上表面和无电极下表面的薄的热电聚合物驻极体(β-PVDF)膜在其电沉积的表面上支撑测试材料的另一侧。 单个细金属细长销或细金属细长销的阵列设置在无电极下表面下方。 由于光电(P2E)效应,在检测到通过激光激发产生的固体测试材料的热波时,引脚或引脚产生信号。 由于引脚很小,由引脚产生的信号表示通过测试材料的局部热波程序。 激光束和测试材料相对于彼此移动,使得激光束基本上扫描测试材料的整个一侧。 当使用单个引脚时,引脚相对于测试材料的另一侧移动,使得引脚扫描薄膜的另一侧,以在激光束的整个扫描期间检测通过测试材料的局部热波传播 测试材料。 当使用引脚阵列时,激光束在测试材料上的扫描期间,引脚阵列相对于材料的另一侧保持静止。 在激光束扫描期间由引脚产生的所得到的信号通过信号调节电路传送到微型计算机,其中形成了测试材料地下结构的三维图像。

    METHODS FOR GENERATING MULTIPLE MISMATCHED CODED EXCITATION SIGNALS
    24.
    发明申请
    METHODS FOR GENERATING MULTIPLE MISMATCHED CODED EXCITATION SIGNALS 审中-公开
    用于产生多个不匹配的编码激励信号的方法

    公开(公告)号:US20160213258A1

    公开(公告)日:2016-07-28

    申请号:US14979797

    申请日:2015-12-28

    Abstract: The present disclosure provides systems and methods for imaging based on the generation and use of mismatched coded excitation signals. Cross-correlation properties of the received signal reveal the location and/or timing and/or properties of the source. The use of mismatched signals enables spatial and/or temporal and/or functional encoding of the transmitted signals. In some embodiments, high-speed imaging may be performed by employing mismatched codes for spatial and/or temporal encoding, and by employing a subset of transducer elements as transmitters, and another subset of elements as receivers. Various example embodiments of different types of mismatched codes are provided, including codes that employ multiple frequency chirps, codes that employ concatenated multi-frequency binary phase-coded waveforms, and chirped binary phase-coded waveforms.

    Abstract translation: 本公开提供了基于错配编码激励信号的生成和使用的用于成像的系统和方法。 接收信号的互相关属性显示源的位置和/或时序和/或属性。 使用不匹配的信号可以实现发射信号的空间和/或时间和/或功能编码。 在一些实施例中,可以通过对空间和/或时间编码采用不匹配的代码,并且通过使用换能器元件的子集作为发射机,以及将元素的另一子集作为接收机来执行高速成像。 提供了不同类型的不匹配代码的各种示例实施例,包括采用多频率啁啾的代码,采用级联的多频二进制相位编码波形的代码和啁啾的二进制相位编码波形。

    Method of performing wavelength modulated differential laser photothermal radiometry with high sensitivity
    26.
    发明授权
    Method of performing wavelength modulated differential laser photothermal radiometry with high sensitivity 有权
    高灵敏度进行波长调制差分激光光热辐射测量的方法

    公开(公告)号:US08649835B2

    公开(公告)日:2014-02-11

    申请号:US12948525

    申请日:2010-11-17

    Abstract: Methods are provided for the detection of an analyte in a sample using wavelength modulated differential photothermal radiometry with enhanced sensitivity. A wavelength modulated differential photothermal radiometry system, comprising two optical modulated beams, where each beam experiences different absorption by the analyte, is calibrated by controlling the relative phase difference between the modulated beams so that individual photothermal signals corresponding to each modulated beam are 180° out of phase, corresponding to peak sensitivity to analyte concentration. The system may be further calibrated by varying the relative intensities of the two modulated beams and measuring standards containing known analyte concentration in order to determine an optimal relative intensity for a given concentration range of interest.

    Abstract translation: 提供了使用具有增强的灵敏度的波长调制差分光热辐射测量来检测样品中分析物的方法。 波长调制的差分光热辐射测量系统包括两个光调制光束,其中每个光束经受分析物的不同吸收,通过控制调制光束之间的相对相位来校准,使得对应于每个调制光束的各个光热信号为180° 的相位,对应于对分析物浓度的峰值敏感性。 可以通过改变两个调制束的相对强度和包含已知分析物浓度的测量标准来进一步校准系统,以便确定给定的感兴趣浓度范围的最佳相对强度。

    METHOD OF PROCESSING AND DISPLAYING ORAL HEALTH DIAGNOSTIC DATA
    27.
    发明申请
    METHOD OF PROCESSING AND DISPLAYING ORAL HEALTH DIAGNOSTIC DATA 审中-公开
    加工和显示口腔健康诊断数据的方法

    公开(公告)号:US20130122468A1

    公开(公告)日:2013-05-16

    申请号:US13697758

    申请日:2011-05-13

    Abstract: A method is provided for analyzing and displaying an oral health status of a tooth or an entire dentition based on a measurement with a diagnostic device. Diagnostic data pertaining to a selected tooth, tooth surface, section of tooth surface or numbers of teeth in a mouth is recorded from an oral health diagnostic device, optionally along with an image of the particular tooth or tooth surface examined. The diagnostic data is processed and compared with reference data to determine an oral health status of the tooth. The oral health status of the tooth is then displayed on an odontogram shown in a user interface. The user interface may also provide reports comparing changes in the measured data and/or images along with the therapies used, thereby enabling the measurement and tracking of outcomes from various therapies over time.

    Abstract translation: 提供了一种用于基于使用诊断装置的测量来分析和显示牙齿或整个牙列的口腔健康状况的方法。 从口腔健康诊断装置记录与选定的牙齿,牙齿表面,牙齿表面或牙齿数量有关的诊断数据,可选地与被检查的特定牙齿或牙齿表面的图像一起记录。 处理诊断数据并与参考数据进行比较以确定牙齿的口腔健康状况。 然后将牙齿的口腔健康状况显示在用户界面中显示的odontogram上。 用户界面还可以提供比较所测量的数据和/或图像的变化以及所使用的疗法的报告,从而使得能够随着时间的推移来测量和跟踪各种疗法的结果。

    Method and apparatus using infrared photothermal radiometry (PTR) and modulated laser luminescence (LUM) for diagnostics of defects in teeth
    28.
    发明授权
    Method and apparatus using infrared photothermal radiometry (PTR) and modulated laser luminescence (LUM) for diagnostics of defects in teeth 有权
    使用红外光热辐射测量(PTR)和调制激光发光(LUM)进行牙齿缺陷诊断的方法和设备

    公开(公告)号:US08306608B2

    公开(公告)日:2012-11-06

    申请号:US11488194

    申请日:2006-07-18

    CPC classification number: A61B5/417 A61B5/0088 A61B5/0452 A61B5/7228

    Abstract: There is provided a high-spatial-resolution dynamic diagnostic instrument which can provide simultaneous measurements of laser-induced frequency-domain infrared photothermal radiometric and alternating-current (ac) modulated luminescence signals from defects, demineralization, remineralization and caries in teeth intraorally. The emphasis is on the abilities of this instrument to approach important problems such as the detection, diagnosis and ongoing monitoring of carious lesions and or defects on the occlusal pits and fissures, smooth surfaces and interproximal areas between teeth which normally go undetected by x-ray radiographs or visual examination. The instrument is also able to detect early areas of demineralized tooth and or areas of remineralized tooth as well as defects along the margins of restorations. This capability of inspecting a local spot can be extended to a modulated imaging of sub-surface of target tooth by using a multi-array infrared camera. Two configurations of the instrument are presented.

    Abstract translation: 提供了一种高空间分辨率动态诊断仪器,可以同时测量激光诱导的频域红外光热辐射和交流(ac)调制的发光信号,从缺陷,软化,再矿化和齿内牙龋。 重点在于该仪器能够处理重要问题,例如龋齿病变的检测,诊断和持续监测,以及咬合凹陷和裂缝,牙齿之间的平滑表面和间隙之间的缺陷,这些区域通常未被x射线检测 放射照片或视觉检查。 该仪器还能够检测到软化牙齿的早期区域或再矿化区域,以及沿修复边缘的缺陷。 通过使用多阵列红外摄像机,可以将局部斑点检测能力扩展到目标牙齿的子表面的调制成像。 介绍了仪器的两种配置。

    Method and apparatus using infrared photothermal radiometry (PTR) and modulated laser luminescence (LUM) for diagnostics of defects in teeth
    29.
    发明申请
    Method and apparatus using infrared photothermal radiometry (PTR) and modulated laser luminescence (LUM) for diagnostics of defects in teeth 有权
    使用红外光热辐射测量(PTR)和调制激光发光(LUM)进行牙齿缺陷诊断的方法和设备

    公开(公告)号:US20070021670A1

    公开(公告)日:2007-01-25

    申请号:US11488194

    申请日:2006-07-18

    CPC classification number: A61B5/417 A61B5/0088 A61B5/0452 A61B5/7228

    Abstract: There is provided a high-spatial-resolution dynamic diagnostic instrument which can provide simultaneous measurements of laser-induced frequency-domain infrared photothermal radiometric and alternating-current (ac) modulated luminescence signals from defects, demineralization, remineralization and caries in teeth intraorally. The emphasis is on the abilities of this instrument to approach important problems such as the detection, diagnosis and ongoing monitoring of carious lesions and or defects on the occlusal pits and fissures, smooth surfaces and interproximal areas between teeth which normally go undetected by x-ray radiographs or visual examination. The instrument is also able to detect early areas of demineralized tooth and or areas of remineralized tooth as well as defects along the margins of restorations. This capability of inspecting a local spot can be extended to a modulated imaging of sub-surface of target tooth by using a multi-array infrared camera. Two configurations of the instrument are presented.

    Abstract translation: 提供了一种高空间分辨率动态诊断仪器,可以同时测量激光诱导的频域红外光热辐射和交流(ac)调制的发光信号,从缺陷,软化,再矿化和齿内牙龋。 重点在于该仪器能够处理重要问题,例如龋齿病变的检测,诊断和持续监测,以及咬合凹陷和裂缝,牙齿之间的平滑表面和间隙之间的缺陷,这些区域通常未被x射线检测 放射照片或视觉检查。 该仪器还能够检测到软化牙齿的早期区域或再矿化区域,以及沿修复边缘的缺陷。 通过使用多阵列红外摄像机,可以将局部斑点检测能力扩展到目标牙齿的子表面的调制成像。 介绍了仪器的两种配置。

    Device and method for differential sensing of hydrogen gas using thermoabsorptance or thermoreflectance
    30.
    发明授权
    Device and method for differential sensing of hydrogen gas using thermoabsorptance or thermoreflectance 失效
    使用热吸收或热敏电阻差分感应氢气的装置和方法

    公开(公告)号:US07116421B2

    公开(公告)日:2006-10-03

    申请号:US10384598

    申请日:2003-03-11

    CPC classification number: G01N21/783 G01N21/171 G01N33/005

    Abstract: A hydrogen sensor, useful for trace hydrogen gas detection. The sensor involves providing a gas sample, generating modulated optical excitation sources, bringing the optical excitation source to the side of a metalized thin pyroelectric film, and detecting via a lock-in amplifier circuit the coherent differential signal resulting from thermoreflectance and thermoabsorptance changes in the film when exposed to hydrogen gas.

    Abstract translation: 氢传感器,用于痕量氢气检测。 该传感器包括提供气体样品,产生调制的光学激发源,将光学激发源带到金属化的薄热电薄膜的侧面,以及通过锁定放大器电路检测由于热反射和热吸收变化引起的相干差分信号 当暴露于氢气时胶片。

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