公开(公告)号：US11043357B1

公开(公告)日：2021-06-22

申请号：US16751039

申请日：2020-01-23

Applicant: Applied Materials Israel Ltd.

Inventor： Pavel Margulis

IPC: H01J37/24 ,  H01J37/28 ,  H01J37/256

Abstract: A supply unit for driving an electrode of a charged particle beam column, the supply unit includes a first amplifier and a second amplifier that are configured to receive an input signal, an output of the first amplifier is coupled, via the first resistor, to a signal line of the coaxial cable, an output of the second amplifier is coupled, via the second resistor, to a main shield of the coaxial cable, one port of the first amplifier and one port of the second amplifier are coupled to a power supply return port. The signal line is configured to provide a first driving signal to an that is coupled between the signal line and the power supply return port.

公开(公告)号：US20210033456A1

公开(公告)日：2021-02-04

申请号：US16526989

申请日：2019-07-30

Applicant: Applied Materials Israel Ltd.

Inventor： Pavel Margulis

IPC: G01J1/44 ,  H03F3/08

Abstract: A method and a detection circuit. The detection circuit may include (a) a photodiode that is configured to convert radiation to a photodiode current; (b) a photodiode bias circuit that is configured to bias the photodiode; (c) a dynamic resistance circuit that has a first terminal and a second terminal; (d) a transimpedance amplifier that is configured to amplify an output current of the dynamic resistance circuit to provide an output voltage, wherein the second terminal is coupled to a negative input port of the amplification circuit; and (e) a conductor that is coupled between the first terminal and an anode of the photodiode.

公开(公告)号：US09869582B2

公开(公告)日：2018-01-16

申请号：US14948012

申请日：2015-11-20

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Pavel Margulis

IPC: H01L31/024 ,  H01L31/02 ,  G01J1/44 ,  H04B10/69

CPC classification number: G01J1/44 ,  G01J2001/444 ,  G01J2001/4466 ,  H01L31/02027 ,  H04B10/6911

Abstract: A device that may include a DC power supply coupled to a fixed current source; an APD; a DC voltage regulator that comprises a regulating transistor, arranged to maintain a regulated voltage at a fixed value over different APD currents; a temperature control module that is arranged to maintain a portion of the temperature control module at a fixed temperature; and compensation circuit that comprises a compensation component that is thermally coupled to the APD. A voltage drop over the compensation component is smaller than a voltage drop over the APD. A sum of (a) a current that pass through the APD and (b) a current that passes through the compensation component is fixed. The portion of the temperature control module is thermally coupled to the compensation component and to the APD.

公开(公告)号：US20170309439A1

公开(公告)日：2017-10-26

申请号：US15134324

申请日：2016-04-20

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Pavel Margulis

IPC: H01J37/147 ,  H01J37/06 ,  H01J37/28

CPC classification number: H01J37/1474 ,  H01J37/265 ,  H01J37/28

Abstract: A method for scanning an object with a charged particle beam, the method may include repeating, for each pair of scan lines out of multiple pairs of scan lines, the stages of: (i) deflecting the charged particle beam along a first direction, thereby scanning the object along a first scan line of the pair of scan lines; (ii) collecting electrons emitted from the object during the scanning of the object along a majority of the first scan line; (iii) deflecting the charged particle beam along a second direction that is normal to the first direction; (iv) deflecting the charged particle beam along a third direction that is opposite to the first direction, thereby scanning the object along a second scan line of the pair of scan lines; (v) collecting electrons emitted from the object during the scanning of the object along a majority of the second scan line; and (vi) deflecting the charged particle beam along the second direction that is normal to the third direction.

公开(公告)号：US20150287841A1

公开(公告)日：2015-10-08

申请号：US14245282

申请日：2014-04-04

Applicant: APPLIED MATERIALS ISRAEL, LTD.

Inventor： Pavel Margulis

IPC: H01L31/02

CPC classification number: H01L31/02027 ,  G01J1/44

Abstract: A device that may include A DC power supply coupled to a fixed current source; an avalanche photo-diode (APD); a DC voltage regulator that comprises a regulating transistor; wherein the DC voltage regulator is arranged to (a) maintain a regulated voltage at a fixed value, and (b) output the regulated voltage; and a temperature control module that is arranged to maintain a portion of the temperature control module at a fixed temperature; wherein the DC voltage regulator and the APD are electrically coupled in parallel to each other, so that a sum of currents that pass through the APD and the regulating transistor equals a fixed current supplied by the fixed current source; and wherein the portion of the temperature control module is thermally coupled to the DC voltage regulator and to the APD, and wherein APD and the regulating transistor are thermally coupled to each other.

Abstract translation: 可以包括耦合到固定电流源的A DC电源的装置; 雪崩光电二极管（APD）; DC调节器，包括调节晶体管; 其中所述直流电压调节器被布置为（a）将调节电压保持在固定值，并且（b）输出所述调节电压; 以及温度控制模块，其布置成将所述温度控制模块的一部分保持在固定温度; 其中所述DC电压调节器和所述APD彼此并联电耦合，使得通过所述APD和所述调节晶体管的电流之和等于由所述固定电流源提供的固定电流; 并且其中所述温度控制模块的所述部分热耦合到所述DC电压调节器和所述APD，并且其中APD和所述调节晶体管彼此热耦合。

公开(公告)号：US20150145090A1

公开(公告)日：2015-05-28

申请号：US14089571

申请日：2013-11-25

Applicant: APPLIED MATERIALS ISRAEL, LTD.

Inventor： Pavel Margulis

IPC: H01L31/02 ,  H01L31/105

CPC classification number: H01L31/105 ,  H01L31/02164 ,  H01L31/022416

Abstract: A sensing element that may include (a) a PIN diode that may include an anode that is coupled to an anode contact; a cathode that is coupled to a cathode contact; a semiconductor portion that has a sensing region; and an insulator that is positioned between the cathode contact and the anode contact; and (b) a shielding element. The insulator, the cathode contact and the anode contact are positioned between the shielding element and the semiconductor portion. The shielding element is shaped and positioned to facilitate radiation to impinge onto the sensing region of the semiconductor portion while at least partially shielding the insulator from electrons that are emitted from the sensing region.

Abstract translation: 感测元件，其可以包括（a）PIN二极管，其可以包括耦合到阳极触点的阳极; 耦合到阴极接触的阴极; 具有感测区域的半导体部分; 以及位于阴极接触件和阳极接触件之间的绝缘体; 和（b）屏蔽元件。 绝缘体，阴极接触和阳极接触位于屏蔽元件和半导体部分之间。 屏蔽元件被成形和定位成便于辐射照射到半导体部分的感测区域上，同时至少部分地将绝缘体与从感测区域发射的电子屏蔽。