公开(公告)号：US11265085B2

公开(公告)日：2022-03-01

申请号：US16524884

申请日：2019-07-29

Applicant: Applied Materials Israel Ltd.

Inventor： Pavel Margulis

IPC: H03F3/08 ,  H04B10/69

Abstract: There may be provided detection circuit that may include (i) a photodiode that may be configured to convert radiation to a photodiode electrical signal; (ii) a photodiode bias circuit that may be configured to bias the photodiode, wherein the photodiode bias circuit may include a photodiode bias voltage supply and a photodiode bias capacitor; and (iii) a differential transimpedance amplifier that may be configured to amplify the photodiode electrical signal to provide a differential voltage. The differential transimpedance amplifier may include an amplification circuit and an additional circuit, wherein the amplification circuit may include a positive input port, a negative input port, a positive output port, a negative output port and a common mode input port. The photodiode bias voltage supply may be a floating voltage supply.

公开(公告)号：US10197441B1

公开(公告)日：2019-02-05

申请号：US15883654

申请日：2018-01-30

Applicant: Applied Materials Israel Ltd.

Inventor： Raphael Matthews ,  Tal Kuzniz ,  Pavel Margulis

IPC: G01J1/44

Abstract: A method and a light detector that includes (i) a photon to electron converter a photon to one or more photoelectrons; (ii) a photoelectron detection circuit that includes a photoelectron sensing region; (iii) a chamber; (iv) a bias circuit that is configured to supply to the light detector one or more biasing signals for accelerating a propagation of the one or more photoelectrons within the chamber and towards the photoelectron sensing region; (iv) a photoelectron manipulator that is configured to operate in a selected operational mode out of multiple operational modes that differ by their level of blocking, (v) a controller that is configured to control the photoelectron manipulator based on a feedback about the at least one of (a) the photon, (b) the one or more photoelectrons, (c) a previous photon and, (d) previous one or more photoelectrons.

公开(公告)号：US09881765B2

公开(公告)日：2018-01-30

申请号：US15134324

申请日：2016-04-20

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Pavel Margulis

IPC: H01J37/147 ,  H01J37/28 ,  H01J37/06

CPC classification number: H01J37/1474 ,  H01J37/265 ,  H01J37/28

Abstract: A method for scanning an object with a charged particle beam, the method may include repeating, for each pair of scan lines out of multiple pairs of scan lines, the stages of: (i) deflecting the charged particle beam along a first direction, thereby scanning the object along a first scan line of the pair of scan lines; (ii) collecting electrons emitted from the object during the scanning of the object along a majority of the first scan line; (iii) deflecting the charged particle beam along a second direction that is normal to the first direction; (iv) deflecting the charged particle beam along a third direction that is opposite to the first direction, thereby scanning the object along a second scan line of the pair of scan lines; (v) collecting electrons emitted from the object during the scanning of the object along a majority of the second scan line; and (vi) deflecting the charged particle beam along the second direction that is normal to the third direction.

公开(公告)号：US09299872B2

公开(公告)日：2016-03-29

申请号：US14089571

申请日：2013-11-25

Applicant: APPLIED MATERIALS ISRAEL, LTD.

Inventor： Pavel Margulis

IPC: H01L31/105 ,  H01L31/0216 ,  H01L31/0224

CPC classification number: H01L31/105 ,  H01L31/02164 ,  H01L31/022416

Abstract: A sensing element that may include (a) a PIN diode that may include an anode that is coupled to an anode contact; a cathode that is coupled to a cathode contact; a semiconductor portion that has a sensing region; and an insulator that is positioned between the cathode contact and the anode contact; and (b) a shielding element. The insulator, the cathode contact and the anode contact are positioned between the shielding element and the semiconductor portion. The shielding element is shaped and positioned to facilitate radiation to impinge onto the sensing region of the semiconductor portion while at least partially shielding the insulator from electrons that are emitted from the sensing region.

Abstract translation: 感测元件，其可以包括（a）PIN二极管，其可以包括耦合到阳极触点的阳极; 耦合到阴极接触的阴极; 具有感测区域的半导体部分; 以及位于阴极接触件和阳极接触件之间的绝缘体; 和（b）屏蔽元件。 绝缘体，阴极接触和阳极接触位于屏蔽元件和半导体部分之间。 屏蔽元件被成形和定位成便于辐射照射到半导体部分的感测区域上，同时至少部分地将绝缘体与从感测区域发射的电子屏蔽。

公开(公告)号：US11226230B2

公开(公告)日：2022-01-18

申请号：US16526989

申请日：2019-07-30

Applicant: Applied Materials Israel Ltd.

Inventor： Pavel Margulis

IPC: G01J1/44 ,  H03F3/08 ,  H03F1/08 ,  H03F1/26 ,  H03F3/45

Abstract: A method and a detection circuit. The detection circuit may include (a) a photodiode that is configured to convert radiation to a photodiode current; (b) a photodiode bias circuit that is configured to bias the photodiode; (c) a dynamic resistance circuit that has a first terminal and a second terminal; (d) a transimpedance amplifier that is configured to amplify an output current of the dynamic resistance circuit to provide an output voltage, wherein the second terminal is coupled to a negative input port of the amplification circuit; and (e) a conductor that is coupled between the first terminal and an anode of the photodiode.

公开(公告)号：US20210036782A1

公开(公告)日：2021-02-04

申请号：US16524884

申请日：2019-07-29

Applicant: Applied Materials Israel Ltd.

Inventor： Pavel Margulis

IPC: H04B10/69 ,  H03F3/08

Abstract: There may be provided detection circuit that may include (i) a photodiode that may be configured to convert radiation to a photodiode electrical signal; (ii) a photodiode bias circuit that may be configured to bias the photodiode, wherein the photodiode bias circuit may include a photodiode bias voltage supply and a photodiode bias capacitor; and (iii) a differential transimpedance amplifier that may be configured to amplify the photodiode electrical signal to provide a differential voltage. The differential transimpedance amplifier may include an amplification circuit and an additional circuit, wherein the amplification circuit may include a positive input port, a negative input port, a positive output port, a negative output port and a common mode input port. The photodiode bias voltage supply may be a floating voltage supply.

公开(公告)号：US20160076938A1

公开(公告)日：2016-03-17

申请号：US14948012

申请日：2015-11-20

Applicant: Applied Materials Israel, Ltd.

Inventor： Pavel Margulis

IPC: G01J1/44

CPC classification number: G01J1/44 ,  G01J2001/444 ,  G01J2001/4466 ,  H01L31/02027 ,  H04B10/6911

Abstract: A device that may include a DC power supply coupled to a fixed current source; an APD; a DC voltage regulator that comprises a regulating transistor, arranged to maintain a regulated voltage at a fixed value over different APD currents; a temperature control module that is arranged to maintain a portion of the temperature control module at a fixed temperature; and compensation circuit that comprises a compensation component that is thermally coupled to the APD. A voltage drop over the compensation component is smaller than a voltage drop over the APD. A sum of (a) a current that pass through the APD and (b) a current that passes through the compensation component is fixed. The portion of the temperature control module is thermally coupled to the compensation component and to the APD

Abstract translation: 可以包括耦合到固定电流源的直流电源的装置; APD; DC调节器，其包括调节晶体管，被布置成在不同APD电流下将调节电压维持在固定值; 温度控制模块，其布置成将所述温度控制模块的一部分保持在固定温度; 以及包括与APD热耦合的补偿部件的补偿电路。 补偿元件上的电压降小于APD上的电压降。 （a）通过APD的电流和（b）通过补偿组件的电流的总和是固定的。 温度控制模块的部分热耦合到补偿组件和APD

公开(公告)号：US11774281B2

公开(公告)日：2023-10-03

申请号：US17577899

申请日：2022-01-18

Applicant: Applied Materials Israel Ltd.

Inventor： Pavel Margulis

IPC: G01J1/04 ,  G01J1/42

CPC classification number: G01J1/0407 ,  G01J1/42

Abstract: A method, an inspection system and a sensing unit. The sensing unit may include a light recycling optics and a photon to electron converter. The photon to electron converter is configured to receive a first light beam emitted from the object and impinging on the partially reflective surface at a first oblique angle, absorb a first portion and reflect a second portion of the first light beam to provide a first reflected beam. The light recycling optics is configured to redirect, towards the partially reflective surface, one or more reflected beams reflected from the partially reflective surface to provide one or more recycled beams. The photon to electron converter is configured to output electrons that represents an absorbed portion of the input light beam and an absorbed portion of each one of the one or more recycled beam.

公开(公告)号：US20210249543A1

公开(公告)日：2021-08-12

申请号：US16785996

申请日：2020-02-10

Applicant: Applied Materials Israel Ltd.

Inventor： Pavel Margulis

IPC: H01L31/024 ,  H01L31/107 ,  H01L23/373 ,  H03K3/011

Abstract: A method for controlling an avalanche photo diode (APD) and a device that includes a high gain stable APD. The device may include an APD, a compensation circuit that comprises a compensation component that is thermally coupled to the APD, a temperature control module having a part that is thermally coupled to the compensation component and to the APD, and one or more additional components. The APD is formed within a first semiconductor epitaxial layer that is grown on a first side of a substrate, the substrate is highly thermally conductive and electrically insulating.

公开(公告)号：US20210208290A1

公开(公告)日：2021-07-08

申请号：US16732573

申请日：2020-01-02

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Pavel Margulis

IPC: G01T1/17 ,  G01T1/20 ,  H01J37/244 ,  H01J37/28

Abstract: A device and method for detecting radiation comprising: a radiation-sensitive surface composed of an array of electrically inter-isolated radiation-sensitive elements (e.g. avalanche photodiode (APD), PIN diode, or scintillation sensor), each radiation-sensitive element is adapted to generate an electric current in response to absorbing radiation; an array of conversion circuits, each conversion circuit electrically coupled to a respective radiation-sensitive element and configured to generate an output signal indicative of the current generated by the radiation-sensitive element coupled thereto; and one or more summation arrangements, each summation arrangement coupled to a respective group of the conversion circuits, and configured to produce a summation result indicative of the radiation absorbed by respective group of the conversion circuits. The radiation-sensitive surface may be shaped as a dome-shape surface. The radiation-sensitive elements may be associated with radiation-sensitive planes such that all of the radiation-sensitive elements are directed toward a focal point on an inspected surface.