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公开(公告)号：US10804069B2
公开(公告)日：2020-10-13
申请号：US16704061
申请日：2019-12-05
Applicant: KLA-TENCOR CORPORATION
Inventor： Katerina Ioakeimidi , Gildardo R. Delgado , Michael E. Romero , Frances Hill , Rudy F. Garcia
IPC: H01J37/073 , H01J37/26 , G02B27/09 , H01J40/06 , H01J40/18 , H01J1/304 , H01J19/24 , H01J37/06 , H01J37/28 , H01J1/34 , H01L21/67
Abstract: A photocathode can include a body fabricated of a wide bandgap semiconductor material, a metal layer, and an alkali halide photocathode emitter. The body may have a thickness of less than 100 nm and the alkali halide photocathode may have a thickness less than 10 nm. The photocathode can be illuminated with a dual wavelength scheme.
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公开(公告)号：US20200279713A1
公开(公告)日：2020-09-03
申请号：US16106272
申请日：2018-08-21
Applicant: KLA-TENCOR CORPORATION
Inventor： Gildardo R. Delgado , Katerina Ioakeimidi , Rudy Garcia , Zefram Marks , Gary V. Lopez Lopez , Frances A. Hill , Michael E. Romero
IPC: H01J37/073 , H01J37/22 , G01N23/20058
Abstract: The system includes a photocathode electron source, diffractive optical element, and a microlens array to focus the beamlets. A source directs a radiation beam to the diffractive optical element, which produces a beamlet array to be used in combination with a photocathode surface to generate an array of electron beams from the beamlets.
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公开(公告)号：US10748737B2
公开(公告)日：2020-08-18
申请号：US16149260
申请日：2018-10-02
Applicant: KLA-TENCOR CORPORATION
Inventor： Katerina Ioakeimidi , Gildardo R. Delgado , Frances Hill , Michael E. Romero , Rudy F. Garcia
IPC: H01J37/073 , H01J37/26 , G02B27/09 , H01J40/06 , H01J40/18 , H01J1/304 , H01J19/24 , H01J37/06 , H01J37/28 , H01J1/34 , H01L21/67
Abstract: A flat top laser beam is used to generate an electron beam with a photocathode that can include an alkali halide. The flat top profile can be generated using an optical array. The laser beam can be split into multiple laser beams or beamlets, each of which can have the flat top profile. A phosphor screen can be imaged to determine space charge effects or electron energy of the electron beam.
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公开(公告)号：US10714295B2
公开(公告)日：2020-07-14
申请号：US16259317
申请日：2019-01-28
Applicant: KLA-TENCOR CORPORATION
Inventor： Gildardo R. Delgado , Katerina Ioakeimidi , Frances Hill , Gary V. Lopez Lopez , Rudy F. Garcia
Abstract: A photocathode structure, which can include one or more of Cs2Te, CsKTe, CsI, CsBr, GaAs, GaN, InSb, CsKSb, or a metal, has a protective film on an exterior surface. The protective film includes one or more of ruthenium, nickel, platinum, chromium, copper, gold, silver, aluminum, or an alloy thereof. The protective film can have a thickness from 1 nm to 10 nm. The photocathode structure can be used in an electron beam tool like a scanning electron microscope.
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公开(公告)号：US10395884B2
公开(公告)日：2019-08-27
申请号：US16150675
申请日：2018-10-03
Applicant: KLA-TENCOR CORPORATION
Inventor： Gildardo R. Delgado , Rudy F. Garcia , Katerina Ioakeimidi , Frances Hill , Michael E. Romero
Abstract: A photocathode structure, which can include an alkali halide, has a protective film on an exterior surface of the photocathode structure. The protective film includes ruthenium. This protective film can be, for example, ruthenium or an alloy of ruthenium and platinum. The protective film can have a thickness from 1 nm to 20 nm. The photocathode structure can be used in an electron beam tool like a scanning electron microscope.
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Patent Agency Ranking
公开(公告)号：US20190108964A1
公开(公告)日：2019-04-11
申请号：US16150399
申请日：2018-10-03
Applicant: KLA-TENCOR CORPORATION
Inventor： Katerina Ioakeimidi , Gildardo R. Delgado , Michael E. Romero , Frances Hill , Rudy F. Garcia
Abstract: A photocathode can include a body fabricated of a wide bandgap semiconductor material, a metal layer, and an alkali halide photocathode emitter. The body may have a thickness of less than 100 nm and the alkali halide photocathode may have a thickness less than 10 nm. The photocathode can be illuminated with a dual wavelength scheme.
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公开(公告)号：US20180174794A1
公开(公告)日：2018-06-21
申请号：US15588006
申请日：2017-05-05
Applicant: KLA-Tencor Corporation
Inventor： Gildardo R. Delgado , Edgardo Garcia Berrios , Frances Hill , Rudy Garcia
CPC classification number: H01J37/06 , H01J37/28 , H01J2237/061
Abstract: An emitter with a protective cap layer on an exterior surface of the emitter is disclosed. The emitter can have a diameter of 100 nm or less. The protective cap layer includes ruthenium. Ruthenium is resistant to oxidation and carbon growth. The protective cap layer also can have relatively low sputter yields to withstand erosion by ions. The emitter may be part of a system with an electron beam source. An electric field can be applied to the emitter and an electron beam can be generated from the emitter. The protective cap layer may be applied to the emitter by sputter deposition, atomic layer deposition (ALD), or ion sputtering.
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公开(公告)号：US09984846B2
公开(公告)日：2018-05-29
申请号：US15217158
申请日：2016-07-22
Applicant: KLA-Tencor Corporation
Inventor： William G. Schultz , Gildardo R. Delgado , Frances Hill , Edgardo Garcia Berrios , Rudy Garcia
CPC classification number: H01J1/3044 , H01J1/34 , H01J9/025 , H01J19/24 , H01J19/82 , H01J2201/30411 , H01J2201/30449 , H01J2201/30492 , H01J2209/0223
Abstract: An emitter containing a metal boride material has an at least partly rounded tip with a radius of 1 μm or less. An electric field can be applied to the emitter and an electron beam is generated from the emitter. To form the emitter, material is removed from a single crystal rod to form an emitter containing a metal boride material having a rounded tip with a radius of 1 μm or less.
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公开(公告)号：US20180005791A1
公开(公告)日：2018-01-04
申请号：US15217158
申请日：2016-07-22
Applicant: KLA-Tencor Corporation
Inventor： William G. Schultz , Gildardo R. Delgado , Frances Hill , Edgardo Garcia Berrios , Rudy Garcia
CPC classification number: H01J1/3044 , H01J1/34 , H01J9/025 , H01J19/24 , H01J19/82 , H01J2201/30411 , H01J2201/30449 , H01J2201/30492 , H01J2209/0223
Abstract: An emitter containing a metal boride material has an at least partly rounded tip with a radius of 1 μm or less. An electric field can be applied to the emitter and an electron beam is generated from the emitter. To form the emitter, material is removed from a single crystal rod to form an emitter containing a metal boride material having a rounded tip with a radius of 1 μm or less.
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公开(公告)号：US09526158B1
公开(公告)日：2016-12-20
申请号：US14814622
申请日：2015-07-31
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Anatoly Shchemelinin , Yanming Zhao , Gildardo R. Delgado
IPC: H02J1/02 , H05H1/24 , H01J61/09 , H01J1/02 , H01J23/033
CPC classification number: H05H1/24 , H01J1/025 , H01J23/033 , H01J61/09 , H01J61/28 , H01J61/52 , H01J61/54 , H01J61/545 , H01J65/042
Abstract: A laser sustained plasma light source having a cell with a gas volume contained within the cell. At least one laser is directed into the gas volume, for sustaining a plasma within the gas volume, which plasma produces a light. Means are provided for continuously providing the gas volume to the plasma in a laminar flow. A reflector collects the light and provides the light to a desired location.
Abstract translation: 一种激光持续等离子体光源，其具有包含在电池内的气体体积的电池。 至少一个激光器被引导到气体体积中，用于维持等离子体产生光的气体体积内的等离子体。 提供了用于在层流中连续地向等离子体提供气体体积的装置。 反射器收集光并将光提供到期望的位置。
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