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公开(公告)号:US20230296436A1
公开(公告)日:2023-09-21
申请号:US18003801
申请日:2021-07-05
Applicant: NOVA LTD.
Inventor: Yonatan OREN , Eyal Hollander , Elad Schleifer , Gilad BARAK
CPC classification number: G01J3/10 , G01J3/0208 , G01J3/0248 , G01J3/0291 , G01J3/18 , G01J3/2803 , G01J3/44
Abstract: Abstract: Systems and methods for metrology of workpieces such as wafers, using spectrometry of multi- spot- arrays formed over a test area of the tester workpiece, for optically measuring characteristics of the tested workpiece, where the optical metrology system is configured such that the distribution of energy density or flux of the multi-spot-array over the test area of the tested workpiece is such that prevents affecting the workpiece during its testing.
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公开(公告)号:US11740126B2
公开(公告)日:2023-08-29
申请号:US17351067
申请日:2021-06-17
Applicant: Apple Inc.
Inventor: Trent D. Ridder , Mark Alan Arbore , Gary Shambat , Robert Chen , David I. Simon , Miikka M. Kangas
CPC classification number: G01J3/427 , G01J3/06 , G01J3/10 , G01J3/108 , G01J3/2803 , G01J3/2846 , G01J3/42 , G01N21/25 , G01N21/35
Abstract: Methods and systems for measuring one or more properties of a sample are disclosed. The methods and systems can include multiplexing measurements of signals associated with a plurality of wavelengths without adding any signal independent noise and without increasing the total measurement time. One or more levels of encoding, where, in some examples, a level of encoding can be nested within one or more other levels of encoding. Multiplexing can include wavelength, position, and detector state multiplexing. In some examples, SNR can be enhanced by grouping together one or more signals based on one or more properties including, but not limited to, signal intensity, drift properties, optical power detected, wavelength, location within one or more components, material properties of the light sources, and electrical power. In some examples, the system can be configured for optimizing the conditions of each group individually based on the properties of a given group.
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23.
公开(公告)号:US11719633B2
公开(公告)日:2023-08-08
申请号:US17407257
申请日:2021-08-20
Applicant: The Government of the United States of America, as represented by the Secretary of the Navy
Inventor: Jerry R. Meyer , Igor Vurgaftman , Chadwick Lawrence Canedy , William W. Bewley , Chui Soo Kim , Charles D. Merritt , Michael V. Warren , R. Joseph Weiblen , Mijin Kim
IPC: G01N21/59 , H01S5/028 , H01S5/10 , H01S5/125 , H01S5/34 , H01S5/343 , H01S5/042 , H01S5/20 , H01S5/02 , H01S5/026 , G02B6/10 , G01N21/27 , G01N21/25 , G01J3/18 , G01J3/28 , H01S5/22 , H01S5/06 , H01S5/062
CPC classification number: G01N21/59 , G01J3/1895 , G01J3/2803 , G01N21/255 , G01N21/27 , G02B6/102 , H01S5/0215 , H01S5/0262 , H01S5/0287 , H01S5/0421 , H01S5/101 , H01S5/125 , H01S5/2063 , H01S5/2206 , H01S5/3402 , H01S5/343 , G01N2201/0612 , H01S5/062 , H01S5/0612
Abstract: Building blocks are provided for on-chip chemical sensors and other highly-compact photonic integrated circuits combining interband or quantum cascade lasers and detectors with passive waveguides and other components integrated on a III-V or silicon. A MWIR or LWIR laser source is evanescently coupled into a passive extended or resonant-cavity waveguide that provides evanescent coupling to a sample gas (or liquid) for spectroscopic chemical sensing. In the case of an ICL, the uppermost layer of this passive waveguide has a relatively high index of refraction that enables it to form the core of the waveguide, while the ambient air, consisting of the sample gas, functions as the top cladding layer. A fraction of the propagating light beam is absorbed by the sample gas if it contains a chemical species having a fingerprint absorption feature within the spectral linewidth of the laser emission.
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24.
公开(公告)号:US11709135B2
公开(公告)日:2023-07-25
申请号:US17407261
申请日:2021-08-20
Applicant: The Government of the United States of America, as represented by the Secretary of the Navy
Inventor: Jerry R. Meyer , Igor Vurgaftman , Chadwick Lawrence Canedy , William W. Bewley , Chui Soo Kim , Charles D. Merritt , Michael V. Warren , R. Joseph Weiblen , Mijin Kim
IPC: G01N21/59 , H01S5/028 , H01S5/10 , H01S5/125 , H01S5/34 , H01S5/343 , H01S5/042 , H01S5/20 , H01S5/02 , H01S5/026 , G02B6/10 , G01N21/27 , G01N21/25 , G01J3/18 , G01J3/28 , H01S5/22 , H01S5/06 , H01S5/062
CPC classification number: G01N21/59 , G01J3/1895 , G01J3/2803 , G01N21/255 , G01N21/27 , G02B6/102 , H01S5/0215 , H01S5/0262 , H01S5/0287 , H01S5/0421 , H01S5/101 , H01S5/125 , H01S5/2063 , H01S5/2206 , H01S5/3402 , H01S5/343 , G01N2201/0612 , H01S5/062 , H01S5/0612
Abstract: Building blocks are provided for on-chip chemical sensors and other highly-compact photonic integrated circuits combining interband or quantum cascade lasers and detectors with passive waveguides and other components integrated on a III-V or silicon. A MWIR or LWIR laser source is evanescently coupled into a passive extended or resonant-cavity waveguide that provides evanescent coupling to a sample gas (or liquid) for spectroscopic chemical sensing. In the case of an ICL, the uppermost layer of this passive waveguide has a relatively high index of refraction that enables it to form the core of the waveguide, while the ambient air, consisting of the sample gas, functions as the top cladding layer. A fraction of the propagating light beam is absorbed by the sample gas if it contains a chemical species having a fingerprint absorption feature within the spectral linewidth of the laser emission.
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公开(公告)号:US20230221179A1
公开(公告)日:2023-07-13
申请号:US17814983
申请日:2022-07-26
Applicant: Verifood, Ltd.
Inventor: Damian GOLDRING , Dror SHARON
CPC classification number: G01J3/0256 , G01J3/0208 , G01J3/26 , G01J3/2803 , G01J3/36 , G01N21/255 , G01J2003/1226
Abstract: A compact spectrometer is disclosed that is suitable for use in mobile devices such as cellular telephones. In preferred embodiments, the spectrometer comprises a filter, at least one Fourier transform focusing element, a micro-lens array, and a detector, but does not use any dispersive elements. Methods for using the spectrometer as an end-user device for performing on-site determinations of food quality, in particular, by comparison with an updatable database accessible by all users of the device, are also disclosed.
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公开(公告)号:US11692874B2
公开(公告)日:2023-07-04
申请号:US17335814
申请日:2021-06-01
Applicant: Tokyo Electron Limited
Inventor: Yan Chen , Xinkang Tian
CPC classification number: G01J3/0297 , G01J3/0208 , G01J3/18 , G01J3/2803
Abstract: Aspects of the present disclosure provide a method for wavelength calibration of a spectrometer. The method can include receiving a calibration light signal having first spectral components of different first wavelengths; separating and projecting the first spectral components onto pixels of a detector of the spectrometer; establishing a relation between the first wavelengths and pixel numbers of first pixels on which the first spectral components are projected; calculating first residual errors between the first wavelengths and estimated wavelengths that are associated by the relation to the pixel numbers of the first pixels; receiving an optical signal having a second spectral component of a second wavelength; projecting the optical signal onto a second pixel; and calibrating the second wavelength based on a second residual error calculated based on one of the first residual errors that corresponds to a pair of the first pixels between which the second pixel is located.
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公开(公告)号:US20230200788A1
公开(公告)日:2023-06-29
申请号:US18116056
申请日:2023-03-01
Applicant: Kohler Co.
Inventor: Ishay Attar
CPC classification number: A61B10/0038 , G01N33/493 , A61B10/007 , G01N21/31 , G01J3/42 , G01J3/10 , G01J3/2803 , G06T7/0014 , A61B2010/0003 , E03D11/13
Abstract: Apparatus and methods are described for use with a bodily emission of a subject that is disposed within a toilet bowl. While the bodily emission is disposed within the toilet bowl, light is received from the toilet bowl using one or more light sensors. Using a computer processor, intensities of at least two spectral bands that are within a range of 530 nm to 785 nm are determined, by analyzing the received light, and a ratio of the intensities of the two spectral bands is determined. In response thereto, the computer processor determines that there is a presence of blood within the bodily emission. The computer processor generates an output on an output device, at least partially in response thereto. Other applications are also described.
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公开(公告)号:US11686618B2
公开(公告)日:2023-06-27
申请号:US17157087
申请日:2021-01-25
Applicant: Hypermed Imaging, Inc.
Inventor: Mark Anthony Darty , Peter Martin Meenen
CPC classification number: G01J3/2823 , G01J3/2803 , G01J3/0208 , G01J2003/2866
Abstract: Disclosed are hyperspectral/multiple spectral imaging methods and devices. A method obtains first and second spectral image datasets of a region of interest (ROI). The first spectral image dataset is characterized by a first spectral range and the second spectral image dataset is characterized by a second spectral range. The method then performs a first spectral analysis on the first spectral image dataset and a second spectral analysis on the second spectral image dataset. Afterwards, the method determines one or more spectral signature(s) at a deeper layer of the ROI.
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公开(公告)号:US20190234796A1
公开(公告)日:2019-08-01
申请号:US16217604
申请日:2018-12-12
Applicant: JVC KENWOOD CORPORATION
Inventor: Yuichi HAGIHARA , Taiki KOBAYASHI , Norikazu TAKAHASHI
CPC classification number: G01J3/0229 , G01J3/18 , G01J3/2803
Abstract: A spectroscope includes a light receiving element and a wavelength selection filter unit. The light receiving element includes a pixel region where a plurality of pixels are disposed. The wavelength selection filter unit is disposed on the pixel region and includes a plurality of wavelength selection filters. The plurality of wavelength selection filters have transmission wavelength characteristics which are different from each other, and split incident light for each wavelength or each wavelength band. The light receiving element generates a light receiving signal by photoelectrically converting light which is split by the wavelength selection filter and is incident on the pixel region, for each pixel.
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公开(公告)号:US20190145832A1
公开(公告)日:2019-05-16
申请号:US16227716
申请日:2018-12-20
Applicant: SETI Institute
Inventor: Eliot Gillum , Alan Holmes
CPC classification number: G01J11/00 , G01J1/4228 , G01J3/2803 , H04N5/247
Abstract: A system and method for detecting laser pulses is disclosed. According to one embodiment, the present system detects an extrasolar laser pulse, ideally repeated pulses, by observing the pulse, characterizing the pulse, and confirming the data related to the pulse.
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