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    Non-dispersive charged particle energy analyzer
    21.
    发明授权
    Non-dispersive charged particle energy analyzer 失效
    非分散带电粒子能量分析仪

    公开(公告)号：US07141800B2

    公开(公告)日：2006-11-28

    申请号：US10961631

    申请日：2004-10-08

    Applicant: Michael A. Kelly ,  Charles E. Bryson, III

    Inventor： Michael A. Kelly ,  Charles E. Bryson, III

    IPC: H01J3/26 ,  H01J49/48

    CPC classification number: H01J33/04 ,  H01J37/05 ,  H01J37/244 ,  H01J49/488 ,  H01J2237/2448 ,  H01J2237/24485

    Abstract: An electron energy analyzer including a curved electrostatic low-pass reflector and a high-pass electrostatic transmissive filter. The reflector comprises a curved grid, preferably ellipsoidal, and an absorber electrode placed in back of the curved grid with respect to the electron source and biased negatively to the curved grid to act as a reflective low-pass filter and a collimating optics for the reflected beam. The transmissive filter includes first and second flat grids extending across the collimated reflected beam. The second grid on the side of the first grid opposite the curved grid is biased negatively to the first grid and the absorber electrode. A field free region is created by applying the same bias to the curved grid, the first grid, and chamber sidewall sleeve. An electron detector detects all electrons passed by the second grid in an energy band in the overlap of the high-pass and low-pass bands.

    Abstract translation: 一种电子能量分析仪，包括弯曲静电低通反射器和高通静电透射滤光片。 反射器包括弯曲格栅，优选椭圆形，和相对于电子源放置在弧形格栅背面的吸收电极，并且负反射地偏置到弯曲网格以用作反射低通滤波器和用于反射的准直光学器件 光束。 透射滤光器包括延伸穿过准直反射光束的第一和第二平坦栅格。 与第一格架相对的弧形栅格侧的第二格栅被负向偏置到第一格栅和吸收体电极。 通过将相同的偏压施加到弯曲格栅，第一格栅和室侧壁套筒来产生无场区域。 电子检测器通过高通和低通带重叠的能带检测由第二格栅通过的所有电子。

    Spectrometer lens for particle beam apparatus
    22.
    发明授权
    Spectrometer lens for particle beam apparatus 失效
    用于粒子束装置的光谱仪透镜

    公开(公告)号：US4769543A

    公开(公告)日：1988-09-06

    申请号：US23857

    申请日：1987-03-09

    Applicant: Erich Plies

    Inventor： Erich Plies

    IPC: H01L21/66 ,  G01N23/22 ,  G01R31/302 ,  G01R31/305 ,  H01J37/147 ,  H01J37/244 ,  H01J37/26 ,  H01J37/28 ,  H01J49/48 ,  H01J49/00

    CPC classification number: G01R31/305 ,  H01J37/1474 ,  H01J37/268 ,  H01J49/488

    Abstract: A spectrometer-lens for particle beam apparatus is formed by a short focal length magnetic lens having an integrated electrostatic retarding field spectrometer and a single-stage deflection unit arranged within said lens. To avoid deflecting secondary particles that are triggered at a specimen by a primary particle beam, nearly uniform electrical and magnetic deflection fields are generated by the deflection unit oriented relative to one another such that their field vectors reside perpendicular to one another and respectively perpendicular to a velocity vector of the secondary particles attracted from the specimen.

    Abstract translation: 用于粒子束装置的光谱仪透镜由具有集成静电延迟场光谱仪的短焦距磁透镜和布置在所述透镜内的单级偏转单元形成。 为了避免通过初级粒子束偏转在样本处触发的二次粒子，由相对于彼此定向的偏转单元产生几乎均匀的电和磁偏转场，使得它们的场矢量彼此垂直并分别垂直于 从样品吸引的二次粒子的速度矢量。

    Apparatus and method for contact-free potential measurements of an electronic composition
    24.
    发明授权
    Apparatus and method for contact-free potential measurements of an electronic composition 失效
    电子组合物的无接触电势测量的装置和方法

    公开(公告)号：US4277679A

    公开(公告)日：1981-07-07

    申请号：US105892

    申请日：1979-12-21

    Applicant: Hans P. Feuerbaum

    Inventor： Hans P. Feuerbaum

    IPC: H01J37/28 ,  G01R31/26 ,  G01R31/302 ,  G01R31/305 ,  H01J37/26 ,  H01J49/48 ,  H01L21/66 ,  G01N23/00

    CPC classification number: H01J49/488 ,  G01R31/305 ,  H01J37/266

    Abstract: A method and apparatus for the contact-free potential measurement at an electronic component using an electron beam wherein a predetermined potential is applied to the measuring point and the output voltage of a controlled gain amplifier is set to a predetermined reference value U.sub.S by means of controlling a photomultiplier voltage U.sub.PM and the photomultiplier voltage U.sub.PM is maintained constant. The measuring voltage U.sub.M is then determined from the difference of the voltages U.sub.R -U.sub.S between the control unit output voltage U.sub.R and the index value voltage U.sub.S. The method and apparatus allow the quantitative potential measurement to be made on the conducting paths of an integrated circuit without utilizing manual adjustments.

    Abstract translation: 使用电子束的电子部件的无接触电位测定方法和装置，其中通过控制将控制增益放大器的预定电位施加到测量点并将受控增益放大器的输出电压设置为预定的参考值US 光电倍增管电压UPM和光电倍增管电压UPM保持不变。 然后根据控制单元输出电压UR和指标值电压US之间的电压UR-US的差确定测量电压UM。 该方法和装置允许在集成电路的导电路径上进行定量电位测量，而不用手动调整。

    Electron detector
    25.
    发明授权
    Electron detector 失效
    电子探测器

    公开(公告)号：US3914606A

    公开(公告)日：1975-10-21

    申请号：US44848074

    申请日：1974-03-06

    Applicant: JEOL LTD

    Inventor： HASHIMOTO HIROSHI ,  MOGAMI AKINORI

    IPC: G01N23/225 ,  H01J37/252 ,  H01J49/48 ,  H01J39/00

    CPC classification number: H01J49/488

    Abstract: A device for measuring electron densities at a given energy level in an electron beam or the like having strong background noise, for example, in the detection of Auger electric energy spectrums. An electron analyzer passes electrons at the given energy level and at the same time or ad seriatum electrons of at least one adjacent energy level. Detecting means associated therewith produce signals indicative of the densities of the electrons at each energy level and combine these signals to produce a signal indicative of the density of the electrons of the given energy level absent background noise.

    Abstract translation: 用于在具有强背景噪声的电子束等中测量给定能级的电子密度的装置，例如在俄歇电能谱的检测中。 电子分析仪以给定的能级和相同的时间或者至少一个相邻能级的电子传递电子。 与其相关联的检测装置产生指示每个能级处的电子密度的信号，并组合这些信号以产生指示给定能量级别的电子密度而不存在背景噪声的信号。

    Electron-beam micro-analyzer with an auger electron detector
    27.
    发明授权
    Electron-beam micro-analyzer with an auger electron detector 失效
    具有AUGER电子探测器的电子束微分析仪

    公开(公告)号：US3760180A

    公开(公告)日：1973-09-18

    申请号：US3760180D

    申请日：1972-10-12

    Applicant: SIEMENS AG

    Inventor： WEBER U

    IPC: G01N23/227 ,  G01Q30/08 ,  G01Q30/16 ,  H01J37/073 ,  H01J37/252 ,  H01J37/256 ,  H01J49/48 ,  G01N23/20 ,  G01T1/36

    CPC classification number: G01N23/227 ,  H01J37/073 ,  H01J37/252 ,  H01J37/256 ,  H01J49/488

    Abstract: An electron-beam micro-analyzer for investigating solid test specimens and radiation penetrable test specimens is disclosed. The micro-analyzer has an electron-beam generator for directing a focussed electron beam unto the test specimen to release Auger electrons therefrom. An electron spectrometer then separates the released Auger electrons according to the respective kinetic energies thereof and an electron detector detects the Auger electrons of specified energy separated in the spectrometer. The electron-beam generator has a field-emission point cathode having a small radius of curvature and an anode having an opening for passing the electron beam therethrough. A voltage supply applys a voltage to develop an electric field between the anode and the point cathode of sufficient strength to excite the cathode to electron field emission. A deceleration lens disposed intermediate the anode and the test specimen reduces the velocity of the electrons of the electron beam passing from the opening of the anode.

    Abstract translation: 公开了一种用于研究固体试样和辐射穿透试样的电子束微分析仪。 微分析仪具有电子束发生器，用于将聚焦的电子束引导到测试样品以从其中释放俄歇电子。 然后电子光谱仪根据其分别的动能分离释放的俄歇电子，电子检测器检测在光谱仪中分离出的特定能量的俄歇电子。 电子束发生器具有具有小的曲率半径的场发射点阴极和具有用于使电子束通过的开口的阳极。 电压源施加电压以在阳极和点阴极之间产生足够强度的电场，以激发阴极到电子场发射。 设置在阳极和测试样本之间的减速透镜降低了从阳极的开口通过的电子束的电子的速度。

    Electron beam apparatus
    28.
    发明授权
    Electron beam apparatus 失效
    电子束设备

    公开(公告)号：US3678384A

    公开(公告)日：1972-07-18

    申请号：US3678384D

    申请日：1969-08-25

    Applicant: CHARLES W OATLEY ,  CAMBRIDGE SCIENTIFIC INSTR LTD

    Inventor： OATLEY CHARLES W

    IPC: H01J37/26 ,  H01J49/48 ,  G01R31/22 ,  G01R15/12

    CPC classification number: H01J49/488 ,  H01J37/268

    Abstract: In electron beam apparatus in which an electron beam is caused to impinge on a specimen surface and the resulting secondary electrons are analyzed to show the distribution of electric potential on the surface, the potential on the surface is switched rapidly on and off or the potential on a grid between the specimen and collector is switched rapidly between two levels, and the signals from the collector in the two conditions are directed into two channels, from which the difference signal is used to show the potential of the surface, largely independent of topography and other factors. The beam itself can also be switched on and off at double the switching frequency. In the grid version there can be a second grid to shield the specimen from the switched grid.

    Abstract translation: 在电子束装置中，使电子束撞击在试样表面上，分析所得到的二次电子，以显示表面上的电位分布，表面上的电位迅速开关或电位 样品和收集器之间的网格在两个水平之间快速切换，并且在两个条件下来自收集器的信号被引导到两个通道中，差分信号用于显示表面的电位，在很大程度上独立于地形和 其他因素。 光束本身也可以以开关频率的两倍打开和关闭。 在网格版本中，可以有第二个网格来屏蔽样本与交换网格。

    Charged particle analyser and method using electrostatic filter grids to filter charged particles
    30.
    发明授权
    Charged particle analyser and method using electrostatic filter grids to filter charged particles 有权
    带电粒子分析仪和使用静电过滤网过滤带电粒子的方法

    公开(公告)号：US08421027B2

    公开(公告)日：2013-04-16

    申请号：US12523287

    申请日：2008-01-14

    Applicant: Ian Richard Barkshire ,  Peter John Statham ,  Marcus Jacka

    Inventor： Ian Richard Barkshire ,  Peter John Statham ,  Marcus Jacka

    IPC: H01J3/26

    CPC classification number: H01J37/05 ,  H01J37/256 ,  H01J37/28 ,  H01J49/488 ,  H01J2237/053 ,  H01J2237/24415 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/24585 ,  H01J2237/2516

    Abstract: A charged particle analyzer (1) comprises a first non-imaging electrostatic lens (8, 9) for receiving charged particles having divergent, trajectories and for converting the said trajectories into substantially parallel trajectories. At least one planar filter (10) is provided for receiving the charged particles having the substantially parallel trajectories and for filtering the charged particles in accordance with their respective energies. A second non-imaging electrostatic lens (11) receives the energy filtered charged particles and selectively modifies their trajectories as a function of their energies. A charged particle detector (12) then receives the charged particles in accordance with their selectively modified trajectories.

    Abstract translation: 带电粒子分析仪（1）包括用于接收具有发散轨迹的带电粒子并用于将所述轨迹转换成基本上平行轨迹的第一非成像静电透镜（8,9）。 提供至少一个平面过滤器（10）用于接收具有基本上平行轨迹的带电粒子并根据它们各自的能量对带电粒子进行过滤。 第二非成像静电透镜（11）接收能量过滤的带电粒子并根据其能量选择性地修改它们的轨迹。 带电粒子检测器（12）然后根据它们选择性地修改的轨迹接收带电粒子。

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