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    Ionization gauge for high pressure operation
    28.
    发明授权
    Ionization gauge for high pressure operation 有权

    公开(公告)号：US09952113B2

    公开(公告)日：2018-04-24

    申请号：US15421805

    申请日：2017-02-01

    Applicant: MKS Instruments, Inc.

    Inventor： Gerardo A. Brucker

    IPC: G01L21/30 ,  G01L21/32 ,  H01J41/04 ,  G01L19/06 ,  H01J1/52 ,  H01J41/02

    CPC classification number: G01L21/32 ,  G01L19/0627 ,  G01L21/30 ,  H01J1/52 ,  H01J41/02 ,  H01J41/04

    Abstract: An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.

    Fluid sampling system
    29.
    发明授权
    Fluid sampling system 失效
    流体采样系统

    公开(公告)号：US6073498A

    公开(公告)日：2000-06-13

    申请号：US178238

    申请日：1994-11-14

    Applicant: Stephen John Taylor ,  Robert Fagan Donat Bradshaw

    Inventor： Stephen John Taylor ,  Robert Fagan Donat Bradshaw

    IPC: G01N1/00 ,  G01N1/14 ,  G01N1/22 ,  G01N1/24 ,  G01N27/62 ,  G01N27/64 ,  G01N30/16 ,  G01N33/00 ,  H01J41/04

    CPC classification number: G01N33/0016 ,  G01N1/2273 ,  G01N27/622 ,  G01N30/16 ,  G01N35/1095

    Abstract: A fluid sampling system has a fluid enclosing element, such as drift cell (60), enclosing a volume of a first fluid. A body of a second fluid, for example in an inlet chamber (62), communicates with the body of first fluid via a small orifice (74). A series of negative pressure pulses is applied to the first fluid by an electromechanical transducer (92), each negative pulse causing a sample of the second fluid to be drawn in through the orifice (74). The sample is then entrained into the air flow of a closed loop circulatory system, and can be detected or measured by any appropriate equipment such as an ion mobility spectrometer.

    Abstract translation: PCT No.PCT / GB92 / 01259 Sec。 371日期：1994年11月14日 102（e）1994年11月14日日期PCT提交1992年7月10日PCT公布。 公开号WO93 / 01485 日期1993年1月21日流体采样系统具有包围一定体积的第一流体的流体封闭元件，例如漂移池（60）。 例如在入口室（62）中的第二流体的主体经由小孔口（74）与第一流体的主体连通。 通过机电换能器（92）将一系列负压脉冲施加到第一流体，每个负脉冲使得第二流体的样品通过孔口（74）被吸入。 然后将样品夹带到闭环循环系统的空气流中，并且可以通过任何合适的设备如离子迁移谱仪检测或测量。

    Hot-cathode ionization pressure gauge including a sequence of electrodes arranged at a distance from one another in sequence along an axis
    30.
    发明授权
    Hot-cathode ionization pressure gauge including a sequence of electrodes arranged at a distance from one another in sequence along an axis 失效
    热阴极电离压力计包括沿着轴线依次彼此间隔设置的电极序列

    公开(公告)号：US5373240A

    公开(公告)日：1994-12-13

    申请号：US189914

    申请日：1994-02-01

    Applicant: Haas Guenter

    Inventor： Haas Guenter

    IPC: G01L21/30 ,  G01L21/32 ,  H01J41/04

    CPC classification number: G01L21/32 ,  H01J41/04

    Abstract: A hot cathode ionization pressure gauge with the following electrodes, arged at a distance from one another in the specified sequence along an axis:a) a thermionic cathode filament which has a central active part and lateral support parts;b) an essentially flat, diaphragm-like control electrode,c) an essentially flat apertured acceleration electrode andd) an essentially flat ion collector electrode,and with a base plate on which the control electrode, the acceleration electrode and ion collector electrode are mounted, in each case via support means running at right angles to the main part of the relevant electrode and via a support bolt connected to the support means.

    Abstract translation: 一种具有以下电极的热阴极电离压力计，沿着一个轴线以规定的顺序彼此间隔一定距离：a）具有中心活性部分和侧向支撑部分的热离子阴极细丝; b）基本上平坦的隔膜状控制电极，c）基本上平坦的有孔加速电极，以及d）基本上平坦的离子集电极电极，以及其上安装有控制电极，加速电极和离子集电极的基板 在每种情况下都经由与相关电极的主要部分成直角运行的支撑装置，并且经由连接到支撑装置的支撑螺栓。

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