Silicon oxide particles
    33.
    发明授权
    Silicon oxide particles 失效
    氧化硅颗粒

    公开(公告)号:US06726990B1

    公开(公告)日:2004-04-27

    申请号:US09085514

    申请日:1998-05-27

    Abstract: A collection of silicon oxide nanoparticles have an average diameter from about 5 nm to about 100 nm. The collection of silicon oxide nanoparticles effectively include no particles with a diameter greater than about four times the average diameter. The particles generally have a spherical morphology. Methods for producing the nanoparticles involve laser pyrolysis. The silicon oxide nanoparticles are effective for the production of improved polishing compositions including compositions useful for chemical-mechanical polishing.

    Abstract translation: 氧化硅纳米颗粒的集合具有约5nm至约100nm的平均直径。 氧化硅纳米颗粒的收集有效地包括直径大于平均直径的四倍的颗粒。 颗粒通常具有球形形态。 制备纳米颗粒的方法包括激光热解。 氧化硅纳米颗粒对于生产改进的抛光组合物是有效的,包括用于化学机械抛光的组合物。

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