TEMPERATURE MEASUREMENT ARRANGEMENT
    32.
    发明申请

    公开(公告)号:US20180245983A1

    公开(公告)日:2018-08-30

    申请号:US15961155

    申请日:2018-04-24

    Applicant: GOJI LIMITED

    Abstract: Method of processing objects by radio frequency (RF) energy. The method includes feeding, with a plurality of radiating elements, RF radiation into a cavity to process the objects in the cavity, receiving, with a plurality of dummy loads located outside of the cavity, RE energy coupled from the cavity into the radiating elements, and estimating an effect that operating at each of a plurality of sets of operating parameters will have on the temperature of each of the dummy loads. The method also includes, while maintaining the temperature of the dummy loads within a safe temperature range, choosing among the plurality of sets of operating parameters, at least one set based on the estimating and operating at the chosen at least one set of operating parameters.

    PYROMETER BACKGROUND ELIMINATION
    37.
    发明申请

    公开(公告)号:US20170328775A1

    公开(公告)日:2017-11-16

    申请号:US15668965

    申请日:2017-08-04

    Abstract: Embodiments disclosed herein provide an RTP system for processing a substrate. An RTP chamber has a radiation source configured to deliver radiation to a substrate disposed within a processing volume. One or more pyrometers are coupled to the chamber body opposite the radiation source. In one example, the radiation source is disposed below the substrate and the pyrometers are disposed above the substrate. In another example, the radiation source is disposed above the substrate and the pyrometers are disposed below the substrate. The substrate may be supported in varying manners configured to reduce physical contact between the substrate support and the substrate. An edge ring and shield are disposed within the processing volume and are configured to reduce or eliminate background radiation from interfering with the pyrometers. Additionally, an absorbing surface may be coupled to the chamber body to further reduce background radiation interference.

    THERMOWELL WITH INFRARED SENSOR
    40.
    发明申请
    THERMOWELL WITH INFRARED SENSOR 有权
    带红外传感器的THERMOWELL

    公开(公告)号:US20170003173A1

    公开(公告)日:2017-01-05

    申请号:US14755126

    申请日:2015-06-30

    Applicant: Rosemount Inc.

    Abstract: A thermowell assembly for measuring a process temperature includes an elongate thermowell having a proximal end and a distal end. A bore extends between the two ends with the thermowell assembly configured to extend into a process fluid. An infrared sensor detects infrared radiation from the distal end through the bore of the thermowell and responsively provides a sensor output. A configuration is provided in which infrared radiation received by the infrared sensor from a wall of the bore is reduced and or radiation received from the distal end of the bore is increased.

    Abstract translation: 用于测量工艺温度的热套管组件包括具有近端和远端的细长热套管。 孔在两端之间延伸,热套管组件构造成延伸到工艺流体中。 红外传感器检测来自远端的红外辐射通过热套管的孔,并且响应地提供传感器输出。 提供了一种构造,其中由红外传感器从孔的壁接收的红外辐射减小,并且从孔的远端接收的辐射增加。

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