公开(公告)号：US20090059228A1

公开(公告)日：2009-03-05

申请号：US12196463

申请日：2008-08-22

Applicant: Masahiro Horie ,  Kumiko Fukue

Inventor： Masahiro Horie ,  Kumiko Fukue

IPC: G01J4/04

CPC classification number: G01J3/447 ,  G01J3/4412

Abstract: In a spectroscopic ellipsometer, light emitted from a light source enters a measurement surface of a substrate through an optical system in a lighting part so as to incline to the measurement surface to be directed to a light receiving device, and ellipsometry is performed based on spectral intensity of reflected light reflected on the measurement surface, the spectral intensity being acquired by the light receiving device. In focusing of the spectroscopic ellipsometer, a focus position of the measurement surface is obtained based on a total light amount in a predetermined wavelength band of the reflected light, the total light amount being obtained by the light receiving device. In the spectroscopic ellipsometer, since the optical system for ellipsometry and the optical system for focusing are common, it is possible to eliminate influences of change of the optical systems by temperature change or the like and to achieve high accurate focusing.

Abstract translation: 在光谱椭偏仪中，从光源发出的光通过照明部中的光学系统进入基板的测量面，从而向测量面倾斜而被引导到光接收装置，并且基于光谱进行椭偏仪 在测量表面反射的反射光的强度，由光接收装置获取的光谱强度。 在分光椭偏仪的聚焦中，基于反射光的预定波长带中的总光量，由光接收装置获得的总光量，获得测量表面的聚焦位置。 在分光椭偏仪中，由于用于椭偏仪的光学系统和用于聚焦的光学系统是常见的，因此可以通过温度变化等来消除光学系统的变化的影响，并且实现高精度的聚焦。

公开(公告)号：US07428050B2

公开(公告)日：2008-09-23

申请号：US10560293

申请日：2004-05-13

Applicant: George C. Giakos

Inventor： George C. Giakos

IPC: G01J4/00

CPC classification number: G01J4/04 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/2823 ,  G01J3/36 ,  G01J3/433 ,  G01J3/447 ,  G01N21/21

Abstract: In one embodiment, the present invention is directed to a multi-energy polarization imaging method consisting of a multi-fusion, dual-rotating retarder/multiple-energy complete Mueller matrix-based polarimeter and dual-energy capabilities. By subtracting polarimetric parameters such as degree of polarization, degree of linear polarization, degree of circular polarization, respectively, obtained with interrogation light beams of wavelengths λ1, and λ2, the system of the present invention can obtain, in one embodiment, enhanced imaging.

Abstract translation: 在一个实施例中，本发明涉及由多融合双旋转延迟器/多能量完全基于米勒矩阵的偏振计和双能量能量组成的多能量偏振成像方法。 通过用波长λ1和λ2的询问光束分别减去偏振度，偏振度，圆偏振度等极化参数， 在一个实施例中，本发明的系统可以获得增强的成像。

公开(公告)号：US20080180698A1

公开(公告)日：2008-07-31

申请号：US12019592

申请日：2008-01-24

Applicant: Hidong Kwak ,  Shankar Krishnan

Inventor： Hidong Kwak ,  Shankar Krishnan

IPC: G01B11/06 ,  G01J1/42

CPC classification number: G01B11/0625 ,  G01B11/0633 ,  G01B11/0641 ,  G01J3/02 ,  G01J3/0224 ,  G01J3/0294 ,  G01J3/447 ,  G01N21/211 ,  G01N21/33 ,  G01N2021/213 ,  G01N2201/0233

Abstract: An optical method and system for measuring characteristics of a sample using a broadband metrology tool in a purge gas flow environment are disclosed. In the method a beam path for the metrology tool is purged with purge gas at a first flow rate. A surface of the sample is illuminated by a beam of source radiation having at least one wavelength component in a vacuum ultraviolet (VUV) range and/or at least one wavelength component in an ultraviolet-visible (UV-Vis) range. A flow rate of a purge gas is adjusted between the first flow rate for metrology measurements made when the source radiation is in the VUV spectral region and a second flow rate for metrology measurements made when the source radiation is in the UV-Vis spectral region. The system includes a light source, illumination optics, collection optics, detector, a purge gas source and a controller. The purge gas source is configured to supply a flow of purge gas to a beam path in the light source and/or illumination optics and/or sample and/or collection optics and/or detector. The controller is configured to control a flow rate of the purged gas flow in response to an output signal from the detector.

Abstract translation: 公开了一种用于在吹扫气体流动环境中使用宽带测量工具测量样品的特性的光学方法和系统。 在该方法中，用第一流量的吹扫气体吹扫计量工具的光束路径。 通过在紫外 - 可见（UV-Vis）范围内具有真空紫外（VUV）范围和/或至少一个波长分量的至少一个波长分量的源辐射束照射样品的表面。 当源辐射处于VUV光谱区域时进行的度量测量的第一流量和当源辐射处于UV-Vis光谱区域时进行度量测量的第二流量时，净化气体的流量被调节。 该系统包括光源，照明光学器件，收集光学器件，检测器，吹扫气体源和控制器。 吹扫气体源被配置为向光源和/或照明光学器件和/或样品和/或收集光学元件和/或检测器中的光束路径提供净化气体流。 控制器被配置为响应于来自检测器的输出信号来控制净化气体流量的流量。

公开(公告)号：US20080088907A1

公开(公告)日：2008-04-17

申请号：US11998418

申请日：2007-11-30

Applicant: Ralf Wolleschensky

Inventor： Ralf Wolleschensky

IPC: G02F1/11 ,  G02F1/01

CPC classification number: G02B27/283 ,  G01J3/0224 ,  G01J3/1256 ,  G01J3/4406 ,  G01J3/447 ,  G01N21/6445 ,  G01N21/6458 ,  G02B21/002 ,  G02B21/0068

Abstract: Device for controlling light radiation, which is excited in a specimen and/or which is backscattered and/or reflected and which contains one or more wavelengths, at a plurality of light outlets, wherein a separation of the light radiation into differently polarized components is carried out; and the components of the excitation radiation and/or detection radiation are affected in their polarization by means of a preferably birefringent, preferably acousto-optic or electro-optic medium, which changes the ordinary and extraordinary refractive index.

Abstract translation: 用于控制在多个光出口处在样本中激发并且/或背散射和/或反射并且包含一个或多个波长的光辐射的装置，其中将光辐射分离成不同偏振的分量 出来 并且激发辐射和/或检测辐射的分量通过改变普通和非凡折射率的优选双折射，优选声光或电光介质在它们的极化中受到影响。

公开(公告)号：US20080049221A1

公开(公告)日：2008-02-28

申请号：US11833761

申请日：2007-08-03

Applicant: RALF WOLLESCHENSKY

Inventor： RALF WOLLESCHENSKY

IPC: G02B21/06

CPC classification number: G01N15/1434 ,  G01J3/02 ,  G01J3/0224 ,  G01J3/0229 ,  G01J3/10 ,  G01J3/4406 ,  G01J3/447 ,  G01J2003/1282 ,  G01J2003/1286 ,  G01N21/6445 ,  G01N21/6458 ,  G01N2015/0065 ,  G01N2015/149 ,  G01N2015/1493 ,  G02B21/002

Abstract: Method and arrangement for changing the spectral composition and/or intensity of illumination light and/or specimen light in an adjustable manner, wherein a spatial separation into radiation components of different polarization is carried out with a first polarizing device, a spectral, spatial splitting of at least one radiation component is carried out with first dispersion device, the polarization state of at least one part of the spectrally spatially split radiation component is changed, and a spatial separation and/or combination of radiation components of different polarization are/is carried out by a second polarizing device, wherein a spatial combination of radiation components which are changed and not changed with respect to their polarization state is advantageously carried out by a second dispersion device.

Abstract translation: 用于以可调节的方式改变照明光和/或标本光的光谱组成和/或强度的方法和装置，其中利用第一偏振装置，光谱，空间分裂进行不同偏振的辐射分量的空间分离 使用第一分散装置执行至少一个辐射分量，改变光谱空间分裂的辐射分量的至少一部分的偏振状态，并且执行不同极化的辐射分量的空间分离和/或组合 通过第二偏振装置，其中通过第二分散装置有利地进行相对于它们的偏振状态改变而不改变的辐射分量的空间组合。

公开(公告)号：US20080002184A1

公开(公告)日：2008-01-03

申请号：US11667678

申请日：2005-11-08

Applicant: Yasunori Toda ,  Satoru Adachi

Inventor： Yasunori Toda ,  Satoru Adachi

IPC: G01N21/00 ,  G01J3/30

CPC classification number: G01N21/636 ,  G01J3/447 ,  G01N21/21

Abstract: A high-sensitivity evaluation technique for optical anisotropy. An optical measurement/evaluation apparatus A has an optical pulse generator 1 which generates optical pulses, half mirror 3, first mirror 5, second mirror 7, third mirror 9, retroreflector 11, wave plate 15, lens 17, spectroscope 21, and controller (PC) 23. An optical pulse L1 emitted from the optical pulse generator 1 is separated into two pulsed lights L2 and L3 by the half mirror 3. The pulsed light L2 is reflected by the mirrors 5 and 7 (pulsed lights L4 and L5) and polarized light of the optical pulse is rotated by the half-wave phase plate 15 installed on a rotary stage 15a and is focused on a surface of a specimen S by the lens 17 (L8). The optical pulse L3 is reflected by the retroreflector 11 which returns light parallel to incident light and non-coaxially (L6), and reflected by the mirror 9. Then polarized light of the optical pulse is rotated by the half-wave phase plate 15 installed on the rotary stage 15a and is focused on the same position on the surface of the specimen S by the lens 17 through an optical path L7 different from L8 above. In so doing, the linearly polarized lights of the two optical pulses are directed at the specimen S by being aligned approximately parallel to each other and being rotated simultaneously. A phenomenon known as four-wave mixing occurs when a wave number k1 is given to the optical pulse L8 and a wave number k2 is given to the optical pulse L7. Presence of anisotropic changes due to uniaxial strain or the like in an isotropic thin film causes large anisotropy in the intensity of diffracted light (2k2−k1).

Abstract translation: 光学各向异性的高灵敏度评估技术。 光学测量/评估装置A具有产生光脉冲的光脉冲发生器1，半反射镜3，第一反射镜5，第二反射镜7，第三反射镜9，后向反射器11，波片15，透镜17，分光镜21和控制器 PC）23。 从光脉冲发生器1发射的光脉冲L 1由半反射镜3分离为两个脉冲光L 2和L 3。脉冲光L 2被反射镜5和7（脉冲光L 4和L 5 ），并且通过安装在旋转台15a上的半波相位板15旋转光脉冲的偏振光，并且通过透镜17（L 8）聚焦在样本S的表面上。 光脉冲L 3被后向反射器11反射，后向反射器11返回与入射光和非同轴（L 6）平行的光并被反射镜9反射。 然后光脉冲的偏振光被安装在旋转台15a上的半波相位板15旋转，并通过透镜17通过不同于第一透镜的光路L 7聚焦在样本S的表面上的相同位置 L 8以上。 在这样做时，两个光脉冲的线偏振光通过大致平行地对齐并同时旋转而被引导到样本S. 当向光脉冲L 8给出波数k <1>时，发生称为四波混频的现象，并向光脉冲L给出波数k <2> 7。 在各向同性薄膜中存在由于单轴应变等引起的各向异性变化导致衍射光强度（2k 2 -k 1/2）的大的各向异性。

公开(公告)号：US07277210B2

公开(公告)日：2007-10-02

申请号：US11187350

申请日：2005-07-21

Applicant: Jan Lipson

Inventor： Jan Lipson

IPC: G02B5/32

CPC classification number: G02B5/32 ,  G01J3/02 ,  G01J3/0224 ,  G01J3/1838 ,  G01J3/447 ,  G01N21/21 ,  G01N21/65 ,  G02B27/1006 ,  G02B27/1086 ,  G02B27/145 ,  G02B27/283 ,  G03H1/26 ,  G03H1/2645 ,  G03H2001/266 ,  G03H2222/31

Abstract: An optical apparatus in which multiplexed holograms are used to achieve wavelength selectivity and polarization manipulation is used to facilitate near-normal incidence of light on the holograms. The polarization manipulation allows light reflected from the holograms to be separated from the light incident on the holograms. In one application, the apparatus can be used to extract spectral lines of an analyte from radiation scattered from a sample.

Abstract translation: 使用多路复用全息图来实现波长选择性和偏振操作的光学装置用于促进全息图上的光的近似法线入射。 偏振操作允许从全息图反射的光与入射到全息图上的光分离。 在一个应用中，该装置可用于从从样品散射的辐射中提取分析物的光谱线。

公开(公告)号：US20070222988A1

公开(公告)日：2007-09-27

申请号：US11601344

申请日：2006-11-17

Applicant: Eric Jiang ,  Francis J. Deck

Inventor： Eric Jiang ,  Francis J. Deck

IPC: G01J4/00 ,  G01J3/42

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/447 ,  G01N21/19

Abstract: A spectrometer generates Vibrational Circular Dichroism (VCD) measurements having an exceedingly high signal-to-noise ratio, as well as a greater wavelength range over which measurements may be accurately provided. This is achieved by utilizing reflective optics (preferably solely reflective optics, i.e., no refractive elements) to supply a concentrated and collimated input light beam to a sample within a sample cell, and similarly collecting the light output from the sample cell via reflective optics for supply to a detector.

Abstract translation: 光谱仪产生具有非常高的信噪比的振动圆二色性（VCD）测量，以及可以准确地提供测量的更大的波长范围。 这通过利用反射光学器件（优选地仅反射光学器件，即没有折射元件）来实现，以将集中和准直的输入光束提供给样品池内的样品，并且类似地通过反射光学器件收集来自样品池的光输出，用于 供应到检测器。

公开(公告)号：US07271594B2

公开(公告)日：2007-09-18

申请号：US11095180

申请日：2005-03-31

Applicant: Rene Abreu ,  Jeffrey Grotts ,  Alexander J. Majewski

Inventor： Rene Abreu ,  Jeffrey Grotts ,  Alexander J. Majewski

IPC: G01R29/12

CPC classification number: G01N21/21 ,  G01J3/42 ,  G01J3/447

Abstract: A system for processing signals includes a receiver assembly for receiving a signal. The signal has a sample component with a sample electric field and a sample polarization, and has a reference component with a reference electric field and a reference polarization. The receiver assembly includes an analyzer for polarimetrically processing the signal, including differencing the signal to generate a difference electric field proportional to the difference of the sample and reference electric fields. By polarimetrically differencing the signal, the analyzer reduces the magnitude of the common-mode signal at the difference signal receiver. The receiver assembly includes an electric-field detector for measuring the difference electric field such that the reduction in common-mode amplitude decreases the noise equivalent power of the electric-field detector. One advantage of the present invention, then, is the reduction of noise equivalent power of the electric-field detector when measuring small variations in large electric fields.

Abstract translation: 用于处理信号的系统包括用于接收信号的接收机组件。 该信号具有样本电场和样本偏振的样本分量，并且具有参考电场和参考极化的参考分量。 接收器组件包括用于对信号进行偏振处理的分析器，包括差分信号以产生与样本和参考电场的差成正比的差电场。 通过对信号进行极化差分，分析仪减小差分信号接收器处共模信号的幅度。 接收器组件包括用于测量差分电场的电场检测器，使得共模幅度的降低降低了电场检测器的噪声等效功率。 因此，本发明的一个优点是当测量大电场的小变化时，降低电场检测器的噪声当量功率。

公开(公告)号：US07253896B1

公开(公告)日：2007-08-07

申请号：US10148787

申请日：2000-11-28

Applicant: Natalia Novikov, legal representative

Inventor： Valerie Alexey Novikov, deceased

IPC: G01J3/28

CPC classification number: G01J3/447 ,  G01J3/433 ,  G01N21/3504

Abstract: A filter for use in a spectrometer to filter transmitted radiation and wherein the filter has a birefringent element responsive to an applied signal, a first polarizer for polarizing the radiation transmitted by a sample, a second polarizer for polarizing the radiation transmitted by the birefringent element, and wherein the birefringent element has a birefringent member having a first birefringence and the birefringent member being responsive to a force applied thereto to generate an additional second birefringence; and the filter having a driver for applying a force to the birefringent member in accordance with the applied signal, and the driver has a piezoelectric member coupled to the birefringent member on one end or at two opposite ends.

Abstract translation: 一种用于光谱仪过滤透射辐射的滤光器，其中所述滤光片具有响应于所施加的信号的双折射元件，用于偏振由样品透射的辐射的第一偏振器，用于偏振由所述双折射元件透射的辐射的第二偏振器， 并且其中所述双折射元件具有具有第一双折射率的双折射元件，并且所述双折射元件响应于施加到其上的力以产生另外的第二双折射; 并且所述滤波器具有根据所施加的信号向所述双折射构件施加力的驱动器，并且所述驱动器具有在一端或两相对端耦合到所述双折射构件的压电构件。