EVALUATING APPARATUS FOR THERMAL BOUNDARY CONDUCTANCE USING ACOUSTIC PHONON WAVES

    公开(公告)号:US20240159658A1

    公开(公告)日:2024-05-16

    申请号:US18451672

    申请日:2023-08-17

    Abstract: The present disclosure relates to an apparatus for evaluating thermal conductance of an interface on the basis of how much the phases of acoustic phonons, which are produced in a semiconductor, change on a semiconductor interface. The apparatus for evaluating thermal conductance of a semiconductor interface according to an embodiment of the present disclosure includes: a spectrometer exciting acoustic phonons in a semiconductor by irradiating a laser beam to the semiconductor; and a processor evaluating thermal conductance of an interface of the semiconductor in accordance with a phase difference of a ascending acoustic phonon propagating toward the interface and reflecting from the interface and a descending acoustic phonon propagating in an opposite direction to the interface.

    SEMICONDUCTOR DEVICE INSPECTION APPARATUS AND METHOD OF DRIVING THE SAME

    公开(公告)号:US20180106731A1

    公开(公告)日:2018-04-19

    申请号:US15672696

    申请日:2017-08-09

    CPC classification number: G01N21/9501 G01N21/956 G01N21/95623 G01N2201/066

    Abstract: A semiconductor device inspecting apparatus includes a light source for emitting light to a semiconductor pattern. The semiconductor pattern includes a structure that reflects the light from the light source. The semiconductor device inspecting apparatus further includes an objective optical system disposed in a path of the reflected light from the semiconductor pattern, and a first noise filter disposed in a path of the reflected light having passed through the objective optical system, the first noise filter including at least one bar pattern that filters a diffraction noise of the light. The semiconductor device inspecting apparatus additionally includes a second noise filter disposed in a path of the filtered light from the first noise filter, the second noise filter including an outer frame surrounding a central portion. The semiconductor device inspecting apparatus further includes a first photodetector detecting the light having passed through the second noise filter.

    IMAGING SYSTEM
    40.
    发明申请
    IMAGING SYSTEM 审中-公开
    成像系统

    公开(公告)号:US20160077021A1

    公开(公告)日:2016-03-17

    申请号:US14781208

    申请日:2014-03-19

    Abstract: Disclosed is an imaging system capable of reducing the generation of interference patterns in a state in which a beam of highly coherent electromagnetic waves is enlarged to a prescribed illumination area and used for illumination by moving the prescribed illumination region within a range of motion that is smaller than the illumination region.

    Abstract translation: 公开了一种成像系统,其能够在高度相干的电磁波的波长扩大到规定的照明区域的状态下减少干涉图案的产生,并且通过在规定的照明区域的移动范围内移动规定的照明区域来进行照明 比照明区域。

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