公开(公告)号：US20110291010A1

公开(公告)日：2011-12-01

申请号：US13147980

申请日：2010-01-20

Applicant: Junichi Katane ,  Sukehiro Ito

Inventor： Junichi Katane ,  Sukehiro Ito

IPC: H01J37/18 ,  H01J37/28

CPC classification number: H01J37/28 ,  H01J37/244 ,  H01J2237/2443 ,  H01J2237/2445 ,  H01J2237/2605

Abstract: The present invention provides a scanning charged particle beam device including a sample chamber (8) and a detector. The detector has: a function of detecting light at least ranging from the vacuum ultraviolet region to the visible light region, of light (17) having image information which is obtained by a light emission phenomenon of gas scintillation when the sample chamber is controlled to a low vacuum (1 Pa to 3,000 Pa); and a function of detecting ion currents (11, 13) having image information which are obtained by cascade amplification of electrons and gas molecules. Accordingly, it becomes possible to realize a device which can deal with observation of various samples. Further, an optimal configuration of the detection unit is devised, to thereby make it possible to add value to an obtained image and provide users in wide-ranging fields with the observation image. In addition, the detector is made usable in combination with a detector for high vacuum, to thereby make it possible to provide wide-ranging users with the image, irrespective of the vacuum mode.

Abstract translation: 本发明提供一种扫描带电粒子束装置，其包括样品室（8）和检测器。 检测器具有：检测至少从真空紫外区域到可见光区域的光的功能，具有通过气体闪烁的发光现象获得的图像信息的光（17），当样品室被控制到 低真空（1Pa〜3,000Pa）; 以及检测具有通过电子和气体分子的级联放大获得的图像信息的离子电流（11,13）的功能。 因此，可以实现可以处理各种样品的观察的装置。 此外，设计了检测单元的最佳配置，从而使得可以向所获得的图像增加值并且向用户提供具有观察图像的广泛范围的用户。 此外，检测器可与用于高真空的检测器组合使用，从而使得可以向广泛的用户提供图像，而不管真空模式如何。

公开(公告)号：US20110121179A1

公开(公告)日：2011-05-26

申请号：US12783707

申请日：2010-05-20

Applicant: STEVEN D. LIDDIARD ,  KEITH W. DECKER ,  DEGAO XU

Inventor： STEVEN D. LIDDIARD ,  KEITH W. DECKER ,  DEGAO XU

IPC: H01J5/18 ,  G01J1/00

CPC classification number: H01J5/18 ,  H01J37/244 ,  H01J47/004 ,  H01J2235/18 ,  H01J2237/2445

Abstract: A high strength window for a radiation detection system has a plurality of ribs comprising beryllium material. There are openings between the plurality of ribs. The tops of the ribs terminate generally in a common plane. The high strength window also has a support frame around a perimeter of the ribs. A layer of thin polymer film material is disposed over and spans the plurality of ribs and openings to pass radiation therethrough. A radiation detection system comprises a high strength window as described above and a sensor behind the window. The sensor is configured to detect radiation that passes through the window.

Abstract translation: 用于放射线检测系统的高强度窗具有包括铍材料的多个肋。 在多个肋之间有开口。 肋的顶部通常在公共平面中终止。 高强度窗口还具有围绕肋的周边的支撑框架。 将一层薄的聚合物膜材料设置在多个肋和开口上并跨越多个肋和开口以使辐射通过其中。 辐射检测系统包括如上所述的高强度窗口和窗后的传感器。 传感器被配置为检测通过窗口的辐射。

公开(公告)号：US07872236B2

公开(公告)日：2011-01-18

申请号：US11668846

申请日：2007-01-30

Applicant: Xu Zhang ,  Joe Wang ,  Zhong-Wei Chen

Inventor： Xu Zhang ,  Joe Wang ,  Zhong-Wei Chen

IPC: G01T1/20

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/2443 ,  H01J2237/24435 ,  H01J2237/2445 ,  H01J2237/24465

Abstract: A charged particle detector consists of four independent light guide modules assembled together to form a segmented on-axis annular detector, with a center opening for allowing the primary charged particle beam to pass through. One side of the assembly facing the specimen is coated with or bonded to scintillator material as the charged particle detection surface. Each light guide module is coupled to a photomultiplier tube to allow light signals transmitted through each light guide module to be amplified and processed separately. A charged particle detector is made from a single block of light guide material processed to have a cone shaped circular cutout from one face, terminating on the opposite face to an opening to allow the primary charged particle beam to pass through. The opposite face is coated with or bonded to scintillator material as the charged particle detection surface. The outer region of the light guide block is shaped into four separate light guide output channels and each light guide output channel is coupled to a photomultiplier tube to allow light signal output from each channel to be amplified and processed separately.

Abstract translation: 带电粒子检测器由四个独立的光导模块组成，组合在一起以形成分段的轴上环形探测器，其中心开口允许初级带电粒子束通过。 面向样品的组件的一侧作为带电粒子检测表面涂覆或结合到闪烁体材料。 每个光导模块耦合到光电倍增管，以允许通过每个光导模块传输的光信号被单独放大和处理。 带电粒子检测器由一块光导材料制成，被处理成具有从一个面的锥形圆形切口，终止在与开口相对的面上以允许初级带电粒子束通过。 相反的面被涂覆或与闪烁体材料结合，作为带电粒子检测表面。 导光块的外部区域被成形为四个分开的光导输出通道，并且每个光导输出通道耦合到光电倍增管，以允许来自每个通道的光信号输出被单独放大和处理。

公开(公告)号：US20100163729A1

公开(公告)日：2010-07-01

申请号：US12653366

申请日：2009-12-11

Applicant: Hisashi Isozaki

Inventor： Hisashi Isozaki

IPC: G01N23/225

CPC classification number: H01J37/244 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/02 ,  H01J2237/2445

Abstract: The present invention provides an electron microscope device, comprising a scanning electron microscope 2 provided with scanning means 10 for scanning an electron beam and an electron detector 12 for detecting an electron 11 issued from a specimen 8 where the electron beam is projected for scanning, wherein a scanning electron image is acquired based on a detection result from the electron detector, wherein the electron detector comprises a fluorescent substance layer for performing photoelectric conversion, a wavelength filter giving restriction so that all or almost all of wavelength ranges of fluorescent lights from the fluorescent substance layer can be transmitted, and a wavelength detecting element for receiving the fluorescent light transmitted through the wavelength filter and for performing photoelectric conversion.

Abstract translation: 本发明提供一种电子显微镜装置，包括：扫描电子显微镜2，其具有用于扫描电子束的扫描装置10;以及电子检测器12，用于检测从用于扫描的电子束投射的样本8发出的电子11，其中 基于来自电子检测器的检测结果获取扫描电子图像，其中电子检测器包括用于进行光电转换的荧光物质层，波长滤波器提供限制，使得荧光灯的全部或几乎所有的荧光波长范围 可以传输物质层，以及用于接收透过波长滤波器并用于进行光电转换的荧光的波长检测元件。

公开(公告)号：US07589322B2

公开(公告)日：2009-09-15

申请号：US11477085

申请日：2006-06-28

Applicant: Kentaro Nishikata ,  Yutaka Saijo ,  Shigeru Kakinuma ,  Junichi Aoyama ,  Satoshi Ohashi

Inventor： Kentaro Nishikata ,  Yutaka Saijo ,  Shigeru Kakinuma ,  Junichi Aoyama ,  Satoshi Ohashi

IPC: G01N23/00

CPC classification number: H01J37/228 ,  H01J37/244 ,  H01J37/256 ,  H01J2237/2445 ,  H01J2237/24485 ,  H01J2237/24507 ,  H01J2237/24585 ,  H01J2237/2808

Abstract: An object of this invention is to make it easy to adjust a position of the energy beam to irradiate and a position of a focal point of a light collecting mirror part, and to prevent displacement of the light collecting part due to vibration with a simple arrangement. A sample measuring device in accordance with this invention is to measure light generated from a sample W by irradiating electron beams EB on the sample W, and comprises a electron optical column part 23 that converges the electron beams EB, and a light collecting mirror part 31 that is arranged between the electron optical column part 23 and the sample W and that has an energy beam path 312 to pass the electron beams EB converged by the electron optical column part 23 and to irradiate the electron beams EB on the sample W and a mirror face 311 whose focal point F is set on an axis of the energy beam path 312 and that collects the light L generated from the sample W by means of the mirror face 311, wherein the light collecting mirror part 31 is supported by the electron optical column part 23 so that the axis of the electron beams EB coincides with the focal point F.

Abstract translation: 本发明的目的是使得能够容易地调节照射的能量束的位置和聚光镜部的焦点的位置，并且以简单的布置来防止由于振动引起的聚光部的位移 。 根据本发明的样品测量装置是通过在样品W上照射电子束EB来测量由样品W产生的光，并且包括会聚电子束EB的电子光学柱部分23和聚光反射镜部分31 其布置在电子光学柱部分23和样品W之间，并且具有能量束路径312以使由电子光学柱部分23会聚的电子束EB照射到样品W上的电子束EB和反射镜 其焦点F设置在能量束路径312的轴上并且通过镜面311收集从样本W产生的光L的面311，其中聚光镜部31由电子光学柱支撑 部分23，使得电子束EB的轴线与焦点F一致。

公开(公告)号：US20080164410A1

公开(公告)日：2008-07-10

申请号：US12004288

申请日：2007-12-20

Applicant: Ho-Jin Lee

Inventor： Ho-Jin Lee

IPC: G21K7/00

CPC classification number: H01J37/28 ,  G01R31/305 ,  H01J37/228 ,  H01J37/244 ,  H01J37/256 ,  H01J2237/2445 ,  H01J2237/2482 ,  H01J2237/2808 ,  H01J2237/2817 ,  H01J2237/3174

Abstract: According to an emission detecting analysis system and method, a test target is placed on a stage inside a chamber. A scanning electron microscope (SEM) column is installed at the chamber to obtain an image of the test target, and an emission detector column is installed at the chamber to detect light emission of the test target. High-magnification emission analysis and accurate detection of an emission point at a test target are obtained. In addition, a physical structure of the emission point is analyzed at the test target to reduce time required for analyzing a failure.

Abstract translation: 根据排放检测分析系统和方法，将测试对象放置在室内的台上。 在室上安装扫描电子显微镜（SEM）柱以获得测试对象的图像，并且在室处安装发射检测器柱以检测测试对象的光发射。 获得高倍率放射性分析和准确检测测试目标的发射点。 此外，在测试目标处分析发射点的物理结构，以减少分析故障所需的时间。

公开(公告)号：US20080078933A1

公开(公告)日：2008-04-03

申请号：US11925142

申请日：2007-10-26

Applicant: Masahiro WATANABE ,  Takashi Hiroi ,  Maki Tanaka ,  Hiroyuki Shinada ,  Yasutsugu Usami

Inventor： Masahiro WATANABE ,  Takashi Hiroi ,  Maki Tanaka ,  Hiroyuki Shinada ,  Yasutsugu Usami

IPC: G21K5/04

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/20 ,  H01J37/21 ,  H01J37/222 ,  H01J37/226 ,  H01J37/265 ,  H01J37/28 ,  H01J37/304 ,  H01J2237/20235 ,  H01J2237/20292 ,  H01J2237/216 ,  H01J2237/2445 ,  H01J2237/24578 ,  H01J2237/2482 ,  H01J2237/2487 ,  H01J2237/2814 ,  H01J2237/2817 ,  H01J2237/2826 ,  H01J2237/304 ,  H01J2237/3175

Abstract: A method and apparatus for assessing a height of a specimen includes an electron beam unit having an electron beam source, lenses, a table for setting a specimen and controllable in a height direction, and a detector, and a height detection system for detecting height of the specimen set on the table while the specimen is irradiated by an electron beam. The height detection system further includes an illumination system, a collection system, first and second detectors, a device configured to receive output signals from the first and second detectors while the specimen is irradiated by the electron beam and to generate a comparison signal from the output signals, wherein the comparison signal is responsive to the height of the specimen.

Abstract translation: 用于评价试样的高度的方法和装置包括：电子束单元，具有电子束源，透镜，用于设置样本的台面并可在高度方向上控制;以及检测器，以及用于检测高度的高度检测系统 样本被放置在桌子上，而样品被电子束照射。 高度检测系统还包括照明系统，收集系统，第一和第二检测器，被配置为在样本被电子束照射的同时从第一和第二检测器接收输出信号并从输出产生比较信号的装置 信号，其中比较信号响应于样本的高度。

公开(公告)号：US07329889B2

公开(公告)日：2008-02-12

申请号：US11180672

申请日：2005-07-14

Applicant: Masahiro Watanabe ,  Takashi Hiroi ,  Maki Tanaka ,  Hiroyuki Shinada ,  Yasutsugu Usami

Inventor： Masahiro Watanabe ,  Takashi Hiroi ,  Maki Tanaka ,  Hiroyuki Shinada ,  Yasutsugu Usami

IPC: G01N21/86

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/20 ,  H01J37/21 ,  H01J37/222 ,  H01J37/226 ,  H01J37/265 ,  H01J37/28 ,  H01J37/304 ,  H01J2237/20235 ,  H01J2237/20292 ,  H01J2237/216 ,  H01J2237/2445 ,  H01J2237/24578 ,  H01J2237/2482 ,  H01J2237/2487 ,  H01J2237/2814 ,  H01J2237/2817 ,  H01J2237/2826 ,  H01J2237/304 ,  H01J2237/3175

Abstract: An electron beam apparatus including a table which mounts a specimen and is movable in three dimensional directions, an electron beam optical system irradiating an electron beam onto a specimen and for detecting a secondary electron emanated from the specimen by the irradiation of the electron beam, and a surface height detection system for detecting height of the surface of the specimen mounted on the table. A focus control system controls a relative position between a focus position of the electron optical system and the table in accordance with information of the height, and an image processing system obtains an image from the detected secondary electron and processes the obtained image to detect a defect on the surface of the specimen.

Abstract translation: 一种电子束装置，包括安装试件并可在三维方向上移动的工作台，将电子束照射到试样上并通过照射电子束来检测从试样发出的二次电子的电子束光学系统;以及 表面高度检测系统，用于检测安装在桌子上的样本的表面的高度。 焦点控制系统根据高度信息来控制电子光学系统的焦点位置与桌子之间的相对位置，并且图像处理系统从检测到的二次电子中获取图像并处理所获得的图像以检测缺陷 在样品的表面。

公开(公告)号：US20060124858A1

公开(公告)日：2006-06-15

申请号：US11010639

申请日：2004-12-13

Applicant: Daniel Moonen

Inventor： Daniel Moonen

IPC: H01J37/244 ,  H01J37/26

CPC classification number: H01J29/892 ,  H01J37/224 ,  H01J37/26 ,  H01J2237/057 ,  H01J2237/2445

Abstract: A fiber optic plate assembly is provided for transferring optical signals to a detector or other optical element within an imaging device or imaging system. The fiber optic plate assembly comprises first and second fiber optic plates coupled via an optical coupling gel configured to permit separation of the two plates from each other to permit repair or replacement of one of the plates. Alternatively, the imaging device may comprise a single fiber optic plate coupled directly to an optical detector.

Abstract translation: 提供了一种用于将光学信号传送到成像装置或成像系统内的检测器或其它光学元件的光纤板组件。 光纤板组件包括通过光学耦合凝胶耦合的第一和第二光纤板，其配置成允许将两个板彼此分开以允许修复或更换其中一个板。 或者，成像装置可以包括直接耦合到光学检测器的单个光纤板。

公开(公告)号：US07030388B2

公开(公告)日：2006-04-18

申请号：US10679517

申请日：2003-10-07

Applicant: Yasufumi Takagi ,  Minoru Niigaki ,  Shoichi Uchiyama ,  Minoru Kondo ,  Itaru Mizuno

Inventor： Yasufumi Takagi ,  Minoru Niigaki ,  Shoichi Uchiyama ,  Minoru Kondo ,  Itaru Mizuno

IPC: H01J37/244

CPC classification number: H01J49/025 ,  H01J37/244 ,  H01J2237/2445

Abstract: The present invention relates to an illuminant, etc., having a high response speed and a high luminous intensity. The illuminant comprises a substrate and a nitride semiconductor layer provided on one surface of the substrate. The nitride semiconductor layer emits fluorescence in response to incidence of electrons. At least part of the emitted fluorescence passes through the substrate, and then exits from the other surface of the substrate. Generation of the fluorescence is caused by incidence of electrons onto a quantum well structure of the nitride semiconductor layer and recombination of pairs of electrons and holes generated due to electron incidence, and the response speed of fluorescence generation is on the order of nanoseconds or less. Also, the luminous intensity of the fluorescence becomes equivalent to that of a conventional P47 fluorescent substance. Namely, the illuminant has a response speed and a luminous intensity that are sufficient for adaptation to scanning electron microscopes and mass spectroscopes.

Abstract translation: 本发明涉及具有高响应速度和高发光强度的发光体等。 光源包括衬底和设置在衬底的一个表面上的氮化物半导体层。 氮化物半导体层响应于电子的入射发射荧光。 发射的荧光的至少一部分通过衬底，然后从衬底的另一表面离开。 荧光的产生是由于电子发射到氮化物半导体层的量子阱结构和由于电子入射而产生的电子和电子对的复合而引起的，并且荧光产生的响应速度在数量级以下。 此外，荧光的发光强度等同于常规P47荧光物质的发光强度。 即，发光体具有对扫描电子显微镜和质谱进行适应的响应速度和发光强度。