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    Method of using a compound particle-optical lens
    36.
    发明授权
    Method of using a compound particle-optical lens 有权
    使用复合粒子光学透镜的方法

    公开(公告)号：US09490100B2

    公开(公告)日：2016-11-08

    申请号：US14021480

    申请日：2013-09-09

    Applicant: FEI Company

    Inventor： Petr Syta{hacek over (r)} ,  Petr Hlavenka ,  Lubomír Tůma

    IPC: H01J37/14 ,  H01J37/145 ,  H01J37/28

    CPC classification number: H01J37/14 ,  H01J37/145 ,  H01J37/28 ,  H01J2237/1035 ,  H01J2237/24475 ,  H01J2237/24485 ,  H01J2237/248

    Abstract: The invention relates to a compound objective lens for a Scanning Electron Microscope having a conventional magnetic lens excited by a first lens coil, an immersion magnetic lens excited by a second lens coil, and an immersion electrostatic lens excited by the voltage difference between the sample and the electrostatic lens electrode. For a predetermined excitation of the lens, the electron beam can be focused on the sample using combinations of excitations of the two lens coils. More BSE information can be obtained when the detector distinguishes between BSE's (202) that strike the detector close to the axis and BSE's (204) that strike the detector further removed from the axis. By tuning the ratio of the excitation of the two lens coils, the distance from the axis that the BSE's impinge on the detector can be changed, and the compound lens can be used as an energy selective detector.

    Abstract translation: 本发明涉及一种用于扫描电子显微镜的复合物镜，其具有由第一透镜线圈激发的常规磁透镜，由第二透镜线圈激发的浸没磁透镜，以及由样品和 静电透镜电极。 对于透镜的预定激发，可以使用两个透镜线圈的激发的组合将电子束聚焦在样品上。 当检测器区分击穿靠近轴的检测器的BSE（202）和撞击检测器进一步从轴移除的BSE（204）之后，可以获得更多的BSE信息。 通过调整两个透镜线圈的激励的比率，可以改变从BSE撞击在检测器上的轴线的距离，并且复合透镜可以用作能量选择检测器。

    Energy dispersive X-ray analyzer and method for energy dispersive X-ray analysis
    37.
    发明授权
    Energy dispersive X-ray analyzer and method for energy dispersive X-ray analysis 有权
    能量色散X射线分析仪和能量色散X射线分析方法

    公开(公告)号：US09349572B2

    公开(公告)日：2016-05-24

    申请号：US14664423

    申请日：2015-03-20

    Applicant: Hitachi High-Tech Science Corporation

    Inventor： Yutaka Ikku

    IPC: H01J37/26 ,  H01J37/28

    CPC classification number: H01J37/28 ,  G01N23/2252 ,  G01N2223/401 ,  G01N2223/418 ,  G01N2223/424 ,  H01J2237/2442 ,  H01J2237/24585 ,  H01J2237/248 ,  H01J2237/28

    Abstract: An energy dispersive X-ray analyzer is attached to a scanning electron microscope and includes: a SEM controller; a detector; an EDS controller; and a data processor. The data processor generates first and second X-ray mapping image respectively when the SEM controller controls the scanning electron microscope to irradiate the sample with an electron beam under first and second acceleration voltage conditions. The data processor corrects the first X-ray mapping image and the second X-ray mapping image into images that are independent of acceleration voltage condition based on a measurement intensity variation ratio of the X-ray when changed from the first acceleration voltage condition to the second acceleration voltage condition, and controls the display unit to display a difference image between the corrected first X-ray mapping image and the corrected second X-ray mapping image.

    Abstract translation: 能量色散X射线分析仪附着在扫描电子显微镜上，包括：SEM控制器; 检测器 EDS控制器 和数据处理器。 当SEM控制器控制扫描电子显微镜以在第一和第二加速电压条件下用电子束照射样品时，数据处理器分别产生第一和第二X射线映射图像。 数据处理器将第一X射线映射图像和第二X射线映射图像基于X射线从第一加速电压条件变化到第二X射线映射图像的测量强度变化率而与加速电压条件无关的图像进行校正 第二加速电压条件，并且控制显示单元显示校正的第一X射线映射图像和校正的第二X射线映射图像之间的差分图像。

    Image processing device and computer program
    38.
    发明授权
    Image processing device and computer program 有权
    图像处理装置和计算机程序

    公开(公告)号：US09165214B2

    公开(公告)日：2015-10-20

    申请号：US13818097

    申请日：2011-08-31

    Applicant: Yuichi Abe ,  Hiroyuki Shindo

    Inventor： Yuichi Abe ,  Hiroyuki Shindo

    IPC: G06K9/34 ,  A61N5/00 ,  G06K9/62 ,  G01B15/04 ,  H01J37/28

    CPC classification number: G06K9/62 ,  G01B15/04 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/248 ,  H01J2237/2817

    Abstract: The purpose of the present invention is to provide an image processing apparatus and a computer program such that correspondence points between design data and an edge line or between edge lines can be accurately identified for their matching. In an embodiment for achieving the purpose, when positioning between a first pattern formed by a first line segment and a second pattern formed by a second line segment is performed, a first correspondence point and a second correspondence point are set on the first line segment and the second line segment, respectively; a degree of alignment for performing the positioning of the first pattern and the second pattern is calculated on the basis of the distance between the first correspondence point and the second correspondence point; and the position of the first correspondence point and/or the second correspondence point is changed in accordance with a shape difference between the first line segment and the second line segment (see FIG. 2).

    Abstract translation: 本发明的目的是提供一种图像处理装置和计算机程序，使得可以准确地识别设计数据与边缘线之间或边缘线之间的对应点以进行匹配。 在实现该目的的实施例中，当在由第一线段形成的第一图案和由第二线段形成的第二图案之间进行定位时，在第一线段上设置第一对应点和第二对​​应点， 第二线段; 基于第一对应点和第二对​​应点之间的距离来计算用于执行第一图案和第二图案的定位的对准程度; 并且第一对应点和/或第二对应点的位置根据第一线段和第二线段之间的形状差异而变化（参见图2）。

    Charged particle beam apparatus and electrostatic chuck apparatus
    39.
    发明授权
    Charged particle beam apparatus and electrostatic chuck apparatus 有权
    带电粒子束装置和静电吸盘装置

    公开(公告)号：US09077264B2

    公开(公告)日：2015-07-07

    申请号：US14118892

    申请日：2012-05-18

    Applicant: Tetsuji Ohsawa ,  Naoya Ishigaki

    Inventor： Tetsuji Ohsawa ,  Naoya Ishigaki

    IPC: H01L21/683 ,  H02N13/00 ,  H01J37/20 ,  H01J37/28

    CPC classification number: H02N13/00 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/2007 ,  H01J2237/248 ,  H01L21/6831

    Abstract: To improve an apparatus reliability by applying a voltage suitable to a situation, a charged-particle-beam apparatus 1 of the present invention includes: a sample stage 25; an electrostatic chuck 30; and an electrostatic-chuck controlling unit 13, and generates an image of a sample 24 by irradiating the sample 24 held on the sample stage 25 by the electrostatic chuck 30 with an electron beam 16. The electrostatic-chuck controlling unit 13, when the electrostatic chuck 30 holds the sample 24, applies a preset initial voltage to a chuck electrode of the electrostatic chuck 30; determines whether or not the sample 24 is normally clamped to the electrostatic chuck 30; and increases the voltage applied to the chuck electrode until determining that the sample 24 is clamped normally to the electrostatic chuck 30 if determining that the sample 24 is not clamped normally to the electrostatic chuck 30.

    Abstract translation: 为了通过施加适合于这种情况的电压来提高装置的可靠性，本发明的带电粒子束装置1包括：样品台25; 静电吸盘30; 和静电卡盘控制单元13，并且通过用电子束16通过静电卡盘30照射保持在样品台25上的样本24来产生样本24的图像。静电卡盘控制单元13当静电吸盘控制单元13 卡盘30保持样品24，将预设的初始电压施加到静电卡盘30的卡盘电极; 确定样品24是否正常夹在静电吸盘30上; 并且如果确定样品24没有正常地夹在静电卡盘30上，则增加施加到卡盘电极的电压，直到确定样品24正常地夹在静电卡盘30上。

    Image quality adjusting method, non-transitory computer-readable recording medium, and electron microscope
    40.
    发明授权
    Image quality adjusting method, non-transitory computer-readable recording medium, and electron microscope 有权
    图像质量调整方法，非暂时性计算机可读记录介质和电子显微镜

    公开(公告)号：US09053904B2

    公开(公告)日：2015-06-09

    申请号：US13764522

    申请日：2013-02-11

    Applicant: KABUSHIKI KAISHA TOSHIBA

    Inventor： Takashi Ishii ,  Akira Hamaguchi

    IPC: H01J37/26 ,  H01J37/153 ,  H01J37/28

    CPC classification number: H01J37/263 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24495 ,  H01J2237/248

    Abstract: In accordance with an embodiment, a method of adjusting quality of an image of patterns common in shape includes acquiring a first gray value and a first waveform within a reference image, acquiring a sample image, acquiring a second gray value and a second waveform from third and fourth regions within a sample image, respectively, and adjusting the brightness and contrast of the sample image. The first gray value is a standard for the brightness of the image from a first region within a reference image. The first and second waveforms represent a luminance profile of second and fourth regions including edges, respectively. The third and fourth regions correspond to the first and second regions. The brightness and contrast of the sample image are adjusted by matching the first gray value and the first waveform with the second gray value and the second waveform.

    Abstract translation: 根据实施例，调整形状中共同的图案的质量的方法包括获取参考图像内的第一灰度值和第一波形，获取样本图像，从第三方获取第二灰度值和第二波形 和第四区域，并且调整样本图像的亮度和对比度。 第一灰度值是来自参考图像内的第一区域的图像的亮度的标准。 第一和第二波形分别表示包括边缘的第二和第四区域的亮度分布。 第三和第四区域对应于第一和第二区域。 通过将第一灰度值和第一波形与第二灰度值和第二波形匹配来调整样本图像的亮度和对比度。

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